Scanning Electron

Microscopy (SEM)

In a SEM, electrons interact with a sample's atoms to produce shattered electrons,

X-rays and visible light. All of these signals can be collected and analysed using
ISAAC's instruments to provide a wealth of information about a sample's
properties, including morphology, microstructure and composition.

Imaging
Electron Backscatter Diffraction (EBSD)
Chemical Analysis

Fundamental Analysis Using Backscatter Electron Detectors (BSED)

The AQC is based on a standard electron microscope configuration (Figure 1). It
utilizes a Tungsten emitter source to generate electrons. Electrons are then focused to
a point on the membrane surface and the beam is swept left-to-right and top-tobottom in a coarse stepping pattern. During the interaction of the beam at each pixel,
carbon and oxygen molecules of the membrane generate backscatter electrons (BSE).
The efficiency of BSE generation from the membrane is fairly inefficient so very few
BSE are detected by the backscatter electron detector (BSED) position above the
sample.

Figure 1. Analyzer Set-Up

As beam continues to scan through the sample (Figure 2), the BSED signal is
continually monitored and once the beam interacts with a feature, the BSED signal will
increase. This is due to an observable increase in the average atomic number of the
sample, in this case the atomic changes from C-O to an aluminum or stainless steel
particle.

Figure 2. Automated Feature Analysis

An increase in the atomic number increases the efficiency of BSE generation (Figure
3), resulting in an increase BSED signal on the analyzer. Once a feature is detected, a
measuring algorithm is engaged, whereby the size and shape of the particle is
determined. Finally, the beam is positioned on the particle to determine its elemental
composition. This process is unique to the PSEM due to its integrated hardware and
software package and allows particle detection ranging from 30 nm to 5 mm. Without
require image processing like all other SEMequipment requires, analysis times are
reduced upwards of 10-fold. Finally, the PSEM provides additional flexibility for particle
shape analysis of complex irregular shaped features.

Figure 3. Backscatter Electron Contrast

Back Scattered Electrons

Produced by elastic
interactions of beam
electrons with nuclei of
atomsin the specimen
Energy loss less than 1 eV,

Scattering angles range up to 180,

but average about 5

Many incident electrons

undergo a series of such
elastic event that cause them
to be scattered back out of the
specimen
The fraction of beam electrons
backscattered in this way varies
strongly with the atomic number Z
of the scattering atoms, but does not
change much with changes in .

Because of this dependence of on atomic number, images produced using BSE show
characteristic atomic number contrast.
That is, features of high average Z
appear brighter than those of low
average Z