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0 MOSFET Model
- Users Manual
Xuemei (Jane) Xi, Mohan Dunga, Jin He, Weidong Liu, Kanyu M.
Cao, Xiaodong Jin, Jeff J. Ou, Mansun Chan, Ali M. Niknejad,
Chenming Hu
Project Director: Professor Chenming Hu
Professor Ali Niknejad
Copyright 2003
The Regents of the University of California
All Rights Reserved
Developers:
BSIM4.3.0 Developers:
Professor Chenming Hu (project director), UC Berkeley
Web Sites:
BSIM4 web site with BSIM source code and documents:
http://www-device.eecs.berkeley.edu/bsim3/~bsim4.html
Compact Model Council: http://www.eigroup.org/~CMC
Technical Support:
Dr. Xuemei (Jane) Xi: JaneXi@eecs.berkeley.edu
Acknowledgement:
The development of BSIM4.3.0 benefited from the input of many BSIM
users, especially the Compact Model Council (CMC) member companies.
The developers would like to thank Keith Green, Tom Vrotsos, Britt
Brooks and Doug Weiser at TI, Joe Watts and Richard Q Williams at IBM,
Yu-Tai Chia, Ke-Wei Su, Chung-Kai Chung, Y-M Sheu and Jaw-Kang
Her at TSMC, Rainer Thoma, Ivan To, Young-Bog Park and Colin
McAndrew at Motorola, Ping Chen, Jushan Xie, and Zhihong Liu at
Celestry, Paul Humphries, Geoffrey J. Coram and Andre Martinez at
Analog Devices, Andre Juge and Gilles Gouget at STmicroelectronics,
Mishel Matloubian at Mindspeed, Judy An at AMD, Bernd Lemaitre,
Laurens Weiss and Peter Klein at Infinion, Ping-Chin Yeh and Dick
Dowell at HP, Shiuh-Wuu Lee, Wei-Kai Shih, Paul Packan, Sivakumar P
Mudanai and Rafael Rio at Intel, Xiaodong Jin at Marvell, Weidong Liu at
Synopsys, Marek Mierzwinski at Tiburon-DA, Jean-Paul MALZAC at
Silvaco, Pei Yao and John Ahearn at Cadence, Mohamed Selim and
Ahmed Ramadan at Mentor Graphics, Peter Lee at Hitachi, Toshiyuki
Saito and Shigetaka Kumashiro at NEC, Richard Taylor at NSC, for their
valuable assistance in identifying the desirable modifications and testing of
the new model.
Special acknowledgment goes to Dr. Keith Green, Chairman of the
Technical Issues Subcommittee of CMC; Britt Brooks, chair of CMC, Dr.
Joe Watts, Secretary of CMC, and Dr. Ke-Wei Su for their guidance and
technical support.
The BSIM project is partially supported by SRC, and CMC.
Table of Contents
Chapter 1:
1-1
1-2
Chapter 2:
1-5
2-1
2-2
2-6
2-9
Chapter 3:
3-1
3-5
Chapter 4:
4.1 Model selectors
2-5
4-2
Chapter 5:
5.1 Bulk Charge Effect
4-3
5-2
5-4
5-5
5-7
5-8
5-10
5-16
5.9 New Current Saturation Mechanisms: Velocity Overshoot and Source End Velocity Limit Model 5-17
Chapter 6:
6.1 Iii Model
6-2
Chapter 7:
7.1 General Description
7-3
Chapter 8:
8-1
8-8
Chapter 9:
9.1 Flicker Noise Models
9.2Channel Thermal Noise
8-6
Chapter 10:
9-7
10-1
10-6
Chapter 11:
11-1
Chapter 12:
11-3
12-1
12-1
12-2
12-2
12-3
Chapter 13:
12-5
12-8
13-1
Chapter 14:
14.1Optimization strategy
14-1
14-3
Appendix A:
A-1
A-5
A-10
A-11
A-12
A-15
A-20
A-25
A-26
A-26
Appendix B:
Appendix C:
References
C-1
1-1
choice in a physically accurate maner; (11) the quantum mechanical charge-layerthickness model for both IV and CV; (12) a more accurate mobility model for
predictive modeling; (13) a gate-induced drain/source leakage (GIDL/GISL)
current model, available in BSIM for the first time; (14) an improved unified
flicker (1/f) noise model, which is smooth over all bias regions and considers the
bulk charge effect; (15) different diode IV and CV charatistics for source and drain
junctions; (16) junction diode breakdown with or without current limiting; (17)
dielectric constant of the gate dielectric as a model parameter; (18) A new scalable
stress effect model
becoming thus a function of the active area geometry and the location of the
device in the active area; (19) A unified current-saturation model that includes all
mechanisms of current saturation- velocity saturation, velocity overshoot and
source end velocity limit; (20) A new temperature model format that allows
convenient prediction of temperature effects on saturation velocity, mobility, and
S/D resistances.
1-2
High-k gate dielectric can be modeled as SiO 2 (relative permittivity: 3.9) with an
equivalent SiO 2 thickness. For example, 3nm gate dielectric with a dielectric
constant of 7.8 would have an equivalent oxide thickness of 1.5nm.
BSIM4 also allows the user to specify a gate dielectric constant (EPSROX)
different from 3.9 (SiO 2) as an alternative approach to modeling high-k dielectrics.
Figure 1-1 illustrates the algorithm and options for specifying the gate dielectric
thickness and calculation of the gate dielectric capacitance for BSIM4 model
evaluation.
No
No
TOXE given?
Yes
TOXP given?
Yes
TOXE TOXE
TOXP TOXP
No
Yes
TOXE TOXE
TOXP TOXE - DTOX
Default case
C oxe = EPSROX 0
C oxp =
EPSROX 0
1 .9 10 9 cm
1 +
2TOXP
0. 7
1-3
1-4
NGATE
Figure 1-2. Charge distribution in a MOSFET with the poly gate depletion effect.
The device is in the strong inversion region.
The effective gate voltage can be calculated in the following manner. Assume the
doping concentration in the poly gate is uniform. The voltage drop in the poly gate
Vpoly can be calculated as
(1.2.1)
qNGATE X
V poly = 0.5 X poly E poly =
2 si
2
poly
where Epoly is the maximum electrical field in the poly gate. The boundary
condition at the interface of poly gate and the gate oxide is
1-5
(1.2.2)
EPSROX Eox = si E poly = 2 q si NGATE Vpoly
where Eox is the electric field in the gate oxide. The gate voltage satisfies
(1.2.3)
Vgs VFB s = V poly + Vox
where Vox is the voltage drop across the gate oxide and satisfies Vox = Eox TOXE.
From (1.2.1) and (1.2.2), we can obtain
(1.2.4)
a (Vgs VFB s V poly ) V poly = 0
2
where
(1.2.5)
a=
EPSROX 2
2 q si NGATE TOXE 2
By solving (1.2.4), we get the effective gate voltage Vgse which is equal to
(1.2.6)
2
2 EPSROX (Vgs VFB s )
q si NGATE TOXE 2
Vgse = VFB + s +
1+
1
EPSROX 2
q si NGATE TOXE 2
1-6
Wdrawn
+ XW 2dW
NF
(1.3.2b)
Weff ' =
Wdrawn
+ XW 2dW'
NF
The difference between (1.3.2a) and (1.3.2b) is that the former includes bias
dependencies. NF is the number of device fingers. dW and dL are modeled by
(1.3.3)
WL
WW
WWL
+ W W N + WLN W W N
WLN
L
W
L W
(1.3.4)
dL = LINT +
LL
LW
LWL
+ LWN + LLN LWN
LLN
L
W
L W
1-7
WINT represents the traditional manner from which "delta W" is extracted (from
the intercept of straight lines on a 1/Rds~Wdrawn plot). The parameters DWG and
DWB are used to account for the contribution of both gate and substrate bias
effects. For dL, LINT represents the traditional manner from which "delta L" is
extracted from the intercept of lines on a Rds~Ldrawn plot).
The remaining terms in dW and dL are provided for the convenience of the user.
They are meant to allow the user to model each parameter as a function of Wdrawn ,
Ldrawn and their product term. By default, the above geometrical dependencies for
dW and dL are turned off.
MOSFET capacitances can be divided into intrinsic and extrinsic components. The
intrinsic capacitance is associated with the region between the metallurgical source
and drain junction, which is defined by the effective length (Lactive ) and width
(W active) when the gate to source/drain regions are under flat-band condition. Lactive
and Wactive are defined as
(1.3.5)
Lactive= Ldrawn+ XL2dL
(1.3.6)
Wactive=
Wdrawn
+ XW 2dW
NF
(1.3.7)
dL = DLC +
LLC LWC
LWLC
+ LWN + LLN LWN
LLN
L
W
L W
1-8
(1.3.8)
dW = DWC +
WLC WWC
WWLC
+ W W N + WLN W W N
WLN
L
W
L W
The meanings of DWC and DLC are different from those of WINT and LINT in the
I-V model. Unlike the case of I-V, we assume that these dimensions are biasdependent. The parameter Leff is equal to the source/drain to gate overlap length
plus the difference between drawn and actual POLY CD due to processing (gate
patterning, etching and oxidation) on one side.
The effective channel length Leff for the I-V model does not necessarily carry a
physical meaning. It is just a parameter used in the I-V formulation. This Leff is
therefore very sensitive to the I-V equations and also to the conduction
characteristics of the LDD region relative to the channel region. A device with a
large Leff and a small parasitic resistance can have a similar current drive as
another with a smaller Leff but larger Rds.
The Lactive parameter extracted from capacitance is a closer representation of the
metallurgical junction length (physical length). Due to the graded source/drain
junction profile, the source to drain length can have a very strong bias dependence.
We therefore define Lactive to be that measured at flat-band voltage between gate to
source/drain. If DWC, DLC and the length/width dependence parameters (LLC,
LWC, LWLC, WLC, WWC and WWLC) are not specified in technology files,
BSIM4 assumes that the DC bias-independent Leff and Weff will be used for the
capacitnace models, and DWC, DLC, LLC, LWC, LWLC, WLC, WWC and WWLC
will be set to the values of their DC counterparts.
1-9
BSIM4 uses the effective source/drain diffusion width Weffcj for modeling
parasitics, such as source/drain resistance, gate electrode resistance, and gateinduced drain leakage (GIDL) current. W effcj is defined as
(1.3.9)
Weffcj =
Wdrawn
WLC WWC
WWLC
Note: Any compact model has its validation limitation, so does BSIM4. BSIM4 is
its own valid designation limit which is larger than the warning limit, shown in
following table. For users reference, the fatal limitation in BSIM4 is also shown.
Parameter
name
Designed
Limitation(m)
Warning
Limitation(m)
Fatal
Limitation(m)
Leff
1e-8
1e-9
LeffCV
1e-8
1e-9
Weff
1e-7
1e-9
WeffCV
1e-7
1e-9
Toxe
5e-10
1e-10
Toxp
5e-10
1e-10
Toxm
5e-10
1e-10
1-10
s Vbs s
where VFB is the flat band voltage, VTH0 is the threshold voltage of the long
channel device at zero substrate bias, and is the body bias coefficient given by
(2.1.2)
=
2q si N substrate
Coxe
2-1
qD0
qD
+ K1NDEP s Vbs 1 s Vbs
Coxe
si
with a definition of
(2.2.3)
s = 0.4 +
k BT NDEP
ln
q ni
X dep0
2-2
dep0
(2.2.5)
D1 = D10 + D11 =
X dep 0
dep 0
(2.2.6)
s = 0.4 +
k BT NDEP
+ PHIN
ln
q ni
where
PHIN = qD10 si
VTH0, K1, K2, and PHIN are implemented as model parameters for model
flexibility. Appendix A lists the model selectors and parameters.
