2

Block Valves, Branch Valves, High-Pressure

Valves....all available with proven, original patented structures
and in a wide range of series to meet application-specific
requirements
■Features Total number of particles generated (particle size of 0.1µm or larger)
(Experimental value)

400 Hitachi Metals metal diaphragm valve

●Original patented structure (metal diaphragm)
Metal diaphragm valve (Eompany A)

●Clean design Metal diaphragm valve (Company B)

(1) Minimized particle generation Bellows valve (Company C)

●Simple structure has no sliding parts such as valve disk Bellows valve (Company D)
300
and springs in contact with gas.
●Special electrolytic polishing without abrasive grain

Total number of particles generated

ensures that the valves are free from residual grain.
(2) Super-precision finish
With special electrolytic polishing, a surface roughness
below Rmax 0.4 µm has been achieved.
(3) Minimized dead space 200

Excellent gas replacement is ensured by the extremely

simple structure with no engagement sections.

●Corrosion resistance
Hitachi Metals’ Ni-Co alloy with high corrosion resistance is
used as a metal diaphragm material to make the valves 100

ideal for handling highly corrosive fluids such as halogen.

●Long service life

●Excellent sealing quality

0 10 20 30 40 50
Sealed 
parts Sealing 
structure Vacuum 
leak  (actual 
rate  values)
Minutes (min) Number of valve opening
and closing operations
1.01×10-11Pa・m3/sec(He)
Exterior Metal 
seal
〔1×10-10atm・cc/sec(He)〕
Flat 
seat 
structure 1.01×10-11Pa・m3/sec(He)
Seat 3min.
of PCTFE 〔1×10-10atm・cc/sec(He)〕

■Basic Structure
●Compactness
A compact metal diaphragm, developed and completed by
non-linear Finite-Element Method based stress analysis, can
secure large deformation with a small force. Compact
design has now become possible.

Panel nut (304SS) Handle(Al)

●Certified ISO 9001

Bonnet (304SS)
Stem (403SS)

Seat(PCTFE)
Diaphragm (Ni-Co alloy)

Body(316LSS)

2
 10K-Valve Series

■Common Specifications
Nominal 
diameter   "   "   " Swagelok○R
  type JSK○R
 
type (meter  screw)
Connection HMJ (UJR ○ R
 type) JSK ○
R
 type (unified screw)
Cv 
value 0.3 0.5 0.6 1.2
BW (butt-welded) Super  JSK ○
R
type   
Working    Vacuum∼9.81 
pressure  x  10-1Mpa[10 
kgf/cm2]
Valve 
seat kgf/cm2]
1.08Mpa[11 
Maximum 
back pressure 
9.81  10-1 
x  Mpa  kgf/cm2]
[10  Pressure 
test
Valve body (Exterior) 1.47Mpa[15 
kgf/cm2]
Pneumatic
closed, 
Nominally  nominally 
open 
type
valve 1.01  10-9Pa・m3/sec(He)
x 
Operation Valve 
seat
Leak  integrity [1  10-8atm・cc/sec(He)]
x 
Manual
Round  (T 
handle  or 
L  available)
handle  (actual value)
valve Valve body 1.01 x 10-9Pa・m3/sec(He)
(Exterior) [1 
x 10-8atm・cc/sec(He)]
Pneumatic
Mount 
tap
valve Operating temperature -10∼80℃
Mounting
Manual 3.92 
x 10-1∼6.87 
x 10-1Mpa
tap, 
Mount  panel 
nut Operating 
pressure
valve [4∼7kgf/cm2]

■Two-Way Valves (LD Series)

φD1
φD2
Rc1/8
R

L1 L2
HMJ (UJRR type) (male) UJRR type (female)
H1
H2

φD3
h2
H3
φd

φd
h1

h1

S
S
L L1
L3 L4
R
JSK type (male) JSKR type (female)
4
φD
S

2-M5 depth 8

Mount tap

L5
L6

SwagelokR type B.W.

unit : mm

Unit: 
mm
Typical 
figures Pneumatic 
valve Manual  (round 
valve  handle)

