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Flow Measurement and Instrumentation 32 (2013) 8489

Contents lists available at SciVerse ScienceDirect

Flow Measurement and Instrumentation


journal homepage: www.elsevier.com/locate/flowmeasinst

Method of the viscosity measurement by means of the vibrating


micro-/nano-mechanical resonators
Alexander I. Fedorchenko a,1, Ivo Stachiv a,b,c,n, Wei-Chih Wang d
a

Institute of Thermomechanics AS CR, v.v.i., Dolejskova 5, Prague 182 00, Czech Republic
Institute of Physics AS CR, v.v.i., Na Slovance 2, Prague 182 21, Czech Republic
c
Institute of Physics, Academia Sinica, Taipei 11529, Taiwan
d
University of Washington, Department of Mechanical Engineering, Seattle, WA 98006, USA
b

art ic l e i nf o

a b s t r a c t

Article history:
Received 15 August 2012
Received in revised form
27 February 2013
Accepted 26 March 2013
Available online 11 April 2013

Atomic force microscopes, micro-/nano-mechanical resonators and nanowires or carbon nanotube can
detect even a small change of properties of uids and therefore they are often considered to be the
prospective ultrasensitive micro/nano viscometers. However, due to the complicated physics behind such
devices, the interpretation of experimental data including the viscosity extraction is mostly performed
based on some approximations or data ttings. In this paper, the complete analysis of the vibrating
cylindrical micro-/nano-cantilever submerged in a viscous uid is presented. Based on the obtained
results a simple way of the viscosity extraction from the maximum vibrational amplitude (MVA),
the bandwidth and the resonance frequency shift, is proposed. The simple formulas for the achievable
accuracy of the viscosity sensing are given. These results can be used in future development of the
ultrasensitive micro/nano viscometers integrated on micro systems or ow meters.
& 2013 Elsevier Ltd. All rights reserved.

Keywords:
Dimensionless analysis
Microcantilever
Nanowire
Resonance
Viscometer
Viscosity extraction
Microviscometer
Atomic force microscopy

1. Introduction
Micro-/nano-mechanical resonators are widely used to characterize the mechanical properties of polymer membranes and
thin lms [13] or to detect biomolecules and nanoparticle masses
[47]. They are also employed either to study the viscoelastic
behavior of polymers or to determine the uid density and
viscosity [813]. The determination of the uid viscosity is crucial
for a design of the microelectromechanical systems (MEMS) used
in chemistry, biology or medical science [1420].
Frequency spectrum of the resonators is strongly affected by a
surrounding uid. Namely, the viscous drag, and consequently, the
density and the viscosity of uid results in the resonant frequency
shift, decrease of the MVA and the bandwidth broadening. Despite
the fact that the experiments can be usually easily performed,
the physical interpretation of the obtained data remains quite
complicated problem and is still under investigations [2128].
A rigorous theoretical model that describes the vibration of an
arbitrary shape of the resonator submerged in incompressible

n
Correspondence to: Institute of Physics, Academia Sinica, Taipei 11529,
Taiwan. Tel.: +886 911719112.
E-mail addresses: stachiv@phys.sinica.edu.tw, stachiv@fzu.cz (I. Stachiv).
1
Permanent address: S.S. Kutateladze Institute of Thermophysics, Siberian
Branch, Russian Academy of Sciences, 1 Acad. Lavrentyev Ave., 630090 Novosibirsk,
Russia.

0955-5986/$ - see front matter & 2013 Elsevier Ltd. All rights reserved.
http://dx.doi.org/10.1016/j.owmeasinst.2013.03.003

uid has been already developed [22,23]. This model utilizing the
computations of so-called master or hydrodynamic functions;
however, requires a lot of computational work, knowledge of the
resonator geometry and it do not provide any recipe for the
viscosity extraction from data. Thus the one is employed in design
of atomic force microscopy (AFM) cantilevers.
The purpose of this paper is to present a versatile and straightforward approach for solution of the problem and based on the results
to propose a simple way of the viscosity extraction. The method of
the solution along with a recipe for the viscosity extraction from the
data is going to be performed on the micro-/nano-cantilever with a
circular cross sectional area such as carbon nanotubes or nanowires.
In this case a close form of the solution can be found without
applying any special simplication or approximations [29]. For other
resonator shapes only the viscous drag and the added mass coefcients in model have to be replaced. Moreover, it could be expected
that the results obtained for a cylindrical cantilever would qualitatively agree with the ones of the different shapes [30] and thus the
recipes for the extraction of the data should be similar to those
derived for a circular resonators.