Detail information on the doping profile is often available for predictive
modeling. Like BSIM3v3, BSIM4 allows K1 and K2 to be calculated based
on such details as NSUB, XT, VBX, VBM, etc. ( with the same meanings as
in BSIM3v3):
2-3
(2.2.8)
K1 = 2 2K 2 s VBM
K2 =
( 1 2 )(
2 s
s VBX s
(2.2.9)
s VBM s + VBM
where 1 and 2 are the body bias coefficients when the substrate doping
concentration are equal to NDEP and NSUB, respectively:
(2.2.10)
1 =
2q si NDEP
Coxe
(2.2.11)
2 =
2 q si NSUB
Coxe
VBX is the body bias when the depletion width is equal to XT, and is
determined by
(2.2.12)
qNDEP XT 2
= s VBX
2 si
2-4
LPEB
K 2 Vbs
Leff
LPE 0
+ K1 1 +
1 s
L
eff
(1 e
Vds / vt
) L
Leff + DVTP0 1 + e
eff
DVTP1V ds
Leff
Vth (DITS ) = nvt ln
L + DVTP0 1 + e DVTP1Vds
eff
2-5
k BT NDEP NSD
ln
2
q
n
0 .5
cosh
( ) 1
Leff
lt
2-6
(2.4.4)
lt =
si TOXE X dep
EPSROX
X dep =
2 si ( s Vbs )
qNDEP
Xdep is larger near the drain due to the drain voltage. Xdep / represents the
average depletion width along the channel.
Note that in BSIM3v3 and [4], th(Leff ) is approximated with the form of
(2.4.6)
Leff
th (Leff ) = exp
2l t
L
+ 2 exp eff
lt
which results in a phantom second Vth roll-up when Leff becomes very
small (e.g. Leff < LMIN). In BSIM4, the function form of (2.4.3) is
implemented with no approximation.
To increase the model flexibility for different technologies, several
parameters such as DVT0, DVT1, DVT2, DSUB, ETA0, and ETAB are
introduced, and SCE and DIBL are modeled separately.
To model SCE, we use
2-7
(2.4.7)
th (SCE ) =
0.5 DVT 0
cosh DVT 1
Leff
lt
) 1
(2.4.8)
si TOXE X dep
(1 + DVT 2 Vbs )
EPSROX
0 .5
cosh DSUB
Leff
lt 0
) 1
(2.4.11)
si TOXE X dep0
EPSROX
with
2-8
Narrow-Width Effect
(2.4.13)
X dep 0 =
2 si s
qNDEP
DVT1 is basically equal to 1/()1/2. DVT2 and ETAB account for substrate
bias effects on SCE and DIBL, respectively.
This formulation includes but is not limited to the inverse of channel width
due to the fact that the overall narrow width effect is dependent on process
(i.e. isolation technology). Vth change is given by
(2.5.2)
TOXE
Weff '+W 0 s
2-9
Narrow-Width Effect
In addition, we must consider the narrow width effect for small channel
lengths. To do this we introduce the following
(2.5.3)
0.5 DVT 0W
cosh DVT1W
) 1 (V
bi
s )
with l tw given by
(2.5.4)
ltw =
si TOXE X dep
(1 + DVT 2W Vbs )
EPSROX
LPEB
K2 o xVbseff
Leff
LPE0
TOXE
+ K1o x 1 +
1 s + (K 3 + K 3B Vbseff )
s
Leff
Weff '+W 0
DVT 0W
DVT 0
(Vbi s )
0.5
+
cosh DVT1W Leffl Weff ' 1 cosh DVT1 Lleff 1
tw
t
Leff
0.5
2-10
Narrow-Width Effect
(2.5.6)
K1ox = K1
TOXE
TOXM
and
(2.5.7)
K 2ox = K 2
TOXE
TOXM
Note that all Vbs terms are substituted with a Vbseff expression as shown in
(2.5.8). This is needed in order to set a low bound for the body bias during
simulations since unreasonable values can occur during SPICE iterations if
this expression is not introduced.
(2.5.8)
Vbseff = Vbc + 0.5 (Vbs Vbc 1 ) +
where 1 = 0.001V, and Vbc is the maximum allowable Vbs and found from
dVth /dVbs = 0 to be
(2.5.9)
K12
Vbc = 0.9 s
4 K 22
2-11
Narrow-Width Effect
For positive Vbs, there is need to set an upper bound for the body bias as:
(2.5.10)
2
'
'
Vbseff = 0.95 s 0.5 0.95 s Vbseff
1 + 0.95s Vbseff
1 + 41 .0.95 s
2-12
vt exp
2 s
nvt
where
(3.1.1a)
VOFFL
Leff
A unified charge density model considering the charge layer thickness effect is
derived for both subthreshold and inversion regions as
3-1
(3.1.3)
Qch0 = Coxeff Vgsteff
Coxe Ccen
Coxe + Ccen
with Ccen =
si
X DC
1.9 10 9 m
1 +
2TOXP
0 .7
In the above equations, Vgsteff, the effective (Vgse-Vth) used to describe the channel
charge densities from subthreshold to strong inversion, is modeled by
(3.1.6a)
Vgsteff
m (Vgse Vth )
nvt ln 1 + exp
nvt
qNDEP si
nvt
where
(3.1.6b)
m = 0 .5 +
3-2
arctan (MINV )
MINV is introduced to improve the accuracy of Gm, Gm/Id and Gm2/Id in the
moderate inversion region.
To account for the drain bias effect, The y dependence has to be included in (3.1.3).
Consider first the case of strong inversion
(3.1.7)
Qchs ( y ) = Coxeff (Vgse Vth AbulkVF ( y ))
VF (y) stands for the quasi-Fermi potential at any given point y along the channel
with respect to the source. (3.1.7) can also be written as
(3.1.8)
Qchs ( y ) = Qchs0 + Qchs ( y )
The term Qchs(y) = -Coxeff Abulk VF (y) is the incremental charge density introduced
by the drain voltage at y.
In subthreshold region, the channel charge density along the channel from source
to drain can be written as
(3.1.9)
A V ( y)
Taylor expansion of (3.1.9) yields the following (keeping the first two terms)
3-3
(3.1.10)
A V ( y)
AbulkVF ( y )
nvt
To obtain a unified expression for the incremental channel charge density Qch(y)
induced by Vds, we assume Qch (y) to be
(3.1.13)
Qch ( y ) =
Q chs ( y ) Qchsubs( y )
Qchs ( y ) + Qchsubs ( y )
3-4
VF ( y )
Qch0
Vb
Subthreshold Swing n
Vb =
Vgsteff + 2vt
Abulk
A unified expression for Qch (y) from subthreshold to strong inversion regions is
(3.1.16)
V ( y)
V
Vgs Vth Voff '
I ds = I 0 1 exp ds exp
v
nv
where
(3.2.2)
I0 =
W
L
q si NDEP 2
vt
2 s
vt is the thermal voltage and equal to kB T/q. Voff = VOFF + VOFFL / Leff is the
offset voltage, which determines the channel current at Vgs = 0. In (3.2.1), n is the
3-5
Subthreshold Swing n
Cdep
Coxe
0 .5
cosh DVT 1
Leff
lt
) 1
3-6
As the gate oxide thickness is scaled down to 3nm and below, gate leakage current
due to carrier direct tunneling becomes important. This tunneling happens between
the gate and silicon beneath the gate oxide. To reduce the tunneling current, high-k
dielectrics are being studied to replace gate oxide. In order to maintain a good
interface with substrate, multi-layer dielectric stacks are being proposed. The
BSIM4 gate tunneling model has been shown to work for multi-layer gate stacks
as well. The tunneling carriers can be either electrons or holes, or both, either from
the conduction band or valence band, depending on (the type of the gate and) the
bias regime.
In BSIM4, the gate tunneling current components include the tunneling current
between gate and substrate (Igb), and the current between gate and channel (Igc),
which is partitioned between the source and drain terminals by Igc = Igcs + Igcd.
4-1
Model selectors
The third component happens between gate and source/drain diffusion regions (Igs
and Igd). Figure 4-1 shows the schematic gate tunneling current flows.
Igd
Igs
Igcs
Igcd
Igb
Figure 4-1. Shematic gate current components flowing between NMOST terminals
in version.
4-2
(4.2.1a)
Voxacc = V fbzb VFBeff
(4.2.1b)
Voxdepinv = K1ox s + Vgsteff
(4.2.1) is valid and continuous from accumulation through depletion to
inversion. Vfbzb is the flat-band voltage calculated from zero-bias Vth by
(4.2.2)
V fbzb = Vth
zeroVbs andVds
s K1 s
and
(4.2.3)
VFBeff = V fbzb 0.5 (V fbzb Vgb 0.02) +
(V
fbzb
4-3
where the physical constants A = 4.97232e-7 A/V2 , B = 7.45669e11 (g/Fs2 )0.5 , and
TOXREF
ToxRatio =
TOXE
NTOX
1
TOXE 2
Vgb V fbzb
Vaux = NIGBACC vt log 1 + exp
NIGBACC vt
(4.3.2)
Voxdepinv EIGBINV
NIGBINV
v
t
4-4
Igd)
Igc, determined by ECB for NMOS and HVB (Hole tunneling from
Valence Band) for PMOS, is formulated as
(4.3.3)
Igc = Weff Leff A ToxRatio Vgse Vaux
where A = 4.97232 A/V2 for NMOS and 3.42537 A/V2 for PMOS, B =
7.45669e11 (g/F-s2) 0.5 for NMOS and 1.16645e12 (g/F-s 2)0.5 for PMOS,
and
Vgse VTH 0
Vaux = NIGC vt log 1 + exp
NIGC vt
Igs and Igd -- Igs represents the gate tunneling current between the gate
and the source diffusion region, while Igd represents the gate tunneling
current between the gate and the drain diffusion region. Igs and Igd are
determined by ECB for NMOS and HVB for PMOS, respectively.
(4.3.4)
Igs = Weff DLCIG A ToxRatioEdge Vgs Vgs
'
)(
'
)]
and
4-5
(4.3.5)
)(
exp B TOXE POXEDGE AIGSD BIGSD Vgd ' 1 + CIGSD Vgd '
)]
where A = 4.97232 A/V 2 for NMOS and 3.42537 A/V2 for PMOS, B =
7.45669e11 (g/F-s2) 0.5 for NMOS and 1.16645e12 (g/F-s 2)0.5 for PMOS,
and
TOXREF
ToxRatioEdge =
TOXE POXEDGE
NTOX
1
(TOXE POXEDGE )2
Vgs =
(V
gs
V fbsd ) + 1.0e 4
Vgd =
(V
gd
V fbsd ) + 1.0e 4
'
'
Vfbsd is the flat-band voltage between gate and S/D diffusions calculated as
If NGATE > 0.0
V fbsd =
k BT
NGATE
log
q
NSD
4-6
(4.3.6)
Igcs = Igc0
and
(4.3.7)
Igcd = Igc0
V
B TOXE
1 dseff
2
Vgsteff 2 Vgsteff
4-7
A0 Leff
Leff + 2 XJ X dep
Abulk = 1 + F doping
2
Leff
+ B0 1 + KETAVbseff
1
AGS
gsteff
where the second term on the RHS is used to model the effect of non-uniform
doping profiles
(5.1.2)
F doping =
+ K 2ox K 3 B
TOXE
s
Weff '+W 0
5-1
Note that Abulk is close to unity if the channel length is small and increases as the
channel length increases.
