Veeco AFM DiInnova USER MANUAL-B (004-1005-000) PDF

GL,QQRYD
User Manual
For SPM and Software
004-1005-000 (Standard)
004-1005-100 (Cleanroom)
Copyright [2008] Veeco Instruments Inc.

All rights reserved.
Document Revision History

Section(s) Affected
Ref.
DCR
Revision
Date
Approval
02A
5/2007
Pre-Release Draft
N/A
D.Kasai
1/2008
Initial Release
N/A
D.Kasai
11/3/08
New Updates
N/A
D. Paszkeicz
Notices: The information in this document is subject to change without notice. NO WARRANTY OF ANY KIND IS MADE WITH REGARD TO
THIS MATERIAL, INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A
PARTICULAR PURPOSE. No liability is assumed for errors contained herein or for incidental or consequential damages in connection with the
furnishing, performance, or use of this material. This document contains proprietary information which is protected by copyright. No part of this
document may be photocopied, reproduced, or translated into another language without prior written consent.
Copyright: Copyright 2004 Veeco Instruments Inc. All rights reserved.
Trademark Acknowledgments: The following are registered trademarks of Veeco Instruments Inc. All other trademarks are the property of their
respective owners.
Product Names:
NanoScope
MultiMode
Dimension
BioScope
BioScope II
CP II
Atomic Force Profiler
Dektak
Innova
Caliber
(AFP )
Software Modes:
TappingMode
Tapping
TappingMode+
LiftMode
AutoTune
TurboScan
Fast HSG
PhaseImaging
DekMap 2
HyperScan
StepFinder
SoftScan
Hardware Designs:
TrakScan
StiffStage
Hardware Options:
TipX
Signal Access Module and SAM
Extender
TipView
Interleave
LookAhead
Quadrex
Software Options:
NanoScript
Navigator
FeatureFind
Miscellaneous:
NanoProbe
WARRANTY INFORMATION
This product is covered by the terms of the Veeco standard warranty as in effect on the date of shipment
and as reflected on Veeco's Order Acknowledgement and Quote. While a summary of the warranty
statement is provided below, please refer to the Order Acknowledgement or Quote for a complete
statement of the applicable warranty provisions. In addition, a copy of these warranty terms may be
obtained by contacting Veeco.
WARRANTY. Seller warrants to the original Buyer that new equipment will be free of defects in material
and workmanship for a period of one year commencing (x) on final acceptance or (y) 90 days from
shipping, whichever occurs first. This warranty covers the cost of parts and labor (including, where
applicable, field service labor and travel required to restore the equipment to normal operation).
Seller warrants to the original Buyer that replacement parts will be new or of equal functional quality and
warranted for the remaining portion of the original warranty or 90 days, whichever is longer.
Seller warrants to the original Buyer that software will perform in substantial compliance with the written
materials accompanying the software. Seller does not warrant uninterrupted or error-free operation.
Sellers obligation under these warranties is limited to repairing or replacing at Sellers option defective
non-expendable parts or software. These services will be performed, at Sellers option, at either Sellers
facility or Buyers business location. For repairs performed at Sellers facility, Buyer must contact Seller in
advance for authorization to return equipment and must follow Sellers shipping instructions. Freight
charges and shipments to Seller are Buyers responsibility. Seller will return the equipment to Buyer at
Sellers expense. All parts used in making warranty repairs will be new or of equal functional quality.
The warranty obligation of Seller shall not extend to defects that do not impair service or to provide
warranty service beyond normal business hours, Monday through Friday (excluding Seller holidays). No
claim will be allowed for any defect unless Seller shall have received notice of the defect within thirty days
following its discovery by Buyer. Also, no claim will be allowed for equipment damaged in shipment sold
under standard terms of F.O.B. factory. Within thirty days of Buyers receipt of equipment, Seller must
receive notice of any defect which Buyer could have discovered by prompt inspection. Products shall be
considered accepted 30 days following (a) installation, if Seller performs installation, or (b) shipment;
unless written notice of rejection is provided to Seller within such 30-day period.
Expendable items, including, but not limited to, lamps, pilot lights, filaments, fuses, mechanical pump
belts, V-belts, wafer transport belts, pump fluids, O-rings and seals ARE SPECIFICALLY EXCLUDED
FROM THE FOREGOING WARRANTIES AND ARE NOT WARRANTED. All used equipment is sold
AS IS, WHERE IS, WITHOUT ANY WARRANTY, EXPRESS OR IMPLIED.
Seller assumes no liability under the above warranties for equipment or system failures resulting from (1)
abuse, misuse, modification or mishandling; (2) damage due to forces external to the machine including,
