Vacuum Design Constraints and

Considerations

Martin P. Aalund, Ph.D.

Summary
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Intro to Vacuum Technology

The Vacuum barrier, How do you Cross it?

History
Terminology
Levels of Vacuums
Cluster Tools
Robotics
Motion Across The Barrier
Data and Electrically

Design Consideration

How do we Maintain it
Virtual Leaks
Material Compatibility
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Out gassing

Intro to Vacuum Technology

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History
Why do we need Vacuums
Terminology
Levels of Vacuums
Cluster Tools
Robots

Vacuum History
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Evangelista Torricelli was the first person credited with creating

a vacuum 1643 and also invented the barometer. This was in
an attempt understand why a suction pump could only raise
water to 32 feet.
Robert Boyle (1627-1691) used a von Guericke pump,
improved by the young Robert Hooke, to investigate the
vacuum and the general properties of gases and gas pressure
England. Papin invented the Pressure Cooker
Currently one of the most impressive bits of artificial emptiness
is created in the particle accelerators. The large electronpositron collider (LEP) at CERN gets down to a pressure of 1012 Torr or 1.3*10-10 Pa This corresponds to a particle density
of about 1011 hydrogen molecules per cubic meter.
To a first approximation the average density of the universe is
about 1 hydrogen atom per m3

Why do we need Vacuum

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Limits Contamination

Control Chemistries

No Airborne Contamination
Limits Cross Contamination
Slows Oxidation
Allows for Controlled Atmospheres

Many process can be made more predictable or require a vacuum to

function

Plasma Production
Metallization: Metal is evaporated and deposited onto a substrate
Etch
Deposition
Sputtering
Ion Implantation
E-beam
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Metrology
Inspection

Terminology
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Vacuum:

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A volume of Space Substantially void of matter

(Wikepedia)
a space partially exhausted (as to the highest
degree possible) by artificial means (as an air
pump) (Websters)

Manometer: Liquid scale used to measure

vacuum or pressure usually in Inches or mm
torr: A unit of measurement for pressure:
3

torr = 1 mm_Hg

torr = 1.32 10

torr = 0.039in_Hg

torr = 133.32Pa

atm

(it is named after Evangelista Torricelli)

Virtual Leek: A void or trapped volume that

slowly released material into a vacuum.
Examples include Blind wholes with screws etc.

P1

P2

Terminology
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Atmospheric pressure is variable based on weather and location, but is

standardized at 101.325 kPa (760 Torr)
Low vacuum, also called rough vacuum or coarse vacuum, is vacuum that can
be achieved or measured with rudimentary equipment such as a household
vacuum cleaner. Can be measure with a simple manmometer
Medium vacuum is vacuum that can be achieved with a single pump, but is
too low to measure with a liquid or mechanical manometer. It can be measured
with a McLeod gauge, thermal gauge or a capacitive gauge.
High vacuum is vacuum where the mean free path of residual gases is longer
than the size of the chamber or of the object under test. High vacuum usually
requires multi-stage pumping and ion gauge measurement. Some texts
differentiate between high vacuum and very high vacuum.
Ultra high vacuum requires baking the chamber to remove trace gases, and
other special procedures.
Deep space is generally much more empty than any artificial vacuum that we
can create. But it is not uniform and has areas of gas that may be quite dense.
Perfect vacuum is an ideal state that cannot be obtained in a lab, nor even in
outer space.
AMC: Airborne Molecular Contaminates: Gaseous Atoms, Molecules, or
clusters

AMCs
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Can be emitted from Cables, Plastic or Electrometric Parts

Airborne molecular Include

Acids: HCl, HF, SOx, NOx, etc.

