Documenti di Didattica
Documenti di Professioni
Documenti di Cultura
Institute of Thermomechanics AS CR, v.v.i., Dolejskova 5, Prague 182 00, Czech Republic
Institute of Physics AS CR, v.v.i., Na Slovance 2, Prague 182 21, Czech Republic
c
Institute of Physics, Academia Sinica, Taipei 11529, Taiwan
d
University of Washington, Department of Mechanical Engineering, Seattle, WA 98006, USA
b
art ic l e i nf o
a b s t r a c t
Article history:
Received 15 August 2012
Received in revised form
27 February 2013
Accepted 26 March 2013
Available online 11 April 2013
Atomic force microscopes, micro-/nano-mechanical resonators and nanowires or carbon nanotube can
detect even a small change of properties of uids and therefore they are often considered to be the
prospective ultrasensitive micro/nano viscometers. However, due to the complicated physics behind such
devices, the interpretation of experimental data including the viscosity extraction is mostly performed
based on some approximations or data ttings. In this paper, the complete analysis of the vibrating
cylindrical micro-/nano-cantilever submerged in a viscous uid is presented. Based on the obtained
results a simple way of the viscosity extraction from the maximum vibrational amplitude (MVA),
the bandwidth and the resonance frequency shift, is proposed. The simple formulas for the achievable
accuracy of the viscosity sensing are given. These results can be used in future development of the
ultrasensitive micro/nano viscometers integrated on micro systems or ow meters.
& 2013 Elsevier Ltd. All rights reserved.
Keywords:
Dimensionless analysis
Microcantilever
Nanowire
Resonance
Viscometer
Viscosity extraction
Microviscometer
Atomic force microscopy
1. Introduction
Micro-/nano-mechanical resonators are widely used to characterize the mechanical properties of polymer membranes and
thin lms [13] or to detect biomolecules and nanoparticle masses
[47]. They are also employed either to study the viscoelastic
behavior of polymers or to determine the uid density and
viscosity [813]. The determination of the uid viscosity is crucial
for a design of the microelectromechanical systems (MEMS) used
in chemistry, biology or medical science [1420].
Frequency spectrum of the resonators is strongly affected by a
surrounding uid. Namely, the viscous drag, and consequently, the
density and the viscosity of uid results in the resonant frequency
shift, decrease of the MVA and the bandwidth broadening. Despite
the fact that the experiments can be usually easily performed,
the physical interpretation of the obtained data remains quite
complicated problem and is still under investigations [2128].
A rigorous theoretical model that describes the vibration of an
arbitrary shape of the resonator submerged in incompressible
n
Correspondence to: Institute of Physics, Academia Sinica, Taipei 11529,
Taiwan. Tel.: +886 911719112.
E-mail addresses: stachiv@phys.sinica.edu.tw, stachiv@fzu.cz (I. Stachiv).
1
Permanent address: S.S. Kutateladze Institute of Thermophysics, Siberian
Branch, Russian Academy of Sciences, 1 Acad. Lavrentyev Ave., 630090 Novosibirsk,
Russia.
0955-5986/$ - see front matter & 2013 Elsevier Ltd. All rights reserved.
http://dx.doi.org/10.1016/j.owmeasinst.2013.03.003
uid has been already developed [22,23]. This model utilizing the
computations of so-called master or hydrodynamic functions;
however, requires a lot of computational work, knowledge of the
resonator geometry and it do not provide any recipe for the
viscosity extraction from data. Thus the one is employed in design
of atomic force microscopy (AFM) cantilevers.
The purpose of this paper is to present a versatile and straightforward approach for solution of the problem and based on the results
to propose a simple way of the viscosity extraction. The method of
the solution along with a recipe for the viscosity extraction from the
data is going to be performed on the micro-/nano-cantilever with a
circular cross sectional area such as carbon nanotubes or nanowires.
In this case a close form of the solution can be found without
applying any special simplication or approximations [29]. For other
resonator shapes only the viscous drag and the added mass coefcients in model have to be replaced. Moreover, it could be expected
that the results obtained for a cylindrical cantilever would qualitatively agree with the ones of the different shapes [30] and thus the
recipes for the extraction of the data should be similar to those
derived for a circular resonators.
2. Mathematical model
The following analysis is applicable to the cylindrical micro-/
nano-cantilever. The governing equation for transverse vibrations
where A+S A is the density of the beam per unit length with
due account of the added mass [30], , A are the density and cross
section area of the beam, Cf (4 f D2S S)1/2 is the damping
coefcient [29], f is the frequency of the piezotransducer, EI is the
bending stiffness of the cantilever S and S are the density and
viscosity of liquid, respectively.
