Air Flow Concepts for modular Cleanrooms

In connection with Air Conditioning Units, there are two basic air-handling
concepts for modular Cleanrooms that find common use:
A) Fan Filter Unit Concept
B) Ducted air-supply concept with terminal end-filters
Whilst concept A) can run independently or with an Air Conditioning System, concept B) will always
need and active air-supply or an Air Conditioning System.
The Air Conditioning System is being used when temperature and humidity control of the Cleanroom
air is required.
On the following pages the respective system variants are being described.

A) Fan Filter Unit Concept

According to the Cleanroom class required by the customer and as defined by the related
international norm (i.e. ISO 14644 ff., Fed. Std. 209E), a certain air-exchange rate and filter coverage
is required.
The Fan Filter Unit (FFU) concept allows the placement of individual filter boxes that are equipped
with an air-fan and a filter (HEPA or ULPA) onto the Cleanroom ceiling.
The air from the surrounding area will be drawn in by the FFU and is then supplied to the Cleanroom
in a filtered, non-turbulent (laminar) manner.

min.
400mm

1.
2.
3.
4.
5.
6.

Filter Section (open)

Modular Base Frame
Cleanroom Ceiling
Fan Filter Unit (FFU)
Pre-Filter of FFU
Softwall Curtain or
Single Shell Hardwall
7. Cleanroom

Open ceiling system with either softwall curtains or hardwall partitions

If the air surrounding the cleanroom is supplied from an air-conditioning system, then conditioned air
is being re-circulated via the FFUs to the Cleanroom.
Alternatively, if it is not suitable to re-circulate the air as described above, it is possible to create a so
called closed-loop system.

Air Flow Concepts for modular Cleanrooms

The FFUs are fitted into a closed ceiling (Plenum) and the air entering the cleanroom is transported
back to the plenum via return air channels.

1. Filter Section (closed)

min.
2. Modular Base Frame
550mm

3. Cleanroom Ceiling
4. Fan Filter Unit (FFU)
5. Return-Air Filter
Softwall Curtain or
Single Shell Hardwall
(inside)
7. Cleanroom
8. Outer Cleanroom
9. Air Plenum
10. Partition Walls / Frame
11. Outer CR ceiling

Our system
design is based
on this approch

Treated fresh air

unit

Closed system with an air-plenum and re-circulated air-flow

Cooling coil to take care room

sensible load
Alternatively the above described system can be combined with an air-conditioning system.

13

1.
2.
3.
4.
5.
6.

7.
8.
9.
10.
11.
12.
13.
14.

Filter Section (closed)

Modular Base Frame
Cleanroom Ceiling
Fan Filter Unit (FFU)
Return-Air Filter
Softwall Curtain or
Single Shell Hardwall
(inside)
Cleanroom
Outer Cleanroom
Air Plenum
Partition Walls / Frame
Outer CR ceiling
Return-Air approx. 15%
Supply Air (Conditioned)
Fresh-Air approx. 10%

AirConditioning
Unit

14

12
Closed system with an air-plenum, an re-circulated air-flow and an air-conditioning system
Date: 18.07.2013, MS

No return back to
AHU

100% fresh air to

page 2 of 8
full fill the fresh
air requirement
only

Air Flow Concepts for modular Cleanrooms

Optional: Fan Filter Unit Concept with an independently operating (air-flow) work-area

14. Machine
Enclosure or
work-space
with an
integrated airsupply and
air-return
system.
15. Air-supply
and Air-return
(off-air)

15

14

Integrated work-areas (machine-enclosures) can be operated independently from the air-handling

system of the Cleanroom.
Instead of exchanging the complete amount of air within the Cleanroom, only a small portion is being
exchanged right where needed. This reduces the overall investment and maintenance cost of the airhandling system.
In order to remain an over-pressure within the Cleanroom, it is important to pay attention to the aircontrol system and the use of adjustable dampers in the ducting system.
The same concept applies also to the air-distribution systems,- such as described in the following
chapter B).

Date: 18.07.2013, MS

page 3 of 8

Air Flow Concepts for modular Cleanrooms

Optional: Fan Filter Unit Concept with Split-system cooling Fan Filter Units open room structure,
without an air-plenum

8
To outside
condensor
unit

min.
550mm

1.
2.
3.
4.
5.
6.

Ceiling Filter Area

Modular Base Frame
Cleanroom Ceiling (no air-plenum)
Fan Filter Unit (FFU)
Pre-Filter of FFU
Softwall Curtain or Single Shell
Hardwall
7. Cleanroom
8. FFU-with Split-Colling/Heating Unit

Open ceiling system with either softwall curtains or hardwall partitions and Fan Filter Units

Optional: Fan Filter Unit Concept with Air-Conditioning System and hooded Fan Filter Units open
room structure without an air-plenum

1.
2.
3.
4.
5.
6.
7.
8.
9.
10.

