What is UTMOST?

UTMOST III SPICE Modeling Software generates the most

accurate, high quality SPICE models for analog, digital,
mixed-signal, and RF applications
Leading IDMs, foundries, and fabless companies use
UTMOST III to perform data acquisition, device
characterization, parameter extraction, and model
verification

UTMOST

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Agenda

Why need modeling

Utmost installation
Utmost simple Tutorial
Utmost menu and option detail introduction
TFT model introduction

UTMOST

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Why need modeling

Model card is the bridge between foundry and fabless

Circuit accuracy depends on accuracy model
Wrong/inaccuracy model leads to low yield or zero yield
Model card can monitor the process variation.
Use model card can speed up the time to market or profit

UTMOST

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UTMOST Inputs and Outputs

UTMOST

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Utmost Installation
Install the Utmost package
Download the binary packaging
Mkdir ../target path/Silvaco
Cd ../target path/Silvaco
Gunzip < /cdrom/utmost.tar.gz.|tar xf -

Install the SFLM

Download the binary sflm.tar.gz
Mkdir /opt/simucad
Cd /opt/simucad
Gunzip < /cdrom/sflm.tar.gz.|tar xf
/<install dir>/bin/sflm install
Bring up web browser http://losthost :3162
Register by online or offline to get the ossid
Apply the license by the ossid and install it
UTMOST

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Simple Tutorial: How to run Vyper/Utmost

VYPER is an interactive, user-friendly front end to UTMOST, SPICE

simulators, schematic capture, SPAYN statistical analysis,
PROMOST, Libraries support facilities, and a bridge to DeckBuild.
Run ../install dir/bin/vyper &

UTMOST

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Simple Tutorial :Utmost main screen& select model

Click utmost button and select interactive item
Select TFT model

UTMOST

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Simple Tutorial: open the file manager

Click the File button in the Utmost main screen

Click the File Manager

UTMOST

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Simple Tutorial: load the setup file

Get the file screen
Drag the setup file to the setup mailbox, the box will show
message loaded
Quit the page

UTMOST

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Simple Tutorial :Open the System main screen

Click the system button on the utmost main screen

UTMOST

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Simple Tutorial: Setup the system options

Click the button on the system screen to setup the options
Set the get RAW data option to simulation or measurement.
Set the graphics control to manual
Set the spice model to internal model or smartlib
Set temperature modeling to Disabled
Set the probe control to manual
Set continuity test to Disabled.
Keep others option or parameters as usual

UTMOST

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Simple Tutorial: Open spice model screen

Click the Utmost main screen->File->spice model button
Select the spice simulator
Select the model name
Click the load model button
Quit the screen

UTMOST

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Simple Tutorial: Open the output log file screen

Click the File->output log files in the utmost main screen
Enter log file name
Enter the header info
Click the Open new
All the data will be in log file

UTMOST

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Simple Tutorial: Open the setup and result screen

Click the Setup button in the utmost main screen

UTMOST

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Simple Tutorial: Open the setup and result screen

Change the Analysis Filter to DC
Select IDS/VDS button
Click the routine control in the utmost main screen

UTMOST

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Simple Tutorial: Open the setup and result screen

Set the Meas. Sections field to 5.

This value controls the number of sweeps performed in the
simulation.
Close the Routine Control Screen by clicking on the Quit
button.

UTMOST

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Simple Tutorial: open model Strategy in utmost screen

Click Strategy button to open the Model Strategy screen
Ensure the device is actived

UTMOST

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Simple Tutorial: Open the extraction screen

click the Extraction button to Open the extraction screen
on the main UTMOST screen.
Select the ID/VD-VG routine
Click on the Measure button.

UTMOST

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Simple Tutorial: Open the graphic screen

Click on the Measure button.
UTMOST will simulate the ID/VD-VG curves according to
the measurement setup and display the results in a
graphics screen.

UTMOST

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Simple Tutorial : Fit and Simulation

There are many options available within the graphics screen.
Under the Options button, select Fit. This invokes the
UTMOST fit algorithm for the ID/VD-VG routine.
Option-> simulation, simulate the curves by model parameters
To quit the graphics screen, click on the Return button.

UTMOST

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Simple Tutorial: open DC measurement screen

To re-simulate the same data using a modified
measurement setup,
locate the Setup and Results screen
click on the Set Measurement button.
opens the DC Measurement Screen.

UTMOST

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Simple Tutorial : Change measurement condition

To alter the voltage sweeping parameters simply edit the
fields adjacent to the corresponding parameter names.
ID/VDS@VGS point 51
Fill in the vds_start_vd
vds_stop_vd
vgs_start_vd
vgs_step_vd

ID/VGS@VDS point 51
Fill in the vgs_start_vg
vgs_stop_vg
vds_start_vg
vds_step_vg

Leave the DC Measurement Screen open

Press Measure on the Extraction screen.
UTMOST

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Simple Tutorial: close and save

To close the log file, open the Output Log File screen and
click on Close File.
To save the UTMOST setup, open the File Manager screen
and click on the Setup & Log checkbox .
Enter a new name in the Setup File Name field and click on
the Store button.
The File Manager should also show the log file just created.
If no icon for this log file appears in the files area, place the
pointer in the Directory text field and press Return. This will
update the files area.

UTMOST

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Detail introduction: File manager

Filtering
Editing
doulbe click file
Dont edit binary

Naming
.s for SPICE files
.l for SPICE
library files
.c for SPICE files
used in circuits

Printing file
Deleting file
Save file
Click Setup&log
UTMOST

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Detail introduction: Primary files

UTMOST

The File Manager is used to initialize UTMOST.

