ACKNOWLEDGEMENT

On the occasion of presenting the seminar report, I wish to express my deep and profound
feeling of gratitude towards a number of persons who have contributed to the successful
completion of my seminar.
First of all, I express my deep gratitude to Lord Almighty, the supreme guide, for bestowing
the blessings through each phase of my work.
The person I would like to acknowledge next is my seminar guide Mr. Ajo Issac John (Asst.
Professor, Department of Mechanical Engineering, VJCET) for his consistent guidance and
inspiration throughout my seminar work.
I also express my heartfelt gratitude to Mr.Vinoj K (Head of department, Mechanical
Engineering, VJCET), Dr. Joseph Kunju Paul (Principal, VJCET), Mr. Eldhose Paul (Asst.
Professor, Department of Mechanical Engineering, VJCET), Mr Aravind S ( Asst.
Professor , Department of Mechanical Engineering, VJCET) for rendering all possible help
and support during my seminar.
Last but not least I am grateful to management, all the staff members of VJCET for their
cooperation and help extended during the course of my seminar. I would also like to thank all
my friends, family members for their encouragement, inspiration and moral support without
which this work would never been possible

ANAND SAJAN

LIST OF CONTENT

CHAPTER 1: INTRODUCTION..............................................................................................1
CHAPTER 2: LITERATURE REVIEW....................................................................................3
CHAPTER 3: OBJECTIVE.......................................................................................................6
CHAPTER 4: PRINCIPLES OF THE LIP-MM PROCESS.....................................................7
4.1 Principle for plasma generation....................................................................................8
4.2 Principle of material removal........................................................................................9
4.3 Selection of Dielectric Material..................................................................................10
CHAPTER 5: PROCESS PARAMETERS..............................................................................11
5.1. Pulse repetition rate....................................................................................................11
5.2 Plasma Formation Probability.....................................................................................13
5.3. Plasma discharge duration..........................................................................................13
5.4. Polarization State.......................................................................................................14
CHAPTER 6: TYPES OF LIP-MM.........................................................................................15
6.1. Spot laser-induced plasma micro-machining (S-LIPMM).........................................15
6.2. Line laser-induced plasma micro-machining (L-LIPMM)........................................15
6.3. Magnetically-controlled LIPMM (MC-LIPMM).......................................................16
CHAPTER 7: COMPARATIVE STUDY WITH MICRO EDM.............................................17
7.1. Device specifications.................................................................................................17
7.2. Process characteristics................................................................................................18
7.2. Assessment result.......................................................................................................18
2

CHAPTER 8: COMPARATIVE STUDY WITH ULTRA SHORT PULSED LASER

ABLATION PROCESS...........................................................................................................21
8.1 Device specifications..................................................................................................21
8.2 Assessment results.......................................................................................................22
CHAPTER 9: RESULTS AND DISCUSSIONS.....................................................................25
CHAPTER 10: CONCLUSION...............................................................................................26
REFERENCES.........................................................................................................................27
APPENDIX..............................................................................................................................28

NOMENCLATURE

EBM
EDM
FIBM
LIP-MM
L-LIPMM
S-LIPMM
MC-LIPMM
ps
ns
fs
nm
m
J
K
GPa

Electron beam machining

Electron discharge machining
Focussed ion beam machining
Laser induced plasma micromachining
Line laser induced plasma micromachining
Spot laser induced plasma micromachining
Magnetically controlled laser induced plasma micromachining
Picosecond
Nano second
Femto second
Nanometer
Micrometer
Joule
Kelvin
Giga Pascal

