PT0191PEN Turbopumps PDF

Turbopumps
For perfect vacuum solutions to challenging applications
Turbopumps
The complete range
Contents
Turbopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
For perfect vacuum solutions to challenging applications . 4
Bearing technologies . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
HiPace 10800 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Compact ball or hybrid bearing turbopumps in the
pumping speed class from 10 to 800 l/s . . . . . . . . . . . . .
Overview of series and applications . . . . . . . . . . . . . . . . .
Pumping speeds and dimensions . . . . . . . . . . . . . . . . . . .
Technical data and order numbers . . . . . . . . . . . . . . . . . .
HiPace 12002300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Compact, hybrid bearing turbopumps in the
pumping speed class from 1,000 to 2,000 l/s . . . . . . . . .
14
HiPace 300800 M, ATH 500 M . . . . . . . . . . . . . . . . . . .

Compact, magnetically levitated turbopumps in the
pumping speed class from 300 to 800 l/s . . . . . . . . . . . .
20
ATH 16003200 M, ATP 2300 M . . . . . . . . . . . . . . . . . . .

Compact, magnetically levitated turbopumps in the
pumping speed class from 1,300 to 2,700 l/s . . . . . . . . .
26
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Vacuum Solutions from a single Source . . . . . . . . . . . . . 32

Market segments and applications. . . . . . . . . . . . . . . . . . 32
Product overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Turbopumps
For perfect vacuum solutions to challenging applications
With courtesy of CERN
The origin
Why are all turbopumps called turbopumps? Because the

multitalented pacesetters were invented by Pfeiffer Vacuum
over 50 years ago under this very name: a definitive milestone
in vacuum technology! Our turbopumps represent the latest
generation of future-orientated vacuum solutions for a wide
spectrum of uses. This spectrum includes not only analytics,
vacuum process and semiconductor technology, but also
coating, research and development as well as industrial
applications.
The turbopump family includes a wide product spectrum in
the pumping speed range of 10 to 2,700 l/s. The pumps provide high cost-efficiency and flexibility. Well-proven bearing
systems offer optimized reliability. Thanks to the proven rotor
design, extremely high values are achieved where pumping
speeds, backing pump compatibility and gas throughput, as
well as compression for light gases, are concerned.
Series
HiPace 10800:
Compact, ball or hybrid bearing turbopumps in the pumping
speed class from 10 to 800 l/s. Robust design. Minimal space
needs. High reliability.
HiPace 12002300:
Compact, hybrid bearing turbopumps in the pumping speed
class from 1,000 to 2,000 l/s. High pumping speed. High gas
throughput. Short run-up time.
HiPace 300800 M, ATH 500 M:
Compact, magnetically levitated turbopumps in the pumping
speed class from 300 to 800 l/s. High gas throughput. Low
vibration operation. Low energy consumption.
ATH 16003200 M:
Compact, magnetically levitated turbopumps in the pumping
speed class from 1,300 to 2,700 l/s. High backing pump
compatibility. Very high gas throughput. Outstanding longterm stability.
Turbopumps
Bearing technologies
Hybrid bearing
The combination of a ceramic ball bearing on the fore-vacuum

side and a permanent magnetic radial bearing on the high
vacuum side is called hybrid bearing. This bearing technology
does not require electromagnets and has a long service life
with maintenance intervals of approximately 4 years. The ball
bearing and the operating fluid reservoir can be replaced on
site within less than 30 minutes.
Permanent magnetic bearing
Safety bearing
Rotor shaft
Ceramic ball bearings
Magnetic levitation
Electromagnetic bearings are also called active magnetically

levitated, because the rotor position is continuously
monitored and adjusted accordingly. This enables wear-free,
low vibration operation with an automatic out-of-balance
compensation. Continuous rotor stability is assured. These
bearings are maintenance-free and require no lubrication.
Upper safety bearing

Upper radial bearing
Rotor shaft
Lower radial bearing
Lower safety bearing
Upper axial bearing
Lower axial bearing
Mounting a turbopump
rotor
There are five degrees of freedom altogether for mounting

a turbopump rotor, two
degrees of freedom in the
lower and upper radial levels
and one in the axial direction.
Y1
X1
Y2
X2
HiPace 10800
Compact, ball or hybrid bearing turbopumps
in the pumping speed class from 10 to 800 l/s
What is HiPace?
HiPace stands for a full range of compact and powerful turbopumps in the pumping speeds range of 10 to 2,000 l/s.
It provides high cost-efficiency and flexibility, which allows
almost all pumps of this range to be installed in any orientation. The proven bearing system guarantees unrivaled reliability. High pumping speeds, high backing pump compatibility
and high gas throughput as well as excellent compression for
light gases are made possible by the innovative rotor design.
Integrated drive electronics
The integrated drive electronics prevent costly cabling. In

addition, various interface versions Profibus, DeviceNet
or E74 are available. Thanks to innovative electronic
components we have doubled the lifetime of these powerful
drive units.
HiPace 10
HiPace 80
Advantages at a glance
1)
HiPace 300
Complete series with pumping speeds from 10 to 800 l/s

Robust design and proven bearing system offer the
highest reliability
Minimal space needs due to compact construction
High gas throughput and high pumping speed
Installation in any orientation1)
Suitable for industrial use thanks to protection class IP 54
Corrosive gas version available
Semi S2 und UL certification
Full range of accessories extends the possible uses
Extended maintenance intervals
Bearing replacement on site
HiPace 300 C, 0 to 90
HiPace 800
Fast run-up time
The run-up time of the HiPace has been significantly reduced.

It makes the pumps ready for action more quickly. This is
an incalculable benefit for your production. In addition,
we provide extended remote and sensor fuctionalities which
allow you to assess pump data such as temperature,
for example. The improved diagnostics make it possible to
improve pump availability and support service.
High-performance
technology
We are setting trends with the well thought-out design of the

HiPace. The functional housing is partly responsible, as it
makes the pumps extremely light and extends the application
spectrum. Also, the innovative rotor geometry provides quiet
operation and sets standards for significantly improved gas
loads.
Universally apliccable
HiPace Plus pumps are specially designed for electron

microscopy and high-end mass spectrometry. Our HiPace C
series are turbopumps specially for corrosive applications.
In addition, we have HiPace P pumps which are suitable for
industrial use, as they are insensitive to process dusts and
intruding particles.
Overview of series and applications
n recommended
HiPace 10
HiPace 60 P
HiPace 80
HiPace 300
HiPace 300 C
HiPace 300 P
HiPace 300 Plus
HiPace 400
HiPace 400 P
HiPace 700
HiPace 700 P
HiPace 700 Plus
HiPace 800
HiPace 800 P
Semiconductor
Coating
Industry
R&D
Electron microscopy
Leak detection
Mass spectrometry
Surface analysis
Plasma monitoring
Residual gas analysis
Lithography
PVD (Physical Vapor Deposition)
CVD (Chemical Vapor Deposition)
Plasma etching
Implantation Source
Implantation Beamline
Inspection
Bonding
MBE (Molecular Beam Epitaxy)
Load-locks, transfer chambers, handling systems
Flat Panel Display (FPD)
LED / OLED
Hard disk coating
Photovoltaics
Glass coating (PVD)
CD / DVD / Blu-Ray production (PVD)
Optical coating (PVD)
Wear protection (PVD, CVD)
Web coating
Medical technology
Industrial leak detection
Electron beam welding
Isolation vacuums
Lamp and tube manufacturing
Heat treatment
Vacuum drying
Vacuum furnaces
Nuclear research
Fusion technology
Plasma research
Particle accelerators
Space simulation
Cryogenic research
Elementary particle physics
Nanotechnology
Biotechnology
Analytics
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P = Process-appropriate, dust-insensitive
C = Corrosive gas version
HiPace 10800
Pumping speeds and dimensions
N2
He
H2
Ar
Pumping speed
HiPace 400, DN 100
12
N2
He
H2
Ar
Pumping speed Saugvermgen