(5.2.1)
The physical meaning of Eeff can be interpreted as the average electric field
experienced by the carriers in the inversion layer. The unified formulation of
mobility is then given by
eff =
(5.2.2)
1 + ( Eeff E0 )
For an NMOS transistor with n-type poly-silicon gate, (5.2.1) can be rewritten in a
more useful form that explicitly relates Eeff to the device parameters
5-2
(5.2.3)
Eeff
Vgs + Vth
6TOXE
BSIM4 provides three different models of the effective mobility. The mobMod = 0
and 1 models are from BSIM3v3.2.2; the new mobMod = 2, a universal mobility
model, is more accurate and suitable for predictive modeling.
mobMod = 0
(5.2.4)
eff =
U0
+ 2Vth
+ 2Vth
V
V
1 + (UA + UCVbseff ) gsteff
+ UB gsteff
TOXE
TOXE
mobMod = 1
(5.2.5)
eff =
U0
2
Vgsteff + 2Vth
Vgsteff + 2Vth
1 + UA
+ UB TOXE (1 + UC Vbseff )
TOXE
mobMod = 2
(5.2.6)
eff =
U0
+ C0 (VTHO VFB s )
V
1 + (UA + UC Vbseff ) gsteff
TOXE
EU
5-3
(5.3.1)
RDSWMIN + RDSW
Rds (V ) =
1
gsteff
(1e6 W )
WR
effcj
(5.3.2)
RDWMIN + RDW
Rd (V ) =
1
PRWB Vbd + 1 + PRWG (V V )
gd
fbsd
5-4
[(1e6 W )
WR
effcj
NF
(5.3.3)
RSWMIN + RSW
Rs (V ) =
1
PRWB Vbs + 1 + PRWG (V V )
gs
fbsd
[(1e6 W )
WR
effcj
NF
Vfbsd is the calculated flat-band voltage between gate and source/drain as given in
Section 4.3.2.
The following figure shows the schematic of source/drain resistance connection
for rdsMod = 1.
Rsdiff +Rs(V)
Rddiff+Rd(V)
The diffusion source/drain resistance Rsdiff and Rddiff models are given in the
chapter of layout-dependence models.
5-5
(5.4.1)
I ds ( y ) = WQ ch ( y ) ne ( y )
dVF ( y )
dy
ne( y) =
eff
Ey
1+
Esat
V ( y ) eff dVF ( y )
I ds ( y ) = WQ ch0 1 F
E
Vb
dy
1+ y
Esat
(5.4.3) is integrated from source to drain to get the expression for linear
drain current. This expression is valid from the subthreshold regime to the
strong inversion regime
(5.4.4)
I ds 0
5-6
V
W eff Qch0Vds 1 ds
2Vb
=
V
L1 + ds
Esat L
Velocity Saturation
Ids =
Idso
RdsIdso
1+
Vds
eff E
1 + E Esat
= VSAT
E < Esat
E Esat
where Esat corresponds to the critical electrical field at which the carrier velocity
becomes saturated. In order to have a continuous velocity model at E = Esat , Esat
must satisfy
(5.5.2)
Esat =
2VSAT
eff
5-7
Vdsat =
EsatL(Vgsteff + 2vt)
AbulkEsatL + Vgsteff + 2vt
(5.6.1)
Vdsat =
b b 2 4 ac
2a
where
(5.6.2b)
2
1
a = Abulk Weff VSATCoxe Rds + Abulk 1
5-8
(5.6.2c)
2
(Vgsteff + 2vt ) 1 + Abulk EsatLeff
b =
(5.6.2e)
= A1Vgsteff + A2
is introduced to model the non-saturation effects which are found for
PMOSFETs.
1
Vdseff = Vdsat (Vdsat Vds ) +
2
5-9
5-10
next that CLM dominates in the second region, DIBL in the third region, and
SCBE in the fourth region.
3.0
14
Triode
CLM
DIBL
SCBE
12
2.5
Ids (mA)
8
1.5
6
Rout (KOhms)
10
2.0
1.0
4
0.5
0.0
Vds (V)
The channel current is a function of the gate and drain voltage. But the current
depends on the drain voltage weakly in the saturation region. In the following, the
Early voltage is introduced for the analysis of the output resistance in the
saturation region:
Vds
Vd s a t
I ds (Vgs ,Vds )
Vd
(5.7.1)
dVd
Vds 1
5-11
I (V ,V )
VA = I dsat ds gs ds
Vd
We assume in the following analysis that the contributions to the Early voltage
from all mechanisms are independent and can be calculated separately.
VACLM
I (V ,V ) L
= I dsat ds gs ds
L
Vd
Vgsteff
1
F 1 + PVAG
PCLM
Esat Leff
R I
V 1
1 + ds dso Leff + dsat
Vdseff
Esat litl
5-12
and the F factor to account for the impact of pocket implant technology is
(5.7.6)
F=
1 + FPROUT
Leff
Vgsteff + 2vt
litl =
siTOXE XJ
EPSROX
Vth
Vd
V
AbulkVdsat
1
1 + PVAG gsteff
rout (1 + PDIBLCB Vbseff )
AbulkVdsat + Vgsteff + 2vt
Esat Leff
Vgsteff + 2vt
5-13
where rout has a similar dependence on the channel length as the DIBL
effect in Vth, but a separate set of parameters are used:
(5.7.10)
rout =
PDIBLC1
2 cosh
DROUT Leff
lt 0
) 2 + PDIBLC 2
5-14
increase exponentially with the drain voltage. A well known Isub model [8]
is
(5.7.11)
I sub =
B litl
Ai
V
ds dsat
V V
I ds = I ds w / o Isub + I sub = I ds w / o Isub 1 + Bi ds Bdsat
i litl
Ai exp Vds Vd s a t
The Early voltage due to the substrate current VASCBE can therefore be
calculated by
(5.7.13)
VASCBE =
B litl
Bi
exp i
Ai
V
V
ds
dsat
5-15
(5.7.14)
1
V ASCBE
PSCBE1 litl
PSCBE 2
exp
Leff
V
ds
dsat
1
F 1 + (1 + PDITSL Leff )exp ( PDITSD Vds )
PDITS
Ids =
Ids0 NF
1 VA Vds V dseff Vds V dseff Vds V dseff
1+
1+
1+
1
+
ln
R I
VADIBL
VADITS
VASCBE
1+ Vdsdseffds0 Cclm VAsat
5-16
(5.8.2)
VA is written as
(5.8.3)
VA = VAsat + V ACLM
where VAsat is
VAsat =
(5.8.4)
bulk dsat
Esat Leff +Vdsat + 2RdsvsatCoxeWeff Vgsteff 1 2(Vgsteff
+ 2vt )
RdsvsatCoxeWeff Abulk 1+ 2
VAsat is the Early voltage at Vds = Vdsat. VAsat is needed to have continuous drain
current and output resistance expressions at the transition point between linear and
saturation regions.
5-17
v = vd ( 1 +
E
E
E
)=
(1 +
)
E x
1 + E / Ec
E x
This relationship is then substituted into (5.8.1) and the new current
expression including the velocity overshoot effect is obtained:
(5.9.2)
I DS , HD
V dseff
I DS 1 +
Leff E sat
=
V dseff
1+
OV
L eff E sat
where
(5.9.3)
E OV
sat
Vds Vdseff
1 +
1
Esat litl
LAMBDA
= E sat 1 +
1 +
+ 1
Esat
litl
5-18
I DS , HD
Wq s
where qs is the source end inversion charge density. Source end velocity
limit gives the highest possible velocity which can be given through
ballistic transport as:
(5.9.5)
v sBT =
1 r
VTL
1+ r
Leff
XN Leff + LC
XN 3.0
5-19
The real source end velocity should be the lower of the two, so a final
Unified current expression with velocity saturation, velocity overshoot and
source velocity limit can be expressed as :
(5.9.7)
I DS =
[1 + (v
I DS , HD
/ v sBT )
2 MM
sHD
1 / 2 MM
where MM=2.0.
5-20
In addition to the junction diode current and gate-to-body tunneling current, the substrate
terminal current consists of the substrate current due to impact ionization (Iii), and gateinduced drain leakage current (IGIDL ).
(V
ds
BETA0
Vdseff ) exp
V V
ds dseff
I dsNoSCBE
I dsNoSCBE =
VA Vds V dseff
I ds0 NF
1
1 +
1
+
ln
I ds0
V ADIBL
1 + RVdsdseff
Cclm VAsat
Vds V dseff
1 +
VADITS
6-1
3 Toxe BGIDL
Vdb3
exp
(6.2.2)
IGISL = AGIDL WeffCJ Nf
3 Toxe BGIDL
Vsb3
exp
where AGIDL, BGIDL, CGIDL, and EGIDL are model parameters and explained
in Appendix A. CGIDL accounts for the body-bias dependence of IGIDL and IGISL.
WeffCJ and Nf are the effective width of the source/drain diffusions and the number
of fingers. Further explanation of WeffCJ and Nf can be found in the chapter of the
layout-dependence model.
6-2
Accurate modeling of MOSFET capacitance plays equally important role as that of the
DC model. This chapter describes the methodology and device physics considered in both
intrinsic and extrinsic capacitance modeling in BSIM4.0.0. Complete model parameters
can be found in Appendix A.
7-1
General Description
capMod = 1 (single-equation
model)
7-2
Separate effective channel length and width are used for capacitance models.
capMod = 0 uses piece-wise equations. capMod = 1 and 2 are smooth and single
equation models; therefore both charge and capacitance are continous and smooth
over all regions.
Threshold voltage is consistent with DC part except for capMod = 0, where a longchannel V th is used. Therefore, those effects such as body bias, short/narrow channel
and DIBL effects are explicitly considered in capMod = 1 and 2.
Overlap capacitance comprises two parts: (1) a bias-independent component which
models the effective overlap capacitance between the gate and the heavily doped
source/drain; (2) a gate-bias dependent component between the gate and the lightly
doped source/drain region.
Bias-independent fringing capacitances are added between the gate and source as well
as the gate and drain.
Qb = Qacc + Qsub
Q = Q + Q
s
d
inv
(7.2.1)
The substrate charge can be divided into two components: the substrate
charge at zero source-drain bias (Qsub0 ), which is a function of gate to
substrate bias, and the additional non-uniform substrate charge in the
presence of a drain bias (Qsub). Qg now becomes
Q g = (Qinv + Qacc + Q sub0 + Qsub )
(7.2.2)
7-3
The total charge is computed by integrating the charge along the channel.
