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Course Overview
Course Mechanics
Lectures: Tuesday, Thursday 2:10-3:30
203 McLaughlin Hall (205 McLaughlin for overflow)
Webcast at webcast.berkeley.edu
Homework: weekly assignments distributed on
Thursdays and due the following Thursday at 5 pm in
the EE C245 box near 275 Cory Hall
Exam: Wednesday, October 15, 6:30-8:00 pm
Sibley Auditorium, Bechtel Engineering Center
Term Project: one-page proposal due October 23
six-page paper due December 8, with
poster presentation (dates/rooms TBA)
EE C245 ME C218 Fall 2003 Lecture 1
Lecture Outline
Reading Senturia: Chapter 1
Todays Lecture
qMEMS defined
qHistorical tour of MEMS
qMEMS and nanotechnology
EE C245 ME C218 Fall 2003 Lecture 1
MEMS Defined
Micro Electro Mechanical Systems
Batch fabrication
(e.g., IC technology)
Energy conversion:
electrical to and from
non-electrical
Ultimate goal:
solutions to real problems,
not just devices
Dimensional Ranges
1 m < L < 300 m lateral dimensions
Surface micromachined structures classic MEMS
10 nm < L < 1 m
Nano electromechanical systems NEMS
(overlap with MEMS some coverage in this course)
It runs!
Cost?
http://www.globaldenso.com/ABOUT/history/ep_91.html
Fabrication process: micro electro-discharge machining
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Vision device
Welding device
Monitoring device
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12
Moores Law
Performance
1.0E+15
1.0E+14
1.0E+13
1.0E+12
d P
Lea
s)
ear
1.5y
/
x
2
pe (
Slo
300x
Original form:
transistor density
doubles every year
since 1962
1.0E+11
d = (Y 1962)2
1.0E+10
1.0E+09
1.0E+08
1985
1990
1995
2000
2005
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Microassembly Processes
Parallel Pick-and-Place
Parallel assembly processes promise
inexpensive, high-volume heterogeneous integration of MEMS,
CMOS, and photonics
www.memspi.com, Chris Keller, Ph.D. MSE 1998
Wafer-Level
Batch
Assembly
Fluidic Self-assembly
Many challenges:
> interconnect
> glue
www.microassembly.com
Michael Cohn, Ph.D. EECS, 1997
http://www.zyvex.com/nanotech/feynman.html
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2. Planar IC Technology
1958 Robert Noyce Fairchild and Jack Kilby (Nobel Prize, Physics,
2000) -Texas Instruments invent the integrated circuit
By the early 1960s, it was generally recognized that this was the way
to make electronics small and cheaper
Harvey Nathanson
and William Newell,
surface-micromachined
resonant gate transistor,
Westinghouse, 1965
Did Harvey hear about
Richard Feynmans talk in
1959? I dont think so
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10
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Polysilicon Microstructures
UC Berkeley 1981-82
R. T. Howe and
R. S. Muller,
ECS Spring Mtg.,
May 1982
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11
R. T. Howe and
R. S. Muller,
IEEE IEDM,
San Francisco,
December 1984
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24
12
C. Nguyen and
R. T. Howe,
IEEE IEDM,
Washington, D.C.,
December 1993
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ADXL-05 (1995)
Courtesy of Kevin Chau,
Micromachined Products
Division, Cambridge
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13
M. S. Rodgers
and J. Sniegowski,
Transducers 99
(Sandia Natl. Labs)
EE C245 ME C218 Fall 2003 Lecture 1
27
Self-Assembly Processes
Alien Technologies, Gilroy, Calif.
chemically micromachined
nanoblock silicon CMOS
chiplets fall into minimum energy
sites on substrate
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14
29
30
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31
SOI
Sense
electrode
Interconnect parasitic
elements are critical
need nearby electronics
Uses vertical channel
FINFET
process on SOI substrate
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33
500 nm
EE C245 ME C218 Fall 2003 Lecture 1
34
17
Si/SiGe superlattice
nanowires
SiC nanowires
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Inlet
Nanogap Electrodes
Electrodes
Nanogap
Junction
Poly Si (I)
Poly Si (II)
Nanofluidic
Network for
DNA Trapping
Outlet
DNA
Nanogap
(5 to 50 nm)
Insulator
Si3N4
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(a)
Poly-Si (I)
Poly-Si (II)
Poly-Si (I)
Poly-Si (II)
(b)
SiN
Poly-Si (I)
Poly-Si (II)
Luke Lee and Dorian Liepmann, BioEng.
Jeff Bokor, EECS
37
Opportunities in Blurring
the MEMS/NEMS Boundary
Aggressive exploitation of extensions of top-down
planar lithographic processes
Synthetic techniques create new materials and
structures (nanowires, CNT bearings)
Self-assembly concepts will play a large role in
combining the top-down and bottom-up technologies
Application: mainstream information technology with
power consumption being the driver
Beyond CMOS really, extensions to CMOS > 2015
Non-volatile memories
Communications
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