2. Mathematical model
The following analysis is applicable to the cylindrical micro-/
nano-cantilever. The governing equation for transverse vibrations

A.I. Fedorchenko et al. / Flow Measurement and Instrumentation 32 (2013) 8489

of the cylindrical cantilever is described by the following beam


equation [29,31]:
U TT C f U T EIU XXXX 0

where A+S A is the density of the beam per unit length with
due account of the added mass [30], , A are the density and cross
section area of the beam, Cf (4 f D2S S)1/2 is the damping
coefcient [29], f is the frequency of the piezotransducer, EI is the
bending stiffness of the cantilever S and S are the density and
viscosity of liquid, respectively.
The one end of the cantilever is xed on the piezotransducer
(X 0) and set into a periodical motion: U(0, T)U0 sin (2fT),
while the other one is free (X L) [13]. The sketch of the
considered device conguration is shown in Fig. 1.
Introducing the dimensionless variables: x X/L, u U/U0 and
Tf0, where f0 C/(4L) and C (E/)0.5, Eq. (1) can be written in
the following dimensionless form:
u 2u 2 uxxxx 0;

where 2 16Cf L/[(E)1/2(1+)D2] is the damping coefcient,


2 D2/[(1+)L2] is the bending stiffness coefcient and S/ is
the added mass coefcient [30,32].
As can be seen, the damping coefcient 2 depends on the
material properties of the beam and its size as L/[(E)1/2D2], while
the bending stiffness coefcient depends only on ratio (D/L)2. Thus
it can be expected that in cases, where 2 is much smaller as 2,
the inuence of the viscosity would be too small to be detected.
Consequently, if the damping coefcient is essentially bigger as the
bending stiffness coefcient, then it might result in a signicant
decrease of the MVA and, correspondingly, in the low signal-tonoise-ratio [31]. To illustrate this fact, the damping and the
bending stiffness coefcients calculated for the microcantilevers
made from glass (the optical ber probe) and silicon of the same
length of L 500 m and diameters of D 5 m, 10 m, and 20 m,
respectively, are listed in Table 1.
Introducing new variable tD/[L(1+)0.5] the Eq. (2) becomes
utt 2dut uxxxx 0

where 2 2L(1+)0.5/D
To close the statement of the problem the following boundary
and initial conditions are imposed:
u0; t sin pt; ux 0; t 0; p 8f L2 1 0:5 =CD

uxx 1; t uxxx 1; t 0

ux; 0 ut x; 0 0

The solution of the problem can be obtained by following the


approach presented in Fedorchenko et al. [31]. Introducing new

85

function u(x, t) v(x, t)+sin pt, the problem given by Eqs. (3)(6) is
reduced to the following heterogeneous problem with homogeneous boundary conditions:
vtt 2dvt vxxxx Bsinpt; B pp2 42 0:5 ; tan 2=p;

v0; t vx 0; t 0

vxx 1; t vxxx 1; t 0

vx; 0 0; vt x; 0 p

10

The solution can be represented as an expansion v(x, t)

n 1 vn tX n x with respect to the eigenfunctions Xn(x) of the


corresponding homogeneous problem. The functions Xn(x) are
solutions of the equation:
X IV n X 0

11

with the following boundary conditions


&
_

X0 X0
X1
X1
0:

12

By performing simple calculations one should obtain the


eigenvalues
n 4n

13

and the corresponding eigenfunctions


X n x sin n sinh n cos n xcosh n x
cos n cosh n sin n xsinh n x;

14

where n are the consecutive roots of transcendental equation


cosh cos 1 0:

15

Expanding the source term Bsin (pt) into a series over the
eigenfunctions Xn(x) given by Eq. (14) yields

f x; tB sinpt f n tX n x;

16

n1

with coefcients
f n t g n sinpt; g n 2Bqn ;

17
2

where qn (cos n+cosh n)/[n(cos n sinh nsin n cosh n) ].