Setup files store system and program operation
information, including ex, meas, opti etc.
Log files are used to store measurement data and
measurement biasing information in ASCII format.
List files contain the results of UTMOST parameter
extractions, including some primitive statistical
analysis results, such as the maximum, minimum,
and average values of the model parameters
extracted during the measurement session.
SPICE models are stored in SPICE library files.
SPAYN is a statistical analysis program designed to
identify and help resolve production deficiencies
and to increase yield
Spice model select the model level type
Reedholm file and Keithley file allows utmost to
read or convert Reedholm/Keithley data
- 26 respectively

Detail introduction: List file

Fill the file name in the field
Click open new to create file
Click overwrite to replace file
Click copy to save selected parameters to list
file
Click store to save current entered parameters
to list file
Click CLOSE FILE to close file
Parameters can be added by Utmost>Parameters->attributes
List has four typeS

List1: Max, Min, Mean, Standard

Deviation of selected parameters, and a
summary of die names used and
associated parameter values.
List2: Max, Min, Mean, Standard
Deviation of selected parameters, and a
summary of all parameter values.
List3: A simple summary of selected
parameters.
List4: A summary of results, tagged with
wafer and die identifiers.
UTMOST

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Detail introduction: Hardware setup (IV/AC/CV/Noise)

Utmost->Hardware->Configuration
!
!

Select instrument type

Click CPU side
!

Port setup
!
!
!

!
!
!

!
!
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Device connect to GND

Test the cable and wire R

Instr Setup to set external

power supplier to IV meter
Stimulate mode
!

UTMOST

Baud rate
Port name (default by computer)
Check communication by
POLLING button

Set SMU and GPIB port No.

Set Continuity test( check the
connection quality)
Set Calibration
!
!

GPIB serial port

Pulse1/Pulse2 options enable

1/2 sources to be used.
User option selects user
operation mode.
System option selects normal
operation mode.

Detail introduction: Hardware setup

Utmost->Hardware->Probing
Select prober type
Select interface type
Fill in prober address
Set the prober delay (100+sec)
#Wafers defined the wafer
number in the cassette
Select units by English or metric
Stop option valid in some station.
To load new wafer after stop
Skip unused wafer: skip wafer in
wafer cassette
Polling to check the prober
connection with computer
Load/unload/move/set home/go
home/contact/no contact controls
the probe card automatically.
UTMOST

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Detail introduction: Hardware Setup

Utmost->Hardware->instrument
usually high accuracy or high
power instruments must be
manually controlled.
Select the
instrument
function
I/V meter, I/V source
Select the instrument type
Check the connection by Polling
Quit

UTMOST

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Detail introduction: System screen configuration

Utmost->system

UTMOST

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Detail introduction: System option

Edit names and Values
If Disabled, then parameter and routine names are read-only
If Enabled, then parameter and routine names may be edited.

Get Raw Data From

To define the data source to be used by Measurement, Simulation, Log
File, Reedholm, Keithley and Drawing.
Measurement, data is taken from instruments connected to UTMOST.
Simulation, uses the currently defined model to simulate a device.
This option can be used to compare a developed model with a real device.
Selecting Log File makes it possible to read data from a log file created in
UTMOST.
Selecting Reedholm allows UTMOST to read data from a Reedholm
formatted file.
Keithley, UTMOST can be used to read data from a Keithley formatted
file.
The Drawing option will be available in future versions of UTMOST.
UTMOST

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Detail introduction: System option

Prober Control :Three options: Manual, SemiAuto and Auto.
System Messages:
Enable :need operator intervention when individual measurement
Disabled :all under computer controll when measurement

Spice Models: determines how UTMOST performs a simulation.

set to External SPICE, UTMOST use an external SPICE program for
simulations.
set to Internal Models, UTMOST uses its own internal simulator
set to interpreter, model implemented by smartspice interpreter, to
use external spice to simulate result
Set to Smartlib, would use a separate internal rubberband simulator
only for DC characterics.

UTMOST

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Detail introduction: system screen configuration

! Group Extraction
disabled, selected model parameters are logged to SPAYN or list files for
each device chosen.
enabled, the model parameters are logged only once, after all chosen
devices have been tested and analyzed.

Technology:
to set according to the UTMOST technology currently in use, such TFT or
MOSFET

Graphics Control
Set to Manual, UTMOST displays a plot and wait for the Return button to
be pressed before continuing.
Set to No Graph, UTMOST does not display graphs.
Set to Pause, UTMOST will wait a time before display the next
measurement.
The waiting time can be set by entering a value in the Pause Wait Time
text field.

MACRO Modeling

UTMOST

Set to Enabled, UTMOST uses the netlist and models provided in the
VYPER control file.
Set to Disabled, UTMOST uses
- 34 - its internal netlist to simulate.

Detail introduction: system option

Continuity Test
set to Enabled, a continuity test as defined in an SMU Continuity Test screen is performed on each test site.
Set to Disabled, will not do the continuity test on each test site

Repeated Measurement
Enabled to ensure all the device can be correctly measured
Disabled will skip the device which has the temporary files (stored data) existed.

Temperature Modeling
Enabled, UTMOST to drive connected computer-controlled temperature ovens
Disabled, UTMOST assumes that all measurements are performed at room (nominal)

gds/gm Model
It controls how the gds/gm data is produced.
If set to Computed, UTMOST calculates the gds/gm data from the Ids data measured.
There are four different methods:Lagrange 5-point and 3-point methods, and the Linear 5-point and 3-point
methods

# of Terminals: describe the device terminal

.Opt Method : Users can switch between the Levenberg-Marquart and the Downhill Simplex method
Nominal Temperature: Nominal Temperature default is room temperature.
File Autoclose Time:
This feature avoid measurement data lost by failure to close the files manually.
Usually used in multiple device or several wafer in probe mode measurement

DC Long Delay:
defines a delay between measurements if the device needs time to cool etc.

AC Read Delay:
defines a delay between the reading the measured AC points from the output buffer of the network analyzer.

