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Linfeng Chen
Temasek Laboratories, National University of Singapore, Singapore 119260
!Received 28 December 2004; accepted 26 April 2005; published online 7 June 2005"
A brief review of the methods used for broadband complex permeability measurement of magnetic
thin films up to microwave frequencies is given. In particular, the working principles of the
transmission-line perturbation methods for the characterization of magnetic thin films are discussed,
with emphasis on short-circuited planar transmission-line perturbation methods. The algorithms for
calculating the complex permeability of magnetic thin films for short-circuited planar
transmission-line perturbation methods are analyzed. A shorted microstrip line is designed and
fabricated as a prototype measurement fixture. The structure of the microstrip fixture and the
corresponding measurement procedure are discussed in detail. A piece of 340 nm thick FeTaN thin
film deposited on Si substrate using sputtering method is characterized using the microstrip fixture.
An improved technique for obtaining permeability by using a saturation magnetization field is
demonstrated here, and the results fit well with the LandauLifchitzGilbert theory. Approaches to
extending this method to other aspects in the investigation of magnetic thin film are also
discussed. 2005 American Institute of Physics. #DOI: 10.1063/1.1935429$
I. INTRODUCTION
0034-6748/2005/76"6!/063911/8/$22.50
76, 063911-1
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063911-2
Liu et al.
Planar transmission lines have been widely used in characterizing the electromagnetic properties of materials.30 In a
planar transmission-line perturbation method, the magnetic
thin film under test is inserted into a segment of planar transmission line. As the boundary conditions of the transmission
line are changed due to the insertion of the magnetic thin
film, the characteristic parameters of the transmission line
are subsequently changed. From the changes of the characteristic parameters, the electromagnetic properties of the
magnetic thin film can be deduced. The characteristic parameters often used in deriving materials properties mainly include characteristic impedance Z, propagation constant ", effective permittivity #eff, and permeability !eff. These
parameters are related by the following equations:
Z = Z0
"=j
!eff
,
#eff
$%
!eff#eff ,
c0
!1"
!2"
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063911-3
FIG. 2. Electric field !solid line" and magnetic field !dashed line" distribution at the cross section of the region with the magnetic thin film sample.
of the portion filled with the thin film are different from
those of the empty portion. The discontinuities of the characteristic parameters along the transmission line affect the
reflection coefficient !S11" of this one-port network, and the
magnetic permeability of the thin film can be obtained from
reflection measurements.3440
Several models have been proposed to analyze the reflection approach: equivalent LCR circuit,35,36 transmission
line,36 and effective parameter.38 The equivalent LCR circuit
model and the transmission-line model analyze the change of
the characteristic impedance !%Z" due to the insertion of the
magnetic thin film, and the complex permeability of the
magnetic thin film are derived from %Z. The effective parameter model analyzes the change of the effective permeability !%!eff" of the transmission line due to the magnetic
properties of the magnetic thin film under test, and the complex permeability of the thin film under study is obtained
from %!eff. In experiments, either %Z or %!eff can be obtained from reflection measurements.
The above three models do not require complicated data
processing, and the results obtained from these models generally agree with each other.16,35 In the equivalent LCR circuit model and the transmission line model, the equivalent
lumped elements of the transmission line are determined
from the best fit of the measurement results over the whole
measurement frequency range; while in the effective parameter approach, the effective parameters at different frequencies describing the transmission line are determined from the
reflection measurements at different measurement
frequencies.38
In this article, we demonstrated and improved on the
effective parameter model proposed by Bekker et al.38 In
Bekkers model, the complex permeability of a magnetic thin
film is derived from the change in the effective permeability
!eff of a transmission line segment with the magnetic thin
film insertion. Before the thin film is inserted, the effective
permeability of the transmission line equals unity !!eff = 1".
After the thin film is inserted, both the effective permittivity
and effective permeability of the transmission line are
changed. At the region where the thin film is inserted, as the
electric field is perpendicular to the thin film as shown in
Fig. 2, and the thickness of the thin film is very small, the
change of the effective permittivity of the transmission line
due to the insertion of the thin film is assumed to be negligible. Therefore by using the effective permittivity calculated
from reflection measurement of the transmission line without
the thin film as the effective permittivity of the transmission
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063911-4
Liu et al.
&
empty
jc0ln# S11
! f "$
4& f !lempty + lsample"
'
!3"
empty
!f" is the reflection coefficient before the thin
where S11
film is inserted, lempty is the length of the empty portion,
lsample is the length of the sample portion, and f is the measurement frequency. After the thin film is inserted, by assuming that the effective permittivity of the transmission line
does not change, the effective permeability of the perturbed
transmission line is given by
!eff!f" =
&
film
jc0ln# S11
! f "$
empty
4& flsample%#eff
!f"
lempty
lsample
'
!4"
film
!f" is the reflection coefficient after the thin film is
where S11
inserted.
As the change of the effective permeability of the transmission line from unity to the value given by Eq. !4" is due
to the magnetic properties of the thin film, the complex permeability of the thin film can be obtained from the change of
effective permeability of the transmission line
!film! f " =
K
#!eff! f " 1$ ,
t
!5"
! =
!initial
Ms
+ 1,
Ha
!6"
where M s is the saturation magnetization and Ha is the anisotropic field of the magnetic thin film under test. Once the
scaling coefficient K is determined, it can be used for other
samples.