Basis: Amonias: Amines, etc
Condensates: Phthalic Ester, Siloxane, Etc
Dopants: Boron, Phosphorous

AMC Related Problems include

Yield Loss
Corrosion of metal surfaces on the wafer
Surface Pollution
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Changes in contact resistance

AMC Control

Haze on wafers
Haze on optics

Use materials with High Molecular weight and Low Volatility

Use High Purity Materials
Control Cross Contamination during Manufacturing and Installation

Outgassing Measurements

Testing is performed in vacuum. Sample from 100 to 300 grams in placed in special aluminum boat
and heated to 398K inside a copper container with a 6.3 mm hole for 24 hours. A Chromium plated
disk is placed in front of a 6.3 mm hole.
TML
Total Mass Loss
CVCM
Collected Volatile Condensable Material
WVR
Water Vapor Regained (Exposed to 50% Humidity for 24 Hours)

Levels of Vacuum
Name

Start torr (Pa)

Stop torr (Pa)

Atmospheric Pressure (variable)

760 (101.325 kPa)

Low, Rough or Course Vacuum

760 (101kPa)

25 (3kPa)

Medium Vacuum

25 (3kPa)

1x10-3 (100mPa)

High Vacuum

1x10-3 (100nPa)

1x10-9 (100pPa)

Ultra High Vacuum

1X10-9 (100mPa)

1x10-12

Extremely High Vacuum

1x10-12 (100pPa)

Outer Space

1x10-6 (100uPa)

Perfect Vacuum

0 (0)

3x10-17 (3fPa)

Vacuum Cluster
Challenges
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Process Challenges

Clusters used for

alternate
atmospheres
Operate near strong
electro-magnetic
fields

Time to purge
Temperature
Chemistries

No magnetic
signature
Static electricity

Moving the Wafer

Vacuum Robot
High Vacuum
Process
Chambers

Process
Chambers

Integrated
Process
Chambers

Cool-Down/
PreClean
Chambers

Orienter / Degas

Low Vacuum

Orienter / Degas

Wafer Cassette Loadlocks

Vacuum Robots
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Very high reliability

Operate in vacuum

Low profile

MESC compatibility
Minimize chamber volume

Sophisticated controls

10-8 Torr
Material compatibility
No virtual leaks

Increase wafer throughput

Prevent wafer slippage
Time optimized trajectories

7 to 9" arm links

Robot ARM Types

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Frog Leg

SCARA

More Bearings
Second Wafer Moves at Low Speed
Higher Throughput for Same Accel
Simple Design
Must Have Bands or Belts in Vacuum
Speed of Extension limited by Second Wafer

Four-Bar Linkage

No Bands
More Bearings

Vacuum Robot Vendors

Vendor

Models

Technology

Brooks

Mag 7

Permanent Magnet

IDE
Rorze

RR452, RR713

Genmark

AVR3000

Ferrofluidic Seals
Ferrofluidic Seals,
Only in Japan

Yaskawa
JEL

SVHR3163, STVHR4000,
DVHR3200

Ferrofluidic Seals

AITEC

AR-SV300, AR-WV300

Single and Dual

Sankyo

SR8600

Single and Dual Arm

Motion and Vacuum

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Cannot use a vacuum P chuck

to hold a substrate

Edge Grip
Highly Optimized Motion
Special Materials

Motion can be created either

inside or outside the vacuum
barrier, both create challenges.
We will look at some of these
challenges for robotics, but could
be applied to any general device.

The Vacuum barrier, How do you Cross

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Mechanically

Electrically

How do We transmit Motion or Torque Across the

Barrier
Need to get Signals and Power Across the Barrier

Information

Need to See and measure things

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Quarts
Encoders
Lasers

Two Main Choices

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Create Motion in the vacuum

Create Motion outside of vacuum and then
provide feed through transferring motion to
the vacuum.

Bellows
Ferro fluidic Seals
Lip Seals
Mag Coupling

Permanent Magnet
Pros
Good Vacuum Isolation
Simple Design
Cons
Bearings in Vacuum
Magnets and epoxy in vacuum
Can Stack for extra DOF
Brooks has Patent

Flux

Vacuum

Magnet Flux

Magnet Flux

Flux

Bearings

Magnetic Coupling
Pros
Good Vacuum Isolation
Cons
Bearings in Vacuum
Magnets and epoxy in vacuum
Two air gaps produces control and
stiffness issues
Can Stack for extra DOF
AMAT has Patent