AC Sweep Delay:
Defines the delay necessary to measure all AC points for each s-parameter family

UTMOST

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Detail introduction: system option

System Init: initialize the setup enviroment.
Print Results:
stores the extracted parameters to an ASCII file.
The file is stored in the current directory and has a name in the format
PRINTxx, where xx is a sequential number starting at 00.
The file can be print in file manager

Title Block (die information)

displays the Title Block screen,
This screen allows process attributes to be set. These attributes are
stored in log files and act as labels in plots
The Title Block screen will also open automatically when List Files or
SPAYN Interface are selected from the Files menu.

dcgmin, reltol, vnto, abstol, numdgt, and dnumdgt

above options are SPICE parameters,
used for external SPICE and SmartLib simulation.

Replot
displays the Replot screen. This screen allows previously simulated or
measured plots to be displayed. To view a plot, select the relevant line of
the plot list and click on the Apply button.
UTMOST

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Detail introduction: system option

Raw data
Display the Raw data set screen
Data manually modified and click the apply to the graphics
In Graphics, use control->show XY option, data can be viewed by
reopen the raw data.

Run time debug

Check and debug the interaction of utmost with instrument
Check and debug the interaction of utmost with external spice

UTMOST

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Detail introduction: Local Optimization

Utmost->Local Opti.

UTMOST

Used to construct the required local optimization strategies

Yellow diamond indicates that the corresponding step has not been activ
Red diamond indicates that the corresponding step is in progress.
Green diamond indicates that the corresponding step has been success
Blue parameters can not be recognized in current model
Red Parameters indicates
values reached their upper or lower boundary
- 38 -

Detail introduction: Local optimization

Click the Define strategy

can use current/current derivative/ current+derivative as local optimization target

Enter correct routine number in the routine field
A red flag indicate the parameters actived
Target selection: select the curves range for optimization
Select strategy by click select strategy in local optimization screen.
Define the print information by click the Define printout in local optimization screen

UTMOST

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Detail introduction: Parameters screen

Utmost->Parameters

UTMOST

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Detail introduction: parameters screen

To specify the parameter name, value of optimized, fit
initial ,user initial, minimum, maximum
Three mode: edit, insert, delete
Click attribute button to mark the parameters in spice file,
list file and spayn file
Copy parameters among opti, fit, user, min, max
Select routine by enter the routine number field, routine
name will be changed corresponding with the name
Select strategy number by selecting the parameters
After selection the total opt. button will show the parameters
number
Click the Total opt. button , it will clear the selection

UTMOST

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Detail introduction: Setups option

Utmost->setups

UTMOST

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Details introduction: setups option

UTMOST

Display a table of routine names for current

technology
Analysis filter can display particular analysis
type by input the analysis type or click the
right arrow
Click on the Clear Last Data button to delete
any data that is related to the current routine,
including temporary files and results files.
To delete data from all routines, click on the
System Init button on the Common Control
screen.
The Create Routine and Modify Routine
buttons provide functions that are to be used
by routine developers only.
Click on the Attributes button to open the
Routine Attributes screen .This screen
provides information about the capabilities of
the selected routine.
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Detail introduction: DC measurement screen

Utmost-> setup->set measurement

UTMOST

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Detail introduction: DC measurement screen

!# Of Setups field can be used to create multiple
measurement setups for a given routine.
!To change the number of setups, enter the required
number in the text field and press the Return key.
!UTMOST automatically copies the current setup to
any new setup.
!To select an individual setup, use the pop-up menu
next to the Setup label.
!Clicking on the Fit Vars button opens the Fitting
Variables screen. This screen is used to set variables
that control the UTMOST fitting algorithms and
parameter extraction.
! Sweep mode can be linear, log10, log 25, log50
!To model can choose ID/VG, Gm, ID/VD etc..
!Can select GDS or RDS
!Can setup the SMU range

UTMOST

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Detail introduction: Extraction screen

The Extraction screen is used to initiate all principal UTMOST operations,
such as measurement, parameter extraction, simulation, and optimization.
Utmost->extraction

UTMOST

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Detail introduction: Extraction screen

Optimization and Fitting Options

UTMOST can perform fitting (parameter extraction) and optimization
automatically after measurement data is obtained.
The Fitting and Optimizer buttons on the Routine Control screen can be set
individually for every routine in the test sequence.
If the Fitting and Optimizer buttons are Disabled, fitting and optimization can
be performed from the Graphics screen

Repeated Measurement
Control
options
UTMOST

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Detail introduction: Configuring Routines

Utmost->Routine control

UTMOST

!Click utmost->setup->create routine or select a routine

!Open the routine control screen
!Fitting, Simulation and Optimization are Enabled, three tasks are performed
in the following order: Fitting, Optimization, and Simulation.
two or more of these buttons are enabled while UTMOST is in manual mode,
the user must press the Return key to move from one process to the next
- 48 -

Detail introduction: Configuring Routines

Fitting
If the Fitting button is Enabled, UTMOST automatically attempts to extract fitting
parameters from the measured data when a measurement is completed.
If a local optimization sequence is enabled for the routine in use, the regular fitting
operation is followed by the local optimization sequence.
The fitting operation is equivalent to selecting Fit from the Options menu of the Graphics
screen. If the Fitting button is Disabled, then no automatic fitting or local optimization
takes place.

Fit Sections
The number in the Fit Sections button shows the number of subsets of measurement
data that will be fitted for the current routine.

Simulation
If the Simulation button is Enabled for a routine, simulation is performed automatically
after the measurement and after fitting and local optimization,
the Simulation button is equivalent to selecting Simulation from the Options menu of the
Graphics screen

Global Optimization

UTMOST

If the Global Optim. button is Enabled for a routine, the optimizer is invoked
automatically when a measurement is completed.
Enabling the Global Optim. button is equivalent to selecting Global Optim. from the
Options menu of the Graphics screen.
If the Global Optim. button is Disabled, optimization must be done manually from the
Graphics screen. The UTMOST optimizer is not available for all routines. The Routine
Attributes screen, defined as part of the Setup and Results screen, can be used to check
- 49routine.
if optimization is allowed for a given

Detail introduction: Configuring Routines

Local Optimization
If the Local Optim. button is Enabled for a routine, then the optimizer is invoked
automatically when a measurement is completed.
Enabling the Local Optim. button is equivalent to selecting Local Optim. from the
Options menu of the Graphics screen.
If the Local Optim. button is Disabled, optimization must be done manually from the
Graphics screen. The UTMOST optimizer is not available for all routines. The Routine
Attributes screen, defined as part of the Setup and Results screen, can be used to check
if optimization is allowed for a given routine.