As thin films are usually fabricated on dielectric substrates, the situations are more complicated than what is discussed above. In order to calculate the effective permeability
of the transmission line loaded with a magnetic thin film
coated on a dielectric substrate from the reflection coefficient, the effective permittivity of this loaded transmission
line should be known. In this loaded transmission line, both
FIG. 3. Cross section of the microstrip circuit !a" loaded with substrate
without thin film and !b" loaded with substrate coated with thin film.
the magnetic thin film itself and the dielectric substrate contribute to the effective permittivity of the transmission line.
As the effects of the thin film to the effective permittivity of
the transmission line are usually quite small, we only consider the effect of the dielectric substrate to the effective
permittivity of the transmission line. In the calculation of the
complex permeability of magnetic thin film, we actually
compare the two cases shown in Fig. 3. In Fig. 3!a", the
transmission line is loaded with a dielectric substrate without
magnetic thin film, and in Fig. 3!b", the transmission line is
loaded with a magnetic thin film coated on a dielectric substrate. We assume that the two substrates in the two cases
have the same dimensions, the same dielectric properties, are
nonmagnetic and they are placed at the same position in the
transmission line.
To calculate the effective permeability of the transmission line in Fig. 3!b" from reflection measurement, the effective permittivity of the transmission line should be known.
As the effective permeability of the transmission line shown
in Fig. 3!a" is unity, its effective permittivity can be obtained
from reflection measurement:
sub
!f" =
#eff
&
empty
sub
jc0ln! S11
!f"
! f "" lempty%#eff
4& flsample
lsample
'
!7"
!eff!f" =
&
film
jc0ln! S11
!f""
sub
4& flsample%#eff
!f"
empty
lempty%#eff
!f"
sub
lsample%#eff
!f"
'
!8"
film
!f" is the reflection coefficient of the transmission
where S11
line loaded with a magnetic thin film coated on a dielectric
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063911-5
FIG. 4. Shorted microstrp line fixture loaded with a magnetic thin film
coated on a dielectric substrate. !a" Photograph and !b" schematic diagram.
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063911-6
Liu et al.
!r!f" = 1 +
)0
f
1
fr
2*f
+j
fr
!9"
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063911-7
&
empty
saturate
!f"
jc0ln! S11
!f"" lempty%#eff
4& flsample
lsample
'
, !11"
saturate
!f" is the reflection coefficient of the transmiswhere S11
sion line loaded with the thin film sample which is magnetically saturated. With a known value of effective permittivity
film
!f", the effective permeability !eff!f" of the transmission
#eff
line loaded with thin film sample can be calculated by
!eff!f" =
FIG. 8. Permeability spectrum of the magnetic thin film. !a" Theoretical
results following LandauLifchitzGilbert equations. !b" Measurement results based on calibration with substrate without thin film. !c" Measurement
results based on calibration with saturation magnetization.
fr =
" %
!0 Ha M s ,
2&
!10"
&
film
jc0ln! S11
!f""
film
4& flsample%#eff
!f"
empty
!f"
lempty%#eff
film
lsample%#eff
!f"
'
, !12"
film
where S11
!f" is the reflection coefficient of the transmission
line loaded with the thin film sample without external magnetic field. With the value of !eff!f" given by Eq. !12", the
complex permeability of the magnetic thin film can be determined following Eqs. !5" and !6". The saturation magnetization approach actually compares the effective permeability
values of the sample-loaded transmission line with and without the externally applied saturation magnetic field. Figure 8
indicates that the results following the saturation magnetization approach have better agreement with the Landau
LifchitzGilbert theory. In experiments, the strength of the
saturation magnetic field we applied is 120 Oe.
In principle, the thin film sample under test can be at any
position along the microstrip line,38 but in the measurement
procedure, the positions of the substrate without magnetic
thin film and the substrate with magnetic thin film should be
at the same position. Mainly based on the following two
reasons, it is desirable to place both the substrate and the thin
film sample at the shorted end of the fixture: first, in this way
the repeatability of the positions of the substrate and the thin
film sample can be ensured so the measurement results have
higher repeatability; and second, the measurements have
higher sensitivities as the magnetic field is the strongest at
the shorted end, as shown in Fig. 5. By measuring the FeTaN
sample ten times, we found that measurement uncertainty of
our experiments is within 10%.
V. DISCUSSIONS
The shorted transmission-line perturbation method discussed in this paper can be further extended to provide more
dimensions for the study of the permeability spectra of magnetic thin films. By adding a heating/cooling system to the
fixture, the temperature dependence of complex permeability
of magnetic thin film can be studied.37 By changing the
strength and orientation of the static magnetic field applied to
the magnetic thin film under study, the magnetic field dependence of the complex permeability of the magnetic thin film
can be studied.35 The magnetostriction of a magnetic thin
film can also be studied by applying mechanic stresses to the
film under test.40
Finally it should be noted that microstrip-line structure
used in this article is only an example to implement the
shorted transmission-line perturbation method. Other types
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063911-8
of planar transmission line structures, such as stripline,36 coplanar line,39 and slotline,40 can also be used to meet various
measurement requirements.
1
Liu et al.
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