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Learning Outcomes
At the end of the lesson student should be able
to:
Design and conduct factorial experiments
involving two factors using factorial design.
Analyze and interpret main effects and
interactions.
Understand how to use ANOVA to analyze
data from factorial experiments.
2
Introduction
Introduction
Introduction
Introduction
Introduction
Terminology - DOE
Factor: variable whose influence upon the response
variable is being studied in the experiment.
Factor Level: different modes or settings of a factor.
Trial (or runs): applying of a treatment to an experimental
unit.
Treatment or level combination: specific combination of
the levels of different factors.
Replicates: number of experimental units on which a
particular treatment is applied.
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Definitions
A factorial experiment means that in each
complete replicate of the experiment all possible
combinations of the levels of the factors are
investigated.
The effect of a factor is defined as the change in
response produced by a change in the level of the
factor.
Main effect: the primary factors in the study that
change the response variable.
Interaction effect: the change in response variable
is due to an interaction between the factors.
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Example
13
(2)150oF
Yields measured
Yields measured
n = 3 replications
uijk, k = 1,..,n are the observations in the cell (i,j).
14
Factorial Design - 2k
Standard 22 Layout
22 = 4 runs/ treatment combination
Factor A: high
Factor B: low
18
19
contrast
AB interaction effect:
20
10
1 2 n
2
u ijk
uijk
4n i 1 k 1
i 1 k 1
j 1
j 1
SSTotal
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Example 1:
An engineer is investigating the thickness of epitaxial layer
which will be subject to two variations in A, deposition time (+
for short time, and for long time) and two levels of B,
arsenic flow rate (- for 55% and + for 59%). The engineer
conduct 22 factorial design with n = 4 replicates.
a)
b)
c)
22
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Arsenic
Level
Deposition Time
A - (Long)
A + (Short)
B
B+
(Low - 55%) (High 59%)
14.037
14.165
13.972
13.907
13.880
13.860
14.032
13.914
14.821
14.757
14.843
14.878
14.888
14.921
14.415
14.932
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1
1
a ab b (1) 59.299 59.156 55.686 56.081 0.836
2n
8
1
1
B b ab a (1) 55.686 59.156 59.299 56.081 0.067
2n
8
A
AB
1
1
(1) a b ab 56.081 59.299 55.686 59.156 0.032
2n
8
24
12
SOLUTION: (Cont.)
25
2.7956,
16
16
[(1) ab b a]2 0.2522
0.004
16
16
SS A
SS AB
SST 14.037 2
grand total
14.9322
16
SS B
[b ab a (1)]2 0.5382
0.0181
16
16
3.0672
FA = f = MSA / MSE
26
13
27
Comment:
The main effect of factor A has fairly small P-value ( 0)
<0.05. Therefore reject null hypothesis.
There is strong evidence that the main effect of factor A
differ from 0. Therefore factor A do effect the response
(outcome).
The effect of interaction between the two factors (AB)
and factor B are not significant (p-value >0.05). There is
no evidence that the main effect of factor B or the
interaction AB differ from 0.
Hypothesis Test
Test the null hypothesis (H0) for each effect whether that the
effect is equal to 0.
When H0 is rejected, this provides evidence that the factor
involved actually affect the response.
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14
y 0 1 x1 2 x2 12 x1x2
0 = constant ( = grand average of all 4n observations)
From Example 1,
1
1
a ab b (1) 59.299 59.156 55.686 56.081 0.836
2n
8
1
1
b ab a (1) 55.686 59.156 59.299 56.081 0.067
2n
8
AB
1
1
(1) a b ab 56.081 59.299 55.686 59.156 0.032
2n
8
15
where,
x1 is the deposition time,x2 is the arsenic flow rate, and x1x2 is the
interaction between this two factors.
The intercept, 0 is the grand average of all 16 observations.
The estimated coefficient of x1 is one-half the effect for deposition time.
The estimated coefficient of x2 is one-half the effect for arsenic flow rate.
The estimated coefficient of the cross-product term is one-half of the
interaction effect.
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y 14.389 0.418x1
This model can now be used for predicting the response for a
given deposition time.
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16
DYS
Material,
A
Temperature (oC),
B
Low
130
155
74
180
High
20
70
82
58
Low
High
82
60
A - (Type 1)
(Low -)
130
155
74
80
138
A + (Type 2) 110
168
160
(High +)
20
70
82
58
96
104
82
60
35
17
Treatment
Combination
(I)
a
b
ab
Factorial Effect
A
B
AB
Effective Life
(in hours)
+
+
+
+
+
+
Total
Average
539
576
230
342
134.75
144.0
57.5
85.5
(i)
A = 1/2n[a+ab-(I)-b]=1/8[576+342-539-230]=1/8[149]=18.625
B = 1/2n[b+ab-(I)-a]=1/8[230+342-539-576]=1/8[-543]=-67.875
AB=1/2n[ab+(I)-a-b]=1/8[342+539-576-230]=1/8[75]=9.375
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Treatment
Combination
(I)
a
b
ab
(ii)
Factorial Effect
A
B
AB
Effective Life
(in hours)
+
+
+
+
+
+
Total
Average
539
576
230
342
134.75
144.0
57.5
85.5
Sum of squares:
SSA = 1/4n[a+ab-(I)-b]2 =1/16[149]2 =1387.563
SSB = 1/4n[b+ab-(I)-a]2 =1/16[-543]2 =18428.06
SSAB=1/4n[ab+(I)-a-b]2 =1/16[75]2 = 351.5625
SSTotal= 1302 + 1552 + +602 (539 + .+342)2 /16 = 31639.94
37
18
Sum of squares:
SSA = 1/4n[a+ab-(I)-b]2 =1/16[149]2 =1387.563
SSB = 1/4n[b+ab-(I)-a]2 =1/16[-543]2 =18428.06
SSAB=1/4n[ab+(I)-a-b]2 =1/16[75]2 = 351.5625
SSTotal= 1302 + 1552 + +602 (539 + .+342)2 /16 = 31639.94
ANOVA Table:
SV
SS
df
MS
F0
A
B
AB
Error
Total
1387.563
18428.06
351.5625
11472.75
31639.94
1
1
1
12
15
1387.563
18428.06
351.5625
956.0625
1.451
19.275
0.368
SV
SS
df
MS
F0
A
B
AB
Error
Total
1387.563
18428.06
351.5625
11472.75
31639.94
1
1
1
12
15
1387.563
18428.06
351.5625
956.0625
1.451
19.275
0.368
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ANOVA Table:
39
19
Treatment
Combination
(I)
a
b
ab
Factorial Effect
A
B
AB
Effective Life
(in hours)
+
+
+
+
+
+
Total
Average
539
576
230
342
134.75
144.0
57.5
85.5
2
40
41
20
y 105.44 33.94 x2
This model can now be used for predicting the response for a
given temperature.
42
EXERCISE:
An experiment was designed to study the effect of oxygen flow rate in liter
per minutes (lpm), A and oxidation time in minutes, B on the oxide
thickness of wafers during dry oxidation. Each parameter was studied at
two levels (low and high levels).
Oxidation Time
(Minute) - B
20 ( - )
40 ( + )
2 (-)
607 582
854 794
9(+)
831 824
1149 1129
O2 Flow (lpm) - A
1. Estimate the each factors effect and indicate which effects are
significant to the oxide thickness of wafers.
2. Perform an analysis of variances and analyze the result.
3. Write the least square fitted model using only the significant source for
predicting the oxide thickness.
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21
END
TQ
ALL THE BEST
BYE
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