Plotter
If the Plotter button is Enabled, and PostScript is selected in the hardware configuration
screen, when a measurement is completed UTMOST automatically generates a
PostScript file.
To create a PostScript file with a different name, enter the new filename in the
PostScript/HPGL text field in the Routine Control screen.
Enabling the Plotter button is equivalent to clicking on the Plot button on the Graphics
screen.

Measurement Sections
The Measurement Sections text field defines the number of curves that will be measured
for the current routine. For example, when measuring IDS for different values of VDS, it is
common to produce a family of curves by varying VGS for each set of VDS values. The
Measurement Sections field gives the number of VGS increments.

Optimizer Setup
UTMOST

The Optimizer Setup button opens the Optimizer Setup/Status screen. This screen is
used to assign values to variables- 50
required
by the optimizer.

Detail introduction: Configuring Routines

Data Setup
The Data Setup button opens the Data Setup screen. This screen displays each
measured data point and the value of the measured and simulated data at that point.
An error value is given to show the percentage error between simulated and measured
data.
If several devices are measured, it is possible to display the information for an individual
device by selecting the device name in the Structure Name section.
To print the information, click on the Print button. This sends the data displayed on the
screen directly to the connected printer.
To save the information to a file, enter a name in the File Name text field and click on the
Store File button.

UTMOST

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Detail introduction: Configuring Routines

Temperature
The Temperature button opens the Temperature Setup screen.
The number of temperature points and the temperature at each point are constant for all
routines.
To mark a routine for a particular temperature, click on the button to the left of the
temperature value and a flag appears.
The temperature flags can be set and cleared by the SET ALL and CLEAR buttons.
The selected temperature points can be stored in a text file, which can be loaded to
UTMOST later.

UTMOST

- 52 -

Detail introduction: Configuring Routines

Multiple Select
The Multiple Select button opens the Multiple Routine screen.
If a routine has several distinct stages (routine number >0), this screen allows the user to
control the stages performed by UTMOST.

Result
The Result button opens the Result screen.
This screen displays which parameters are extracted by the current routine using regular
fitting techniques.
enter a number in the appropriate Extracted text field.
enter the desired values in the Minimum and Maximum text fields.
save a parameter value in a SPAYN or List file, click on the SPAYN or List button.
If a parameter is marked for saving, a flag is displayed next to the parameter name. To
unmark a parameter, click on the button again.

UTMOST

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Detail introduction: Configuring Routines

Preset
opens a parameter Preset screen for the current routine.
can be used to preset selected parameter values and/or limits that take effect whenever
the routine is activated or routine finished
this screen also can be used to reset selected parameter values and/or limits after the
routine is finished.
The Routine field displays the currently selected routine.
The # of parameters field displays the number of parameters to be set (default is zero).
The parameter names in the Names column can be edited only when the Edit button in
the System window is set to Enabled.
pre-set will be transferred to the UTMOST Parameters screen when the routine is
executed.

UTMOST

- 54 -

Detail introduction: Configuring Routines

Local Optimization Sequence
Local optimization is possible using many UTMOST routines.
This screen defines a sequence of local optimization strategies.
These strategies are set up in the Local Optimization screen of
the main UTMOST window.
user enters the strategies into the local optimization sequence
using their numbers, as defined in the Local Optimization
environment.

UTMOST

- 55 -

Detail instruction: Modeling Strategies

The Model Strategy screen is used to set and to display a
summary of measurement and optimization strategies for
each routine, device, group and temperature.
The following information is defined in other screens:
Routine name - Setup and Results screen.
Temperature - Temperature Setup screen (from Routine Control).
Group - Group List screen (Hardware Probing).
Device Name, Polarity and Geometry - Device Pad Definition
Screen (Hardware Probing; any changes made in this screen
also changes the Device Pad Definition screen, as the two
screens work interactively).
Setup Number Measurement Setup under Setup and Results
screen.
Optimization Set Parameters screen

UTMOST

- 56 -

Detail instruction: Modeling Strategies

Utmost->Strategy

UTMOST

- 57 -

Detail instruction: Modeling Strategies

The Model Strategy screen is routine dependent.
This screen can be used to mark or activate any available device for
measurement by the routine
If temperature modeling is enabled, devices can be measured at different
temperatures If multiple groups have been defined the group number can
be changed by clicking on the Group button.
Click on the Clear Sequence button to restart selections for the current
routine.
the Set All Grps (set this group, set all temp.) button will highlight
(select) all devices in all groups.
There are six possible optimization strategies.
The Setup Number refers to a measurement setup defined in the
Measurement screen of the Setup and Result screen. Several
measurement setups can be defined in the Measurement screen. The
Setup # button on the Model Strategy screen can be used to set the
measurement conditions for the particular device and routine.
The polarity of a device can be changed to . available polarities (for
MOSFETs the options are NMOS, PMOS, and Dummy)
The Model button is used to select which set of parameters is used to
perform simulation and optimization.
Geometry (Width and Length )
UTMOST

- 58 -

Detail introduction: Displaying Results Graphically

Utmost->extraction->measurement
A Graphics screen can display single and multiple plots.
the number of plots depends on the number and type of routines
in the measurement sequence, Up to 18 plots .