[l/s]
[l/s]
Saugvermgen [l/s]
Pumping speed [l/s]
HiPace 10, DN 25
10-6
10-5
10-3
10-4
10-2
600
500
400
300
200
100
0
10-6
10-1
Druck [hPa]
10-5
10-3
10-4
10-2
Pressure [hPa]
60
50
40
700
600
500
400
300
20
200
10
100
10-5
10-4
10-3
10-2
10-5
10-3
10-4
10-2
10-1
100
Pressure [mbar]
Pressure [hPa]
HiPace 800, DN 200
300
N2
He
H2
Ar
250
200
150
100
900
800
700
600
500
400
300
200
50
0
10-6
0
10-6
10-1
100
Druck
[hPa]
Pressure [hPa]
Saugvermgen [l/s]
Saugvermgen [l/s]
Pumping speed [l/s]
800
30
HiPace 300, DN 100
10
Pumping speed [l/s]
N2
He
H2
Ar
70
Pumping speed [l/s]
HiPace 700, DN 160
80
0
10-6
100
Druck [hPa]
Pressure [hPa]
Pumping speed [l/s]
Pumping
speed [l/s]
Saugvermgen
[l/s]
HiPace 80, DN 63
10-1
100
10-5
10-4
10-3
10-2
10-1
100
Druck[hPa]
[hPa]
Pressure
10-5
10-4
10-3
10-2
10-1
100
Druck[hPa]
[hPa]
Pressure
Dimensions
168.4
97.3
59
55
55
M5
25
100
89.3
HV
DN 63 ISO-K
89.3
333
4
43
33
43
131
117
150
45
45
131
162
195
162
175
206.5
230.5
239
175
206.5
230.5
239
HV
DN 200 ISO-K
131
M8 (6x)
45
148
179.5
203.5
212
148
179.5
203.5
212
30
208
130
117
150
145.5
HV
DN 200 ISO-K
148
179.5
203.5
212
59
16.7
145.5
131
208
30
VV
DN 25 ISO-KF
45
181
59
16.7
15
HV
DN 160 ISO-K
M8 (6x)
45
130
VV
DN 25 ISO-KF
181
208
181
208
45
HV
DN 160 ISO-K
30
15
45
145.5
131
252
59
8 16.7
145.5
M8 (6x)
HiPace 800,
DN 200 ISO-K with TC 400
149
45
117
117
130
252
59
30VV
16.7
DN 25 ISO-KF
208
208
208
130
208
131
15
HV
DN 100 ISO-K
M8 (6x)
45
130
VV
DN 25 ISO-KF
HV
DN 100 ISO-K
30
103
131
252
59
16.7
45
131
103
M8 (6x)
45
149
91
45
15
HiPace 700,
100
10
(5x
56
56
M8
4545
252
59
30 VV
16.7
DN 25 ISO-KF
163
144
100
144
10
(5x
117
117
130
119.5
163
2.6
20
45
VV
VV
DN 16 ISO-KF DN 16 ISO-KF
HV
HV
DN 100 ISO-K DN 100 ISO-K
VV
DN 25 ISO-KF
37.5
175
18.3
90
83
37.5
20
90
83
175
18.3
VV
VV
2.6
100
43
35
40
M8
HiPace 400,
100
97
86
M5 (6x)
148
179.5
203.5
212
35
40
65
119.5
65
97
55
55
86
M5 (6x)
HiPace 300,
HV
DN 63 ISO-K
30
91
30
181
HiPace 80,
67.3
45
DN 25
HV
47
109.8
40
M6
45
55
DN 16 ISO-KF
VV
195
HiPace 10,
DN 25 with TC 110
M8 (6x)
45
145.5
145.5
11
HiPace 10800
Technical data and order numbers
Technical data
Pump type
Unit
Connection nominal diameter
Flange (in)
Flange (out)
ISO-KF
Venting connection
Pumping speed for:
l/s
Nitrogen (N2)
Helium (He)
l/s
l/s
Hydrogen (H2)
Argon (Ar)
l/s
Compression ratio for:
Nitrogen (N2)
Helium (He)
Hydrogen (H2)
Argon (Ar)
Max. fore-vacuum pressure for
hPa
Nitrogen (N2)
Max. gas throughput at full rotational speed for
hPa l/s
Nitrogen (N2)
Ultimate pressure
hPa
Rotation speed
RPM
Run-up time
min
Cooling type, Standard
Cooling water consumption
l/min
Cooling water temperature
C
V DC
Operating voltage3)
Max. power consumption
W
Weight
kg
HiPace 10
HiPace 80
HiPace 3001)
HiPace 3002)
DN 25
DN 16
DN 63
DN 16
G 1/8
DN 100
DN 16
G 1/8
DN 100
DN 16
G 1/8
10
6
3.7
11.5
67
58
48
66
260
255
220
255
260
255
220
255
3 106
3 103
3 102
2.5 107
> 1 1011
1.3 107
1.4 105
> 1 1011
> 1 1011
> 1 108
9 105
> 1 1011
> 1 1011
> 1 108
9 105
> 1 1011
25
22
15
20
0.37
< 5 105
90,000
0.9
Convection
24 5%
28.8
1.8
1.3
< 1 107
90,000
1.75
Convection
24 5%
110
2.4
5
< 1 107
60,000
3.5
Air
24 5%
180
5.8 8.2
14
< 1 107
60,000
1.8
Water
0.83
1535
24 5%
300
6.7 8.7
1)
with drive electronics TC 110