but not limited to, acts of God, flooding, power surges, power failures, defective electrical work,
transportation, foreign equipment/attachments or Buyer-supplied replacement parts or utilities or services
such as gas; (3) improper operation or maintenance or (4) failure to perform preventive maintenance in
accordance with Sellers recommendations (including keeping an accurate log of preventive maintenance).
In addition, this warranty does not apply if any equipment or part has been modified without the written
permission of Seller or if any Seller serial number has been removed or defaced.
No one is authorized to extend or alter these warranties on Sellers behalf without the written authorization
of Seller.
THE ABOVE WARRANTIES ARE EXPRESSLY IN LIEU OF ANY OTHER EXPRESS OR IMPLIED
WARRANTIES (INCLUDING THE WARRANTY OF MERCHANTABILITY), AND OF ANY OTHER
OBLIGATION ON THE PART OF SELLER. SELLER DOES NOT WARRANT THAT ANY
EQUIPMENT OR SYSTEM CAN BE USED FOR ANY PARTICULAR PURPOSE OR WITH ANY
PARTICULAR PROCESS OTHER THAN THAT COVERED BY THE APPLICABLE PUBLISHED
SPECIFICATIONS.
NO CONSEQUENTIAL DAMAGES. LIMITATION OF LIABILITY. Seller shall not be liable for
consequential damages, for anticipated or lost profits, incidental, indirect, special or punitive damages, loss
of time, loss of use, or other losses, even if advised of the possibility of such damages, incurred by Buyer
or any third party in connection with the equipment or services provided by Seller. In no event will Sellers
THE ABOVE WARRANTIES ARE EXPRESSLY IN LIEU OF ANY OTHER EXPRESS OR IMPLIED
WARRANTIES (INCLUDING THE WARRANTY OF MERCHANTABILITY), AND OF ANY OTHER
OBLIGATION ON THE PART OF SELLER. SELLER DOES NOT WARRANT THAT ANY
EQUIPMENT OR SYSTEM CAN BE USED FOR ANY PARTICULAR PURPOSE OR WITH ANY
PARTICULAR PROCESS OTHER THAN THAT COVERED BY THE APPLICABLE PUBLISHED
SPECIFICATIONS.
NO CONSEQUENTIAL DAMAGES. LIMITATION OF LIABILITY. Seller shall not be liable for
consequential damages, for anticipated or lost profits, incidental, indirect, special or punitive damages, loss
of time, loss of use, or other losses, even if advised of the possibility of such damages, incurred by Buyer
or any third party in connection with the equipment or services provided by Seller. In no event will Sellers
liability in connection with the equipment or services provided by Seller exceed the amounts paid to Seller
by Buyer hereunder.
Service
Field service is available nationwide. Service and installations are performed by factory trained Veeco
service personnel. Contact the Veeco Metrology sales/service office for prompt service.
Veeco Instruments Inc.
112 Robin Hill Road
Santa Barbara CA 93117
Attn.: Service Center
Phone: (805) 967-2700
Fax: (805) 967-7717
www.veeco.com
Disclaimer:
Some images contained in this document may differ from installed equipment. The differences are usually
cosmetic only and still provide useful references for the accompanying text.
Table of Contents
Ch. 1 - Introduction 1
1.1 Overview of Manual ................................................................................................ 1
1.2 Safety ....................................................................................................................... 1
1.3 Microscope Specifications ....................................................................................... 2
1.3.1 Special Hardware Requirements.....................................................................2
1.3.2 Scanner Types.................................................................................................2
1.3.3 Scanning Techniques ......................................................................................2
1.4 SPM Fundamentals .................................................................................................. 4
1.4.1 Terminology....................................................................................................4
1.4.2 SPM Overview................................................................................................5
1.4.3 The Feedback Loop ........................................................................................6
1.4.4 Scan Size, Scan Rate, Feedback Parameters (gains) and Setpoint .................7
1.4.5 Main menu items ..........................................................................................11
1.4.6 Z Position Bar: Monitoring the Scanner's Position......................................14
1.4.7 Feedback Signal: Monitoring the Feedback Signal and Setpoint Values ....15
1.4.8 Setpoint: Setting the Reference Signal for the Feedback Loop ...................15
1.4.9 Setting the Gain of the Feedback Loop ........................................................16
1.4.10 Feedback Checkbox: Setting the Scanner's Z Position..............................17
Ch. 2 - Advanced Imaging 19