UTMOST

- 59 -

Detail introduction: Displaying Results Graphically

The Attributes button on the Graphics screen opens the
Graphics Attributes screen.
Maximum and Minimum values for the
X and Y axes
Scale of X and Y axes, X and Y axis
labels, X and Y axis units
Plot title
Frame color
Line color, line style and marker type
Continuity Optimization (viewport)
box color and line style
Scaling

UTMOST

- 60 -

Detail introduction: Displaying Results Graphically

Options
Raw Data
The Raw Data option refreshes all the plots in the graphics screen with original
measured data. All simulation, optimization, and fitting results are removed from the
Graphics screen, but remain in the Parameters screen and the Results screen.

Fit
Selecting Fit invokes the UTMOST fitting algorithm for parameter extraction for the
given routine.

Simulate
The Simulate option causes UTMOST to simulate data for the current routine.

Global Optimize
The Global Optimization is invoked by selecting the Global Optim. option.

Local Optimize
The Local Optimization is invoked by selecting the Local Optim. option.

Exchange
The Exchange option allows the user to swap measured and simulated data.

UTMOST

- 61 -

Detail introduction: Displaying Results Graphically

Option
Modeling
The feature allows the user to perform multiple simulations for the routine selected.
Spice Model Development screen allows the user to sweep model parameters and
temperature, and to perform a simulation at each step.
To select a model parameter to sweep, click on the numbered button next to the
parameter name. The start, stop, and step values for the sweep should be entered
in the fields provided.
The sweep types available are Linear, Log3, Log5, Log10, Log15 and Log20.
To perform the simulations, click on the Execute button. The simulation results can
be displayed in two or three dimensions. This feature is controlled by the 2D/3D
Graphic button.
For 3D display, the colors can be adjusted from the Shadowing screen. The
Shadowing screen is opened by clicking on the Shadowing button on the Spice
Model Development screen.

UTMOST

- 62 -

Detail introduction: Displaying Results Graphically

Rubberband
With rubberbanding, individual model parameters can be
adjusted, and the results are displayed immediately.
The Save Results button writes the modified parameter values to
the optimized column of the Parameters screen.
There are five simulation speeds available.

UTMOST

- 63 -

Detail introduction: Displaying Results Graphically

option
Calculator
The Calculator is available for performing simple calculations. In
some routines it can be programmed to modify measured data.

Emulator
The Emulator option opens the Emulator 4145 screen. This screen
emulates the function of the HP4145 instrument in its interactive
measurement mode.

UTMOST

- 64 -

Agenda for TFT modeling training

Model selection
Model layout design and manufacturing
Model IV/CV/Timing curves measurement
Model parameters extraction
Model parameters QA

UTMOST

- 65 -

SILVACO TFT Models Selection

Currently supports 4 TFT device models

Level=15 ( Leroux Amorphous Model )
Level=16 ( Berkeley Polysilicon Model)+Leakage current Model
Level=35 ( RPI Amorphous Model ) ( Version=1 & Version=2)
Level=36 ( RPI PolySilicon Model ) ( Version=1 & Version=2)
RPISCALE=1 SMART=0,1,2,3 Model

UTMOST

- 66 -

TFT Models

N+ a-Si

Passivation

Intrinsic a-Si

Source

Provides 4 models :

N+ a-Si

Drain

Leroux model (Amorphous Si, level 15)

RPI model (Amorphous Si, level 35)

Gate
Conducting channel

Gate insulator

Glass substrate

Gate
Drain

gate oxyde

Source

n+

poly-Si

Berkeley TFT model (Polysilicon, level 16)

RPI model (Polysilicon, level 36)

n+

SiO2 coating

quartz or glass substrate

UTMOST

- 67 -

SVA: 4PR TFT

PA-SiNx
DRAIN

ITO

n+ a-Si
SOURCE
a-Si

GATE

UTMOST

GLASS

- 68 -

G-SiNx

TFT Equivalent Circuit

UTMOST

- 69 -

Agenda for TFT modeling training

Model selection
Model layout design and manufacturing
Model IV/CV/Timing curves measurement
Model parameters extraction
Model parameters QA

UTMOST

- 70 -

TFT model layout design for DC/AC measurement

UTMOST

- 71 -

Agenda for TFT modeling training

Model selection
Model layout design and manufacturing
Model IV/CV/Timing curves measurement
Model parameters extraction
Model parameters QA

UTMOST

- 72 -

IV curve measurement
IDS/VGS( Drain current)
VGS sweep over a defined range@ a set of VDS
IDS/VDS
VDS sweep over a defined range @ a set of VGS

UTMOST

- 73 -

CV Measurement
CGDO( Gate to Drain Overlap Capacitance)
Gate to Drain Voltage sweep from big negative to big positive value. The
overlap typical value is 1200microns, capacitance typical value is 25 to
70 pf.

CGSO( Gate to Source Overlap Capacitance)

INTCAP
CGS ( Source: LCR H,DC ,Gate :LCR L, Drain/B DC)
CGD (Drain: LCR H, DC, Gate: LCR L, Source/B DC)
CGC (Drain/Source short, LCR L, Gate LCR H,B DC)
CGB (Drain/Source short DC, Gate LCR H, B: LCR L)
CGG (Drain/Source/B short, LCR L, Gate: LCR H)

UTMOST

- 74 -

Timing Domain measurement

Drain connect to VDD
Source connect to GND of Oscilloscope
Ultmost read the period of each VDD
Display the Tpd VS VDD

UTMOST

- 75 -

Agenda for TFT modeling training

Model selection
Model layout design and manufacturing
Model IV/CV/Timing curves measurement
Model parameters extraction
Model parameters QA

UTMOST

- 76 -

Device Characterization

Different Regimes of Operation

Above-Threshold

Sub-Threshold

-4

10u
Topmost curve: Vgs = 20 V; Step: -2.5 V

8u

-6
-8
-10

Vds = 10V

-12

6u

4u

2u

0u

-14
-30

-20

-10

10

20

30

Gate Voltage [Volts]

UTMOST

Saturation Region

Drain current [A]

Log[Drain Current (Amps)]