The one end of the cantilever is xed on the piezotransducer
(X 0) and set into a periodical motion: U(0, T)U0 sin (2fT),
while the other one is free (X L) [13]. The sketch of the
considered device conguration is shown in Fig. 1.
Introducing the dimensionless variables: x X/L, u U/U0 and
Tf0, where f0 C/(4L) and C (E/)0.5, Eq. (1) can be written in
the following dimensionless form:
u 2u 2 uxxxx 0;
where 2 2L(1+)0.5/D
To close the statement of the problem the following boundary
and initial conditions are imposed:
u0; t sin pt; ux 0; t 0; p 8f L2 1 0:5 =CD
uxx 1; t uxxx 1; t 0
ux; 0 ut x; 0 0
85
function u(x, t) v(x, t)+sin pt, the problem given by Eqs. (3)(6) is
reduced to the following heterogeneous problem with homogeneous boundary conditions:
vtt 2dvt vxxxx Bsinpt; B pp2 42 0:5 ; tan 2=p;
v0; t vx 0; t 0
vxx 1; t vxxx 1; t 0
vx; 0 0; vt x; 0 p
10
11
X0 X0
X1
X1
0:
12
13
14
15
Expanding the source term Bsin (pt) into a series over the
eigenfunctions Xn(x) given by Eq. (14) yields
f x; tB sinpt f n tX n x;
16
n1
with coefcients
f n t g n sinpt; g n 2Bqn ;
17
2
18
vn 0 0; vn 0 hn ; hn 2pqn :
19
20
where
r n Y n Y nn 1=2 g n = 4n p2 2 2p2 1=2
21
and
Fig. 1. Sketch of the considered device for solution of the problem.
n Arctan2p= 4n p2 ; if 4n p2 4 0
22
86
Table 1
Damping (2) and bending stiffness () coefcients for cylindrical cantilevers beams of constant length of L 500 m and different diameters of D 20 m, 10 m and 5 m at
low viscosity (DI water: S 998.2 kg/m3, S 1.002 103 Pa s) and high viscosity (glycerol: S 1261.1 kg/m3, S 1.5 Pa s) liquids. The presented values are calculated for
cantilevers made from silicon ( 2330 kg/m3, E 185 GPa) and glass (optical ber probe) ( 2200 kg/m3, E 68 GPa). The frequency of the piezotransducer is f 50 kHz.
Diameter
(m)
Material
Damping coefcient 2, DI
water
Damping coefcient 2,
glycerol
20
Silicon/
Fiber
Silicon/
Fiber
Silicon/
Fiber
0.011/0.018
0.033/0.033
0.431/0.717
0.032/0.032
0.021/0.036
0.017/0.017
0.862/1.433
0.016/0.016
0.043/0.071
1.724/2.867
10
5
or
n Arctan2p= 4n p2 ; if 4n p2 o 0:
23
Then,
vnp t ImY n eipt r n sinptn ; n n :
24
up x; t vnp tX n x sinpt
25
n1
ux; t An x sinptn
26
n1
where
(
An x
r 2n X 2n x 2r n X n xcosn 1;
n1
r 2n X 2n x 2r n X n xcosn ;
n2
27
Fig. 2. The comparison of the rst vibrational amplitudes of the frequency response of
the microcantilever vibrating in air with the one submerged in DI water.
biquadratic equation
2X 1 xq1 1p4 4X 1 xq1 2 22 2 41 2X 1 xq1 1 4 p2
81 6 41 2 6X 1 xq1 41 2 0:
28
Solving Eq. (28) and leaving only the real and positive root,
pmax1 reads
pmax 1 21 10:782 = 41 ; f or x 1:
29
pmax 1 w1 10:78d =4 2 :
30
87
Table 2
Comparison of the rst natural frequency (fn1) of the microcantilever beam
submerged in different uids with the resonance frequencies by analytical (fa1)
[Eq. (27)] and approximate [Eq. (30)] (fmax1 pmax1/(2)).
Liquid
fn1
fa1
fmax1
DI water
9% GWS
18% GWS
32% GWS
40% GWS
48% GWS
56% GWS
64% GWS
72% GWS
0.55959
0.55959
0.55959
0.55959
0.55959
0.55959
0.55959
0.55959
0.55959
0.55811
0.55776
0.55719
0.55571
0.55407
0.55135
0.54681
0.53865
0.51771
0.55809
0.55769
0.55710
0.55550
0.55388
0.55109
0.54646
0.53823
0.51769
Fig. 4. The linear relationship between the bandwidth (y) and (SS)0.5.