Substituting expansion vx; t
n 1 vn tX n x into Eqs. (7) and
(10) yields
vn t 2dvn t 4n vn t g n sinpt;

18

vn 0 0; vn 0 hn ; hn 2pqn :

19

The general solution of Eq. (18) is the sum of solution vnh(t) of


the homogeneous equation that describes damped free vibrations
and the particular (a quasi steady part) solution vnp(t) of the nonhomogeneous one, which is responsible for the resonance. It is
worse of note that the characteristic time of the frequency sweep
during experiments is usually essentially bigger than the decay
constant (e.g. [31,33]). Hence it is enough to obtain only the
particular solution vnp(t), which contains all required information
of the frequency spectrum changes with due account for a viscous
drag, cantilever size and material properties.
Seeking the particular solution in the form Yn ei(pt) and
writing the RHS in Eq. (18) as gnei(pt) and substituting both
terms into Eq. (18) yields
Y n g n = 4n p2 i2p r n expin ;

20

where
r n Y n Y nn 1=2 g n = 4n p2 2 2p2 1=2

21

and
Fig. 1. Sketch of the considered device for solution of the problem.

n Arctan2p= 4n p2 ; if 4n p2 4 0

22

86

A.I. Fedorchenko et al. / Flow Measurement and Instrumentation 32 (2013) 8489

Table 1
Damping (2) and bending stiffness () coefcients for cylindrical cantilevers beams of constant length of L 500 m and different diameters of D 20 m, 10 m and 5 m at
low viscosity (DI water: S 998.2 kg/m3, S 1.002  103 Pa s) and high viscosity (glycerol: S 1261.1 kg/m3, S 1.5 Pa  s) liquids. The presented values are calculated for
cantilevers made from silicon ( 2330 kg/m3, E 185 GPa) and glass (optical ber probe) ( 2200 kg/m3, E 68 GPa). The frequency of the piezotransducer is f 50 kHz.
Diameter
(m)

Material

Damping coefcient 2, DI
water

Bending stiffness coefcient , DI


water

Damping coefcient 2,
glycerol

Bending stiffness coefcient ,


glycerol

20

Silicon/
Fiber
Silicon/
Fiber
Silicon/
Fiber

0.011/0.018

0.033/0.033

0.431/0.717

0.032/0.032

0.021/0.036

0.017/0.017

0.862/1.433

0.016/0.016

0.043/0.071

8.37  103/8.29  103

1.724/2.867

8.06  103/7.97  103

10
5

or
n Arctan2p= 4n p2  ; if 4n p2 o 0:

23

Then,
vnp t ImY n eipt  r n sinptn ; n n :

24

Finally the quasi steady part of solution of the vibrating


cylindrical cantilever submerged in a viscous uid reads

up x; t vnp tX n x sinpt

25

n1

For a further analysis, it is more convenient to rewrite the Eq. (25)


in the following form:

ux; t An x sinptn

26

n1

where
(
An x

r 2n X 2n x 2r n X n xcosn 1;

n1

r 2n X 2n x 2r n X n xcosn ;

n2

cos n+1], sin n 2n4/n(, p),


n(, p)(p2+42)1/2[(n4p2)2+

tan n [rnXn(x) sin n]/[rnXn(x)


cos n p(n4p242)/n(, p),
(2p)2]1/2.
The comparison of the rst vibrational amplitudes of the
microcantilever in air and DI water are shown in Fig. 2. The length,
diameter, density and bending stiffness of the cantilever made of
silicon are 500 m, 20 m, 2330 kg/m3 and 1.45  109 N m2,
respectively. It should be noticed here that the same material
and size of the cantilever has been used through this study. The
important conclusion can be drawn from the Fig. 2: the rapture of
microcantilever during calibration in air can be caused by too large
displacement of the piezotransducer [7]. But it should be point out
here that the Eq. (1) is valid only for a small displacement of the
cantilever, and hence gives only insight into problem of the
rapture of the microcantilever during the calibration.