with drive electronics TC 400
3)
with drive electronics
2)
You can find additional technical data and accessories on the Internet at: www.pfeiffer-vacuum.com
Order numbers
Pump type
Drive \ flange
TC 110
TC 400
TCP 350
12
HiPace 10
DN 25
PM P03 960
HiPace 80
DN 40 ISO-KF
PM P03 942
PM P03 945
DN 63 ISO-K
PM P03 940
PM P03 943
DN 63 CF-F
PM P03 941
PM P03 944
HiPace 300
DN 100 ISO-K
PM P03 990
PM P03 900
PM P03 993
DN 100 ISO-F
PM P03 992
PM P03 902
PM P03 995
DN 100 CF-F
PM P03 991
PM P03 901
PM P03 994
Technical data
Pump type
Flange (in)
Flange (out)
Venting connection
Pumping speed for:
Nitrogen (N2)
Helium (He)
Hydrogen (H2)
Argon (Ar)
Compression ratio for:
Nitrogen (N2)
Helium (He)
Hydrogen (H2)
Argon (Ar)
Nitrogen (N2)
Nitrogen (N2)
Ultimate pressure
Rotation speed
Run-up time
Operating voltage1)
Weight
Unit
HiPace 400
HiPace 700
HiPace 800
ISO-KF
DN 100
DN 25
G 1/8
DN 160
DN 25
G 1/8
DN 200
DN 25
G 1/8
l/s
l/s
l/s
l/s
355
470
445
320
685
655
555
665
790
700
580
780
> 1 1011
3 107
4 105
> 1 1011
> 1 1011
3 107
4 105
> 1 1011
> 1 1011
3 107
4 105
> 1 1011
hPa
11
11
11
hPa l/s
hPa
RPM
min
6.5
< 1 107
49,200
2
Water
1.6
1535
48 5%
420
11.6 17.5
6.5
< 1 107
49,200
2
Water
1.6
1535
48 5%
400
11.5 17.4
6.5
< 1 107
49,200
2
Water
1.6
1535
48 5%
420
12.8 19.1
l/min
C
V DC
W
kg
1)
Order numbers
Pump type
Drive \ flange
TC 110
TC 400
TCP 350
HiPace 400
DN 100 ISO-K
PM P04 023
PM P04 026
DN 100 ISO-F
PM P04 025
PM P04 028
DN 100 CF-F
PM P04 024
PM P04 027
Pump type
Drive \ flange
TC 110
TC 400
TCP 350
HiPace 800
DN 200 ISO-K
PM P04 300
DN 200 ISO-F
PM P04 302
DN 200 CF-F
PM P04 301
HiPace 700
DN 160 ISO-K
PM P03 933
PM P04 080
DN 160 ISO-F
PM P03 935
PM P04 082
DN 160 CF-F
PM P03 934
PM P04 081
13
HiPace 12002300
Compact, hybrid bearing turbopumps
in the pumping speed class of 1,000 to 2,000 l/s
Intelligent sensors
The HiPace 1200 to 2300 turbopumps can be mounted upside

down. The proven bearing system guarantees unrivaled
reliability. Thanks to the mature rotor design, very high values
are achieved for the pumping speed, backing pump compatibility and gas throughput as well as compression for light
gases. Combined with a reliable sensor system, the HiPace
series achieves the highest level of safety on the market.
Efficient technology
With the proven and optimized bearing system, we offer you

not just enhanced product performance compared to competitors but also first and foremost a longer service life. In this
series, a sealing gas valve protects the bearings from particles
or reactive gases. The HiPace is therefore not only compact,
but also extremely rugged and suitable for industrial use,
which results in an optimized integration capability. Time is
money extended service intervals and problem-free on-site
bearing replacement speak for themselves.
HiPace 1200
HiPace 1500
14
HiPace 1800
Four sizes with pumping speeds from 1,000 to 2,000 l/s

High pumping speed for light gases (H2, He) and heavy
gases (Ar, CF4)
High gas throughput, even for heavy gases (Ar, CF4)
Installation position 0 to 90 and 90 to 180 available
Corrosive gas version (C-types) available
Integrated sealing gas system with throttle and valvel
Wide voltage range: 90 to 265 V
Interfaces: RS-485, Remote; Profibus or DeviceNet optional
Semi S2-compatible, UL, CSA und TV certification
Suitable for industrial use thanks to protection class IP 54
Highest process capability, resistant to particles
HiPace 2300
Integrated electronics
The integrated drive electronics prevent costly cabling. In

addition, they are available with various interface versions
with the same structural volume. Through innovative electronic components, we have doubled the lifetime of these
powerful drive units. The run-up time of the HiPace has also
been considerably reduced, which makes the pump ready
to operate in an even shorter time. In addition, we provide
extended remote and sensor functions. These allow you
to evaluate pump data such as temperatures. Improved
diagnostics ensure maximum pump availability through
status-based maintenance and support service in an
intelligent manner.
Sophisticated design
We set standards in efficiency with the well-thought-out

design of the HiPace. This is evidenced not only by its
functional housing, which makes the pumps extremely light
and extends the spectrum of applications. The innovative rotor
geometry for low vibration operation sets standards too.
And the integrated cooling system ensures that turbopumps
can become more powerful without overpacing them.
n recommended
HiPace 1200
HiPace 1200 C
HiPace 1200 T
HiPace 1500
HiPace 1500 C
HiPace 1500 T
HiPace 1800
HiPace 1800 C
HiPace 1800 T
HiPace 2300
HiPace 2300 C
HiPace 2300 T
Semiconductor
Coating
Industry
R&D
Electron microscopy
Leak detection
Mass spectrometry
Surface analysis
Plasma monitoring
Lithography
Plasma etching
Implantation Source
Inspection
Bonding
LED / OLED
Hard disk coating
Photovoltaics
Glass coating (PVD)
Web coating
Medical technology
Isolation vacuums
Heat treatment
Vacuum drying
Vacuum furnaces
Nuclear research
Fusion technology
Plasma research
Space simulation
Cryogenic research
Nanotechnology
Biotechnology
Analytics
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C = Corrosive gas version

T = with temperature management
15
HiPace 12002300
Pumping speed and dimensions
Pumping speed
HiPace 1800, DN 200
1,400
Pumping speed [l/s]
Pumping speed [l/s]
HiPace 1200, DN 200
1,200
1,000
800
600
2,000
1,800
1,600
1,400
1,200
1,000
800
600
400
400
200
200
0
10
-5
10
-4
10
-3
10
-2
10
-1
10
10-3
10-4
10-5
10-2
Pressure [hPa]
Pressure [hPa]
HiPace 2300, DN 250
1,600
Pumping speed [l/s]
Pumping speed [l/s]
HiPace 1500, DN 250
100
10-1
1,400
1,200
1,000
800
600
400
2,500
2,000
1,500
1,000
500
200
0
10-5
10-4
10-3
10-2
10-1
100
Pressure [hPa]
10-6
10-5
10-4
10-3
10-2
10-1
100
101
Pressure [hPa]
N2
He
H2
Ar
CF4
16
Dimensions
264
240
240
203.1
358.8
70
141.9
230
24
24
141.9
237.8
70
358.8
203.1
G1/8"
237.8
123
189.5
123
213.8
213.8
G1/8"
10
40
40
10
264
DN 200 ISO-K DN 200 ISO-K