Flux

Vacuum

S N S

Magnet Flux

Magnet Flux

S N N

Flux

Magnet Flux Magnet Flux

Bearing

Ferrofluidic Seals
Vacuum

Magnet Flux

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S
Magnet Flux

Magnet Flux

Magnet Flux
Magnet Flux

Pros
No Bearing in Vacuum
Motor and Sensors can be standard
Cons
Seal can Burp during pump down
Seal can Outgas
Reliability of Seal
Concentric shaft for added DOFs
Used by Yaskawa, Brooks has some
Patents via Smartmachines

N
S
Magnet Flux

Ferrofluidic Liquid
Flux

Magnet Flux

Bearings

Flux

Magnet Flux

Harmonic Drive
Pros
Motor and Sensors can be standard
Gear Reduction reduces motor and
sensor costs.
Cons
Bearings in Vacuum
Flex Spline Circular Spline Interface
in Bearing
Costs
Circular Spline
Flex Spline
Wave Generator

Vacuum

Placing Motor in Vacuum

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Standard Motors not suitable for less than 10^-4 Torr.

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Lubricants are not suitable and will vaporize resulting in bearing failures and
fouling other components.
Some lubricants boil off very quickly others such as Silicon dont vaporize as
fast but create low level contamination on all components and are very hard to
clean.
Cooling. How do we get the heat out.

Heat Sink
Heat Pipes
Radiation

Micro Leaks due to construction

bearing grease,
paper slot liners,
conformal coatings,
winding insulation

Laminations
Non Vented Screws.

Micro Environments make create voltage discharge paths

Electrical Challenges in A Vacuum

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Insulation
Getting rid of heat
Out gassing
Exiting the Vacuum

Electrically
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Exposed conductors should be insulated

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Arcing can be an Issue

Vacuum approved Solders

Virtual Leaks
Electronics Components in Vacuum

Enclosing
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Potting
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Enclose in Box
Must monitor pressure
Shields device from vacuum (issue for some chips)
Prevents Out gassing
Completely cover with Potting material such as vacuum compatible
epoxy.
Should Minimize area by placing in recess
Whole assembly often must be scrapped if there is a component failure
Can actually improve heat transfer.

Venting
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Same as Enclosing, but vent supplied to atmosphere.

Out gassing in Cables

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Construction

Stranded Cables can have

voids between wires creating
virtual leaks
Trapped Air can cause Cable
Ruptures and expose Interior
materials

Materials

Must select Materials that

have low Out gassing.

Position Information
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Type of Rotary Actuator

Encoders
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Revolvers
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Absolute Position
Robust

Capacitive Encoders
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Easy to Interface
Lower Cost

Low Cost
Absolute and Incremental
Could be Made Vacuum Compatible

In Vacuum
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Disc in Vacuum Sensor Outside

Use Quarts viewing Window (Adds Costs)
New Vacuum Compatible Read heads can be placed in vacuum

Use a Window to View Sensor

Code Wheel
Sensor Window
Quarts Windows
Vacuum Barrier

Design Consideration
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How do we Maintain it

Virtual Leaks
Material Compatibility
Out gassing

Pump down Speed is Critical

How do we optimize it
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Minimize the Volume

Eliminating the cracks, crevices and other areas that
trap gasses
Fine machine finishes hold less air
Porous metals typically require cleaning and sealing
Machined metals are preferable to castings
Avoid Leaks and Virtual Leaks

Leaks: Leaks can take the form of air leaking through seals,
or air or other contaminates leaking from contained volume
or voids.
Vent Screw

Select the correct Components

How To Select Materials

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Out-gassing

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Evaporation
Sublimation

Thermal Compatibility
Use

Material Compatibility
Carefully Selected
Wet Lubricants

Low Vacuum (Mechanical Pump)

Many
Commercial
Plastics

Dry Lubricant

Vacuum Lubricants

High Vacuum Turbo Pump

Limited Plastics

No Plastics

10 -

10 -

10 -

10 -

10 -

10 -

10 -

10 -

10 -

AT
M

Most Natural Materials

Must be eliminated

Vacuum Lubricants
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Solid

MoS2 (molybdenum disulphide) Good down to 10-12 torr

WS2 (Tungsten Disulfide)
Lubricant is often provided by cage or Spacer.