LIST OF FIGURES
FIGURE

4.1 : PROCESS SCHEMATIC FOR PLASMA GENERATION AND MACHINING

FIGURE

4.2 : SCHEMATICS OF PLASMA FORMATION

FIGURE

5.1: DEPENDENCE OF AVERAGE POWER AND PULSE REPETITION RATE

FIGURE

5.2: DEPENDENCE OF PULSE FORMATION PROBABILITY ON PULSE ENERGY

FIGURE

7.1: PROCESS SCHEMATICS FOR MICRO EDM

FIGURE

7.2: LONGITUDINAL DEPTH PROFILE (A) MICRO EDM (B) LIPMM

FIGURE

7.3: TRANSVERSE DEPTH PROFILE (A) MICRO EDM (B) LIPMM

FIGURE

7.4: EFFECT OF TOOL WEAR IN EDM IN GEOMETRICAL ACCURACY

FIGURE

8.1: PROCESS SCHEMATICS FOR DIRECT LASER ABLATION

FIGURE

8.2: TRANSVERSE DEPTH PROFILE OF LASER ABLATION PROCESS

FIGURE

8.3: TRANSVERSE DEPTH PROFILE OF LIPMM

FIGURE

8.4: LONGITUDINAL DEPTH PROFILES OF LASER ABLATION AND LIPMM

FIGURE

8.5: HEAT AFFECTED AND SHOCK AFFECTED ZONES IN DIRECT LASER ABLATION

FIGURE

9.1: COMPARISON OF LONGITUDINAL DEPTH PROFILES

CHAPTER 2
LITERATURE REVIEW

1. Kumar Pallav, Ishan Saxena, K. F. Ehmann ; Laser-Induced Plasma

Micromachining Process: Principles and Performance; Journal of Micro- and
Nano-Manufacturing; ASME, , Vol. 3, September 2015
The journal explains the basic principle and procedure associated with the
process of laser induced plasma micromachining and also explains the main
disadvantages associated with the existing state of the art machining processes. And
the journal also emphasize that on successful implementation and commercialization
of the process, the key benefits envisaged are micromachining with better accuracy
and better surface integrity, minimal subsurface damage, relatively smaller heataffected zone (HAZ) and low roughness in a wide range of materials including those
that are difficult to machine by some of the most successful micromachining
processes such as micro-electro discharge machining (EDM) and laser ablation.

2. Ishan

Saxena,

Rajiv

Malhotra;

Ehmann;

High-Speed

Fabrication

of

Microchannels Using Line-Based Laser Induced Plasma Micromachining;

Journal of Micro- and Nano-Manufacturing; Vol. 3, June 2015
The presented technique uses an optical system to modify the laser spot into
the shape of a line, to fabricate microchannels directly without scanning as in the case
of a regular circular spot. Moreover, it is shown that the depth and width of the
channels may be varied by changing process parameters like the pulse energy, pulse
frequency, and number of exposures.
2

3. Ishan Saxena, Kornel F. Ehmann ; Journal of Micro- and Nano-Manufacturing;

Multimaterial Capability of Laser Induced Plasma Micromachining Vol. 2,
September 2014
The journal is aimed at understanding the capability of LIPMM process to
address some of the issues faced by pulsed laser ablation in material processing. This
paper experimentally demonstrates machining of optically transmissive, reflective,
and rough surface materials using LIPMM. Apart from this, the study includes
machining of conventional metals (nickel and titanium) and polymer (polyimide), to
demonstrate higher obtainable depth and reduced heat-affected distortion around
microfeatures machined by LIPMM, as compared to laser ablation.

4. Kumar Pallav, Ishan Saxena, Kornel F. Ehmannl; Comparative Assessment of

the Laser-Induced Plasma Micromachining and the Ultrashort Pulsed Laser
Ablation Processes; Journal of Micro- and Nano-Manufacturing; Vol. 2,
September 2014
The paper presents an experimental investigation on the comparative
assessment of the capabilities of the two processes in the machining of microchannels
in stainless steel. For this purpose, microchannels were machined by the two
processes at similar pulse energy levels and feed-rate values. The comparative
assessment was based on the geometric characteristics, material removal rate (MRR),
heat-affected zone and shock-affected zone (HAZ, SAZ), and the range of machinable
materials.

5. J. Ramkumar Nagahanumaiah, K. F. Ehmann ; Comparative Assessment of the

Laser Induced Plasma Micromachining and the Micro-EDM Processes;: Journal
of Micro- and Nano-Manufacturing; Vol. 136, February 2014
The paper presents an experimental investigation on the comparative
assessment of the capabilities of the two processes in the machining of microchannels
3

in stainless steel. For comparative assessment of their processing capabilities,

microchannels were machined by the two processes at similar pulse energy levels,
while other process parameters were maintained at their optimal values for their
respective process technology requirements. The comparative assessment was based
on the geometric characteristics, material removal rate (MRR), effect of tool wear,
and the range of machinable materials.

