UHV (Ultra High Vacuum) and electron spectroscopy, Part 3

Concerning:
Ion getter pumps and Ti sublimation pumps
Metal getters (like Ti) had been used a long time ago to maintain and improve the
vacuum inside tubes used in radios, TV, high voltage power suuply etc.. The glass
tubes were carefully evacuated, the glass tubes sealed and then, from the outside by
induction heating, the getter material (inside) is evaporated.
The 8068 pentode stems from a Kepco high voltage (-2000 to + 2000V) differential
Amplifier.

UHV (Ultra High Vacuum) and electron spectroscopy, Part 3

Calculating the effective pumping speed.
L2 = 50l/s
L1 = 30l/s

Pumping speed S = dV/dt

Pumping through put

Conductivity
1
S eff

Compare to Ohms Law:

q pv

1
U
R

1
S

q pv
1
L1

q pv

m3/s or l/s
S p

dV
m3 Pa
p
dt
s

1
L2

S eff = 17.5 l/s

If we change to a smaller Turbo pump
50l/s:
Seff = 13.6 l/s
The large pump is in this case not very
effective!

UHV (Ultra High Vacuum) and electron spectroscopy, Part 3

For the calculation of vapour pressure and sublimation pressure we use the
chemical potential
c
RT
ln
Concentration dependence
0

This is exact fow low concentrations c

And usually a good approximation for higher c.
Pressure dependance:
Vm
Solid and liquid:
p

c0

( p)

( p0 ) RT ln

Gases:

Temperature dependance:
T
Linear approximation (for example):

(298.15

T , p0

p)

p
p0

Sm

(298.15, p0 ) Vm

p Sm

UHV (Ultra High Vacuum) and electron spectroscopy, Part 3

Sublimation of Titanium by direct heating through an electrical current

The equilibrium
Ti(s) Ti( g ) changes with temperature
s

(T )

(298.15) 0

p
p0

exp

(T , p)
S sm (T
0

298.15)

S m (T 298.15)
RT

(298.15) 0

S g 0 (T

298.15) RT ln(

p
)
p0

UHV (Ultra High Vacuum) and electron spectroscopy, Part 3

Phase transitions: solid-liquid- gas described with the

chemical potential ( example H2O):
(298.15

T)

(298.15) 0

Sm

Equilibrium between H2O(liq) and H2O(gas) at f(T)

Thermionic emission of electrons

Metal like tungsten (W) can emitt at higher temperatutes (2500-300K)

electrons

Electrons. To understand this process we assume a simple metal with free electrons.
Following the Pauli principle , energy levels can only be occupied by two electrons (with
different spin orientation). Therefor electrons in metal occupy in the conducting band a high
number of energetic lecvels. The ocupancy of these levels can be desribed by a continuos
function: the Fermi Dirac distribution function:

f (E)
exp

E Ef

AT 2 exp

kt
e

kT

Fermi-Dirac
distribution function

Richardson equation
For the current
density f(T).

Thermionic emission of electrons

= 520 K
=5200K
=26000 K
=52000K

A typical value of the Fermi level EF is 4.5

eV

The work function

Contact potential:
If we bring two metals with different
Fermi levels into electrical contact,
electron flows from the higher to the
lower level. We will obtain a
measurerable electrical potential
difference V

VCPD

Production of electrons by field emission

Production of electrons by field emission