The threshold voltage along the channel is modified due to the nonuniform substrate charge by
(7.2.3)
Vth ( y ) = Vth (0) + ( Abulk 1)Vy
(7.2.4)
Lactive
Lactive
0
0
Lactive
Lactive
Lactive
Lactive
Qb = Wactive
qb dy = WactiveCoxe Vth VFB s + Abulk 1 Vy dy
0
0
) )
dy =
dVy
Ey
where Ey is expressed in
(7.2.5)
I ds =
7-4
(7.2.6)
Cij =
Qi
V j
C = C
ij
ij
=0
Lactive
Vgsteff ,CV
Abulk
Vgsteff ,CV
CLC CLE
Abulk 1 +
Lactive
7-5
(7.2.9)
nv
Model parameters CLC and CLE are introduced to consider the effect of
channel-length modulation. Abulk for the capacitance model is modeled by
(7.2.10)
A0 Leff
B0
1
Abulk = 1 + F doping
+
Weff '+ B1 1 + KETA Vbseff
Leff + 2 XJ X dep
where
F doping =
+ K 2ox K 3 B
TOXE
s
Weff '+W 0
7-6
zero at threshold voltage. The BSIM4 charge and capacitance models are
formulated by substituting Vgst with Vgsteff,CV as
(7.2.11)
Q(Vgst ) = Q(Vgsteff , CV )
For capacitance modeling
(7.2.12)
C (Vgst ) = C(Vgsteff , CV )
Vgsteff ,CV
Vg , d , s , b
(V
fbzb
where
(7.2.14)
V fbzb = Vth
s K1 s
7-7
} whereV = V
4
dsat,CV
(7.2.15)
Vds 4; 4 = 0.02V
7-8
(7.2.16)
y
Qs = Wactive q c 1
dy
L
active
0
Lactive
y
Q = W
dy
active q c
d
Lactive
0
Lactive
7-9
1.0
E
2
0.15
Cgg (F/cm )
0.10
E
A
0.8
0.6
0.4
0.2
-4
-3
-2
-1
0
Vgs (V)
Tox=30A
0.05
-3
Nsub=5e17cm
B
0.00
0
20
40
60
Depth (A)
Figure 7-1. Charge distribution from numerical quantum simulations show significant
charge thickness at various bias conditions shown in the inset.
CTM is a charge-based model and therefore starts with the DC charge thicknss,
XDC . The charge thicknss introduces a capacitance in series with Cox as illustrated
in Figure 7-2, resulting in an effective Coxeff. Based on numerical self-consistent
solution of Shrodinger, Poisson and Fermi-Dirac equations, universal and
analytical XDC models have been developed. Coxeff can be expressed as
(7.3.1)
Coxeff =
Coxe Ccen
Coxe + Ccen
where
Ccen = si X
DC
7-10
Vgs
Poly depl.
Vgse
Cox
Cacc
Cdep
Cinv
Figure 7-2. Charge-thickness capacitance concept in CTM. Vgse accounts for the poly
depletion effect.
0. 25
V V
VFBeff
1
NDEP
Ldebye exp ACDE
gse bseff
16
3
TOXP
2 10
where Ldebye is Debye length, and XDC is in the unit of cm and (Vgse - Vbseff - VFBeff)
/ TOXP is in units of MV/cm. For numerical statbility, (7.3.2) is replaced by (7.3.3)
(7.3.3)
X DC = X max
1
X0 +
2
X 02 + 4 x X max
7-11
where
X 0 = X max X DC x
and Xmax = Ldebye / 3;
= 10-3 TOXE.
1.9 10 9 m
1 +
2
TOXP
0 .7
Through the VFB term, equation (7.3.4) is found to be applicable to N+ or P+ polySi gates and even other future gate materials.
(iii) Body charge thickness in inversion
In inversion region, the body charge thickness effect is modeled by including the
deviation of the surface potential
MOIN K 1ox t
7-12
Qinv = 0
Subthreshold region
Qsub0 = Wactive LactiveCoxe
2
K1ox 2
Qg = Qsub0
Qinv = 0
Strong inversion region
Vdsat,cv =
Vgs Vth
Abulk '
CLC CLE
Abulk ' = Abulk 1 +
L
eff
Vth = VFBCV + s + K1ox s Vbseff
7-13
Linear region
2
Vds
Abulk 'Vds
A
'
V
2
2
(
1 Abulk ')Vds
(
1 Abulk ') Abulk 'Vds
2
A 'V
50/50 partitioning:
Qinv
2
2
Abulk 'Vds
Abulk ' Vds
2
Abulk 'Vds
12Vgs Vth
Qs = Qd = 0.5Qinv
40/60 partitioning:
(V V )2 A 'V (V V ) ( A 'V )2
V V
Abulk 'Vds Abulk 'Vds gs 6 th bulk ds8 gs th + bulk40 ds
gs
th
Qd = CoxeWactiveLactive
+
2
2
2
12 Vgs Vth Abulk2'Vds
Qs = (Q g + Qb + Q d )
0/100 partitioning:
Vgs Vth Abulk 'Vds ( Abulk 'Vds )2
Qd = CoxeWactiveLactive
+
2
4
24
Qs = (Q g + Qb + Q d )
7-14
Saturation region
V
(1 Abulk ')Vdsat
50/50 partitioning:
1
Qs = Qd = CoxeWactive Lactive (Vgs Vth )
3
40/60 partitioning:
Qd =
4
CoxeWactiveLactive (Vgs Vth )
15
Qs = (Q g + Qb + Q d )
0/100 partitioning:
Qd = 0
Qs = (Q g + Qb )
7.4.2 capMod = 1
7-15
Qsub0
2
K1ox 2
Vdsat, cv =
Qinv
Vgsteffcv
Abulk '
2
2
12 Vgsteff ,cv
2
1 A '
(1 Abulk ') Abulk 'Vcveff
bulk
2
12 Vgsteff , cv
QS = QD =
7-16
Wactive LactiveCoxe
2
2
2
Abulk' Vcveff
1
Vgsteff ,cv Abulk 'Vcveff +
Abulk 'Vcveff
2
12 Vgsteff ,cv
QS =
Wactive LactiveCoxe
A 'V
QD =
3
2
Vgsteff ,cv 3 Vgsteff ,cv Abulk 'Vcveff
2
2
2
3
+ 2 V
(A 'V ) ( Abulk 'Vcveff )
2 3 gsteff , cv bulk cveff
15
WactiveLactiveCoxe
A 'V
3
V
2
1
2
3
+ V
( A 'V ) (Abulk'Vcveff )
2 gsteff , cv bulk cveff
5
QS =
Wactive LactiveCoxe
2
2
2
A
'
V
1
bulk
cveff
12 Vgsteff , cv
Wactive LactiveCoxe
2
2
2
A
'
V
3
bulk
cveff
4 Vgsteff, cv
QD =
7.4.3 capMod = 2
Vgbacc =
1
V0 + V02 + 0.08V fbzb
2
7-17
1
Vcveff = Vdsat V1 + V12 + 0.08Vdsat
2
Vgsteff , cv
Abulk '
MOIN K 1ox t
Qsub0 = WactiveLactiveCoxeff
Qinv = WactiveLactiveCoxeff
- 1 + 1 +
2
K1ox 2
2
2
12 Vgsteff, cv
2
1 A '
2
12 Vgsteff , cv
50/50 partitioning:
QS = QD =
WactiveLactiveCoxeff
2
7-18
40/60 partitioning:
QS =
Wactive LactiveCoxeff
A 'V
QD =
3
2
(Vgsteff ,cv ) 3 (Vgsteff , cv ) Abulk 'Vcveff
2
2
2
3
+ 2 (V
)(Abulk 'Vcveff ) ( Abulk 'Vcveff )
2 3 gsteff , cv
15
WactiveLactiveCoxeff
A 'V
2
1
2
3
+ (V
)(Abulk 'Vcveff ) ( Abulk 'Vcveff )
2 gsteff ,cv
5
0/100 partitioning:
2
2
WactiveLactiveCoxeff
A
'
V
1
bulk
cveff
QS =
Vgsteff, cv + Abulk 'Vcveff
Abulk'Vcveff
2
2
12 Vgsteff ,cv
2
2
Wactive LactiveCoxeff
A
'
V
3
bulk
cveff
QD =
Vgsteff , cv Abulk 'Vcveff +
Abulk 'Vdveff
2
2
4 Vgsteff , cv
7-19
(7.5.1)
2 EPSROX
4.0e 7
CF = ----------------------------------------0 log 1 + -------------------
TOXE
7-20
4Vgs, overlap
CKAPPAS
2
CKAPPAS
(7.5.3)
1
2
Vgs, overlap = Vgs + 1 (Vgs + 1) + 41 , 1 = 0.02V
2
(ii) Drain side
(7.5.4)
Qoverlap, d
4Vgd ,overlap
CKAPPAD
= CGDOVgd + CGDLVgd Vgd ,overlap
1+ 1
Wactive
2
CKAPPAD
(7.5.5)
V gd , overlap =
1
V gd + 1
2
(V
+ 1 ) + 4 1 , 1 = 0. 02V
gd
7-21
7-22
As circuit speed and operating frequency rise, the need for accurate prediction of circuit
performance near cut-off frequency or under very rapid transient operation becomes
critical. BSIM4.0.0 provides a set of accurate and efficient high-speed/RF (radio
frequency) models which consist of three modules: charge-deficit non-quasi-static (NQS)
model, intrinsic-input resistance (IIR) model (bias-dependent gate resistance model), and
substrate resistance network model. The charge-deficit NQS model comes from
BSIM3v3.2 NQS model [11] but many improvements are added in BSIM4. The IIR model
considers the effect of channel-reflected gate resistance and therefore accounts for the
first-order NQS effect [12]. Thus, the charge-deficit NQS model and the IIR model should
not be turned on simultaneously. These two models both work with multi-finger
configuration. The substrate resistance model does not include any geometry dependence.
8-1
8-2
Qdef
Vdef
icheq(t)
8-3
Considering both the transport and charging component, the total current
related to the terminals D, G and S can be written as
(8.1.2)
iD,G ,S (t ) = I D ,G,S (DC) +
Qd , g, s (t )
t
and
(8.1.4a)
Qdef (t )
t
Qcheq (t ) Qdef (t )
(8.1.4b)
Qd , g ,s (t )
t
= D , G, S xpart
Q def (t )
8-4
(8.1.5)
I
Weff eff Coxeff k BT
1
= XRCRG 1 ds + XRCRG 2
Rii
qLeff
Vdseff
where Coxeff is the effective gate dielectric capacitance calculated from the
DC model. Note that Rii in (8.1.5) considers both the drift and diffusion
componets of the channel conduction, each of which dominates in
inversion and subthreshold regions, respectively.
Qch (t ) =
Qcheq (t )
1 + j
where is the angular frequency. Based on (8.1.6), it can be shown that the
transcapacitances Cgi , Csi, and Cdi (i stands for any of the G, D, S and B
terminals of the device) and the channel transconductances Gm, Gds, and
Gmbs all become complex quantities. For example, now Gm have the form
of
8-5
(8.1.7)
Gm =
G m0
G
+ j m0 2 2
2 2
1+
1+
and
(8.1.8)
Cdg =
Cdg 0
+
j
2 2
1 + 2 2
1+
Cdg0
Those quantities with sub 0 in the above two equations are known from
OP (operating point) analysis.
8-6
rgateMod = 1 (constant-resistance):
Rgeltd
In this case, only the electode gate resistance (bias-independent) is generated by adding an internal gate node. Rgeltd is give by
(8.1.9)
Rgeltd =
effcj
RSHG XGW + 3 NGCON
NGCON ( Ldrawn XGL) NF
Rgeltd+R ii
8-7
In this case, the gate resistance is the sum of the electrode gate resistance
(8.1.9) and the intrinsic-input resistance R ii as given by (8.1.5). An internal gate node will be generated. trnqsMod = 0 (default) and acnqsMod =
0 (default) should be selected for this case.