2.1 Advanced Imaging ................................................................................................. 19
2.2 Advanced Methods: ............................................................................................... 20
2.2.1 Scanning Thermal Microscopy (SThM) .......................................................20
2.2.2 Conductive AFM (C-AFM) ..........................................................................21
2.2.3 Liquid Imaging: ............................................................................................22
2.2.4 Electrostatic Force Microscopy (EFM) ........................................................23
2.2.5 Magnetic Force Microscopy (MFM) ............................................................24
2.2.6 Force Modulation Microscopy (FMM).........................................................25
2.2.7 Low Current STM.........................................................................................25
2.2.8 Scanning Capacitance Microscopy (SCM)..................................................26
2.2.9 Piezo Response Microscopy .........................................................................26
2.2.10 Electrochemistry .........................................................................................27
2.2.11 Surface Potential Microscopy (Kelvin Probe Microscopy) ........................27
2.3 Accessories and documents ................................................................................... 28
2.3.1 Heater Cell ....................................................................................................28
Table of Contents
Ch. 3 - Safety 29
3.1 Operating Safety .................................................................................................... 29
3.1.1 Safety Symbols .............................................................................................29
3.1.2 Definitions: Warning, Caution, and Note .....................................................30
3.1.3 Summary of Warnings and Cautions ............................................................31
3.1.4 Grounding Innova .........................................................................................32
3.1.5 Setting the Line Voltage ...............................................................................32
3.2 Laser Safety ........................................................................................................... 33
3.3 Specifications and Performance............................................................................. 35
3.4 Innova User Documentation .................................................................................. 37
3.4.1 Innova Users Guide ....................................................................................37
3.4.2 SPMLab Display and Image Analysis ..........................................................37
Ch. 4 - Installation and Set-Up 39

4.1 Overview:............................................................................................................... 39
4.2 Facilities................................................................................................................. 39
4.2.1 Acoustic/Vibration Specifications ................................................................40
4.2.2 Space requirements .......................................................................................40
4.3 Cable Connections ................................................................................................. 42
4.4 Removing and Installing the Scanner .................................................................... 44
4.5 Starting Innova....................................................................................................... 46
4.6 Loading a Sample .................................................................................................. 47
4.7 Installing a Chip Carrier ........................................................................................ 49
4.8 Loading a Probe Cartridge ..................................................................................... 53
4.9 Using the WinTV32............................................................................................... 53
4.9.1 Using the Innova Optics ...............................................................................53
4.10 Aligning the Deflection Sensor............................................................................ 57
4.10.1 Aligning the Laser Spot ..............................................................................57
Table of Contents
4.10.2 Aligning the Deflection Sensor...................................................................58
4.11 Troubleshooting Tips ........................................................................................... 59
4.12 Typical startup ..................................................................................................... 59
4.13 Deflection Sensor................................................................................................. 62
4.13.1 Alignment Knobs ........................................................................................62
4.13.2 Laser Indicators...........................................................................................64
4.14 Motor stage controls ............................................................................................ 66
4.15 Engage ................................................................................................................. 67
Ch. 5 - Realtime Controls 69

5.1 The Scanning Control Dialog Window: ................................................................ 69
5.2 Area Scanning........................................................................................................ 69
5.3 Line Scanning ........................................................................................................ 71
5.4 Scanning Window Tools........................................................................................ 73
5.5 Probe Positioning ................................................................................................... 78
5.6 LiftMode Settings .................................................................................................. 79
5.7 Scanning Conditions Window ............................................................................... 81
5.8 Point Spectroscopy Window.................................................................................. 81
5.9 IV Curves ............................................................................................................... 82
5.10 Signal Tracing Window ....................................................................................... 83
5.11 Probe Position Window ....................................................................................... 83
Ch. 6 - Menus 85
6.1 File Menu ............................................................................................................... 85
Table of Contents
6.2 Setup Menu ............................................................................................................ 86
6.3 Real Time Control Menu ....................................................................................... 87
6.4 Tools Menu ............................................................................................................ 88
6.5 Window Menu ....................................................................................................... 89
6.5.1 Control Pane Info Menu ...............................................................................90
6.6 Toolbuttons ............................................................................................................ 90
6.7 Other Controls........................................................................................................ 91
Ch. 7 - Contact Mode Imaging 93