3. Results and discussion


For the rst vibrational amplitude the displacement of the
cantilever given by Eq. (26) can be written in the following form:
u1 x; t A1 sinpt1 ;

27

where A1 {[r1X1(x)]2+2r1X1(x) cos 1+1}1/2, tan 1 [r1X1(x)


sin 1]/[r1X1(x) cos 1+1], sin 1 214/1(, p), cos 1 p
(14p242)/1(, p), 1(, p) (p2+42)1/2[(14p2)2+(2p)2]1/2.
The solution has the same structure as the one derived for the
vibrating ber fully submerged in a uid [33], therefore the
resonance frequency shift with due account for the viscosity can
be obtained by the same way. Differentiating the A1 with respect
to p and accounting for d/dp /(2p) results in the following

Fig. 2. The comparison of the rst vibrational amplitudes of the frequency response of
the microcantilever vibrating in air with the one submerged in DI water.

biquadratic equation
2X 1 xq1 1p4 4X 1 xq1 2 22 2 41 2X 1 xq1 1 4 p2
81 6 41 2 6X 1 xq1 41 2 0:

28

Solving Eq. (28) and leaving only the real and positive root,
pmax1 reads
pmax 1 21 10:782 = 41 ; f or x 1:

29

Introducing the rst mode of the angular natural frequency as


1 12 and the logarithmic decrement d/(2)/1, Eq. (29) can
be rewritten in its nal form
2

pmax 1 w1 10:78d =4 2 :

30

Eq. (30) displays that the increase of damping causes a leftward


shift of the resonance frequency but this shift is smaller as the one
derived for the harmonic oscillator [34]. Table 2 shows a relatively
good agreement between the predicted resonance frequency shift
calculated by Eq. (30) and the rst vibrational mode given by Eqs.
(26) and (27) in a wide range of liquid viscosities. All computations
have been carried out for DI water and different concentrations of
the glycerolwater solutions (GWS). The properties of GWS were
taken from [35].
From resonance curves (see Fig. 3) it can be drawn that there
are two other parameters very sensitive to the viscosity variation:
the MVA and the bandwidth. As can be seen from Fig. 3, the
increase of the viscosity causes the decrease of the MVA and
broadening of the bandwidth. It allows us to suggest preferentially
using these two parameters, the MVA and (the half-power or halfamplitude) bandwidth, for the viscosity extraction.

A.I. Fedorchenko et al. / Flow Measurement and Instrumentation 32 (2013) 8489

87

Table 2
Comparison of the rst natural frequency (fn1) of the microcantilever beam
submerged in different uids with the resonance frequencies by analytical (fa1)
[Eq. (27)] and approximate [Eq. (30)] (fmax1 pmax1/(2)).
Liquid

fn1

fa1

fmax1

DI water
9% GWS
18% GWS
32% GWS
40% GWS
48% GWS
56% GWS
64% GWS
72% GWS

0.55959
0.55959
0.55959
0.55959
0.55959
0.55959
0.55959
0.55959
0.55959

0.55811
0.55776
0.55719
0.55571
0.55407
0.55135
0.54681
0.53865
0.51771

0.55809
0.55769
0.55710
0.55550
0.55388
0.55109
0.54646
0.53823
0.51769

Fig. 4. The linear relationship between the bandwidth (y) and (SS)0.5.

Fig. 3. Comparison of the rst vibrational amplitudes of the frequency response of


the micro cantilever submerged in DI Water and 6% GWS.

Following the approach of Fedorchenko et al. [31] and performing computations in a wide range of viscosities (from DI water to
72% GWS), the relationship between both the MVA and the
bandwidth, and the viscosity can be found.
The viscous coefcient in proposed model is the same as the
one in [31], therefore the generalization of the results should be
again function of (S S)1/2. Indeed, the bandwidth is a linear
function of (S S)1/2 (see Fig. 4), while the MVA is a power function
of (S S)1/2 (see Fig. 5).
From a dimensionless analysis very important information can
be retrieved; namely the change of length or diameter of the
microcantilever causes only the change of the absolute value of the
damping and, consequently, for bandwidth only the slope of
linear function varies and for the MVA only the shape of a power
function would be different.
For a real practical application it is necessary to estimate the
achievable accuracy of the viscosity sensing. Hence the general
formulas for an achievable accuracy of the viscosity sensing S
through the instrumental (sensing) error y of the bandwidth and
the amplitude measurement should be derived.
The linear relationship between the bandwidth and viscosity is
given as:
y a1 S S 1=2 b1

31

where y stands for bandwidth and values of a1 and b1 coefcients


for the considered size of the microcantilever are shown in Fig. 4.