Grease/Oil

TorrLube Good Down to 10-9 torr

Fomblin Y perfluoroalkylpolyether (PFPE)
Isoflex
Krytox (PFPE)
Barrierta

Common Materials
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Stainless Steal

Strength
Corrosion Resistance
Available in Magnetic and Non-Magnetic Forms
Common Alloys Include
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Aluminum

Good Stiffness To Weight Ration

Easily machined
Non Magnetic
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Common Alloys Include

Ceramics

Xxx Mag
XXx non Mag

Chemical Resistance
Temperature Resistance
Thermal and Electrical Insulation
Alumina
Quarts
Beryllium Oxide?

Plastics

PolyBenzImidazole (Celazole) High Temp, Brittle, Hard to Machine. Bushings, Bearings, Rollers
Polyimide
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Vespel High Temp, Expensive

Duration, Lower Cost than Vespel, similar Properties

PolyAmide-Imide (Torlon) Low Thermal Expansion, typically used for Insulators, spaces. Can be glass filled.
PTFE

Low Outgassing Plastics

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PolyBenzImidazole

PolyAmide-Imide

Celazole is the highest temperature-capable plastic available. However, it is very brittle (almost ceramic-like) and quite
difficult to machine. That said, is it frequently used for bushings, bearings, rollers, and spacers in extreme environments.
Polyimide
DuPont Vespel SP-1 is one of the most-used high-temperature plastic materials used in applications where high-purity
and electrical properties are needed. Vespel is frequently used in ultra-clean semiconductor and chemical applications. It
is also one of the most expensive materials sold, but is flight-approved for NASA, USAF and other aerospace agencies.
Duratron XP is the first real alternative to Vespel ... it was developed specifically to replace Vespel in extreme
applications at a slightly lower price. It contains less than 1% metallic impurities as measured using the ICP-MS test
standard. Duratron XP is ideal for use in high-energy gas plasma etch and strip processes.
Unfilled Torlon 4203 has high dielectric properties and low thermal expansion, and is much less expensive than some
advanced polymers. Torlon 4203 is typically used for insulators, spacers, and mechanical parts up to 520F.
Torlon 5530 (30% glass-filled) is typically used for applications where dimensional stability over a wide temperature
range is needed, as with temperature test sockets, nests, and fixtures. : Torlon's moisture absorption is a bit high, so
critical dimensional stability can be an issue.

Semitron ESd 500HR (filled PTFE)

Semitron ESd 500HR is antistatic/conductive PTFE. This material is relatively clean, readily machinable,
dissipates static electricity reliably ... as a result it is used in test handling equipment, fixtures, and other
applications where static generation may cause failures and/or errors in production environments. PTFE
has good mechanical properties up to approximately 500F.
Neoflon PCTFE (PolyChloroTetraFluoroEthylene)
PCTFE exhibits high chemical resistance, low and high temperature capability, resistance to most
chemicals (including strong acids and bases), low friction, electrical and thermal insulation, and
"slipperiness".

Low Outgassing Plastics

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PEEK (PolyEtherEtherKetone)
PEEK is pure, easily machinable, chemically resistant, stable, and also has relatively low outgassing
values. PEEK has good mechanical properties, but will not take temperatures over 350F, so it may not
have the mechanical or thermal performance needed.
Techtron PPS (PolyPhenylene Sulfide)
Techtron PPS is easily machined to close tolerance, has excellent mechanical, thermal and chemical
stability and has one of the lowest outgassing thermoplastic material. Techtron PPS is generally a bit less
expensive than PEEK or Torlon, but will not take as high temperatures.
Ultem PEI (PolyEtherImide)
Ultem has good dielectric properties and low thermal expansion, and is considerably less expensive than
some other polymers. PEI is also clean and stable, but is not particularly resistant to chemicals or solvents
. PEI has good mechanical properties up to approximately 410F.
Semitron ESd 410C (filled PEI)
Semitron ESd 410C is antistatic/conductive PEI. This material is relatively clean, readily machinable,
dissipates static electricity reliably ... as a result it is used in test handling equipment, fixtures, and other
applications where static generation may cause failures and/or errors in production environments. PEI has
good mechanical properties up to approximately 340F.
Ertalyte PET-P (Polyethylene Terephthalate)
Ertalyte offers the dimensional stability of acetal with the wear resistance of nylon. Ertalyte PETPolyester is clean, chemically resistant, stable, PET-P is considerably less expensive than most of the
other materials listed above, but may not have the mechanical or thermal performance needed for all
applications.
Semitron ESd 225 (filled acetal)
Semitron ESd 225 is antistatic/conductive acetal. This material is relatively clean, readily machinable,
dissipates static electricity reliably ... as a result it is used in test handling equipment, fixtures, and other
applications where static generation may cause failures and/or errors in production environments. Acetal
has good mechanical properties up to approximately 180F.