HV
HV
16
1.
12
5
9
45
45
16
1.
12
5
9
189.5
HiPace 1200,
DN 200 ISO-K
230
VV
VV
202.3
G1/8"
70
24
10
40
40
10
G1/8"
191.6
226.3
347.3
DN 250 ISO-K
DN 250 ISO-K
HV
HV
.5
70
141.9
264
24
16
1
290
264
191.6
226.3
347.3
12
45
45
.5
290
178
111.5
16
1
202.3
12
178
111.5
HiPace 1500,
DN 250 ISO-K
141.9
230
230
DN 40 ISO-KF
DN 40 ISO-KF
VV
VV
HiPace 1800,
DN 200 ISO-K
24
399
151.1
230
HiPace 2300,
DN 250 ISO-K
290
311
290
379
379
192
258
192
258
24
48
24
40
40
10
G1/8"
10
G1/8"
142
142
221.4
236
221.4
16
16
112
1.
.5
5
9
236
230
DN 250 ISO-K
DN 250 ISO-K
HV
HV
43
12
43
278
48
DN 40 ISO-KF
DN 40 ISO-KF
VV
VV
311
151.1
24
40
40
48
151.1
248.5
278
399
248.5
G1/8"
10
G1/8"
10
240
162
241.4
162
256
256
16 12
16
1.
1
5
9 .5
43
43
311
240
DN 200 ISO-K
DN 200 ISO-K
HV
HV
241.4
12
311
48
151.1
230
230
DN 40 ISO-KF
DN 40 ISO-KF
VV
VV
17
HiPace 12002300
Technical data
Pump type
Unit
Flange (in)
Flange (out)
ISO-KF
Venting connection
Pumping speed for
l/s
Nitrogen (N2)
Helium (He)
l/s
l/s
Hydrogen (H2)
Argon (Ar)
l/s
l/s
Tetrafluoromethane (CF4)
Compression ratio for
Nitrogen (N2)
Helium (He)
Hydrogen (H2)
Argon (Ar)
hPa
Nitrogen (N2)
hPa l/s
Nitrogen (N2)
Helium (He)
hPa l/s
hPa l/s
Hydrogen (H2)
Argon (Ar)
hPa l/s
hPa l/s
hPa
Ultimate pressure1)
Rotation speed
RPM
Run-up time
min
l/h
Cooling water consumption2)
C
Power connection: voltage
V AC

Weight
W
kg
HiPace 1200
HiPace 1500
HiPace 1800
HiPace 2300
DN 200
DN 40
G 1/8
DN 250
DN 40
G 1/8
DN 200
DN 40
G 1/8
DN 250
DN 40
G 1/8
1,250
1,300
1,100
1,200
950
1,450
1,350
1,150
1,400
1,100
1,450
1,650
1,700
1,370
1,050
1,900
2,050
1,850
1,850
1,450
> 1 108
2 105
6 103
> 1 108
> 1 108
> 1 108
2 105
6 103
> 1 108
> 1 108
> 1 108
3 105
2 104
> 1 108
> 1 108
> 1 108
3 105
2 104
> 1 108
> 1 108
1.8
1.8
20
> 30
> 30
11
12
< 1 107
37,800
2.5
Water
100
15 35
100120/
200240
1,350
27 40
20
> 30
> 30
11
12
< 1 107
37,800
2.5
Water
100
15 35
100120/
200240
1,350
29 41
20
20
> 30
16
14
< 1 107
31,500
4
Water
100
15 35
100120/
200240
1,350
33 34
20
20
> 30
16
14
< 1 107
31,500
4
Water
100
15 35
100120/
200240
1,350
34 47
1)
Measured with oil-free backing pump purged with inert gas, not tempered, elastomer sealed
At maximum gas throughput and cooling water temperature of 25 C
2)
18
Order numbers
Flange
Orientation of the HV flange
ISO-K
up (0 90)
Pump type
Standard version
Corrosive gas version
ISO-F
CF-F
ISO-K
ISO-F
upside down (90 180)
CF-F
HiPace 1200, DN 200, TC 1200

PM P03 910
PM P03 911
PM P03 912
PM P03 916
PM P03 917
PM P04 190
PM P03 913
PM P03 918
PM P03 914
PM P03 919
PM P03 915
PM P04 191
Pump type
Standard version
HiPace 1500, DN 250, TC 1200

PM P04 060
PM P04 061
PM P04 062
PM P04 066
PM P04 067
PM P04 192
PM P04 063
PM P04 068
PM P04 064
PM P04 069
PM P04 065
PM P04 193
Pump type
Standard version
HiPace 1800, DN 200, TC 1200

PM P04 070
PM P04 071
PM P04 076
PM P04 077
PM P04 073
PM P04 078
PM P04 074
PM P04 079
Pump type
Standard version
HiPace 2300, DN 250, TC 1200

PM P03 920
PM P03 921
PM P03 922
PM P03 926
PM P03 927
PM P04 194
PM P03 923
PM P03 928
PM P03 924
PM P03 929
PM P03 925
PM P04 195
19
HiPace 300800 M, ATH 500 M

Compact, magnetically levitated turbopumps
in the pumping speed class of 300 to 800 l/s
Technically perfect
The HiPace M and ATH 500 M have an active 5-axis magnetic

bearing. Using just this bearing technologoy, the rotor
position is controlled in real-time. During operation, automatic
out-of-balance compensation occurs, which allows minimal
vibrations or the best possible process tolerance. The low
energy consumption and ultra-low service costs guarantee
cost-efficient operation.
Compatible
Do the different interface standards make your life difficult?

We offer integrated drive electronics for all magnetically
levitated turbopumps with standardized interfaces and
connectors. You have the choice.
HiPace 300 M
ATH 500 M
20
HiPace 700 M
Very easy installation

Any mounting position
Integrated drive electronics
Clean vacuum thanks to lubricant-free magnetic bearings
High gas throughput for all process gases
Low vibrations and low magnetic stray field
Automatic out-of-balance compensation
Broad rotation speed range
Outstanding long-term stability and reliability
HiPace 800 M
Leading
Highest pumping speed, compression and gas throughput

or minimal vibration are classic vacuum parameters which
our customers expect. All 5-axis magnetically levitated pumps
in the series deliver excellent performance data in their
specialized fields.This makes them the perfect answer for all
noncorrosive applications in analytics, research & develoment
as well as in reactive processes in the coating and semiconductor sector.
Safe
Our maintenance-free, magnetically levitated turbopumps

only use high-quality safety bearings which ensure safety
during operation. Even the harshest environments are no
problem for our HiPace thanks to its IP 54 protection class.
Product tests according to ISO 27892 also show that all
pumps meet the most stringent safety requiremenents.
n recommended
HiPace 300 M
ATH 500 M
ATH 500 MT
HiPace 700 M
HiPace 800 M
Semiconductor
Coating
Industry
R&D
Electron microscopy
Leak detection
Mass spectrometry
Surface analysis
Plasma monitoring
Lithography
Plasma etching
Implantation Source
Inspection
Bonding
LED / OLED
Hard disk coating
Photovoltaics
Glass coating (PVD)
Web coating
Medical technology
Isolation vacuums
Heat treatment
Vacuum drying
Vacuum furnaces
Nuclear research
Fusion technology
Plasma research
Space simulation
Cryogenic research
Nanotechnology
Biotechnology
Analytics
n n n n
n n n
n n n n n n n n
n n
n
n
n n n
n n
n
n
n n
n
n n n
n
n
n n
n n
n
n
n
n n
n n n n n
n
n
n n
n n
n n
n n
n
n n
n n n n
n
n
n
n
n
n
n
n n
n
n n
n n n n n n n n n
n n
n n
n n
n n
n
n
n n
n n
ATH 500 MT = with temperature management
21