Fig. 5. The relationship between the MVA (y) and (SS)0.5.

Performing algebraic manipulations yields


S


y 
2yb1 7y
S a21

32

where sign plus (minus) stands for upper (lower) limit of the
instrumental (sensing) error.
Similarly the relationship between the MVA and viscosity can
be written as:
y a2 S S b2 =2

33

where y is the MVA and values of a2, b2 coefcients are presented


in Fig. 5. Then S is given by:


y2=b2
y 2=b2

1
7
1
34
S 7
y
S a2=b2
where signs plus (minus) stand for upper (lower) limit of the
instrumental (sensing) error.

88

A.I. Fedorchenko et al. / Flow Measurement and Instrumentation 32 (2013) 8489

Table 3
Theoretically achievable accuracy of the viscosity sensing for the bandwidth
according to Eq. (32) for different instrumental errors in low-viscosity and highviscosity liquids. The instrumental errors are 100/200 Hz.
Accuracy of the bandwidth measurement, S (%), DI
Hz
Water

S (%), 72%
GWS

7100
7200

0.220/0.220
0.441/0.441

1.264/1.254
2.537/2.507

Table 4
Theoretically achievable accuracy of the viscosity sensing for the MVA according to
Eq. (34) for different instrumental errors in low-viscosity and high-viscosity liquids.
The instrumental errors are 0.1/0.2.
Accuracy of the MVA measurement

S (%), DI water

S (%), 72% GWS

70.1
70.2

1.562/1.602
3.085/3.244

7.812/8.829
14.755/18.860

The accuracy of the viscosity sensing for the bandwidth given


by Eq. (32) is proportional to y and strongly depends on the slope
as a12. In case of the MVA (see Eq. (34)), the accuracy of sensing
depends strongly on ratio y=a2 2=b2 . Moreover, upper and lower
limits of the accuracy of the viscosity sensing S for both MVA
and bandwidth, are not symmetrical and their values can essentially differ from each other. Hence in experiments it needs to
consider the lower accuracy of the viscosity sensing as the
reference one. In case of bandwidth the lower accuracy stands
for upper instrumental error, while for MVA it is exactly opposite.
Some values of the theoretically achievable accuracies of the
viscosity sensing calculated by Eqs. (32) and (34) for low (DI
water) and high-viscosity uids (72% GWS) are listed in
Tables 3 and 4. As can be seen the use of bandwidth and MVA
have positive and negative features. For instance, the bandwidth
provides a relatively small instrumental error for both low (DI
water) and high-viscosity uids (72% GWS). If MVA is chosen, the
instrumental error for low-viscosity uids (i.e. DI water) is still a
relatively small but unfortunately for high-viscosity uids (e.g. 72%
GWS) the instrumental error increases essentially (i.e. for the same
instrumental error the accuracy decreases over 100 times, when
initially measured DI water is replaced by 72% GWS).
However the advantage of using the MVA is that one can
essentially reduce the time required for experiments just by
measuring the amplitude in the neighborhood of the predicted
resonance frequencies given by Eq. (30).

4. Conclusions
This paper presents a complete theoretical analysis of the
viscometer utilizing the vibrating cylindrical micro-/nano-cantilever
submerged in a uid. Based on the solution of model, the impact of
viscosity, density and cantilever size on the resonance frequency
shift has been elucidated. The explicit formulas of the viscosity
extraction from the resonance frequency shift, the MVA and the
bandwidth have been derived. In case of cantilever with a simple
cross section such as cone, rectangle, square or triangle only the
viscous drag and the added mass coefcient must be recalculated
but the results should qualitatively agree with the ones obtained for
cylindrical resonator. These ndings can be used in experiments for
real-time molecule detection in various liquid solutions or in design
of the micro-/nanoviscometers.

Acknowledgments
This research has been supported by the Ministry of Education,
Youth and Sport of the Czech Republic, LH-KONTAKT II, project
LH12042 and by the institutional support RVO: 61388998.
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