Bearings
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Ball
Cross Roller
Magnetic
Chamberlink Actuator

Puts Bearing on Outside

Bearings
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EXAMPLE A:

RINGS: Stainless Steel

BALLS: Stainless Steel
RETAINER: Vespel or PEEK
LUBRICATION: Solid, MOS2. Solid, WS2 (Tungsten
Disulfide)
FEATURES: Clean, high temperature, corrosion resistant,
solid lubricated, inexpensive.

EXAMPLE B

RINGS: Stainless Steel

BALLS: Solid Lube Coated Stainless Steel
RETAINER: PEEK
LUBRICATION: Solid, MOS2
FEATURES: Clean, high temperature, corrosion resistant,
solid lubricated, increased life, increased performance, more
expensive.

Materials Information
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Good Information Available

Use Your Suppliers
Use the Web

NASA
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http://outgassing.nasa.gov/

References
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Low Outgassing Cables for Clean Room

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HITACHI CABLE REVIEW No.24 (AUGUST

2005)

http://outgassing.nasa.gov/
http://en.wikipedia.org/wiki/Main_Page

Backups

Design Considerations
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reliability,
product safety,
efficiency,
response time,
flexibility, and
maintenance issues.
Thermal

Summary
Cost

Patent

Clean

Proven

Stiffness

Magnetic
Coupling

10

10

10

Ferro Fluidic

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Permanent
Magnets

10

Harmonic Drive

How do we create a Vacuum

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This vacuum is produced by pumping air out

of a chamber or chambers
At pressures above 10-6 Torr a standard
Mechanical Pump can be used.
At pressures below 10-6 Torr a standard
turbo pumps are often used.

Types of Vacuum Pumps

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Positive Displacement (.1Pa)

Momentum Transfer (

Diaphragm
Piston Pump
Scroll Pump
Gear Pump
Diffusion (10-8 to 1 pascals )
Turbo Molecular (intermediate
vacuum (~10-4) up to
ultra-high vacuum levels (~10-10 Torr). )

Entrapment

Cryopumps
Ion pump
Sorption Pumps

Cluster
Vacuum
Loadlocks

Vacuum
Robot

View From Front End (EFEM

Interface)

Vacuum Transport
Chamber

Top View Looking Towards

Front End

Vacuum Challenges
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Operating in vacuum

Motion across vacuum barrier

Ferofluidic seals
Magnetic coupling
Cooling

No Vacuum to Grip

Limits material selection

Limits lubrication
No out gassing

Highly optimized motion

Special materials

Reliability

Methods of Getting Power Across

Operating in vacuum

Ferofluidic seals
Magnetic coupling
Cooling
Limits material selection
Limits lubrication
No out gassing

Reliability

How do we create a Vacuum

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This vacuum is produced by pumping air out

of a chamber or chambers
At pressures above 10-6 Torr a standard
Mechanical Pump can be used.
At pressures below 10-6 Torr a standard
turbo pumps are often used.

Sin/Cosine

Linked Slides

Median Speed
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Friction between silicon and

stainless steel is about .24 G
Must Grip the Wafer to move
faster, or use a polymer to
increase Friction
We must limit the acceleration
of the robot when it has a
wafer on either end-effector.

Thus the Kinematics of the robot

may affect the overall
Throughput.

Paschens Law

Resolver
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Uses an AC signal to excite the rotor winding.

Stator has two windings at 90 degrees to each other.
As the rotor turns the coupling to the two windings will change
Can have multiple poles, but you lose absolute capability.
Converters usually are analog and can be expensive, $200 for 14-16 bits.
Rotor current normally passed through an inductive coupling.
Could be placed in vacuum environment.
Cosine
Reference

Sin