Return-Air Wall
Cleanroom Wall
Cleanroom Ceiling (no air-plenum)
Fan Filter Unit (with and without hood)
Pre-Filter of FFU
Single shell Hard-Wall
Cleanroom
Fan Filter Unit with ducted hood
Return-Air duct to Air-Handling Unit
Air-Handling Unit,- cooling/heating only

Air- 10
Conditioning
Unit
9
Open ceiling system with either softwall curtains or hardwall partitions and hooded Fan Filter Units
Date: 18.07.2013, MS

page 4 of 8

Air Flow Concepts for modular Cleanrooms

B) Ducted air-supply concept with filters
Here the air is being supplied by an external air-handling or air-conditioning system.
As the air is supplied to the air-plenum, Cleanroom ceiling integrated terminal end-filters are required.

This type of air-handling is widely used.

The disadvantage of that concept lies in the fact that not only the complete amount of room-air is
being returned to the air-handling unit (AHU) via large ducts, but also that the related energy
consumption is very high. Another issue is that it is difficult to control the air-flow locally in order to
create zones of different cleanliness.
Optional:
Instead of terminal end-filters, the air is being
distributed to the Cleanroom by so called
textile ducts.
These textile ducts are round or in a semi circular shape and allow a low velocity, nonturbulent airflow within the Cleanroom.
The material is made of Nylon (or other) and
can be removed easily for washing.
The air for the Cleanroom is filtered at the airhandling unit before entering the textile ducts.
The advantage is that large metal duct
systems above the Cleanroom ceiling are no
longer required and therefor the overall cost
can be reduced.
This system can be used in Cleanrooms up to a class 100.
Schematic drawings on the following pages show different system variants.

Date: 18.07.2013, MS

page 5 of 8

Air Flow Concepts for modular Cleanrooms

1

4
6

1.
2.
3.
4.
5.
6.
7.
8.

Textile Duct
Modular Base Frame
Cleanroom Ceiling
Air-Distribution Box
Return-Air approx. 15%
Supply Air (Filtered)
Surrounding Room Air
approx. 10%
Air Handling Unit & Filter

8
Air-Handling
Unit

Ducted Air-Supply System with an Air-Handling / Air-Conditioning Unit

3
4

13

1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
12.
13.
14.
15.
16.

Air-Handling
Unit

Textile Duct
Modular Base Frame
Cleanroom Ceiling
Air-Distribution Box
Return-Air Filter
Return-Air Wall / Cleanroom wall
Cleanroom
Return-Air Duct
Air-Plenum
Supply Air (Filtered)
Return-Air approx. 15%
Outside Air approx. 10%
Air Conditioning Unit & Filter
Fan Filter Unit (FFU)
Return-Air Grille
Surrounding Building

12

11
Ducted Air-Supply System with an Air-Conditioning System

Date: 18.07.2013, MS

page 6 of 8

Air Flow Concepts for modular Cleanrooms

14

16

1
6

Air-Handling
AirUnit
Handling
Unit
15

Ducted Air-Supply System with an Air-Conditioning System in combination with FFUs

In combination with an Air Handling / Air-Conditioning System Fan Filter Units (FFUs) can be used.
The outside air (see pos. 7.) will be drawn not from the surrounding room, but from outside the
building.
The following picture shows a Cleanroom with a ducted air-supply system.
Instead of textile ducts, standard filter-boxes with air-grilles are being used.

Project OCT, Stuttgart, Germany, view of return-air-ducts placed on the outside of the Cleanroom

Date: 18.07.2013, MS

page 7 of 8

Air Flow Concepts for modular Cleanrooms

Comparison of the two Air-Handling Systems:
Type of System

Pro

Fan Filter Units

Individual Control of each of the

FFUs and therefore regulated airflow where it is required
Easy replacement of filter and
individual FFUs. If one FFU needs
maintenance, the remaining units
can still service the Cleanroom
Different zones of cleanliness can
be created within a Cleanroom.

Con

Needs at least 600mm of clear

space above the Cleanroom
ceiling. Not always suitable for low
room heights.
In some configurations,- especially
very large Cleanrooms,- the costs
may be higher than with a ducted
system.
Type of System

Pro

Ducted System

Easy to install, with an Air-Handling

Unit being separated from the
Cleanroom for servicing.
Easy Filter-Change
Price similar to other systems
Optimizes Cleanroom height where
the surrounding outside room height
is not high enough.

Con

No sectional air-flow control

possible
Longer shut-down time when the
textile duct needs to be
maintained.
More room outside the Cleanroom
required for ductwork and AirHandling Unit

Date: 18.07.2013, MS

page 8 of 8