Following the approach of Fedorchenko et al. [31] and performing computations in a wide range of viscosities (from DI water to
72% GWS), the relationship between both the MVA and the
bandwidth, and the viscosity can be found.
The viscous coefcient in proposed model is the same as the
one in [31], therefore the generalization of the results should be
again function of (S S)1/2. Indeed, the bandwidth is a linear
function of (S S)1/2 (see Fig. 4), while the MVA is a power function
of (S S)1/2 (see Fig. 5).
From a dimensionless analysis very important information can
be retrieved; namely the change of length or diameter of the
microcantilever causes only the change of the absolute value of the
damping and, consequently, for bandwidth only the slope of
linear function varies and for the MVA only the shape of a power
function would be different.
For a real practical application it is necessary to estimate the
achievable accuracy of the viscosity sensing. Hence the general
formulas for an achievable accuracy of the viscosity sensing S
through the instrumental (sensing) error y of the bandwidth and
the amplitude measurement should be derived.
The linear relationship between the bandwidth and viscosity is
given as:
y a1 S S 1=2 b1
31
y
2yb1 7y
S a21
32
where sign plus (minus) stands for upper (lower) limit of the
instrumental (sensing) error.
Similarly the relationship between the MVA and viscosity can
be written as:
y a2 S S b2 =2
33
1
7
1
34
S 7
y
S a2=b2
where signs plus (minus) stand for upper (lower) limit of the
instrumental (sensing) error.
88
Table 3
Theoretically achievable accuracy of the viscosity sensing for the bandwidth
according to Eq. (32) for different instrumental errors in low-viscosity and highviscosity liquids. The instrumental errors are 100/200 Hz.
Accuracy of the bandwidth measurement, S (%), DI
Hz
Water
S (%), 72%
GWS
7100
7200
0.220/0.220
0.441/0.441
1.264/1.254
2.537/2.507
Table 4
Theoretically achievable accuracy of the viscosity sensing for the MVA according to
Eq. (34) for different instrumental errors in low-viscosity and high-viscosity liquids.
The instrumental errors are 0.1/0.2.
Accuracy of the MVA measurement
S (%), DI water
70.1
70.2
1.562/1.602
3.085/3.244
7.812/8.829
14.755/18.860
4. Conclusions
This paper presents a complete theoretical analysis of the
viscometer utilizing the vibrating cylindrical micro-/nano-cantilever
submerged in a uid. Based on the solution of model, the impact of
viscosity, density and cantilever size on the resonance frequency
shift has been elucidated. The explicit formulas of the viscosity
extraction from the resonance frequency shift, the MVA and the
bandwidth have been derived. In case of cantilever with a simple
cross section such as cone, rectangle, square or triangle only the
viscous drag and the added mass coefcient must be recalculated
but the results should qualitatively agree with the ones obtained for
cylindrical resonator. These ndings can be used in experiments for
real-time molecule detection in various liquid solutions or in design
of the micro-/nanoviscometers.
Acknowledgments
This research has been supported by the Ministry of Education,
Youth and Sport of the Czech Republic, LH-KONTAKT II, project
LH12042 and by the institutional support RVO: 61388998.
References
[1] Huang L, Chen J, Cao T, Cong H, Cao W. Investigation of microtribological
properties of C60containing polymer thin lms by using AFM/FFM. Wear
2003;255:82631.
[2] Bistac S, Schmitt M, Ghorbal A, Gnecco E, Meyer E. Nano-scale friction of
polystyrene in air and in vacuum. Polymer 2008;49:37804.
[3] Kim S, Lee D, Yun M, Jeon S, Thundat T. Multi-modal characterization of
nanogram amounts of a photosensitive polymer. Applied Physics Letters
2013;102:024103-14.
[4] Hansen KM, Thundat T. Microcantilever biosensors. Methods 2005;37:5764.
[5] Lang HP, Hegner M, Gerber C. Cantilever array sensors. Materials Today
2005:306.
[6] Dohn S, Hansen O, Boisen A. Cantilever based mass sensor with hard contact
readout. Applied Physics Letters 2006;88:264104-13.
[7] Stachiv I, Fedorchenko AI, Chen Y-L. Mass detection by means of the vibrating
nanomechanical resonators. Applied Physics Letters 2012;100:093110-13.
[8] Shih WY, Li X, Gu H, Shih W-H, Aksay IA. Simultaneous liquid viscosity and
density determination with piezoelectric unimorph cantilevers. Journal of
Applied Physics 2001;89(2):1497505.
[9] Papi M, Arcovito G, De Spirito M, Vassalli M, Tiribilli B. Fluid viscosity
determination by means of uncalibrated atomic force microscopy cantilevers.