Leakage

- 77 -

10

20

Drain-source voltage [V]

Linear Region

30

Model parameter extraction

Select model type

Loading curves
Global extraction (auto)
Fine tune and optimization
Simulation
Check Error criteria
Iteration
Generate the model card

UTMOST

- 78 -

TFT model Routine

A typical parameter extraction sequence would proceed as follows:

Use the IDS/VGS routine to measure IDS vs. VGS curves measured at various
drain-source biases.
Local or Global Optimization strategies could be implemented in order to extract
threshold voltage, mobility, drain-induced barrier lowering, subthreshold, and gateinduced drain leakage parameters.
Use the IDS/VDS routine to measure IDS vs. VDS curves measured at various
gate-source biases.
Local or Global Optimization strategies could be implemented in order to extract
velocity saturation, channel length modulation and hot carrier parameters.
Use the CGDO and CGSO routines to extract gate-drain and gate-source overlap
capacitances and associated parameters.
Extract temperature parameters using Local or Global Optimization techniques
with IDS/VGS and IDS/BDS data measured at temperatures other than room
temperature.
Use the ton/toff or timering routines to extract TFT time domain parameters.

UTMOST

- 79 -

TFT DC modeling routine1: IDS/VDS

IDS/VDS (Drain Current Modeling Routine)
The IDS/VDS routine is used to verify TFT functionality and to measure TFT
drain current.
This measured data can be used to simulate and optimize TFT model
parameters related to velocity saturation and channel length modulation.

Data Acquisition
IDS vs. VDS@VGS (constant)
The number of VGS voltage steps is defined in the Routine Control screen
using the Measurement Sections field.
A TFT device is connected according to the SMU definitions, and the VDS
and VGS voltages defined.
Typically, TFT devices are used in the forward bias mode. When this is the
case, the VDS drain voltage is swept from 0V to the VDSmax. If the TFT
device is used in forward and reverse bias mode, then the VDS drain voltage
can be swept from -VDSmax to +VDSmax.

UTMOST

- 80 -

TFT DC modeling routine2: IDS/VGS

IDS/VGS
The IDS/VGS routine is used to verify TFT functionality and to
measure TFT drain current.
measured data can be used to simulate and optimize TFT model
parameters related to threshold voltage, mobility, subthreshold,
drain-induced barrier lowering and gate-induced drain leakage.

Data Acquisition
IDS vs VGS @ VDS (constant)
The number of VDS voltage steps is defined in the Routine
Control screen using the Measurement Sections text field.
The TFT is connected according to SMU definitions, and the VDS
and VGS voltages are defined.
Typically the TFT will be measured from weak-inversion to
strong-inversion with the gate bias being swept from a negative
to a positive voltage in the case of an n-type TFT device.
UTMOST

- 81 -

TFT DC modeling routine3: VTO

VTO (Threshold Voltage Extractions)
The threshold voltage extraction routine VTO measures a single
IDS/VGS curve and extracts model parameter VTO from the
largest slope of the curve.
This routine can be used for extracting temperature model
parameters if measurements are performed at a number of
different temperatures.

Data Acquisition

UTMOST

A data set is obtained as the drain current values for one gate
voltage sweep.
A TFT device is connected according to the SMU definitions, and
the gate voltage VGS is swept over a specified voltage range
while the drain voltage VDS is kept constant.
Threshold voltage measurement and extraction is typically
performed on a large TFT device (typically 25/25).
The model parameter VTO represents the threshold voltage
value at 0V of substrate bias
- 82 - and low value of drain voltage VDS.

TFT DC modeling routine4: LAMBDA

LAMBDA (Channel Length Modulation)
The channel length modulation routine LAMBDA measures a
single IDS/VDS curve for a constant gate voltage VGS.
From this single data set, model parameter LAMBDA is extracted.

Data Acquisition
A data set is obtained as the drain IDS current values for one
drain voltage VDS sweep, while the gate voltage VGS is kept
constant.
The VGS voltage value is typically way between VTO and 0V.
The model parameter LAMBDA models the channel length
modulation effects in a TFT device. Due to this effect, a TFT
device has a finite output conductance in the saturation region.

UTMOST

- 83 -

TFT DC modeling routine5: BVDO

BVDO (Drain to Source Breakdown Voltage Extraction)
The BVDO drain to source breakdown voltage routine measures the
voltage across the drain to source terminals, while the gate terminals is
shorted to ground and current is forced into the drain terminal.
The drain to source breakdown voltage occurs at the point where the
voltage across the terminals starts to increase rapidly. The breakdown
voltage parameter BVDO is extracted at a specified current I_to_fit.

Data Acquisition
The forcing drain current should always be swept logarithmically across a
specified current range while the drain to source voltage is measured.
The SHORT integration time option and the LOG10 logarithmic sweep
option are recommended in order to ensure minimum heat generation
inside the device during the measurements.
The breakdown voltage measurements are destructive if not handled
properly.
Set the current compliance properly and carefully to avoid device
destruction.
The value of BVDO is extracted at a given drain current I_to_fit. BVDO
can be extracted over temperature for process control purposes. No
SPICE parameter is extracted.
UTMOST

- 84 -

TFT DC modeling routine6: ALL_DC

ALL_DC (Multitarget TFT DC Modeling)
The ALL_DC routine is used to measure a set of IDS versus VGS and IDS
versus VDS curves for a number of TFT geometries.
These data sets can be used to extract the entire scalable set of model
parameters for any TFT model.
All of the measurement data is collected in one measurement sequence.
Current, conductance, or resistance can be selected for a measurement set
as an optimization target for up to 40 different TFT geometries.
ALL_DC measurement data is a suitable target for regular or local
optimization strategies.
If ALL_DC data is stored in a data log file, it can be used as a source of data
for the IDS/VDS and ID/VGS routines.
Data Acquisition
IDS vs VDS data set to be used for drain current IDS, output conductance gds,
or output resistance rds modeling is measured while VDS is swept over a
defined voltage range for a set of VGS values.
IDS vs VGS data set to be used for drain current IDS and transconductance
gm modeling is measured while VGS is swept over a wide voltage range (to
ensure that the device operates in the linear region) for a set of VDS values.
The output resistance rds, output conductance gds, and transconductance
gm are internally computed from the measured drain current IDS.
After this computation, the data for all four potential optimization targets (drain
current IDS, output resistance rds, output conductance gds, and
transconductance gm) becomes available for all measured geometries..)
UTMOST

