Nanoelectromechanical systems (NEMS):

Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical
functionality on the nanoscale. NEMS form the logical next miniaturization step from so-called
microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like
nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical,
biological, and chemical sensors. The name derives from typical device dimensions in the nanometer
range, leading to low mass, high mechanical resonance frequencies, potentially large quantum
mechanical effects such as zero point motion, and a high surface-to-volume ratio useful for surfacebased sensing mechanisms. Uses include accelerometers, or detectors of chemical substances in the
air.

Contents

1 Overview

2 Importance for AFM

3 Approaches to miniaturization

4 Materials
o

4.1 Carbon allotropes

4.1.1 Metallic carbon nanotubes

4.1.2 Difficulties

5 Simulations

6 Future of NEMS

7 Applications

8 References

9 External links

Overview
Because of the scale on which they can function, NEMS are expected to significantly impact many
areas of technology and science and eventually replace MEMS. As noted by Richard Feynman in his
famous talk in 1959, "There's Plenty of Room at the Bottom," there are a lot of potential applications
of machines at smaller and smaller sizes; by building and controlling devices at smaller scales, all
technology benefits. Among the expected benefits include greater efficiencies and reduced size,
decreased power consumption and lower costs of production in electromechanical systems.
In 2000, the first very-large-scale integration (VLSI) NEMS device was demonstrated by researchers
from IBM. Its premise was an array of AFM tips which can heat/sense a deformable substrate in order
to function as a memory device. Further devices have been described by Stefan de Haan. In 2007, the
International Technical Roadmap for Semiconductors (ITRS) contains NEMS Memory as a new entry
for the Emerging Research Devices section.

Importance for AFM

A key application of NEMS is atomic force microscope tips. The increased sensitivity achieved by
NEMS leads to smaller and more efficient sensors to detect stresses, vibrations, forces at the atomic
level, and chemical signals. AFM tips and other detection at the nanoscale rely heavily on NEMS. If
implementation of better scanning devices becomes available, all of nanoscience could benefit from
AFM tips.

Approaches to miniaturization
Two complementary approaches to fabrication of NEMS can be found. The top-down approach uses
the traditional microfabrication methods, i.e. optical and electron beam lithography, to manufacture
devices. While being limited by the resolution of these methods, it allows a large degree of control
over the resulting structures. Typically, devices are fabricated from metallic thin films or etched
semiconductor layers.
Bottom-up approaches, in contrast, use the chemical properties of single molecules to cause singlemolecule components to (a) self-organize or self-assemble into some useful conformation, or (b) rely
on positional assembly. These approaches utilize the concepts of molecular self-assembly and/or
molecular recognition. This allows fabrication of much smaller structures, albeit often at the cost of
limited control of the fabrication process.
A combination of these approaches may also be used, in which nanoscale molecules are integrated
into a top-down framework. One such example is the carbon Nanotube nanomotor.

Materials
Carbon allotropes
Many of the commonly used materials for NEMS technology have been carbon based, specifically
diamond,[6][7] carbon nanotubes and graphene. This is mainly because of the useful properties of
carbon based materials which directly meet the needs of NEMS. The mechanical properties of carbon
(such as large Young's modulus) are fundamental to the stability of NEMS while the metallic and
semiconductor conductivities of carbon based materials allow them to function as transistors.
Both graphene and diamond exhibit high Young's modulus, low density, low friction, excessively low
mechanical dissipation,[ and large surface area. The low friction of CNTs, allow practically
frictionless bearings and has thus been a huge motivation towards practical applications of CNTs as
constitutive elements in NEMS, such as nanomotors, switches, and high-frequency oscillators. Carbon
nanotubes and graphene's physical strength allows carbon based materials to meet higher stress
demands, when common materials would normally fail and thus further support their use as a major
materials in NEMS technological development.
Along with the mechanical benefits of carbon based materials, the electrical properties of carbon
nanotubes and graphene allow it to be used in many electrical components of NEMS. Nanotransistors
have been developed for both carbon nanotubes as well as graphene. Transistors are one of the basic
building blocks for all electronic devices, so by effectively developing usable transistors, carbon
nanotubes and graphene are both very crucial to NEMS.
Metallic carbon nanotubes
Metallic carbon nanotubes have also been proposed for nanoelectronic interconnects since they can
carry high current densities. This is a very useful property as wires to transfer current are another
basic building block of any electrical system. Carbon nanotubes have specifically found so much use
in NEMS that methods have already been discovered to connect suspended carbon nanotubes to other
nanostructures. This allows carbon nanotubes to be structurally set up to make complicated
nanoelectric systems. Because carbon based products can be properly controlled and act as
interconnects as well as transistors, they serve as a fundamental material in the electrical components
of NEMS.
Difficulties

Despite all of the useful properties of carbon nanotubes and graphene for NEMS technology, both of
these products face several hindrances to their implementation. One of the main problems is carbons
response to real life environments. Carbon nanotubes exhibit a large change in electronic properties
when exposed to oxygen. Similarly, other changes to the electronic and mechanical attributes of
carbon based materials must fully be explored before their implementation, especially because of their
high surface area which can easily react with surrounding environments. Carbon nanotubes were also
found to have varying conductivities, being either metallic or semiconducting depending on their
helicity when processed.[15] Because of this, very special treatment must be given to the nanotubes
during processing, in order to assure that all of the nanotubes have appropriate conductivities.
Graphene also has very complicated electric conductivity properties compared to traditional
semiconductors as it lacks an energy band gap and essentially changes all the rules for how electrons
move through a graphene based device. This means that traditional constructions of electronic devices
will likely not work and completely new architectures must be designed for these new electronic
devices.

Simulations
Computer simulations have long been important counterparts to experimental studies of NEMS
devices. Through continuum mechanics and molecular dynamics (MD), important behaviors of
NEMS devices can be predicted via computational modeling before engaging in experiments.
Additionally, combining continuum and MD techniques enables engineers to efficiently analyze the
stability of NEMS devices without resorting to ultra-fine meshes and time-intensive simulations.
Simulations have other advantages as well: they do not require the time and expertise associated with
fabricating NEMS devices; they can effectively predict the interrelated roles of various
electromechanical effects; and parametric studies can be conducted fairly readily as compared with
experimental approaches. For example, computational studies have predicted the charge distributions
and pull-in electromechanical responses of NEMS devices. Using simulations to predict mechanical
and electrical behaviour of these devices can help optimize NEMS device design parameters.

Future of NEMS
Key hurdles currently preventing the commercial application of many NEMS devices include lowyields and high device quality variability. Before NEMS devices can actually be implemented,
reasonable integrations of carbon based products must be created. A recent step in that direction has
been demonstrated for diamond, achieving a processing level comparable to that of silicon. The focus
is currently shifting from experimental work towards practical applications and device structures that
will implement and profit from of such novel devices. The next challenge to overcome involves
understanding all of the properties of these carbon-based tools, and using the properties to make
efficient and durable NEMS with low failure rates.
NEMS devices, if implemented into everyday technologies, could further reduce the size of modern
devices and allow for better performing sensors. Carbon-based materials have served as prime
materials for NEMS use, because of their exceptional mechanical and electrical properties. Once
NEMS interactions with outside environments are integrated with effective designs, they will likely
become useful products to everyday technologies.