Documenti di Didattica
Documenti di Professioni
Documenti di Cultura
Freescale Semiconductor
+
MPX5500
Rev 7, 09/2009
MPX5500
Series
0 to 500 kPa (0 to 72.5 psi)
0.2 to 4.7 V Output
Features
Case
No.
None
# of Ports
Single
Dual
Gauge
Pressure Type
Differential
Absolute
Device
Marking
867
867C
UNIBODY PACKAGES
MPX5500D
CASE 867-08
MPX5500DP
CASE 867C-05
MPX5500D
MPX5500DP
Pressure
Operating Characteristics
Table 1. Operating Characteristics (VS = 5.0 Vdc, TA = 25C unless otherwise noted, P1 > P2. Decoupling circuit shown in
Figure 4. required to meet electrical specifications.)
Characteristic
Symbol
Min
Typ
Max
Unit
POP
500
kPa
VS
4.75
5.0
5.25
Vdc
IO
7.0
10
mAdc
(0 to 85C)
Voff
0.088
0.20
0.313
Vdc
(0 to 85C)
VFSO
4.587
4.70
4.813
Vdc
(0 to 85C)
VFSS
4.50
Vdc
(0 to 85C)
2.5
%VFSS
V/P
9.0
mV/kPa
tR
1.0
ms
IO+
0.1
mAdc
20
ms
(1)
Pressure Range
Supply
Voltage(2)
Supply Current
(3)
Output(4)
(5)
Accuracy
Sensitivity
Response Time
(7)
Time(8)
MPX5500
2
Sensors
Freescale Semiconductor
Pressure
Maximum Ratings
Table 2. Maximum Ratings(1)
Rating
(2)
Symbol
(P2 1 Atmosphere)
Value
Unit
P1max
2000
kPa
Storage Temperature
Tstg
-40 to +125
Operating Temperature
TA
-40 to +125
Maximum Pressure
1. Maximum Ratings apply to Case 867 only. Extended exposure at the specified limits may cause permanent damage or degradation to the
device.
2. This sensor is designed for applications where P1 is always greater than, or equal to P2. P2 maximum is 500 kPa.
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.
VS
3
Thin Film
Temperature
Compensation
and
Gain Stage #1
Sensing
Element
2
GND
Gain Stage #2
and
Ground
Reference
Shift Circuitry
Vout
MPX5500
Sensors
Freescale Semiconductor
Pressure
On-chip Temperature Compensation and Calibration
Figure 3 illustrates the Differential/Gauge basic chip
carrier (Case 867). A fluorosilicone gel isolates the die
surface and wire bonds from the environment, while allowing
the pressure signal to be transmitted to the sensor
diaphragm. (For use of the MPX5500D in a high pressure,
cyclic application, consult the factory.)
The MPX5500 series pressure sensor operating
characteristics, and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media,
other than dry air, may have adverse effects on sensor
performance and long-term reliability. Contact the factory for
information regarding media compatibility in your application.
5.0
Transfer Function:
Vout = VS*(0.0018*P+0.04) Error
VS = 5.0 Vdc
Temperature = 0 to 85C
4.5
4.0
3.5
Output (V)
TYPICAL
3.0
2.5
MAX
2.0
MIN
1.5
1.0
0.5
0
50
500
450
550
Stainless Steel
Metal Cover
Die
P1
Wire Bond
Lead Frame
RTV Die
Bond
P2
Epoxy Case
Vout
Output
Vs
IPS
1.0 F
0.01 F
GND
470 pF
Sensors
Freescale Semiconductor
Pressure
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing fluorosilicone gel
which protects the die from harsh media. The Freescale MPX
pressure sensor is designed to operate with positive
differential pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the
following table.
Part Number
MPX5500D
MPX5500DP
Case Type
867
867C
Pressure (P1)
Side Identifier
Stainless Steel Cap
Side with Part Marking
MPX5500
Sensors
Freescale Semiconductor
Pressure
PACKAGE DIMENSIONS
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION -A- IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
R
POSITIVE PRESSURE
(P1)
M
B
-AN
PIN 1
SEATING
PLANE
DIM
A
B
C
D
F
G
J
L
M
N
R
S
-TG
J
S
F
D 6 PL
0.136 (0.005)
STYLE 1:
PIN 1.
2.
3.
4.
5.
6.
STYLE 2:
PIN 1.
2.
3.
4.
5.
6.
VOUT
GROUND
VCC
V1
V2
VEX
T A
STYLE 3:
PIN 1.
2.
3.
4.
5.
6.
OPEN
GROUND
-VOUT
VSUPPLY
+VOUT
OPEN
INCHES
MILLIMETERS
MAX
MIN
MAX MIN
16.00
0.595
0.630 15.11
13.56
0.514
0.534 13.06
5.59
0.200
0.220
5.08
0.84
0.027
0.033
0.68
1.63
0.048
0.064
1.22
0.100 BSC
2.54 BSC
0.40
0.014
0.016
0.36
18.42
0.695
0.725 17.65
30 NOM
30 NOM
12.57
0.475
0.495 12.07
11.43
0.430
0.450 10.92
0.090
0.105
2.29
2.66
OPEN
GROUND
+VOUT
+VSUPPLY
-VOUT
OPEN
CASE 867-08
ISSUE N
BASIC ELEMENT
P
0.25 (0.010)
T Q
-A-
U
W
X
R
PORT #1
POSITIVE
PRESSURE
(P1)
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ASME Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
L
V
PORT #2 VACUUM (P2)
PORT #1 POSITIVE
PRESSURE (P1)
-Q-
PORT #2
VACUUM
(P2)
B
PIN 1
C
SEATING
PLANE
-T-
-TJ
S
SEATING
PLANE
G
F
D 6 PL
0.13 (0.005)
DIM
A
B
C
D
F
G
J
K
L
N
P
Q
R
S
U
V
W
X
INCHES
MIN
MAX
1.145
1.175
0.685
0.715
0.405
0.435
0.027
0.033
0.048
0.064
0.100 BSC
0.014
0.016
0.695
0.725
0.290
0.300
0.420
0.440
0.153
0.159
0.153
0.159
0.063
0.083
0.220
0.240
0.910 BSC
0.182
0.194
0.310
0.330
0.248
0.278
STYLE 1:
PIN 1.
2.
3.
4.
5.
6.
MILLIMETERS
MIN
MAX
29.08
29.85
17.40
18.16
10.29
11.05
0.68
0.84
1.22
1.63
2.54 BSC
0.36
0.41
17.65
18.42
7.37
7.62
10.67
11.18
3.89
4.04
3.89
4.04
1.60
2.11
5.59
6.10
23.11 BSC
4.62
4.93
7.87
8.38
6.30
7.06
VOUT
GROUND
VCC
V1
V2
VEX
CASE 867C-05
ISSUE F
PRESSURE AND VACUUM SIDES PORTED (DP)
MPX5500
6
Sensors
Freescale Semiconductor
MPX5500
Rev. 7
09/2009