6. Rajiv Malhotra , Ishan Saxena , Kornel Ehmann, Jian Cao ;Laser-induced

plasma micro-machining (LIPMM) for enhanced productivity and flexibility in
laser-based

micro-machining

processes

CIRP Annals

Manufacturing

Technology 62 (2013) 211214

This journal explains that LIPMM process has the capability to machine a
variety of materials including metal alloys, polymers and ceramics. A process variant,
line-LIPMM (L-LIPMM), based on optical manipulation of the laser beam to create
line instead of spot-plasma, is introduced. Additionally, a second variant,
magnetically-controlled LIPMM (MC-LIPMM), in which an external magnetic field
is used to manipulate the shape of the plasma, is also introduced to further increase
process throughput and flexibility.

7. Kumar Pallav and Kornel F. Ehmann; Feasibility of Laser Induced Plasma

Micro-machining, International Federation for Information Processing, AICT
315, pp. 7380, 2010
The paper offers evidence on the feasibility of a newly proposed
micromachining process, which is motivated by the need to overcome the various
limitations associated with -EDM and conventional ultra-short laser micromachining
processes. The limitations in -EDM and laser micro-machining processes are mainly
due to the requirement of a conductive electrode and work piece, electrode wear and
compensation strategies, and complex process control mechanisms respectively.

CHAPTER 3
OBJECTIVE

To explain the principle of Laser Induced Plasma Micromachining

To study the process parameters of the process
To perform a comparative assessment of LIP-MM with Micro electron discharge
machining ( -EDM) and Ultra short Pulsed laser ablation

CHAPTER 4

CHAPTER
RESULTS AND DISCUSSIONS

CHAPTE

REFERENCES
1. Kumar Pallav, Ishan Saxena, K. F. Ehmann; Laser-Induced Plasma Micromachining
Process: Principles and Performance; Journal of Micro- and Nano-Manufacturing;
ASME, , Vol. 3, September 2015
2. Ishan Saxena, Rajiv Malhotra; Ehmann; High-Speed Fabrication of Microchannels
Using Line-Based Laser Induced Plasma Micromachining; Journal of Micro- and
Nano-Manufacturing; Vol. 3, June 2015
3. Ishan Saxena, Kornel F. Ehmann: Multimaterial Capability of Laser Induced Plasma
Micromachining; Journal of Micro- and Nano-Manufacturing; Vol. 2, September
2014
4.

Kumar Pallav, Ishan Saxena, Kornel F. Ehmann; Comparative Assessment of the

Laser-Induced Plasma Micromachining and the Ultrashort Pulsed Laser Ablation
Processes; Journal of Micro- and Nano-Manufacturing; Vol. 2, September 2014

5. Ramkumar Nagahanumaiah, K. F. Ehmann ; Comparative Assessment of the Laser

Induced Plasma Micromachining and the Micro-EDM Processes; J Journal of Microand Nano-Manufacturing; Vol. 136, February 2014
6. Rajiv Malhotra , Ishan Saxena , Kornel Ehmann, Jian Cao; Laser-induced plasma
micro-machining (LIPMM) for enhanced productivity and flexibility in laser-based
micro-machining processes; CIRP Annals - Manufacturing Technology 62211214; 2013
7. Kumar Pallav and Kornel F. Ehmann; Feasibility of Laser Induced Plasma Micromachining,

International Federation for Information Processing ; AICT 315, pp.

7380, 2010

QUESTION AND ANSWERS

1.

What is the role of dielectric medium in LIP-MM process?

Ans:

The dielectric medium serves as a media for plasma generation and also

required

for flushing of the melted metal during the machining process. Thus helping in
removing the melted metal almost instantly and preventing the resolidification and the
formation of built up edges in the machined region.

2. What are the properties required for selection of dielectric media?

Ans : The dielectric media should have the following characteristics:

Low absorption coefficient for the incident laser beam, since the work piece is

immersed in a thick layer (5mm) of the dielectric media.

Low variation of the absorption coefficient with respect to changes in the local

temperature, since high temperatures are reached in the close vicinity of the plasma.
Easily and completely removed and cleaned from the work piece surface after

machining without leaving any residue.

Low ionization energy, so that plasma could be generated in the focal volume

through the optical breakdown process.

Sufficient dielectric constant value, so that the plasma is generated only at the focal

spot of the tightly focused ultra short laser beam.

Transparent, so that the plasma could be observed from outside and focused.
Low viscosity, so that it could be used for flushing of the debris from micro features
with a high aspect ratio.

10