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SEM
(Scanning Electron Microscopy)
The scanning electron microscope (SEM) uses a focused beam of high-energy electrons
to generate a variety of signals at the surface of solid specimens. The signals that derive
from electron-sample interactions reveal information about the sample including external
morphology (texture), chemical composition, and crystalline structure and orientation of
materials making up the sample. In most applications, data are collected over a selected
area of the surface of the sample, and a 2-dimensional image is generated that displays
spatial variations in these properties. Areas ranging from approximately 1 cm to 5
microns in width can be imaged in a scanning mode using conventional SEM techniques
Instrumentation
Electron Lenses
Sample Stage
Infrastructure Requirements:
o Power Supply
o Vacuum System
o Cooling system
o Vibration-free floor
Applications
The SEM is routinely used to generate high-resolution images of shapes of objects (SEI)
and to show spatial variations in chemical compositions: 1) acquiring elemental maps or
spot chemical analyses using EDS, 2)discrimination of phases based on mean atomic
number (commonly related to relative density) using BSE, and 3) compositional maps
based on differences in trace element "activators" using CL. The SEM is also widely
used to identify phases based on qualitative chemical analysis and/or crystalline structure.
Precise measurement of very small features and objects down to 50 nm in size is also
accomplished using the SEM. Backscattered electron images can be used for rapid
discrimination of phases in multiphase samples. SEMs equipped with diffracted
backscattered electron detectors can be used to examine micro fabric and crystallographic
orientation in many materials.
TEM
(Transmission electron microscope)
The use of a transmission electron microscope (TEM) to study minute structures by
taking transmission electron micrographs of thin sections of materials and/or studying
diffraction patterns produced using a TEM.
The TEM operates on the same basic principles as the light microscope but uses electrons
instead of light. Because the wavelength of electrons is much smaller than that of light,
the optimal resolution attainable for TEM images is many orders of magnitude better than
that from a light microscope. Thus, TEMs can reveal the finest details of internal
structure - in some cases as small as individual atoms.
IMAGING
The beam of electrons from the electron gun is focused into a small, thin, coherent beam
by the use of the condenser lens. This beam is restricted by the condenser aperture, which
excludes high angle electrons. The beam then strikes the specimen and parts of it are
transmitted depending upon the thickness and electron transparency of the specimen. This
transmitted portion is focused by the objective lens into an image on phosphor screen or
charge coupled device (CCD) camera. Optional objective apertures can be used to
enhance the contrast by blocking out high-angle diffracted electrons. The image then
passed down the column through the intermediate and projector lenses, is enlarged all the
way.
The image strikes the phosphor screen and light is generated, allowing the user to see the
image. The darker areas of the image represent those areas of the sample that fewer
electrons are transmitted through while the lighter areas of the image represent those
areas of the sample that more electrons were transmitted through.
PRINCIPLE:
Diffraction
Fig2. shows a simple sketch of the path of a beam of electrons in a TEM from just above
the specimen and down the column to the phosphor screen. As the electrons pass through
the sample, they are scattered by the electrostatic potential set up by the constituent
elements in the specimen. After passing through the specimen they pass through the
electromagnetic objective lens which focuses all the electrons scattered from one point of
the specimen into one point in the image plane. Also, shown in fig 2 is a dotted line
where the electrons scattered in the same direction by the sample are collected into a
single point. This is the back focal plane of the objective lens and is where the diffraction
pattern is formed.
ADVANTAGES:
Resolution: Electron microscopes can resolve very much greater detail than light
microscopes because the electron beam has a much shorter wavelength than the
(comparably longer) wavelength of visible light that forms the image in a light
microscope.
SEM allows for large amount of sample to be analyzed at a time whereas with
TEM only small amount of sample can be analyzed at a time.
SEM is used for surfaces, powders, polished & etched microstructures, IC chips,
chemical segregation whereas TEM is used for imaging of dislocations, tiny
precipitates, grain boundaries and other defect structures in solids
In TEM, pictures are shown on fluorescent screens whereas in SEM, picture is
shown on monitor.
SEM also provides a 3-dimensional image while TEM provides a 2-dimensional
picture.
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Electron microscopes do not naturally produce color images, as a SEM produces a single
value per pixel; this value corresponds to the number of electrons received by the detector
during a small period of time of the scanning when the beam is targeted to the (x,y) pixel
position.
The easiest way to get color is to associate to this single number an arbitrary color, using
color look-up table(i.e. each grey level is replaced by a chosen color). This method is
known as false color On a BSE image, false color may be performed to better distinguish
the various phases of the sample.
On textured-surface images:
The same after re-processing of the color from the estimated topography
The same after semi-automatic coloring. Arbitrary colors help identifying the various
elements of the structure