- 85 -

TFT Capacitance Routines

CGDO Gate To Drain Overlap Capacitance
extracts the CGDO model parameter.
Data Acquisition
The gate to drain voltage is swept from a large negative value
(typically -5V) to a large positive value (typically +5V).
The overlap structure is rather long, typically 1200 microns. This
produces an accurate measured capacitance with a typical value of
25pF to 70 pF.
CGD=W*CGDO

Others is same as CGDO

UTMOST

- 86 -

TFT Time Domain Routines

ring_osc
The ring_osc routine reads oscillator period vs (tpd) data from an
oscilloscope, and displays the measured Tpd vs VDD data.

Data Acquisition
The user enters the VDD_start, VDD_step and #_of_steps for the
data collection.
Drain terminal should be connected to VDD, and Source terminal
should be connected to GND of the ring oscillator circuit.
The Output signal will be measured by the oscilloscope, and
UTMOST will read the "period" for each VDD step from the scope.
After the completion of all VDD steps, the Tpd vs VDD data will
be displayed.

UTMOST

- 87 -

Model Generation

Supports widest selection of commercially available device models

Generates models for SmartSpice, HSPICE, Spectre and ELDO
Offers fast buit-in SPICE simulation library (SmartLib)
External SPICE mode allows you to connect to any SPICE simulator
Supports the conversion of model parameter sets from one model to
another
Macro modeling and parameter extraction is available for devices
which cannot be adequately modeled by any existing device models
User-defined models linked dynamically
Support for SmartSpice interpreter models
Fast simulation using SmartLib Model and Fast internal solver

UTMOST

- 88 -

Agenda for TFT modeling training

Model selection
Model layout design and manufacturing
Model IV/CV/Timing curves measurement
Model parameters extraction
Model parameters QA

UTMOST

- 89 -

Model QA

Check model curve RMS and Max Error

Check model parameters boundary, if any violation Physics
Check the model continuity and quadratic differential
Check Convergence
Check Spice compatibility
Check Temperature Stability
Check voltage stability
Check geometry stability

UTMOST

- 90 -

SILVACO TFT Models

SmartSpice currently supports 4 TFT device models

Level=15 ( Leroux Amorphous Model )
Level=16 ( Berkeley Polysilicon Model)+Leakage current Model
Level=35 ( RPI Amorphous Model ) ( Version=1 & Version=2)
Level=36 ( RPI PolySilicon Model ) ( Version=1 & Version=2)
RPISCALE=1 SMART=0,1,2,3 Model

UTMOST

- 91 -

SILVACO TFT Models

Common Geometry and Bulk diode Model Parameters (ACM)

ACM=0 : Berkeley SPICE models ( pn bulk junctions and source (drain) resistors.
ACM=1 : ASPEC Model, Improved pn junction models ( high and low doping regions )
ACM=2 : Physical model, ( high and low doping regions device and is suitable for LDD
devices )
ACM=3 : ACM=2 extension ( shared source and drain MOSFET geometry )
MOS Geometry Model parameters

UTMOST

Parameter

Description

ACM

Area Calculation Method

Units

DEL

Channel length reduction (Level 1, 2, 3, and 6 only )

Default
0

XJ

Metallurgical junction depth

0.15e-6

LD(DLAT,LATD)

Lateral diffusion into channel from source and drain

0.75*XJ

WD

Lateral diffusion into channel from bulk

LDIF

Lateral diffusion beyond the gate

HDIF

Heavily doped diffusion length.

XL(LDEL)

Masking and etching effects on L

XW(WDEL)

Masking and etching effects on W

DL(DL0)

Channel length reduction ( Level 4, 5, and BSIM3 modu le only)

um

DW(DW0)

Channel width reduction ( Level 4, 5, and BSIM3 modu le only)

