Square Capacitive Pressure Sensor

Date
Nov 25, 2015 1:31:49 PM

Contents
1. Global.................................................................................................................
1.1. Definitions....................................................................................................
2. Component 1.....................................................................................................
2.1. Definitions....................................................................................................
2.2. Geometry 1..................................................................................................
2.3. Materials......................................................................................................
2.4. Electromechanics.........................................................................................
2.5. Mesh 1.........................................................................................................
3. Study 1...............................................................................................................
3.1. Stationary....................................................................................................
4. Study 2...............................................................................................................
4.1. Stationary....................................................................................................
5. Results...............................................................................................................
5.1. Data Sets.....................................................................................................
5.2. Derived Values.............................................................................................
5.3. Tables...........................................................................................................
5.4. Plot Groups..................................................................................................

1 Global
Used products

COMSOL Multiphysics
CAD Import Module
MEMS Module

1.1 Definitions
1.1.1 Parameters 1
Parameters

Name

Expression

Value

Description

p0

25[kPa]

25000 Pa

pressure

v0

1[V]

1.0000 V

voltage

2 Component 1
2.1 Definitions
2.1.1 Coordinate Systems
Boundary System 1
Coordinate system type

Boundary system

Tag

sys1

2.2 Geometry 1

Geometry 1
Units

Length unit

Angular unit

deg

2.3 Materials
2.3.1 Air

Air
Selection

Geometric entity level

Domain

Selection

Domain 2

2.3.2 Si - Silicon (single-crystal, isotropic)

Si - Silicon (single-crystal, isotropic)

Selection

Geometric entity level

Domain
5

Selection

Domains 1, 3

2.4 Electromechanics

Electromechanics
Features

Free Deformation 1
Electrical Material Model 1
Zero Charge 1
Free 2
Electromechanical Interface 1
Prescribed Mesh Displacement 1
Linear Elastic Dielectric 1
Initial Values 1
Linear Elastic Material 1
Terminal 1
Ground 1
Boundary Load 1
Fixed Constraint 1

2.5 Mesh 1

Mesh 1

3 Study 1
3.1 Stationary
Study settings

Property

Value

Include geometric nonlinearity

On

Physics and variables selection

Physics interface

Discretization

Electromechanics (emi)

physics

Mesh selection

Geometry

Mesh

Geometry 1 (geom1)

mesh1

4 Study 2
4.1 Stationary
Study settings

Property

Value

Include geometric nonlinearity

On

Physics and variables selection

Physics interface

Discretization

Electromechanics (emi)

physics

Mesh selection

Geometry

Mesh

Geometry 1 (geom1)

mesh1

5 Results
5.1 Data Sets
5.1.1 Study 1/Solution 1
Selection

Geometric entity level

Domain

Selection

Domains 23

Solution

Name

Value

Solution

Solution 1

Component

Save Point Geometry 1

Data set: Study 1/Solution 1

5.1.2 Study 2/Solution 2

Solution

Name

Value

Solution

Solution 2

Component

Save Point Geometry 1

10

Data set: Study 2/Solution 2

5.2 Derived Values

5.2.1 Global Evaluation 1
Data

Name

Value

Data set

Study 1/Solution 1

Expression

Name

Value

Expression

emi.C11

Unit

Description

Capacitance

5.2.2 Global Evaluation 2

Data

Name

Value

Data set

Study 2/Solution 2

Expression

Name

Value

Expression

emi.C11

Unit

Description

Capacitance

11

5.3 Tables
5.3.1 Table 1
Global Evaluation 1 (emi.C11)
Table 1

p0

Capacitance (F)

0.0000

8.8542E-15

1000.0

8.8564E-15

2000.0

8.8585E-15

3000.0

8.8607E-15

4000.0

8.8629E-15

5000.0

8.8650E-15

6000.0

8.8672E-15

7000.0

8.8694E-15

8000.0

8.8715E-15

9000.0

8.8737E-15

10000

8.8759E-15

11000

8.8780E-15

12000

8.8802E-15

13000

8.8823E-15

14000

8.8845E-15

15000

8.8867E-15

16000

8.8888E-15

17000

8.8910E-15

18000

8.8931E-15

19000

8.8952E-15

20000

8.8974E-15

21000

8.8995E-15

22000

8.9016E-15

23000

8.9038E-15

24000

8.9059E-15

25000

8.9080E-15

5.3.2 Table 2
Global Evaluation 2 (emi.C11)
Table 2

12

v0

Capacitance (F)

1.0000

8.9080E-15

11.000

8.9080E-15

21.000

8.9080E-15

31.000

8.9081E-15

41.000

8.9082E-15

51.000

8.9082E-15

61.000

8.9083E-15

71.000

8.9085E-15

81.000

8.9086E-15

91.000

8.9088E-15

5.4 Plot Groups

5.4.1 Displacement (emi)

p0(26)=25000 Surface: Total displacement (m)

13

5.4.2 Potential (emi)

p0(25)=24000 Slice: Electric potential (V)

5.4.3 Potential (emi) 1

v0(1)=1 Slice: Electric potential (V)

14

5.4.4 Displacement (emi) 1

v0(10)=91 Surface: Total displacement (m)

5.4.5 1D Plot Group 8

15

5.4.6 1D Plot Group 9

16