Rgeltd
Cgso
Rii
Cgdo
In this case, the gate electrode resistance given by (8.1.9) is in series with
the intrinsic-input resistance R ii as given by (8.1.5) through two internal
gate nodes, so that the overlap capacitance current will not pass through
the intrinsic-input resistance. trnqsMod = 0 (default) and acnqsMod = 0
(default) should be selected for this case.
8-8
rbodyMod = 1 (On):
All five resistances in the substrate network as shown schematically
below are present simultaneously.
8-9
IDS
Iii + IGIDL
sbNode
RBPS
RBPD
dbNode
bNodePrime
RBPB
RBSB
RBDB
bNode
Figure 8-3. Topology with the substrate resistance network turned on.
8-10
The following noise sources in MOSFETs are modeled in BSIM4 for SPICE noise
ananlysis: flicker noise (also known as 1/f noise), channel thermal noise and induced gate
noise and their correlation, thermal noise due to physical resistances such as the source/
drain, gate electrode, and substrate resistances, and shot noise due to the gate dielectric
tunneling current. A complete list of the noise model parameters and explanations are
given in Appendix A.
9.1.2 Equations
9-1
kBTq2effIds
CoxeLeff Abulkf 10
2
Nl + N
k TI L
NOIA+ NOIB Nl + NOIC Nl
2
W L f 10
Nl + N*
2
B ds
clm
2 ef
10
eff
eff
where eff is the effective mobility at the given bias condition, and Leff and
Weff are the effective channel length and width, respectively. The parameter
N0 is the charge density at the source side given by
9-2
(9.1.3)
N 0 = Coxe Vgsteff q
AbulkVdseff
N l = Coxe Vgsteff 1
V
gsteff + 2 t
N* is given by
(9.1.5)
N* =
k BT (Coxe + Cd + CIT )
q2
+ EM
Litl
L clm = Litl log
E sat
2VSAT
E sat =
eff
9-3
(9.1.7)
Sid , subVt( f ) =
NOIA k BT I ds2
Weff Leff f
EF
N * 1010
id2 =
4 kBTf
Rds (V ) +
Leff 2
eff Qinv
NTNOI
9-4
(9.2.2)
Qinv = WactiveLactiveCoxeff
AbulkVdseff
Abulk2Vdseff 2
NF Vgsteff
+
A V
2
12 Vgsteff bulk2 dseff
v d2
i d2
i d2
Source side
(a) tnoiMod = 0
(b) tnoiMod = 1
tnoiMod = 1 (holistic)
In this thermal noise model, all the short-channel effects and velocity
saturation effect incorporated in the IV model are automatically included,
hency the name holistic thermal noise model. In addition, the
amplification of the channel thermal noise through Gm and Gmbs as well as
the induced-gate noise with partial correlation to the channel thermal noise
are all captured in the new noise partition model. Figure 9-1b shows
schematically that part of the channel thermal noise source is partitioned to
the source side.
The noise voltage source partitioned to the source side is given by
9-5
(9.2.3)
vd 2 = 4k BT tnoi2
Vdseff f
I ds
and the noise current source put in the channel region with gate and body
amplication is given by
(9.2.4)
id = 4 kBT
2
Vdseff f
I ds
where
(9.2.5)
2
Vgsteff
tnoi = RNOIB 1 + TNOIB Leff
E
L
sat eff
and
(9.2.6)
Vgsteff
EsatLeff
where RNOIB and RNOIA are model parameters with default values 0.37
and 0.577 respectively.
9-6
9-7
10-1
dioMod = 0 (resistance-free)
(10.1.1)
qVbs
I bs = I sbs exp
NJS k BTNOM
1 f breakdown + Vbs Gmin
q ( BVS + Vbs )
f breakdown = 1 + XJBVS exp
NJS k BTNOM
10-2
(10.1.4)
qVbs
I bs = I sbs exp
NJS k BTNOM
1 + Vbs G min
dioMod = 2 (resistance-and-breakdown):
Diode breakdown is always modeled. The exponential term (10.1.5) is
linearized at both the limiting current IJTHSFWD in the forward-bias mode
and the limiting current IJTHSREV in the reverse-bias mode.
(10.1.5)
qVbs
I bs = I sbs exp
NJS k BTNOM
1 f breakdown + Vbs Gmin
dioMod = 0 (resistance-free)
(10.1.6)
qVbd
I bd = I sbd exp
NJD k BTNOM
1 f breakdown + Vbd G min
10-3
(10.1.7)
I sbd = Adeff J sd (T ) + Pdeff J sswd (T ) + Weffcj NF J sswgd (T )
q (BVD + Vbd )
f breakdown = 1 + XJBVD exp
NJD k BTNOM
1 + Vbd Gmin
dioMod = 2 (resistance-and-breakdown):
Diode breakdown is always modeled. The exponential term (10.1.10) is
linearized at both the limiting current IJTHSFWD in the forward-bias mode
and the limiting current IJTHSREV in the reverse-bias mode.
10-4
(10.1.10)
qVbd
I bd = I sbd exp
NJD k BTNOM
1 f breakdown + Vbd G min
10-5
where Cjbs is the unit-area bottom S/B junciton capacitance, Cjbssw is the
unit-length S/B junction sidewall capacitance along the isolation edge, and
Cjbsswg is the unit-length S/B junction sidewall capacitance along the gate
edge. The effective area and perimeters in (10.2.1) are given in Chapter 11.
Cjbs is calculated by
if Vbs < 0
(10.2.2)
Vbs
C jbs = CJS (T ) 1
PBS (T )
MJS
otherwise
10-6
(10.2.3)
Vbs
C jbs = CJS (T ) 1 + MJS
PBS (T )
Cjbssw is calculated by
if Vb s < 0
(10.2.4)
Vbs
C jbssw = CJSWS (T ) 1
PBSWS (T )
MJSWS
otherwise
(10.2.5)
Vbs
PBSWS (T )
Cjbsswg is calculated by
if Vb s < 0
(10.2.6)
C jbsswg
Vbs
= CJSWGS (T ) 1
PBSWGS (T )
MJSWGS
otherwise
10-7
(10.2.7)
C jbsswg
Vbs
= CJSWGS (T ) 1
PBSWGS (T )
MJSWGS
C jbd
Vbd
= CJD(T ) 1
PBD (T )
otherwise
(10.2.10)
Vbd
C jbd = CJD (T ) 1 + MJD
PBD (T )
10-8
Cjbdsw is calculated by
if Vbd < 0
(10.2.11)
Vbd
C jbdsw = CJSWD(T ) 1
PBSWD (T )
MJSWD
otherwise
(10.2.12)
Vbd
PBSWD (T )
Cjbdswg is calculated by
if Vbd < 0
(10.2.13)
C jbdswg
Vbd
= CJSWGD(T ) 1
PBSWGD(T )
MJSWGD
otherwise
(10.2.14)
Vbd
PBSWGD(T )
10-9
11-1
Geometry Definition
DMCI of
Point contact, isolated
DMCG of
Wide contact, shared
DMDG
No contact, merged
Ldrawn-XGL
XGW
DMCI of
Wide contact
11-2
In the above, Pseff and Aseff will be used to calculate junction diode IV and
CV. Pseff does not include the gate-edge perimeter.
11-3
Else if ( rgeoMod == 0)
Drain diffusion resistance R ddiff is not generated.
Else
R ddiff computed from NF, DWJ, geoMod , DMCG, DMCI, DMDG,
DMCGT, RSH, and MIN .
Rgeltd =
(11.2.1)
effcj
RSHG XGW + 3 NGCON
NGCON ( Ldrawn XGL) NF
11-4
End source
End drain
Note
0
1
2
3
4
5
6
7
8
9
10
isolated
isolated
shared
shared
isolated
shared
merged
merged
merged
sha/iso
shared
isolated
shared
isolated
shared
merged
merged
isolated
shared
merged
shared
sha/iso
NF=Odd
NF=Odd, Even
NF=Odd, Even
NF=Odd, Even
NF=Odd
NF=Odd, Even
NF=Odd
NF=Odd, Even
NF=Odd
NF=Even
NF=Even
11-5
rgeoMod
End-source contact
End-drain contact
0
1
2
3
4
5
6
7
8
No Rsdiff
wide
wide
point
point
wide
point
merged
merged
No R ddiff
wide
point
wide
point
merged
merged
wide
point
11-6
T
KT1L
Leff
TNOM
12-1
(12.2.1)
U 0(T ) = U 0(TNOM ) (T TNOM )
UTE
(12.2.2)
UA(T ) = UA(TNOM ) + UA1 (T TNOM 1)
(12.2.3)
UB (T ) = UB(TNOM ) + UB1 (T TNOM 1)
and
(12.2.4)
If TEMPMOD = 1,
(12.2.5)
U 0(T ) = U 0(TNOM ) (T TNOM )
UTE
(12.2.6)
12-2
(12.2.8)
(12.4.1)
RDSW (T ) = RDSW (TNOM ) + PRT (T TNOM 1)
(12.4.2)
RDSWMIN (T ) = RDSWMIN (TNOM ) + PRT (T TNOM 1)
12-3
If TEMPMOD = 1,
(12.4.7)
12-4
(12.4.10)
where
(12.5.2)
E g (TNOM ) Eg (T )
T
+ XTIS ln
TNOM
v (TNOM ) vt (T )
J ss (T ) = JSS (TNOM ) exp t
NJS
12-5
(12.5.3)
Eg (TNOM ) E g (T )
T
+ XTIS ln
TNOM
v (TNOM ) vt (T )
J ssws (T ) = JSSWS (TNOM ) exp t
NJS
and
(12.5.4)
Eg (TNOM ) E g (T )
T
+ XTIS ln
TNOM
v (TNOM ) vt (T )
J sswgs (T ) = JSSWGS (TNOM ) exp t
NJS
where
(12.5.6)
Eg (TNOM ) Eg (T )
T
+ XTID ln
TNOM
v (TNOM ) vt (T )
J sd (T ) = JSD(TNOM ) exp t
NJD
12-6
(12.5.7)
Eg (TNOM ) Eg (T )
T
+ XTID ln
TNOM
v (TNOM ) vt (T )
J sswd (T ) = JSSWD (TNOM ) exp t
NJD
and
(12.5.8)
E g (TNOM ) Eg (T )
T
+ XTID ln
TNOM
v (TNOM ) vt (T )
J sswgd (T ) = JSSWGD(TNOM ) exp t
NJD
12-7
(12.6.3)
Drain-side diode
The temperature dependences of zero-bias unit-length/area junction
capacitances on the drain side are modeled by
(12.6.7)
12-8
(12.6.9)
7.02 10 4TNOM 2
TNOM + 1108
and
12-9
(12.7.2)
Eg (T ) = 1.16
7.02 10 4T 2
T + 1108
ni = 1.45e10
qEg (TNOM )
TNOM TNOM
exp 21.5565981
300.15 300.15
2 k BT
12-10
CMOS feature size aggressively scaling makes shallow trench isolation(STI) very
popular active area isolatiohn process in advanced technologies. Recent years, strain
channel materials have been employed to achieve high device performance. The
mechanical stress effect induced by these process causes MOSFET performance
function of the active area size(OD: oxide definition) and the location of the device
in the active area. And the necessity of new models to describe the layout
dependence of MOS parameters due to stress effect becomes very urgent in advance
CMOS technologies.