um

GEO

Source/drain geometry selector

- 92 -

SILVACO TFT Models

Drain/Source resistance model parameters

Parameter

Description

Default

Drain contact resistance

Units
Ohm(ACM=0)
Ohm/sq (ACM =1,2,3)
Ohm(ACM=0)
Ohm/sq (ACM =1,2,3)
Ohm

RD

Drain ohmic resistance

RS

Source ohmic resistance

RDC
RSC

Source contact resistance

Ohm

RSH

Drain, source diffusion sheet resistance

Ohm/sq

0
0
0

Capac itance mo del pa rame ters

UTMOST

Parame ter

Descr iption

Units

Default

CGDO

Drain O verlap Capac itance factor

F/m

CGSO

Drain O verlap Capac itance factor

F/m

- 93 -

SILVACO TFT Models

Drain/Source res istance model parameters

Parameter

Description

Default

Drain contact resistance

Units
Ohm(ACM=0)
Ohm/sq (ACM =1,2,3)
Ohm(ACM=0)
Ohm/sq (ACM =1,2,3)
Ohm

RD

Drain ohmic resistance

RS

Source ohmic resistance

RDC
RSC

Source contact resistance

Ohm

RSH

Drain, source diffusion sheet resistance

Ohm/sq

0
0
0

Self Heating Thermal Model Parame ters

Parameter
SHMOD
(SELFT)
RTH0
CTH0

UTMOST

Description

Units

Self-Heating Selector
Thermal Resistance
Thermal Capacitance

- 94 -

Default
0

C/W
W.s/C

0
0

SILVACO TFT Models

MOSFET
MOSFET models
models levels
levels 4,
4, 5,
5, 7,
7, 10,
10, and
and 69
69
Leff=L*SCALE*LMLT-2LD
(
if
DL
is
not
Leff=L*SCALE*LMLT-2LD ( if DL is not define)
define)
if
DL
is
not
specified,
if DL is not specified,
Leff=L*SCALE*LMLT+Xl*SCALM
Leff=L*SCALE*LMLT+Xl*SCALM -2LD*SCALE
-2LD*SCALE
if
DW
is
define,
if DW is define,
Weff=W*SCALE*WMLT-WD,
Weff=W*SCALE*WMLT-WD, Weff*=Weff.
Weff*=Weff.
If
DW
is
not
specified,
If DW is not specified,
Weff=W*SCALE*WMLT+XW*SCALM-2WD*SCALM
Weff=W*SCALE*WMLT+XW*SCALM-2WD*SCALM
Weff*=W*SCALE*WMLT+XW*SCALE
Weff*=W*SCALE*WMLT+XW*SCALE

MOSFET
MOSFET models
models levels
levels 1,
1, 2,
2, 3,
3, 6,
6, and
and 99
Leff=L*SCALE*LMLT+XL*SCALM
Leff=L*SCALE*LMLT+XL*SCALM
-2(LD+DEL)*SCALE
-2(LD+DEL)*SCALE
Weff=W*SCALE*WMLT*XW*SCALM
Weff=W*SCALE*WMLT*XW*SCALM
-2*WD*SCALM
-2*WD*SCALM
Weff*=W*SCALE*WMLT+XW*SCALM
Weff*=W*SCALE*WMLT+XW*SCALM
(( for
for overlap
overlap cap
cap calculation
calculation ))

UTMOST

- 95 -

SILVACO TFT Models

MOS diode Model for ACM=2 and ACM=3

ACM=3
ACM=3
GEO
GEO == 00 :: No
No sharing
sharing
GEO
GEO == 11 :: Drain
Drain is
is shared
shared with
with other
other devices
devices
GEO
=
2
:
Source
is
shared
with
other
GEO = 2 : Source is shared with other devices
devices
GEO
GEO == 33 :: Both
Both drain
drain and
and source
source are
are shared
shared
with
with other
other devices
devices
default
is
GEO
=
0
default is GEO = 0
IfIf PD
PD is
is unspecified
unspecified (ACM=2,
(ACM=2, ACM=3(GEO=0,2))
ACM=3(GEO=0,2))
PDeff=(4*HDIF*SCALE*WMLT*2(Weff*))*M
PDeff=(4*HDIF*SCALE*WMLT*2(Weff*))*M
PDeff=2*HDIF*SCLM*WMLT*(Weff*)*M
PDeff=2*HDIF*SCLM*WMLT*(Weff*)*M

IfIf AD
AD is
is unspecified
unspecified (ACM=2,
(ACM=2, ACM=3(GEO=0,2))
ACM=3(GEO=0,2))
ADeff=(2*HDIF*SCALE*WMLT*(Weff*))*M
ADeff=(2*HDIF*SCALE*WMLT*(Weff*))*M
IfIf ACM=2
ACM=2 or
or ACM
ACM =3
=3 and
and GEO=1,
GEO=1, 33
ADeff=(HDIF*SCALM*WMLT*(Weff*))*M
ADeff=(HDIF*SCALM*WMLT*(Weff*))*M
else
else
ADeff=(AD*SCALE^2*WMLT^2)*M
ADeff=(AD*SCALE^2*WMLT^2)*M

IfIf ACM
ACM =3
=3 and
and GEO=1,
GEO=1, 33
PDeff=(2HDIF*WMLT+(Weff*))*M
PDeff=(2HDIF*WMLT+(Weff*))*M
else
else PDeff=(PD*SCALE*WMLT)*M
PDeff=(PD*SCALE*WMLT)*M

IfIf AS
AS is
is unspecified
unspecified (( ACM=2,
ACM=2, or
or ACM=3
ACM=3 (GEO=0,1))
(GEO=0,1))
ASeff=(2*HDIF*SCALM*WMLT*(Weff*))*M
ASeff=(2*HDIF*SCALM*WMLT*(Weff*))*M
ifif ACM=3,
ACM=3, and
and GEO=2,3
GEO=2,3
ASeff=(HDIF*SCALM*WMLT*(Weff*))*M
ASeff=(HDIF*SCALM*WMLT*(Weff*))*M
else
else
ASeff=(AS*SCALM^2*WMLT^2)*M
ASeff=(AS*SCALM^2*WMLT^2)*M
UTMOST

IfIf PS
PS is
is unspecified
unspecified (( ACM=2,
ACM=2, or
or ACM=3
ACM=3 (GEO=0,1))
(GEO=0,1))
PSeff=(4*HDIF*SCALM*WMLT+2(Weff*))*M
PSeff=(4*HDIF*SCALM*WMLT+2(Weff*))*M
ifif ACM=3,
ACM=3, and
and GEO=2,3
GEO=2,3
PSeff=(2HDIF*SCALM*WMLT+(Weff*))*M
PSeff=(2HDIF*SCALM*WMLT+(Weff*))*M
else
else PSeff=(PS*SCALM*WMLT)*M
PSeff=(PS*SCALM*WMLT)*M

- 96 -

SILVACO TFT Models

IfIf NRS
NRS is
is specified,
specified,
( LD LDIF ) SCALM
* RS
Weff *
RSeff !
M

NRS * RSH

RSC )

else,
else,
( HDIF * SCALM * RSH
RSeff ! RSC

( LD LDIF ) * SCALM * RS
Weff *
M

IfIf NRD
NRD is
is specified,
specified,
( LD LDIF ) SCALM
* RS
Weff *
RDeff !
M

NRD * RSH

RDC )

else,
else,
( HDIF * SCALM * RSH
RDeff ! RDC

UTMOST

- 97 -

( LD LDIF ) * SCALM * RD
Weff *
M