Pumping speed
HiPace 700 M, DN 160
300
N2
He
H2
Ar
Saugvermgen [l/s]
250
Pumping speed [l/s]
Saugvermgen [l/s]
Pumping speed [l/s]
200
150
800
700
600
500
400
300
100
200
50
0
100
10 -5
10 -4
10 -2
10 -3
10 -1
10 0
10 1
Druck [mbar]
10-5
10-4
10-3
10-2
10-1
Pressure [hPa]
600
N2
He
H2
Ar
Saugvermgen [l/s]
500
400
300
900
800
700
600
500
400
300
200
200
100
0
Pressure [hPa]
Pumping speed [l/s]
Pumping
speed
Pumping
speed [l/s]
(l/s)
ATH 500 M, DN 160
100
101
Druck [mbar]
100
10-4
10-3
10-2
10-1
100
101
InletPressure
pressure (mbar)
[hPa]
10 -5
10 -4
10 -3
10 -2
10 -1
10 0
10 1
Druck
[mbar]
Pressure [hPa]
N2
He
H2
Ar
22
Dimensions
HiPace 300 M,
DN 100 ISO-F
VVVV
DN
DN
1616
ISO-KF
ISO-KF
/ G1/4"
/ G1/4"
150
150
HVHV
DN
DN
100
100
ISO-F
ISO-F
162
162
454 5
91
91
1212
2121
88
/ G1/4"
/ G1/4"
(2x)
(2x)
M8
M8
(6x)
(6x)
)
)

45 45180180
(= (=
545
4
4x 4x
9090 121.52.5

131
131
180
180
164
164
197
243197
225463
256
99
99
G1/8"
G1/8"
144
144
152
152
HVHV
152
152
ATH 500 M,
DN 160 ISO-F
62
62
95.8
95.8
256
256
42
42
VVVV
DN25
DN25
ISO-KF
ISO-KF
180
180
HiPace 700 M,
DN 160 ISO-F
HV HV
DNDN
160160
ISO-F
ISO-F
208
208
8 8
/ G1/4"
(2x)(2x)
/ G1/4"
M8M8
(6x)(6x)
90 90

VV VV
DN DN
25 ISO-KF
/ G1/4"
25 ISO-KF
/ G1/4"
150
150
) )
45 45180 180
(=5(=
5
4 4
4x 4x
144144
45 45
36 36
HV HV
DN DN
200 200
ISO-K
ISO-K
G1/8"
G1/8"
12.512
.5
) )
45 14850 180
(= (=
4 x 4 x
45 45
131
236
77
90 90

131
8 /8
G1/4"
(2x) (2x)
/ G1/4"
M8 (6x)
M8 (6x)
77
154
176
154
222176
236
222
113
180
113
208
208
180
HiPace 800 M,
DN 200 ISO-F
12.512.5
131
131
180
180
113
113
103
179 103
201279
248202
226418
261
150
150
VV VV
DNDN
25 ISO-KF
/ G1/4"
25 ISO-KF
/ G1/4"
45 45
36 36
G1/8"
G1/8"
145 145
23

Technical data
Pump type
Unit
Flange (in)
Flange (out)
ISO-KF
Venting connection
Pumping speed for
l/s
Nitrogen (N2)
Helium (He)
l/s
l/s
Hydrogen (H2)
Argon (Ar)
l/s
Nitrogen (N2)
Helium (He)
Hydrogen (H2)
Argon (Ar)
hPa
Nitrogen (N2)
hPa l/s
Nitrogen (N2)
Argon (Ar)
hPa l/s
Ultimate pressure
hPa
Rotation speed
RPM
Run-up time
min
l/min
C
V DC
Operating voltage1)
W
Weight
kg
HiPace 300 M
ATH 500 M
HiPace 700 M
HiPace 800 M
DN 100
DN 16
G 1/8
DN 160
DN 25
G 1/8
DN 160
DN 25
G 1/8
DN 200
DN 25
G 1/8
255
215
170
250
520
350
190
500
685
600
480
660
790
625
500
775
> 1 1011
> 1 108
5 105
> 1 1011
>
>
>
>
> 1 1011
> 1 107
2 105
> 1 1011
> 1 1011
> 1 107
2 105
> 1 1011
20
2.6
28
13
< 1 107
60,000
<2
Water
1.3
15 35
48 5%
300
13.1 17.2
67
42
< 1 108
50,000
<2
Water
1.0
15 25
48 5%
550
17 18
13
8
< 1 107
49,200
4
Water
1.3
15 35
48 5%
300
15.7 20.8
13
8
< 1 107
49,200
4
Water
1.3
15 35
48 5%
300
17.1 21.5
2
1
2
8
107
104
102
106
1)
24
Order numbers
Pump type
Interface \ flange
RS-485
Profibus
DeviceNet
HiPace 300 M
DN 100 ISO-K
PM P03 950
PM P03 953
PM P03 956
DN 100 ISO-F
PM P03 951
PM P03 954
PM P03 957
DN 100 CF-F
PM P03 952
PM P03 955
PM P03 958
Pump type
Interface, cooling \ flange
Profibus, water cooling
Remote, water cooling
Profibus, air cooling
Remote, air cooling
ATH 500 M
DN 100 ISO-F
VY362100
V2362100
VY361100
V2361100
DN 100 ISO-K
VY312100
V2312100
VY311100
V2311100
DN 100 CF-F
VY322100
V2322100
VY321100
V2321100
ATH 500 M
DN 160 ISO-F
VY462100
V2462100
VY461100
V2461100
DN 160 ISO-K
VY412100
V2412100
VY411100
V2411100
DN 160 CF-F
VY422100
V2422100
VY421100
V2421100
Pump type
Interface, cooling \ flange
Remote, air cooling
ATH 500 MT
DN 100 ISO-F
VR362103
DN 100 ISO-K
VR312103
DN 100 CF-F
VR322103
ATH 500 MT
DN 160 ISO-F
VR462103
DN 160 ISO-K
VR412103
DN 160 CF-F
VR422103
Pump type
Interface \ flange
RS-485
Profibus
DeviceNet
HiPace 700 M
DN 100 ISO-K
PM P04 450
PM P04 453
PM P04 456
DN 160 ISO-F
PM P04 451
PM P04 454
PM P04 457
DN 160 CF-F
PM P04 452
PM P04 455
PM P04 458
Pump type
Interface \ flange
RS-485
Profibus
DeviceNet
HiPace 800 M
DN 200 ISO-K
PM P04 460
PM P04 463
PM P04 466
DN 200 ISO-F
PM P04 461
PM P04 464
PM P04 467
DN 200 CF-F
PM P04 462
PM P04 465
PM P04 468
25
ATH 16003200 M, ATP 2300 M