Influence of stress on mobility has been well known since the 0.13um technology.
The stress influence on saturation velocity is also experimentally demonstrated.
Stress-induced enhancement or suppression of dopant diffusion during the
processing is reported. Since the doping profile may be changed due to different STI
sizes and stress, the threshold voltage shift and changes of other second-order
effects, such as DIBL and body effect, were shown in process integration.
BSIM4 considers the influence of stress on mobility, velocity saturation, threshold
voltage, body effect, and DIBL effect.
13-1
eff
effo
So,
(12.3.2)
eff
effo
= 1 + eff
13-2
the other side, respectively. 2D simulation shows that stress distribution can be
expressed by a simple function of SA and SB.
L
Trench
isolation
edge
SA
SB
LOD
LOD = SA + SB + L
13-3
KU0
(Inv _ sa + Inv _ sb)
Kstress _ u0
Where:
Inv _ sa =
1
S A + 0.5 Ldrawn
Inv _ sb =
1
S B + 0.5 Ldrawn
LKU0
WKU0
Kstress _ u0 = 1 +
+
LLODKU0
( Wdrawn + XW + WLOD )WLODKU0
( Ldrawn + XL )
+
( Ldrawn + XL )
LLODKU0
PKU0
( W drawn + XW + WLOD )WLODKU0
Temperatur e
1+ TKU 0
1
TNOM
So that:
(12.3.4)
eff =
1 + eff ( SA , SB )
1 + eff ( SAref , SBref )
effo
(12.3.5)
sattemp =
1 + K VSAT eff ( SA , SB )
1 + KVSAT eff ( SAref , SB ref )
sattempo
Where effo , sato are low field mobility, saturation velocity at SAref, SB ref
and SAref , SBref are reference distances between OD edge to poly from one and
the other side.
13-4
13.1.2Vth-related Equations
Vth0, K2 and ETA0 are modified to cover the doping profile change in the devices
with different LOD. They use the same 1/LOD formulas as shown in
section(13.1.1), but different equations for W and L scaling:
KVTH0
(Inv _ sa + Inv _ sb Inv _ sa ref Inv _ sb ref )
Kstress_vth0
(13.1.6)
STK2
(Inv _ sa + Inv _ sb Inv _ sa ref Inv _ sbref )
(13.1.7)
Kstress_vth0 LODK2
STETA0
ETA0 = ETA0 original +
( Inv _ sa + Inv _ sb Inv _ sa ref Inv _ sbref ) (13.1.8)
Kstress_vth0 LODETA0
K 2 = K 2 original +
Where:
Kstress _ vth0 = 1 +
Inv _ sa ref =
S Aref
Kstress_ vth0 =1 +
lkvth0
wkvth0
+
llodkvth
( Ldrawn + XL)
(Wdrawn + XW + wlod) wlodkvth
1
+ 0 .5 Ldrawn
Inv _ sb ref =
SB ref
1
+ 0 .5 Ldrawn
LKVTH0
WKVTH0
+
LLODKVTH
( Ldrawn + XL)
(Wdrawn + XW + WLOD)WLODKVTH
13-5
Inv _ sa =
Inv _ sb =
1
NF
NF 1
1
NF
NF 1
1
drawn + i ( SD + Ldrawn )
SA + 0.5 L
i =0
1
drawn + i ( SD + Ldrawn )
SB + 0.5 L
i= 0
L
Trench isolation
edge
SB
SA
LOD
SD
13-6
SAeff
n
1
swi
1
=
(13.2.1)
SBeff
n
1
swi
1
=
(13.2.2)
Fig.(13.4) A typical layout of MOS devices with more instance parameters (swi,
sai and sbi) in addition to the traditional L and W
13-7
14-1
Extraction Strategy
device performance quite well. Values extracted in this manner will now have
some physical relevance.
14-2
Extraction Procedure
Large W and L
Orthogonal Set of W and L
Wmin
L
Lmin
Figure 13-1. Device geometries used for parameter extraction
14-3
Extraction Procedure
threshold voltage VTH0, and the body effect coefficients K1 and K2 which
depend on the vertical doping concentration distribution. The set of devices
with a fixed large channel width but different channel lengths are used to
extract parameters which are related to the short channel effects. Similarly,
the set of devices with a fixed, long channel length but different channel
widths are used to extract parameters which are related to narrow width
effects. Regardless of device geometry, each device will have to be
measured under four, distinct bias conditions.
(1) Ids vs. Vgs @ Vds = 0.05V with different Vbs .
(2) Ids vs. Vds @ Vbs = 0V with different Vgs .
(3) Ids vs. Vgs @ Vds = Vdd with different Vbs.
(4) Ids vs. Vds @ Vbs = Vbb with different Vgs . (|Vbb | is the maximum body
bias).
14.3.2Optimization
The optimization process recommended is a combination of NewtonRaphson's iteration and linear-squares fit of either one, two, or three
variables. A flow chart of this optimization process is shown in Figure 132. The model equation is first arranged in a form suitable for NewtonRaphson's iteration as shown in (14.3.1):
(14.3.1)
fexp (P10, P20, P30 ) fsim( P1(m) , P2( m) , P3(m) ) =
14-4
Extraction Procedure
Initial Guess of
Parameters P
Model Equations
Fit Routine
P
(m+1)
i
(m)
=P
P
P
+ P
i
i
(m)
<
no
yes
STOP
To change (14.3.1) into a form that a linear least-squares fit routine can be
used (i.e. in a form of y = a + bx1 + cx 2), both sides of (14.3.1) are divided
14-5
Extraction Procedure
by fsim / P1 . This gives the change in P1, P1(m) , for the next iteration
such that:
(14.3.2)
Pi
( m + 1)
Pi( m )
+ Pi( m )
where i=1, 2, 3 for this example. The (m+1) parameter values for P2 and P3
are obtained in an identical fashion. This process is repeated until the
incremental parameter change in parameter values Pi (m) are smaller than
a pre-determined value. At this point, the parameters P1, P2 , and P3 have
been extracted.
14.3.3Extraction Routine
Before any model parameters can be extracted, some process parameters
have to be provided. They are listed below in Table 13-1:
Input Parameters Names
Physical Meaning
NDEP
TNOM
Ldrawn
W drawn
XJ
Junction depth
14-6
Extraction Procedure
VTH0, K1, K2
Step 2
Extracted Parameters & Fitting Target
Data
Step 3
Extracted Parameters & Fitting Target
Data
14-7
Extraction Procedure
Step 4
Extracted Parameters & Fitting Target
Data
Step 5
Extracted Parameters & Fitting Target
Data
Step 6
Extracted Parameters & Fitting Target
Data
14-8
Extraction Procedure
Step 7
Extracted Parameters & Fitting Target
Data
Step 8
Extracted Parameters & Fitting Target
Data
K3, K3B, W0
Step 9
Extracted Parameters & Fitting Target
Data
MINV, VOFF, VOFFL, NFACTOR,
CDSC, CDSCB
Fitting Target Exp. Data: Subthreshold
region Ids(Vgs, Vbs)
14-9
Extraction Procedure
Step 10
Extracted Parameters & Fitting Target
Data
CDSCD
Fitting Target Exp. Data: Subthreshold
region Ids(Vgs, Vbs)
Step 11
Extracted Parameters & Fitting Target
Data
DWB
Fitting Target Exp. Data: Strong Inversion region I ds(Vgs, Vbs )
Step 12
Extracted Parameters & Fitting Target
Data
VSAT, A0, AGS, LAMBDA, XN, VTL, One Set of Devices (Large and Fixed W &
LC
Different L).
Fitting Target Exp. Data: Isat (Vgs, Vbs)/W I ds vs. Vds @ Vbs = 0V at Different Vgs
A1, A2 (PMOS Only)
Fitting Target Exp. Data Vdsat (Vgs)
14-10
Extraction Procedure
Step 13
Extracted Parameters & Fitting Target
Data
B0, B1
One Set of Devices (Large and Fixed L &
Fitting Target Exp. Data: Isat (Vgs, Vbs)/W Different W).
I ds vs. Vds @ Vbs = 0V at Different Vgs
Step 14
Extracted Parameters & Fitting Target
Data
DWG
One Set of Devices (Large and Fixed L &
Fitting Target Exp. Data: Isat (Vgs, Vbs)/W Different W).
I ds vs. Vds @ Vbs = 0V at Different Vgs
Step 15
Extracted Parameters & Fitting Target
Data
PSCBE1, PSCBE2
Step 16
Extracted Parameters & Fitting Target
Data
14-11
Extraction Procedure
Step 17
Extracted Parameters & Fitting Target
Data
DROUT, PDIBLC1, PDIBLC2
Fitting Target Exp. Data: (DROUT,
PDIBLC1, PDIBLC2, L)
Step 18
Extracted Parameters & Fitting Target
Data
PDIBLCB
Step 19
Extracted Parameters & Fitting Target
Data
14-12
Extraction Procedure
Step 20
Extracted Parameters & Fitting Target
Data
Step 21
Extracted Parameters & Fitting Target
Data
KETA
Step 22
Extracted Parameters & Fitting Target
Data
14-13
Extraction Procedure
Step 23
Extracted Parameters & Fitting Target
Data
Step 24
Extracted Parameters & Fitting Target
Data
Step 24
Extracted Parameters & Fitting Target
Data
14-14
Extraction Procedure
14-15
Description
Default
value
Binnable?
Note
LEVEL
(SPICE3
parameter)
14
NA
BSIM4
also set as
the default
model in
SPICE3
VERSION
4.3.0
NA
Berkeley
Latest official release
BINUNIT
NA
PARAMCHK
NA
Parameters
checked
MOBMOD
NA
RDSMOD
NA
Rd s(V)
modeled
internally
through IV
equation
IGCMOD
NA
OFF
IGBMOD
NA
OFF
CAPMOD
NA
RGATEMOD
(Also an
instance
parameter)
(no gate
resistance)
A-1
Parameter
name
RBODYMOD
(Also an
instance
parameter)
Description
Substrate resistance network model
selector
Default
value
Binnable?
Note
NA
( network
off)
TRNQSMOD
(Also an
instance
parameter)
NA
OFF
ACNQSMOD
(Also an
instance
parameter)
NA
OFF
FNOIMOD
NA
TNOIMOD
NA
DIOMOD
NA
TEMPMOD
No
If 0,original model
is used
If 1, new
format
used
PERMOD
GEOMOD
(Also an
instance
parameter)
RGEOMOD
(Instance
parameter
only)
A-2
1 (including
the gateedge perimeter)
NA
NA
NA
(isolated)
0 (no S/D
diffusion
resistance)
Process Parameters
Description
Default
value
Binnable?
Note
3.9 (SiO 2 )
No
Typically
greater
than or
equal to
3.9
EPSROX
TOXE
3.0e-9m
No
Fatal error
if not positive
TOXP
TOXE
No
Fatal error
if not positive
TOXM
TOXE
No
Fatal error
if not positive
DTOX
Defined as (TOXE-TOXP)
0.0m
No
XJ
1.5e-7m
Yes
GAMMA1 (1
in equation)
calculated
V 1/2
Note-1
GAMMA2 (2
in equation)
calculated
V 1/2
Note-1
NDEP
1.7e17cm-3
Yes
Note-2
NSUB
6.0e16cm-3
Yes
NGATE
0.0cm-3
Yes
NSD
1.0e20cm-3
Yes
VBX
calculated
(V)
No
Note-3
XT
Doping depth
1.55e-7m
Yes
A-3
Process Parameters
Parameter
name
Description
Default
value
Note
Binnable?