End-to-end 
length Handle Panel nut
Size Height Height Height
d S D4 D1 diameter Thread Lift
L1 L2 L3 L4 L5 L6 H1 H1 H1 H3 h2
D2 D3

 " 4.5 56 70 56 88 63.5 81 14 25 25.4 71 45 70 40 *1) 25.5 8 0.8

 " 7.5 73 82 63 97 71 88 16 32 28.6 105 *2) 79 52 φ22 32 8.5 0.9

 " 10.5 88 100 82 110 89 103 17.5 47 28.6 *3) 105 130.5 80 φ36 45.5 10 2
*1) 
Round 
handle 
20mm   
dia. T/L 
handle 
18mm  2)72, 
dia  with 
56 
for 
compact  3) 
type  H1=153, 
NC:  NO: 
H1=144
3
 10K-Valve Series

unit : mm
■Branch Three-Way Valves (LT Series)
φD1

Rc1/8

H1
h1
S
L

Size  ",  "
Connection All types in "Product Specifications"

1/2L
Manual 
valve (round 
handle)
Operation

φD
Pneumatic 
valve (NC  NO)
or 

4
Flow 
diagram V
Note: The manual and pneumatic valves have the
same dimensions as the two-way valves.

■Dual Three-Way Valves (LB-23 Series) unit : mm

80
5
φ4

Rc1/8
67

45°
14

Size  "
65
UJR○R
 type  (female)
Connection 135
JSK○
R
 type (female)
Manual  valve  (round 
handle)
Operation
Pneumatic  valve
φ25
OUT OUT OUT OUT .4
28

Flow 
diagram  N.C. N.C. N.C. N.C.
OUT N.O. OUT N.O. OUT N.O. OUT N.O.
IN IN IN IN
2-M5 depth 8

4
 Ultra-Small Dead Space Valves
(ELD Series, ELT series)

unit : mm
■Ultra-Small Dead Space Valves (ELD Series, ELT Series)
Dead space reduced to 1/5 (in-house comparison in terms of vertical hole)

φ45

Rc1/8

66
Two-way  valve (ELD  series)
Valve 
type
Branch three-way valve (ELT series)
Size  " Notes:Same end-to-end length as LD and LT series

Cv 
value 0.25 
or 
more

Connection All types in "Product Specifications"
Manual 
valve (round 
handle) 
 
Operation
Pneumatic 
valve (NC  NO)
or 

■OTHER VALVES

Angle valves NW flange valve

Block valves

5
 High-Pressure Valve Series

■Common Specifications
Ultra-small dead 
space  type Swagelok○R
  type JSK○
R
  (meter 
type  screw)
Valve 
structure
metal  diaphragm valve Connection HMJ (JJR○ R
  type) JSK○
R
  (unified 
type  crew)
Size  " BW (butt-welded) Super JSK○
R
 type   

Cv 
value 0.1 Valve 
seat MPa[185kgf/cm2]
18.1 
Vacuum∼16.18 
MPa  [165 kgf/cm2] Pressure 
test
Working 
pressure Valve body
Maximum 
back pressure 
pr 16.18  Mpa  kgf/cm2]
[165  24.5 MPa[250kgf/cm2]
(Exterior)
Pneumatic
Normally 
closed 
type 1.01  10-9Pa・m3/sec(He)
x 
valve Valve  seat 3min
Operation Allowable  leak 
rate [1  10-8atm・cc/sec(He)]
x 
Manual
Round 
handle (actual 
values) Valve body 1.01  10-11Pa・m3/sec(He)
x 
valve
(Exterior) [1  10-10atm・cc/sec(He)]
x 
Pneumatic
Mount 
tap Operating temperature -10∼80℃
valve
Mounting
Manual 3,92 
x 10-1∼6.87 
x 10-1MPa
tap, 
Mount  panel 
nut Operating 
pressure
valve [4∼7kgf/cm2]

unit : mm
■Two-Way Valves (PLD Series)
0.3 φ40
70.5

Ultra-small
dead space
3

φ4.5
22
14

25

L1

Rc1/8"
37
14 99

φ2
5.4
25

2-M5 screw depth

Note: The end-to-end length and mount tap are the same as those of 10K valve series. See the dimensions table on page 3.