Compact, magnetically levitated turbopumps
in the pumping speed class of 1,300 to 2,700 l/s
Reliable
Our turbopumps in the ATH M and ATP1) M series are not just
magnetically levitated an active 5-axis magnetic bearing
monitors the position of the rotor and regulates any deviation
from the correct position in real-time. Through the use of this
high-quality bearing technology, we achieve the best possible
long-term stability and reliability coupled with quiet running
properties. The bearing technology and process orientation of
the high vacuum pumps make our ATH M and ATP M series a
benchmark for high-performance turbopumps in semiconductor production, coating and dry-etching plasma processes as
well as in many industrial and R&D applications.
1)
ATP = no Holweck stage
ATH 1603 M,
ATH 2303 M,
26
ATH 2800 M
Clean vacuum thanks to lubricant-free magnetic bearings

Very high gas throughput for all process gases
Outstanding long-term stability and reliability
High backing pump compatibility
High air ingress stability
Low lifetime costs due to maintenance-free technology
Freely selectable rotation speed in a broad RPM range
for optimized process customization
Ultra-low noise and vibration
Can be installed in any orientation
Continuous control of the rotor position thanks to magnetic
bearing technology
ATH 3200 M
High performance
Our magnetically levitated turbopumps are optimized for

vacuum production processes with high gas throughput at a
high operating pressure. In R&D applications, the pumps are
distinguished by their minimal vibration even at a low final
pressure. A freely selectable RPM makes optimized process
adjustment possible or the direct replacement of old highvacuum pumps through adaptation to their pumping speed.
Safe
In the event of a power cut, the rotor acts as a generator

and supplies power to the battery-free controller. The rotor is
gradually slowed down and smoothly goes into mechanical
emergency bearing mode. In the event of an extreme ingress
of air or a break in the connection between the pump and the
controller, the emergency bearings come into play. The status
of the bearings is monitored by the controller. A venting valve
regulated by the controllerer can brake the rotor quickly and
effectively in the event of a massive ingress of air or mechanical shock and in this way so prevent damage to the pump.
MT models in the ATH M series have a temperature management feature through an integrated heater. The process-oriented regulation of the heating cable and the cooling water
keeps the pump at a constant temperature (up to 75C) in
order to minimize the condensation of process chemicals or
by-products in the pump.
n recommended
ATH 1603 M
ATH 1600 MT
ATH 2303 M
ATH 2300 MT
ATH 2800 M
ATH 2800 MT
ATH 3200 M
ATH 3200 MT
ATP 2300 M
Semiconductor
Coating
Industry
R&D
Electron microscopy
Leak detection
Mass spectrometry
Surface analysis
Plasma monitoring
Lithography
Plasma etching
Implantation Source
Inspection
Bonding
LED / OLED
Hard disk coating
Photovoltaics
Glass coating (PVD)
Web coating
Medical technology
Isolation vacuums
Heat treatment
Vacuum drying
Vacuum furnaces
Nuclear research
Fusion technology
Plasma research
Space simulation
Cryogenic research
Nanotechnology
Biotechnology
Analytics
n n n n n n n n
n n
n n
n n
n
n n n
n
n n n
n
n n n
n
n n n n n
n n n n n n n n
n
n
n n n n n n n n
n
n
n
n n n n n
n
n
n n
n n n n n
n
n
n
n n
n n
n n n n n n n n n n
n n
n n n n n n n n n n
n n
n n n n n n n n n n
n n
n n n n n n n n n n
n n n n n n n n n n
n n
27
ATH 16003200 M, ATP 2300 M

Pumping speed
ATH 3200 M, DN 320
1,600
Pumping
speed [l/s]
(l/s)
Pumping
speed
Pumping
speed [l/s]
(l/s)
Pumping
speed
ATH 1603 M, DN 250

1,400
1,200
1,000
800
600
3,000
2,500
2,000
1,500
1,000
400
500
200
0
10-4
10-2
10-3
10-1
100
0
10-4
101
10-3
10-2
10-1
InletPressure
pressure (mbar)
[hPa]
101
ATP 2300 M, DN 250

Pumping
speed
(l/s)
Pumping
speed
[l/s]
speed (l/s)
Pumping speed Pumping
[l/s]
ATH 2303 M, DN 250
100
Inlet
pressure[hPa]
(hPa)
Pressure
1,800
1,600
1,400
1,200
1,000
800
2,500
2,000
1,500
1,000
600
500
400
200
0
10-5
10-4
10-3
10-2
10-1
100
101
Pressure
[hPa]
Inlet
pressure
(hPa)
0
10-5
10-4
10-3
10-2
10-1
100
Inlet pressure (hPa)
Pressure [hPa]
Pumping
speed[l/s]
(l/s)
Pumping
speed
ATH 2800 M, DN 250

3,000
2,500
2,000
1,500
1,000
500
0
10-4
10-3
10-2
10-1
100
101
Inlet
pressure[hPa]
(hPa)
Pressure
28
N2
He
H2
Ar
305
Dimensions
305
256
256
HV
230.2
320.15
VV
DN 40 ISO KF
77.9
77.9
55
VV
DN 40 ISO KF
305
320.15
152
230.2
152
HV
ATH 1603 M,
DN 250 ISO-F,
with integrated
drive electronics
245
245
ATH 2303 M,
DN 250 ISO-F
HV
HV
35
24.75
VV
85.5
85.5
VV
DN 40 ISO KF
24.75
358.1
VV
VV
DN 40 ISO KF
24.75
358.1
24.75
35
312
312
HV
ATH 2800 M,
DN 250 ISO-F
HV
35
V
N 40 ISO KF
48.2
409.0
409.0
48.2
35
VV
DN 40 ISO KF
VV
115.7
115.7
VV
367
367
HV
35
VV
DN 40 ISO KF
351.4
351.4
48.2
35
VV
DN 40 ISO KF
VV
115.7
115.7
VV
367
367
HV
ATP 2300
M,
DN 250 ISO-F
HV
289.2
289.2
VV
.14
.14
23
VV
DN 40 ISO KF
23
7
315
48.2
ATH HV
3200 M,
DN 320 ISO-F
VV
DN 40 ISO KF
315
29
ATH 16003200 M, ATP 2300 M