RSH
0.0ohm/
square
No
Should not
be negative
RSHG
0.1ohm/
square
No
Shoule not
be negative
A-4
Description
Long-channel threshold voltage at
Vb s=0
Default
value
0.7V
(NMOS)
Binnable?
Note
Yes
Note-4
-0.7V
(PMOS)
VFB
Flat-band voltage
-1.0V
Yes
Note-4
PHIN
0.0V
Yes
K1
0.5V1/2
Yes
Note-5
K2
0.0
Yes
Note-5
K3
80.0
Yes
Yes
V -1
K3B
0.0
W0
2.5e-6m
Yes
LPE0
1.74e-7m
Yes
LPEB
0.0m
Yes
VBM
-3.0V
Yes
DVT0
2.2
Yes
DVT1
0.53
Yes
DVT2
-0.032V -1
Yes
DVTP0
0.0m
Yes
Not modeled if
binned
DVTP0
<=0.0
0.0V -1
Yes
DVTP1
A-5
Parameter
name
Description
Default
value
Binnable?
Note
DVT0W
0.0
Yes
DVT1W
5.3e6m -1
Yes
DVT2W
-0.032V -1
Yes
U0
Low-field mobility
0.067
m2 /(Vs)
Yes
(NMOS);
0.025
m2 /(Vs)
PMOS
UA
1.0e-9m/V
for
MOBMOD
=0 and 1;
1.0e-15m/V
for
MOBMOD
=2
Yes
UB
1.0e-19m2 /
Yes
-0.0465V-1
for MOBMOD=1;
-0.0465e-9
Yes
UC
V2
m/V2 for
MOBMOD
=0 and 2
EU
VSAT
Saturation velocity
A-6
1.67
(NMOS);
1.0 (PMOS)
8.0e4m/s
Yes
Parameter
name
Description
Default
value
Binnable?
Note
A0
1.0
Yes
AGS
0.0V -1
Yes
charge effect
B0
0.0m
Yes
B1
0.0m
Yes
KETA
-0.047V -1
Yes
A1
0.0V -1
Yes
A2
1.0
Yes
WINT
0.0m
No
LINT
0.0m
No
DWG
0.0m/V
Yes
DWB
0.0m/V1/2
Yes
VOFF
-0.08V
Yes
VOFFL
0.0mV
No
MINV
0.0
Yes
inversion condition
NFACTOR
1.0
Yes
ETA0
0.08
Yes
ETAB
-0.07V-1
Yes
DSUB
DROUT
Yes
CIT
0.0F/m 2
Yes
A-7
Parameter
name
Description
Default
value
Binnable?
Note
CDSC
2.4e-4F/m2
Yes
CDSCB
0.0F/(Vm2)
Yes
CDSCD
0.0(F/Vm2)
Yes
PCLM
1.3
Yes
PDIBLC1
0.39
Yes
PDIBLC2
0.0086
Yes
PDIBLCB
0.0V -1
Yes
DROUT
0.56
Yes
PSCBE1
4.24e8V/m
Yes
PSCBE2
1.0e-5m/V
Yes
PVAG
0.0
Yes
DELTA
( in equation)
0.01V
Yes
FPROUT
0.0V/m 0.5
Yes
Not modeled if
binned
FPROUT
not positive
PDITS
0.0V -1
Yes
Not modeled if
binned
PDITS=0;
Fatal error
if binned
PDITS
negative
Rout
A-8
Parameter
name
Description
Default
value
Binnable?
Note
PDITSL
0.0m-1
No
Fatal error
if PDITSL
negative
PDITSD
0.0V -1
Yes
0.0
Yes
If not
given or
(<=0.0),
velocity
overshoot
will be
turned off
2.05e5[m/s]
Yes
If not
given or
(<=0.0),
source end
thermal
velocity
will be
turned off
VTL
Thermal velocity
LC
0.0[m]
No
5e9[m] at
room temperature
XN
3.0
Yes
A-9
RDSWMIN
RDW
Description
Default
value
Binnable?
Note
200.0
Yes
If negative,
reset to 0.0
No
Yes
ohm(m)
ohm(m)WR
WR
0.0
Zero bias lightly-doped drain resistance Rd (V) per unit width for RDSMOD=1
ohm(m)WR
RDWMIN
0.0
ohm(m)WR
No
RSW
Zero bias lightly-doped source resistance Rs(V) per unit width for RDSMOD=1
100.0
Yes
No
RSWMIN
100.0
ohm(m)WR
0.0
ohm(m)WR
PRWG
1.0V -1
Yes
PRWB
0.0V -0.5
Yes
WR
1.0
Yes
NRS (instance
parameter
only)
1.0
No
NRD (instance
parameter
only)
1.0
No
A-10
Description
Default
value
Binnable?
Note
0.0Am/V
Yes
ALPHA0
ALPHA1
0.0A/V
Yes
BETA0
30.0V
Yes
Description
Default
value
Binnable?
Note
0.0mho
Yes
I gidl=0.0 if
binned
AGIDL
=0.0
BGIDL
2.3e9V/m
Yes
I gidl=0.0 if
binned
BGIDL
=0.0
CGIDL
0.5V 3
Yes
EGIDL
0.8V
Yes
A-11
Description
Default
value
0.43
2
(Fs /g)
BIGBACC
0.5
Binnable?
Note
Yes
Yes
-1
0.054
(Fs2 /g)0.5
m-1 V -1
CIGBACC
0.075V-1
Yes
NIGBACC
1.0
Yes
Fatal error
if binned
value not
positive
AIGBINV
0.35
Yes
Yes
(Fs2/g) 0.5m -1
BIGBINV
0.03
(Fs2 /g)0.5
m-1 V -1
CIGBINV
0.006V-1
Yes
EIGBINV
1.1V
Yes
NIGBINV
3.0
Yes
Fatal error
if binned
value not
positive
AIGC
0.054
(NMOS) and
0.31
(PMOS)
Yes
(Fs2/g) 0.5m -1
A-12
Parameter
name
BIGC
Description
Parameter for Igcs and I gcd
Default
value
Binnable?
Note
Yes
Yes
Yes
Yes
Yes
LINT
Yes
0.054
(NMOS) and
0.024
(PMOS)
(Fs2 /g)0.5
m-1 V -1
CIGC
0.075
(NMOS) and
0.03
(PMOS) V -1
AIGSD
0.43
(NMOS) and
0.31
(PMOS)
(Fs2/g) 0.5m -1
BIGSD
0.054
(NMOS) and
0.024
(PMOS)
(Fs2 /g)0.5
m-1 V -1
CIGSD
0.075
(NMOS) and
0.03
(PMOS) V -1
DLCIG
NIGC
1.0
Yes
Fatal error
if binned
value not
positive
POXEDGE
1.0
Yes
Fatal error
if binned
value not
positive
A-13
Parameter
name
Description
Default
value
Binnable?
Note
PIGCD
1.0
Yes
Fatal error
if binned
value not
positive
NTOX
1.0
Yes
TOXREF
3.0e-9m
No
Fatal error
if not positive
A-14
Description
Default
value
Binnable?
Note
0.0
No
XPART
CGSO
calculated
(F/m)
No
Note-6
CGDO
calculated
(F/m)
No
Note-6
CGBO
0.0
F/m
Note-6
CGSL
0.0F/m
Yes
CGDL
0.0F/m
Yes
CKAPPAS
0.6V
Yes
CKAPPAD
CKAPPAS
Yes
CF
calculated
(F/m)
Yes
Note-7
CLC
1.0e-7m
Yes
CLE
0.6
Yes
DLC
LINT (m)
No
DWC
WINT (m)
No
VFBCV
-1.0V
Yes
NOFF
1.0
Yes
0.0V
Yes
strong inversion
VOFFCV
A-15
Parameter
name
Description
ACDE
MOIN
Default
value
Binnable?
Note
1.0m/V
Yes
15.0
Yes
A-16
Description
Parameter for distributed channelresistance effect for both intrinsicinput resistance and charge-deficit
NQS models
Default
value
Binnable?
12.0
Yes
Note
Warning
message
issued if
binned
XRCRG1
<=0.0
XRCRG2
RBPB
(Also an
instance
parameter)
RBPD
(Also an
instance
parameter)
RBPS
(Also an
instance
parameter)
1.0
Yes
50.0ohm
No
If less than
1.0e-3ohm,
reset to
1.0e-3ohm
50.0ohm
No
If less than
1.0e-3ohm,
reset to
1.0e-3ohm
50.0ohm
No
If less than
1.0e-3ohm,
reset to
1.0e-3ohm
RBDB
(Also an
instance
parameter)
RBSB
(Also an
instance
parameter)
GBMIN
50.0ohm
No
If less than
1.0e-3ohm,
reset to
1.0e-3ohm
50.0ohm
No
If less than
1.0e-3ohm,
reset to
1.0e-3ohm
1.0e-12mho
No
Warning
message
issued if
less than
1.0e-20
mho
A-17
Description
Flicker noise parameter A
Default
value
Binnable?
Note
6.25e41
No
No
No
4.1e7V/m
No
-1 1-
(eV) s
m-3 for
NMOS;
EF
6.188e40
(eV)-1s1for
PMOS
EF m-3
NOIB
3.125e26
-1 1-
(eV) s
m-1 for
NMOS;
EF
1.5e25
(eV)-1s1for
PMOS
EF m-1
NOIC
8.75
-1 1-EF
(eV) s
EM
Saturation field
AF
1.0
No
EF
1.0
No
KF
0.0
No
A 2-EFs1-EF F
NTNOI
1.0
No
TNOIA
1.5E6
No
TNOIB
3.5E6
No
A-18
Parameter
name
Description
Default
value
Binnable?
Note
RNOIA
0.577
No
RNOIB
0.37
No
A-19
Description
Default
value
Binnable?
Note
DMCG
0.0m
No
DMCI
DMCG
No
DMDG
0.0m
No
DMCGT
0.0m
No
NF
No
Fatal error
if less than
one
DWC (in
CVmodel)
No
No
(instance
parameter
only)
DWJ
MIN
(instance
parameter
only)
(minimize
the drain diffusion number)
XGW
0.0m
No
XGL
0.0m
No
XL
0.0m
No
A-20
Parameter
name
Description
XW
NGCON
Default
value
Binnable?
0.0m
No
No
Fatal error
if less than
one; if not
equal to 1
or 2, warning message issued
and reset to
1
Note
A-21
Description
Default
value
Binnable?
Note
IJTHSREV
No
No
No
Note-8
No
No
No
IJTHDREV
=0.1A
IJTHDREV
=IJTHSREV
IJTHSFWD
IJTHDFWD
IJTHSFWD
=0.1A
IJTHDFWD
=IJTHSFWD
XJBVS
XJBVD
XJBVS=1.0
XJBVD
=XJBVS
BVS
Breakdown voltage
BVS=10.0V
BVD
BVD=BVS
JSS
JSD
JSS=
1.0e-4A/m2
JSD=JSS
JSWS
JSWD
JSWS
=0.0A/m
JSWD
=JSWS
A-22
Parameter
name
(separate for
source and drain
side as indicated
in the names)
JSWGS
JSWGD
Description
Gate-edge sidewall reverse saturation
current density
Default
value
Binnable?