Applied Physics Letters 2006;88:194102-13.
[10] Ghatkesar MK, Rakhmatullina E, Lang HP, Gerber Ch, Hegner M, Braun T.
Multi-parameter microcantilever sensor for comprehensive characterization
of Newtonian uids. Sensors and Actuators B: Chemical 2008;135:1338.
[11] McLoughlin N, Lee SL, Hhner G. Simultaneous determination of density and
viscosity of liquids based on resonance curves of uncalibrated microcantilevers. Applied Physics Letters 2006;89:184102-13.
[12] Papi M, Maulucci G, Arcovito G, Paoletti P, Vassalli M, De Spirito M. Detection
of microviscosity by using uncalibrated atomic force microscopy. Applied
Physics Letters 2008;93:124102-13.
[13] Ghatkesar MK, Braun T, Barwich W, Ramseyer J-P, Gerber Ch, Hegner M, Lang
HP. Resonating modes of vibrating microcantilevers in liquid. Applied Physics
Letters 2008;92:043106-13.
[14] Baskurt OK, Meiselman HJ. Blood Rheology and hemodynamics. Seminars in
Thrombosis and Hemostasis 2003;29:43550.
[15] Merrill EW, Gilliland ER, Cokelet G, Shin H, Britten A, Wells Jr. RE. Rheology of
human blood, near and at zero ow. Biophysical Journal 1963;3:199213.
[16] Brau RR, Ferrer JM, Lee H, Castro CE, Tam BK, Tarsa PB, Matsudaira P, Boyce
MC, Kamm RD, Lang MJ. Passive and active microrheology with optical
tweezers. Journal of Optics A: Pure and Applied Optics 2007;9:S10312.
[17] Guzman C, Flyvbjerg H, Kszali R, Ecoffet C, Forr L, Jeney S. In situ viscometry
by optical trapping interferometry. Applied Physics Letters 2008;93:1841021184102-3.
[18] Kolmakov A, Zhang Y, Cheng G, Moskovits M. Detection of CO and O2 using tin
oxide nanowire sensors. Advanced Materials 2003;15:9971000.
[19] Fisher LM, Wright VA, Guthy C, Yang N, McDermott MT, Buriak JM, Evoy S.
Specic detection of proteins using nanomechanical resonators. Sensors &
Actuators, B: Chemical 2008;134:6136.
[20] Eom K, Park HS, Yoon DS, Kwon T. Nanomechanical resonators and their
applications in biological/chemical detection: nanomechanics principle. Physics Report 2011;503:11563.
[21] Sader JE, White L. Theoretical analysis of the static deection of
plates for atomic force microscope applications. Journal of Applied Physics
1993;74:19.
[22] Elmer FJ, Dreier M. Eigenfrequencies of a rectangular atomic force microscope
cantilever in a medium. Journal of Applied Physics 1997;81:770914.
[23] Sader JE. Frequency response of cantilever beam immersed in viscous uids
with applications to the atomic force microscope. Journal of Applied Physics
1998;84:6476.
[24] Chon JWM, Mulvaney P, Sader JE. Experimental validation of theoretical
models for the frequency response of atomic force microscope cantilever
beams immersed in uids. Journal of Applied Physics 2000;87:397889.
[25] Van Eysden CA, Sader JE. Resonance frequencies of a rectangular
cantilever beams immersed in uid. Journal of Applied Physics 2006;100:
114916-1114916-8.
[26] Basak S, Raman A, Garimella SV. Hydrodynamic loading of microcantilevers
vibrating in viscous uids. Journal of Applied Physics 2006;99:114906-110.
[27] Van Eysden CA, Sader JE. Frequency response of cantilever beams immersed in
viscous uids with application to the atomic force microscope: arbitrary mode
order. Journal of Applied Physics 2007;101:044908-1044908-11.
[28] Robb-Smith TJ, Donovan KJ, Scott K, Somerson M. Induced electro-optic effects
on the single-walled carbon nanotubes. II. Hydrodynamics of nanotubes in
viscous media. Physical Review B 2011;83:155415-17.
[29] Landau LD, Lifshitz EM. Fluid mechanics. Oxford, England: Pergamon Press;
1987.
89
[33] Fedorchenko AI, Stachiv I, Ho J, Wang A-B, Wang W-C. On forced vibrations of
the partially immersed ber in uid. Sensors and Actuators B: Physical
2008;147:498503.
[34] Mandelshtam LI. Lectures on the theory of oscillations. Moskow: Nauka; 1972.
[35] Lide DR, editor. CRC handbook of chemistry and physics. 90th Edition.
New York: CRC Press; 2009.