Microsystems Engineering Seminar

Exercise Questions I

Winter Semester 2016/-17

Questions related to the lecture from 25th October 2016

1. Make a sketch of the typical top down process cycle as used in semiconductor technology
2. What is Moores Law and what is the ITRS roadmap?
3. What are the methodic success factors of microelectronics?
4. The definition of Micro Systems Engineering can be made, following three approaches.
Describe these approaches

Questions related to the film Silicon Run

5. What is doping of a semiconductor? Which types of dopants do you know?

6. What is a n-channel transistor? How does it work?
7. What is a p-channel transistor?
8. What is a lithography mask?
9. By which technique are masks fabricated?
10. Which further semiconductor manufacturing techniques have been mentioned in the
film?

Michael Rb, EAH Jena, 2016