7.1 Overview................................................................................................................ 93
7.1.1 Special Hardware Requirements:..................................................................93
7.2 Startup .................................................................................................................... 93
7.2.1 Cold start.......................................................................................................93
7.2.2 Warm Start ....................................................................................................94
7.3 Approaching the Sample........................................................................................ 96
7.3.1 Aligning Laser and Performing a Manual Approach....................................96
7.3.2 Engaging .......................................................................................................98
7.4 Taking a Contact Mode Image............................................................................. 100
7.5 Taking Better Images........................................................................................... 102
7.5.1 Before Beginning ........................................................................................102
7.5.2 Setting Scan Parameters..............................................................................102
7.5.3 Adjusting Feedback Parameters..................................................................103
7.6 LFM Imaging ....................................................................................................... 105
7.6.1 Taking an LFM Image ................................................................................106
7.6.2 How LFM Works........................................................................................108
Ch. 8 - TappingMode Imaging 113

8.1 Overview.............................................................................................................. 113
8.1.1 Special Hardware Requirements.................................................................113
Table of Contents
8.2 Startup .................................................................................................................. 114
8.3 Cantilever Tuning - Manual Tuning Method...................................................... 115
8.4 Autotune............................................................................................................... 123
8.5 Engage ................................................................................................................. 127
8.6 Scanning Windows .............................................................................................. 130
Ch. 9 - STM Imaging 135

9.1 Overview.............................................................................................................. 135
9.1.1 Special Hardware Requirements.................................................................135
9.2 Preparing and Loading STM Tips ....................................................................... 135
9.2.1 Using Wire Cutters to Make STM Tips......................................................136
9.2.2 Using the STM Cartridge............................................................................137
9.2.3 To Insert a Tip Into the STM Cartridge:.....................................................138
9.2.4 To Store an STM Cartridge with a Tip Loaded: .........................................139
9.2.5 To Remove a Tip from an STM Cartridge: ................................................139
9.3 Taking an STM Image ......................................................................................... 140
9.3.1 Startup .........................................................................................................140
9.3.2 Troubleshooting ..........................................................................................142
9.3.3 Preparing for Engage .................................................................................143
9.3.4 Engaging .....................................................................................................144
9.3.5 Starting a Scan and Optimizing STM Scan Parameters .............................146
9.4 Considerations While Taking an STM Image ..................................................... 148
9.4.1 Sample Characteristics................................................................................148
9.4.2 Optimizing Image .......................................................................................148
9.4.3 Increased Risk of Sample/Tip Damage ......................................................148
Ch. 10 - Single Point Spectroscopy 149

10.1 Overview............................................................................................................ 149
10.1.1 Special Hardware Requirements...............................................................149
10.2 Startup ................................................................................................................ 149
10.3 Align Laser ........................................................................................................ 152
Table of Contents
10.4 Engage ............................................................................................................... 153
10.5 Prepare to Ramp................................................................................................. 154
10.6 Ramp .................................................................................................................. 156
10.7 Sample Session with Probe Positioning............................................................. 158
Ch. 11 - MFM Imaging 161

11.1 Overview............................................................................................................ 161
11.2 Special Hardware Requirements........................................................................ 161
11.3 Startup ................................................................................................................ 162
11.4 Cantilever Tuning .............................................................................................. 164
11.4.1 Manual Cantilever Tuning: .......................................................................164
11.4.2 Cantilever Tune with Autotune.................................................................167
11.5 Engage ............................................................................................................... 168
Ch. 12 - EFM Imaging 173

12.1 Overview:........................................................................................................... 173
12.3 Startup ................................................................................................................ 174
12.4 Cantilever Tuning .............................................................................................. 176
12.5 Engage ............................................................................................................... 181
12.6 Set Tip Bias Voltage .......................................................................................... 184
Ch. 13 - Nanolithography 187

13.1 Overview:........................................................................................................... 187
13.1.1 Special Hardware Requirements...............................................................187
Table of Contents
13.2 Startup ................................................................................................................ 187
13.3 Additional Instructions and Information............................................................ 188
13.4 Nanolithography - A Sample Session ................................................................ 188
Ch. 14 - Calibration 193

14.1 Overview............................................................................................................ 193
14.3 Test the X and Y Detector: ................................................................................ 194
14.4 Calibrating X and Y Measurements: ................................................................. 195
14.5 Calibrating Z Measurement: ............................................................................. 197
14.5.1 Calibrating the Z-Linearizer: ...................................................................198
Ch. 15 - Thermal Tune 199

15.1 Overview............................................................................................................ 199
15.2 Set-up ................................................................................................................. 199
15.2.1 Calibrate Sensitivity..................................................................................200
15.3 Thermal Tune..................................................................................................... 203
15.4 Additional Options............................................................................................. 209
15.4.1 Input Gain .................................................................................................210
15.4.2 Check for Aliases......................................................................................211
Ch. A - Synchronizer 213