Technical data
Pump type
Flange (in)
Flange (out)
Pumping speed for
Nitrogen (N2)
Helium (He)
Hydrogen (H2)
Argon (Ar)
Nitrogen (N2)
Helium (He)
Hydrogen (H2)
Argon (Ar)
Nitrogen (N2)
Gas throughput for
Nitrogen (N2)
Helium (He)
Hydrogen (H2)
Argon (Ar)
Final pressure
RPM
Run-up time
Weight1)
Unit
ATH 1603 M
ATH 2303 M
ATH 2800 M
ATH 3200 M
ATP 2300 M
ISO-KF
DN 250
DN 40
DN 250
DN 40
DN 250
DN 40
DN 320
DN 40
DN 250
DN 40
l/s
l/s
l/s
l/s
1,370
1,100
550
1,300
1,950
1,500
1,200
1,850
2,150
2,200
1,750
2,100
2,700
2,400
1,800
2,500
1,850
1,800
1,700
1,750
>
>
>
>
6 108
4 104
5 102
1,7 108
>
>
>
>
1
3
1
1
108
104
103
108
>
>
>
>
1
3
2
1
108
104
103
108
>
>
>
>
1
3
2
1
108
104
103
108
>
>
>
>
1
1
7
1
108
105
103
108
hPa
1.7
2.9
2.1
2.1
2.1
hPa l/s
hPa l/s
hPa l/s
hPa l/s
hPa
RPM
min
l/min
C
V AC
W
kg
67
> 67
> 67
20
< 6 109
39,000
<6
Water
1.0
15 25
200240
650
42
67
> 67
> 67
25
< 6 109
31,000
<8
Water
1.0
15 25
200240
1,000
68
84
> 84
> 84
> 37
< 6 109
25,000
< 10
Water
1.0
15 25
200240
1,000
93
84
> 84
> 84
> 37
< 6 109
25,000
< 10
Water
1.0
15 25
200240
1,000
93
37
> 50
> 50
15
< 4 109
31,000
<8
Water
1.0
15 25
200240
1,000
60
Pump type
Interface \ flange
External drive electronics
Profibus
DeviceNet
Remote
ATH 1603 M
DN 200 ISO-F
Y2562100
YY56210A
YV56210A
YS56210A
DN 200 CF-F
Y2522100
YY52210A
YV52210A
YS52210A
DN 250 ISO-F
Y2662100
YY66210A
YV66210A
YS66210A
DN 250 CF-F
Y2622100
YY62210A
YV62210A
YS62210A
ATH 2303 M
DN 250 ISO-F
X2662100
XY66210A
XV66210A
XS66210A
DN 250 CF-F
X2622100
XY62210A
XV62210A
XS62210A
Pump type
Interface \ flange
Profibus
DeviceNet
Remote
ATH 2800 M
DN 250 ISO-F
U2662100
VG 250
U26A2100
ATH 3200 M
DN 320
U2C62100
VG 350
U2DA2100
ATP 2300 M
DN 250 ISO-F
T2662100
TY66210A
TV66210A
TS66210A
DN 250 CF-F
T2622100
TY62210A
TV62210A
TS62210A
Order numbers
30
Technical data
Pump type
Flange (in)
Flange (out)
Pumping speed for
Nitrogen (N2)
Helium (He)
Hydrogen (H2)
Argon (Ar)
Unit
ATH 1600 MT
ATH 2300 MT
ATH 2800 MT
ATH 3200 MT
ISO-KF
DN 250
DN 40
DN 250
DN 40
DN 250
DN 40
DN 320
DN 40
l/s
l/s
l/s
l/s
1,370
1,100
550
1,300
1,950
1,500
1,200
1,850
2,150
2,200
1,750
2,100
2,700
2,400
1,800
2,500

Nitrogen (N2)
Helium (He)
Hydrogen (H2)
Argon (Ar)
Nitrogen (N2)
Gas throughput for
Nitrogen (N2)
Helium (He)
Hydrogen (H2)
Argon (Ar)
Ultimate pressure
Rotation speed
Run-up time
Weight1)
> 5 108
> 1 108
> 1 108
> 1 108
> 4 10
> 5 102
> 2 108
> 3 10
> 2 103
> 1 108
> 3 10
> 2 103
> 1 108
> 3 104
> 2 103
> 1 108
hPa
2.2
2.8
2.1
2.1
hPa l/s
hPa l/s
hPa l/s
hPa l/s
hPa
RPM
min
67
> 67
> 67
20
< 6 109
39,000
<6
Water
1.0
15 25
200240
650
42
67
> 67
> 67
25
< 6 109
31,000
<8
Water
1.0
15 25
200240
1,000
68
84
> 84
> 84
> 37
< 6 109
25,000
< 10
Water
1.0
15 25
200240
1,000
93
84
> 84
> 84
> 37
< 6 109
25,000
< 10
Water
1.0
15 25
200240
1,000
93
l/min
C
V AC
W
kg
1)
Weight including drive electronics 8 kg
Order numbers
Pump type
Interface \ flange
Profibus
Remote
ATH 1600 MT
DN 200 ISO-F
P6562100
PY56210A
PS56210A
Pump type
Interface \ flange
ATH 2800 MT
DN 250 ISO-F VG 250
U6662100
U6A62100
DN 200 CF-F
P6522100
PY52210A
PS52210A
DN 250 ISO-F DN 250 CF-F

P6662100
P6622100
PY66210A
PY62210A
PS66210A
ATH 2300 MT
DN 200 ISO-F
Q6562100
QY56210A
QS56210A
DN 250 ISO-F
Q6662100
QY66210A
QS66210A
DN 250 CF-F
Q6622100
QY62210A
QS62210A
ATH 3200 MT
DN 320 ISO-F VG 350
U6C62100
U6DA2100
31
Vacuum Solutions from a single Source

Market segments and applications
The Vacuum solution
Semiconductor
Sputter system
32
Providing solutions means understanding the

customer. One vacuum is not just like another
vacuum, the key lies in the specific requirements. Which process should be used with
which materials to produce the right results?
Under which environmental conditions?
Our customers demand sophisticated and
intelligent results and rightly so. Their vacuums have to deliver stability and low-maintenance pumps as well as reduced energy and
resource consumption.
A complete vacuum solution covers all

processes and steps involved in creating
perfect vacuum conditions including consultation, products, accessories, application training programs and service. Our customers
requirements usually involve a high level of
complexity. They not only include the precise
vacuum requirements but also specific needs
covering the entire system, the materials and
products to be used and processed as well as
process conditions. This is why we develop
customized vacuum solutions handinhand
with our customers.
Customer benefits
Extra long service
invervals
Low energy consumption
of the vacuum pumps
On-site service for all
product lines from a
single source

Industry
Leak detection
Research & Development

Accelerator
Customer benefits
Detection of smallest
leakages
High reproducibility
High throughput and
fast cycle times
Maximum environmental
benefit
single source
Customer benefits
High reliability
Special solution for
accelerator applications
Resistant to
radioactive radiation
Easy maintenance
Highest quality and
availibility
single source
33

Coating
Customer benefits
Unmatched Cost of
ownership thanks to
optimum pump design
High availability
due to robust design
Largest product range in
vacuum technology
single source
Glass coating
Analytics
Mass spectrometry
34
Customer benefits
Specially coordinated
component selection
Common interfaces
and easy control
Synchronization of
vacuum generation and
-measuring
single source

eVacuum
App
Utility
films
Chamber
calculator
eVacuum
Customer benefits
Central point of
contact for questions
concerning vacuum
technology for
customers and
employees
Simple, comprehensive
and interactive
knowledge
Compendium
Productselector
Know
How
Book
35