6
 unit : mm
■Branch Three-Way Valve (PLT Series) φ40

Lift0.3
70.5

9/16-18UNF
3
22
14
L1

Size  ",  "

1/2L
Connection All types in "Product Specifications"
Manual 
valve (round 
handle) φ2
Operation 5.4

25
Pneumatic 
valve (NC  NO)
or 

2-M5 screw depth 8

Flow 
diagram V

Note: The main dimensions are the same

as those of two-way valves.

■Related Products

Mass flow controllers

Mass flow meters

7
 Product Symbols
●Single-Seat Valves
Diaphragm
Series Material Valve type Size Connection Operation material Special

L D 4 V C Y
① ② ③ ④ ⑤ ⑥ ⑦ ⑧

Category Description Symbol Category Description Symbol Category Description Symbol

Two-way 
valve D Swagelok○
R
 type S W/ 
special 
design ××
Special
UJR○
R
 (female) 
type U
Angle 
valve A W/O 
special 
design Blank
Valve 
type UJR○R
  (female, with
P
pure ring) type
Branch 
three-way 
valve T
(UJR ○
HMJ  R
 type) 
(male) V Category Description Symbol
Branch 
four-way 
valve C
JSK ○
R
 meter 
screw Diaphragm
(standard) 
F Ni-Co 
alloy  Y
(female) type material
Connection JSK○R
 meter  screw
M
Category Description Symbol (male) type
Category Description Symbol
316LSS L (inch 
B.W.  size) B
Material
Round 
handle R

valve
SUS316L＋Clean 
S C S-JSK○R
 meter 
screw
Q
(female) 
type

Manual 
Lever 
handle
T
S-JSK○R
  meter 
screw (symmetric)
K
Category Description Symbol (male) type  Lever handle
L
(non-symmetric)
10K-Valve 
Series Blank Operation
Category Description Symbol Normally 
closed C

valve
10K-Valve Series 4
Series E  "

Pneumatic 
(Ultra-small 
dead space) Normally 
closed
Size  " 6 compact actuator C2
High-pressure 
series  P 8 type
 "
Normally 
open O

●Block Valves Diaphragm

Series Material Valve type Size Connection Operation Valve type Valve design material Special

L B 4 V C 2 3
① ② ③ ④ ⑤ ⑥ ⑪ ⑫ ⑦ ⑧

Category Description Symbol Category Description Symbol Category Description Symbol

Valve 
type Block   
valve  B Round 
handle R Type Dual 
3-way 23
Pneumatic valve

NC 
only  C
Notes  Operation
NO 
only O
1) Symbols
(1), (2), (3), (4), (5),  (6), (7) and  (8) are the same  as NC 
& NO 
combined A
those  of  the  single-seat  valves given  above.
2) (12)  Valve  design  is given  a separate  symbol depending
on  the structure  and  flow  path  and  on how  the pneumatic
valve  NC  and  pneumatic  valve  NO  are  combined.
Example  [4] =  V  design    [6] 
Cube  design 

･Specifications subject to change without notice.

Shinjuku Head Office Head Office & 2400 Westchester Avenue, Purchase,
Shinjuku Park Tower Bldg, New York Office New York 10577-2514, U.S.A.
7-1, Nishi-shinjuku 3-Chome, Tel. 1-914-694-9200
Shinjuku-ku, Tokyo 163-1015, Japan Fax. 1-914-694-9279
Tel: 81-3-5381-6909 San Jose Office 2151 O'Toole Avenue suite B, San Jose
Fax: 81-3-5381-6947/6948 California 95131-1330, U.S.A.
Tel. 1-408-383-1780
Fax. 1-408-383-1792

Head Office Immermannstrasse 14-16, 40210 Düsseldorf,

Germany 78 Shenton Way ＃12-01
Tel. 49-211-16009-0 Singapore 079120
Fax. 49-211-16009-29 Tel. 65-222-3077
Fax. 65-222-5232