Lithography

Bonding

Spin Coat, Spin Dry

Delta 6 RC Table Top

To receive a quote from your local

sales office go to: www.suss.com
or send an email to: Delta@suss.com

Features and benefits

Pieces up to 6, Wafers up to 6,
Substrates up to 55

Integrated splash ring

Remote control unit

Programmable process time, speed and

acceleration

For wafer drying or coating

Vacuum and low contact chuck

50 recipes, each with 10 steps

Robust and convenient control

Module for bench mounting

Available as Table Top Spinner in polypropylene housing

Testing

The DELTA 6 RC spin coater module is a simple and

economical module for applying highly accurate processing to wafers up to 6 ( 150 mm) or substrates
up to 55 (125125 mm). The DELTA 6 RC spin
coater module consists of a bench mounted spinner
unit and a remote control unit which is connected by
a flexible cable and can be located outside the immediate work area. The wafer is held by a vacuum chuck
or by a low contact chuck. The specially designed
spinning bowl, in combination with an integrated splash
ring, allows a non splashing coating or drying process.
For safety reasons the spinning bowl is covered by a
transparent, sensor controlled lid.

Wet Processing

Delta 6 RC Bench Mounted

System Configuration

ASIA

EC-Motor
Ten programmable steps
Number of recipes: 50
Number of steps per recipe: 10
Acceleration approx. 3000 rpm/sec programmable
in 10 steps
Programmable process spin speed up to 6.000 rpm
Programmable process time from 1 up to 999 sec
Manual ON/OFF-vacuum switch
Integrated vacuum gauge
Drain connection: OD 32 mm polypropylene tube

SUSS MicroTec KK (Japan)

GITC 1-18-2, Hakusan, Midori-ku
Yokohama, Kanagawa, Japan 226-0006
Phone (+81)-45-931-5600 Fax (+81)-45-931-5601

Requirements
Voltage: 230 VAC; 50/60 Hz; 2 A
or 110 VAC; 60 Hz; 4 A
Vacuum: min. 0.7 bar
N2 (optional): 5 6 bar
Media disposal: bottle or house drain

Options
Table top cabinet
Nitrogen blow off
Vacuum pump

Dimensions
Spinner module (WDH):
325325270 mm (12.812.810.6)
Controller (WDH):
28714460 mm (11.35.72.4)

SUSS MicroTec (Shanghai) Co., Ltd.

580 Nanjing W. Rd
Nanzheng Building Room 606 200041 Shanghai PRC
Phone (+86) 21-52340432 Fax (+86) 21-52340430
SUSS MicroTec (Taiwan) Co., Ltd.
8F-11 No. 81 Shui-Lee Road
Hsin-Chu 300 Taiwan
Phone (+886)-(3)-5169098 Fax (+886)-(3)-5169262
SUSS MicroTec Co., LTD (South and Northeast Asia)
3388/92-93 25th Floor Sirinrat Building
Rama IV Road Klongtoey Bangkok 10110 Thailand
Phone (+66)-(0)-2350 6038 Fax (+66)-(0)-2633 5728

EUROPE
SUSS MicroTec Ltd.
Unit 1 Scopwick Lodge Farm
Scopwick Heath Lincolnshire LN4 3DL England
Phone (+44)-(0) 1526-323147 Fax (+44)-(0) 1526-322214
SUSS MicroTec S.A.S.
BP24 131 Impasse Barteudet F-74490 Saint Jeoire France
Phone (+33)-(0) 4 50 35 83 92 Fax (+33)-(0) 4 50 35 88 01
SUSS MicroTec Test Systems GmbH
Sss-Strasse 1 D-01561 Sacka/Dresden Germany
Phone (+49)-(0) 35240-73-0 Fax (+49)-(0) 35240-73-700
SUSS MicroTec Lithography GmbH
Schleissheimer Strasse 90
D-85748 Garching/Munich Germany
Phone (+49)-(0) 89/3 20 07- 0 Fax (+49)-(0) 89/3 20 07-162

NORTH AMERICA
SUSS MicroTec Inc.
Western Regional Sales Office
8240 So. Kyrene Road Suite 101 Tempe, AZ 85284-2117 USA
Phone (+1) (480) 557-9370 Fax (+1) (480) 557-9371
SUSS MicroTec Inc.
228 Suss Drive Waterbury Center, VT 05677 USA
Phone (+1) (802) 244-5181 Fax (+1) (802) 244-5103

Data, design and specification of custom built machines

depend on individual process conditions and can vary
according to equipment configurations. Not all specifications may be valid simultaneously. Illustrations in this
brochure are not legally binding. SUSS reserves the right
to change machine specifications without prior notice.