Product overview
36

Product overview
Vacuum generation
Turbopumps
Rotary vane pumps
UnoLine Plus
Pumping speed
250 up to 500 m3/h
HenaLine
Pumping speed
25 up to 1,000 m3/h
Pascal
Pumping speed
5.4 up to 15 m3/h
Diaphragm
pumps
Piston
pumps
Screw
pumps
MVP
XtraDry
HeptaDry
Pumping speed
0.25 up to 9.6 m3/h
Pumping speed
7.5 up to 13 m3/h
Pumping speed
110 up to 525 m3/h
PentaLine
Pumping speed
22 up to 34 m3/h
Pumping speed
130 m/h
ACP 15-40
Dry and compact
A100L
Integrated
load lock pump
DuoLine
Pumping speed
1.25 up to 250 m3/h
Pascal
Pumping speed
5.4 up to 60 m3/h
HiPace
Pumping speed
10 up to 2,000 l/s
Magnetically
levitated
ATH M/HiPace M
Pumping speed
255 up to 2,600 l/s
Roots pumps
Roots pumping stations
Air cooled
With single-stage
backing pump
OktaLine
Pumping speed
250 up to 25,000 m/h
Side
Multistage Roots pumps
channel
pumps Light duty
OnTool Booster
Hybrid
bearing
Two-stage
Single-stage
ACP 120/
ACG 600
Dry, for industrial

application
Gas cooled
OktaLine G
Pumping speed
250 up to 12,000 m/h
CombiLine WU
Ultimate pressure
up to 2 10-3 hPa
With two-stage
backing pump
CombiLine WD
Ultimate pressure
up to 5 10-4 hPa
With dry
backing pump
CombiLine WH
Ultimate pressure
up to 2 10-3 hPa
Multi-stage
SplitFlow
Pumping speed
according to
requirement
Compact
pumping station
LRS
Pumping speed
150 up to 1,000 m/h
Turbo pumping stations

Medium duty
A3P Serie
Energy efficient
process pump
Harsh duty
A3H Serie
Harsh processes for

semiconductor industry
Compact
HiCube Eco
Pumping speed
35 up to 67 l/s
Standard
HiCube Classic
Pumping speed
35 up to 685 l/s
High
performance
HiCube Pro
Pumping speed
35 up to 685 l/s,
short pump-down time
37

Product overview
Vacuum measurement Vacuum analysis

Measurement equipment
Analysis equipment
Analog
Residual
gas analysis
ActiveLine
Total pressure
measurement
Digital
Modular
DigiLine
ModulLine
Total pressure
measurement
Total pressure
measurement for R&D
PrismaPlus
Mass spectrometer
Mass range
1-300 amu
Plasma
analysis
Gas analysis
HiQuad
Mass spectrometer
Mass range
12048 amu
OmniStar
Compact benchtop
analysis system
HPA
High Pressure Analyzer

Pressure range
up to 50 hPa
SPM
PPM
Sputter Process Monitor Plasma Process

Pressure range
Monitor 1-1024 amu
up to 10 hPa
Leak detection and leak testing

Leak detectors
Portable
MiniTest
Mobile, even for

harsh environments
High performance
Compact
ASM 310
Mobile service use
ASM 142
High performance
all-rounder
ASM 142 D
Dry all-rounder
Leak detectors
Workstation
ASM 1002
Ergonomical
test station
38
Modular
ASI 30
Industrial leak
detection systems
Sniffing leak detection
ASM 102 S
Dry and portable
ASM 142 S
Stationary sniffer
test station
ASM 380
Dry and mobile
ASM 182 T
Robust industry
standard
ASM 192 T
Flexible console
devices

Product overview
Vacuum components
Chambers
Components, valves, manipulators
Standard
Components
TrinosLine
Cubical, horizontal/
vertical, modular
Customized
TrinosLine
ISO-KF, ISO-K,
ISO-F, CF, COF
Customized for specific

customer applications
Hoses and flex

connectors
ISO-KF, ISO-K, CF
Glass
elements
Customized
elements
ISO-KF, ISO-K,
ISO-F, CF
Customized for specific

customer applications
Valves
Feedthroughs
Shut-off valves,
gas dosing valves
Current/voltage,
fluids, insulators,
combinations
System technology
Solutions
Plant construction
Service solutions
Contamination
Management Solutions
APA
Monitoring
of contamination
APR
Removal
of contamination
Multi-stage
vacuum
process
Vacu2
For die casting

processes
Helium leak
detection
systems
Coating
Classic
Complete systems
Coating systems
Manipulators
X-, Y-, Z-motion,

rotation, tilting
Worldwide quality
Representatives
worldwide
Genuine parts
Training courses
Maintenance
Consulting competence
Applications
Products
eVacuum
150
Know-how
Experience
Customer
intimacy
Dimensioning
Engineering
Website
App
39
Pfeiffer Vacuum stands for innovative and custom

vacuum solutions worldwide, technological perfection,
competent advice and reliable service.
Complete range
of products
From a single component to complex systems:

We are the only supplier of vacuum technology
that provides a complete product portfolio.
Competence in
theory and practice
Benefit from our know-how and our portfolio of training

opportunities! We support you with your plant layout
and provide first-class on-site service worldwide.
Are you looking for a

perfect vacuum solution?
Please contact us:
Pfeiffer Vacuum GmbH

Headquarters Germany
T +49 6441 802-0
info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.com
All data subject to change without prior notice. PT 0191PEN (August 2012/35)
Vacuum solutions
from a single source

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Turbopumps

For perfect vacuum solutions to challenging applications

HiPace 300800 M, ATH 500 M . . . . . . . . . . . . . . . . . . .

ATH 16003200 M, ATP 2300 M . . . . . . . . . . . . . . . . . . .

Vacuum Solutions from a single Source . . . . . . . . . . . . . 32

With courtesy of CERN

Why are all turbopumps called turbopumps? Because the

The combination of a ceramic ball bearing on the fore-vacuum

Permanent magnetic bearing

Ceramic ball bearings

Electromagnetic bearings are also called active magnetically

Upper safety bearing

Lower radial bearing

Lower safety bearing

Upper axial bearing

Lower axial bearing

There are five degrees of freedom altogether for mounting

Integrated drive electronics

The integrated drive electronics prevent costly cabling. In

Complete series with pumping speeds from 10 to 800 l/s

Fast run-up time

The run-up time of the HiPace has been significantly reduced.

We are setting trends with the well thought-out design of the

HiPace Plus pumps are specially designed for electron

Overview of series and applications

Pumping speed Saugvermgen

Pumping speed [l/s]

HiPace 800, DN 200

Pumping speed [l/s]

HiPace 300, DN 100

Pumping speed [l/s]

Pumping speed [l/s]

HiPace 700, DN 160

Pumping speed [l/s]

with drive electronics TC 110

with drive electronics

The HiPace 1200 to 2300 turbopumps can be mounted upside

With the proven and optimized bearing system, we offer you

Four sizes with pumping speeds from 1,000 to 2,000 l/s

The integrated drive electronics prevent costly cabling. In

We set standards in efficiency with the well-thought-out

Overview of series and applications

C = Corrosive gas version

Pumping speed [l/s]

Pumping speed [l/s]

HiPace 1200, DN 200

HiPace 2300, DN 250

Pumping speed [l/s]

Pumping speed [l/s]

HiPace 1500, DN 250

DN 200 ISO-K DN 200 ISO-K

Max. power consumption

HiPace 1200, DN 200, TC 1200

HiPace 1500, DN 250, TC 1200

HiPace 1800, DN 200, TC 1200

HiPace 2300, DN 250, TC 1200

HiPace 300800 M, ATH 500 M

The HiPace M and ATH 500 M have an active 5-axis magnetic

Do the different interface standards make your life difficult?

Very easy installation

Highest pumping speed, compression and gas throughput

Our maintenance-free, magnetically levitated turbopumps

Overview of series and applications