Note
JSWGS
No
No
MJS=0.5
MJD=MJS
No
MJSWS
=0.33
No
No
No
No
=0.0A/m
JSWGD
=JSWGS
CJS
CJD
CJS=5.0e-4
F/m
CJD=CJS
MJS
MJD
MJSWS
MJSWD
MJSWD
=MJSWS
CJSWS
CJSWD
CJSWS=
5.0e-10
F/m
CJSWD
=CJSWS
CJSWGS
CJSWGD
CJSWGS
=CJSWS
CJSWGD
=CJSWS
MJSWGS
MJSWGD
MJSWGS
=MJSWS
MJSWGD
=MJSWS
A-23
Parameter
name
(separate for
source and drain
side as indicated
in the names)
PB
Description
Bottom junction built-in potential
Default
value
Binnable?
Note
PBS=1.0V
No
No
No
PBD=PBS
PBSWS
PBSWD
PBSWS
=1.0V
PBSWD
=PBSWS
PBSWGS
PBSWGD
PBSWGS
=PBSWS
PBSWGD
=PBSWS
A-24
Description
Default
value
Binnable?
Note
TNOM
27 oC
No
UTE
-1.5
Yes
KT1
-0.11V
Yes
KT1L
0.0Vm
Yes
KT2
0.022
Yes
UA1
1.0e-9m/V
Yes
UB1
-1.0e-18
Yes
Yes
(m/V)2
UC1
0.056V-1 for
MOBMOD=1;
0.056e-9m/
V2 for
MOBMOD=0 and
2
AT
3.3e4m/s
Yes
PRT
0.0ohm-m
Yes
NJS, NJD
NJS=1.0;
No
NJD=NJS
No
XTIS, XTID
XTIS=3.0;
XTID=XTIS
A-25
Parameter
name
Description
Default
value
Binnable?
Note
TPB
Temperature coefficient of PB
0.0V/K
No
TPBSW
0.0V/K
No
TPBSWG
0.0V/K
No
TCJ
Temperature coefficient of CJ
0.0K -1
No
TCJSW
0.0K -1
No
TCJSWG
0.0K -1
No
A-26
Description
Default
value
Binnable?
Note
SA (Instance
Parameter)
0.0
If not
given
or(<=0),
stress
effect will
be turned
off
SB (Instance
Parameter)
0.0
If not
given
or(<=0),
stress
effect will
be turned
off
SD (Instance
Parameter)
0.0
For NF>1
:If not
given
or(<=0),
stress
effect will
be turned
off
SAref
1E-06[m]
No
>0.0
SBref
1E-06[m]
No
>0.0
WLOD
0.0[m]
No
KU0
Mobility degradation/enhancement
coefficient for stress effect
0.0[m]
No
KVSAT
0.0[m]
No
1<=kvsat<
=1
TKU0
0.0
No
A-27
Parameter
name
Description
Default
value
Binnable?
Note
LKU0
0.0
No
WKU0
0.0
No
LLODKU0
0.0
No
>0
WLODKU0
0.0
No
>0
KVTH0
0.0[Vm]
No
LKVTH0
0.0
No
WKVTH0
0.0
No
PKVTH0
0.0
No
LLODVTH
0.0
No
>0
WLODVTH
0.0
No
>0
STK2
0.0[m]
No
LODK2
1.0
No
STETA0
0.0[m]
No
LODETA0
1.0
No
A-28
>0
>0
dW and dL Parameters
Descrition
Default
name
Binnable?
Note
No
WL
0.0m WLN
WLN
1.0
No
WW
0.0mWWN
No
WWN
1.0
No
WWL
0.0
No
0.0mLLN
No
1.0
No
WWN+WLN
LL
LLN
LW
0.0m LWN
No
LWN
1.0
No
LWL
0.0
No
mLWN+LLN
LLC
LL
No
LWC
LW
No
LWLC
LWL
No
WLC
WL
No
A-29
Parameter
name
Descrition
Default
name
Binnable?
Note
WWC
WW
No
WWLC
WWL
No
Description
Default
value
Binnable?
Note
LMIN
0.0m
No
LMAX
1.0m
No
WMIN
0.0m
No
WMAX
1.0m
No
A-30
2q si NDEP
Coxe
Notes 1-8
2 =
2 q si NSUB
Coxe
12Coxe 2
NDEP =
2q si
If both 1 and NDEP are not given, NDEP defaults to 1.7e17cm -3
and 1 is calculated from NDEP.
A-31
Notes 1-8
( 1 2 )(
2 s
s VBX s
s VBM s + VBM
A-32
Notes 1-8
TOXE
Note-8:
For dioMod = 0, if XJBVS < 0.0, it is reset to 1.0.
For dioMod = 2, if XJBVS <=0.0, it is reset to 1.0.
For dioMod = 0, if XJBVD < 0.0, it is reset to 1.0.
For dioMod = 2, if XJBVD <=0.0, it is reset to 1.0.
A-33
Parameter
name
Description
Default
value
Binnable?
Note
TOXE
3.0e-9m
No
Fatal error
if not positive
TOXP
TOXE
No
Fatal error
if not positive
DTOX
Defined as (TOXE-TOXP)
0.0m
No
XJ
1.5e-7m
Yes
Yes
Note-2
Yes
Note-4
0.5V1/2
Yes
Note-5
0.0
Yes
Note-5
1.74e-7m
Yes
NDEP
1.7e17cm-3
VTH0 or VTHO
0.7V
(NMOS)
-0.7V
(PMOS)
K1
K2
LPE0
DVT0
2.2
Yes
DVT1
0.53
Yes
U0
Low-field mobility
0.067
2
m /(Vs)
(NMOS);
0.025
Yes
m2 /(Vs)
PMOS
VSAT
Saturation velocity
8.0e4m/s
Yes
B-1
Parameter
name
Description
Default
value
Binnable?
Note
WINT
0.0m
No
LINT
0.0m
No
VOFF
-0.08V
Yes
NFACTOR
1.0
Yes
ETA0
0.08
Yes
PCLM
1.3
Yes
RDSW
200.0
Yes
If negative,
reset to 0.0
ohm(m)WR
ALPHA0
0.0Am/V
Yes
BETA0
30.0V
Yes
CGSO
calculated
(F/m)
No
Note-6
CGDO
calculated
(F/m)
No
Note-6
CGBO
0.0
F/m
Note-6
DLC
LINT (m)
No
DWC
WINT (m)
No
NOFF
1.0
Yes
0.0V
Yes
strong inversion
VOFFCV
NTNOI
1.0
No
TNOIA
1.5E6
No
TNOIB
3.5E6
No
B-2
Parameter
name
JSS
JSD
Description
Bottom junction reverse saturation
current density
Default
value
Binnable?
Note
JSS=
No
No
1.0e-4A/m2
JSD=JSS
CJS
CJD
CJS=5.0e-4
F/m2
CJD=CJS
WW
0.0mWWN
No
WWN
1.0
No
LL
0.0mLLN
No
LLN
1.0
No
B-3
Appendix C: References
[1] Y. C. King, H. Fujioka, S. Kamohara, K. Chen, and Chenming Hu, DC electrical oxide thickness model
for quantization of the inversion layer in MOSFETs, Semicond. Sci. Technol., vol. 13, pp. 963-966, 1998.
[2] Weidong Liu, Xiaodong Jin, Yachin King, and Chenming Hu, An efficient and accurate compact model
for thin-oxide-MOSFET intrinsic capacitance considering the finite charge layer thickness, IEEE Trans.
Electron Devices, vol. ED-46, May, 1999.
[3] Kanyu M. Cao, Weidong Liu, Xiaodong Jin, Karthik Vasanth, Keith Green, John Krick, Tom Vrotsos,
and Chenming Hu, Modeling of pocket implanted MOSFETs for anomalous analog behavior, Tech.
Dig. of IEDM , pp. 171-174, 1999.
[4] Z.H. Liu, C. Hu, J.H. Huang, T.Y. Chan, M.C. Jeng, P.K. Ko, and Y.C. Cheng,Threshold Voltage
Model For Deep-Submicrometer MOSFETs, IEEE Tran. Electron Devices, vol. 40, pp. 86-95, 1993.
[5] J.A. Greenfield and R.W. Dutton, Nonplanar VLSI Device Analysis Using the Solution of Poisson's
Equation, IEEE Trans. Electron Devices, vol. ED-27, p.1520, 1980.
[6] H. S. Lee, An Analysis of the Threshold Voltage for Short-Channel IGFET's, Solid-State Electronics,
vol.16, p.1407, 1973.
[7] Yuhua Cheng and Chenming Hu, MOSFET Modeling & BSIM3 Users Guide, Kluwer Academic
Publishers, 1999.
[8] C. Hu, S. Tam, F.C. Hsu, P.K. Ko, T.Y. Chan and K.W. Kyle, "Hot-Electron Induced MOSFET
Degradation - Model, Monitor, Improvement," IEEE Trans. Electron Devices, vol. 32, pp. 375-385, 1985.
[9] T. Y. Chen, J. Chen, P. K. Ko, C. Hu, The impact of gate-induced drain leakage current on MOSFET
scaling, Tech. Digest of IEDM, pp. 718-721, 1987.
C-1
[10] S. A. Parke, E. Moon, H-J. Wenn, P. K. Ko, and C. Hu, Design for suppression of gate-induced drain
leakage in LDD MOSFETs using a quasi 2D analytical model, IEEE Trans. Electron Devices, vol. 39,
no. 7, pp 1694-1703, 1992.
[11] Weidong Liu, Xiaodong Jin, J. Chen, M. Jeng, Z. Liu, Y. Cheng, K. Chen, M. Chan, K. Hui, J. Huang,
R. Tu, P. Ko, and Chenming Hu, BSIM3v3.2 MOSFET Model and Users Manual, http://wwwdevice.eecs.berkeley.edu/~bsim3.
[12] Xiaodong Jin, J-J Ou, C-H Chen, Weidong Liu, Paul Gray, and Chenming Hu, An effective gate
resistance model for CMOS RF and noise modeling, Tech. Dig. of IEDM, pp. 961-964, 1998.
[13] Mansun Chan, K. Hui, R. Neff, C. Hu, P. Ko, A Relaxation time Approach to Model the Non-QuasiStatic Transient Effects in MOSFETs, Tech. Dig. of IEDM , pp. 169-172, 1994.
[14] K.K. Hung, P. Ko, C. Hu, and Y. C. Cheng, A Physics-Based MOSFET Noise Model for Circuit
Simulators, IEEE Trans. Electron Devices, vol. 37, no. 5, pp. 1323-1333, 1990.
[15] Weidong Liu, Kanyu M. Cao, Xiaodong Jin, and Chenming Hu, BSIM4.0.0 Technical Notes, http://
www-device.eecs.berkeley.edu/~bsim3/bsim4.html.
[16] R.A.Bianchi, G.Bouche and O.Roux-dit-Buisson, "Accurate Modeling of Trench Isolation Induced
Mechanical Stress Effect on MOSFET Electrical Performance," IEDM 2002, pp. 117-120.
C-2