A.1 Introduction:........................................................................................................ 213
A.2 Set-up .................................................................................................................. 214
A.2.1 Handshaking Out-put Signals ....................................................................214
A.2.2 Set Up Handshaking Input Signals ............................................................217
A.3 Configure Software ............................................................................................. 220
Table of Contents
A.4 Run Synchronizer................................................................................................ 222
Ch. B - Open Hardware 223

B.1 Introduction ......................................................................................................... 223
B.2 Software Setup .................................................................................................... 224
B.3 Open Hardware System Diagram........................................................................ 226
B.3.1 Innova Systems Diagram ...........................................................................226
B.3.2 Open Hardware Access Controls ...............................................................228
B.4 Input/Output Signal Access................................................................................. 229
B.5 Open Hardware Functions................................................................................... 229
B.5.1 Feedback Control .......................................................................................229
B.5.2 Multiplexer Control....................................................................................230
B.5.3 DAC and ADC Control ..............................................................................235
B.5.4 Tip/Sample Voltage Control ......................................................................236
B.5.5 IOMod+ Control.........................................................................................238
B.5.6 Innova Interface Board Control .................................................................240
B.5.7 High Voltage Board Control ......................................................................241
B.6 Examples ............................................................................................................. 244
B.6.1 Changing a Signal on a Channel ................................................................244
B.6.2 Changing the Lock-in Output to Amplitude Times Cos (Phase) ...............246
B.6.3 Turning on the 2kHz Low Pass Filter for a Measurement Channel...........247
B.6.4 Z-Feedback on a Different or External Channel ........................................248
B.6.5 Switching to Deflection Mode Feedback During Tapping Mode Imaging248
B.6.6 Nanomanipulation at Contact Force...........................................................250
B.6.7 Second-Harmonic Detection ......................................................................251
Ch. 1 - Introduction
Overview of Manual
Chapter 1
1.1
Introduction
Overview of Manual
This manual provides information specific to the Innova system. This manual describes installation
procedures and provides information on the operation of the SPMLab program. The information
includes description of several modes of operation and imaging as well as real time data analysis.
Some chapters are for reference only and describe modes and capabilities which are not included in
the basic Innova system. Applications modules are required to obtain these additional capabilities.
Innova uses a stationary probe and samples are scanned back and forth beneath the probe.
Typically, Innova samples are attached to round metal disks (pucks) which are magnetically
attached to the top of the scanner tube. The scanner moves the sample in the x,y and z direction and
the probe obtains information from the sample. The type of information will depend on the data
channels chosen.
PC
Innova
Dual Monitors
NanoDrive
Controller
Isolation table
Figure 1.1a Innova system components
1.2
Safety
The Innova system is designed with features intended to safeguard operators from injury, prevent
damage to the test samples and to be robust against damage from normal use. As with any
electrical, mechanical device, some hazard is inevitable. Chapter 3 provides important safety
information which should be read and understood by all users.
Rev. B
Innova User Manual - Ch. 1, Introduction
Microscope Specifications
1.3
1.3.1 Special Hardware Requirements

Refer to the Veeco Probes catalog or visit www.veecoprobes.com for a listing and descriptions of
the complete line of probes and other accessories.
1.3.2 Scanner Types

Two scanner options are available: Small Area and Large Area scanner
Small Area
Large Area
Figure 1.3a Scanner options
1.3.3 Scanning Techniques

Innova can operate in several SPM modes, including: Contact mode, TappingMode and STM.
Many of these modes are listed below. Some of these modes employ Veeco proprietary methods.
Contact Mode Imaging - Measures height by sliding a probe tip across and in contact
with the sample in either air or liquid. LFM (Lateral Force Microscopy) characterizes
frictional effects. See Chapter 7.
Rev. B
TappingMode Imaging (patented)- Measures height by tapping the surface with an

oscillating tip. TappingMode eliminates shear forces that can damage soft samples and
reduce image resolution. TappingMode is available in air and fluids. This is the
technique of choice for most work and enables the use of phase imaging which can
provide information about material properties such as adhesion and viscoelasticity. See
Chapter 8.
STM Imaging - Scanning Tunneling Microscopy. Utilizes tunneling current which

varies with probe to sample separation for feedback to produce extremely high
resolution imaging of flat conductive samples. See Chapter 9.
Single Point Spectroscopy - Provides single point measurements for a detailed

characterization of local electrical or mechanical properties. See Chapter 10.
MFM Imaging - Magnetic Force Microscopy. Measures magnetic force gradient

distribution above the sample surface. Performed using LiftMode (TappingMode height
followed by a retrace with controlled spacing). See Chapter 11.
EFM Imaging - Electric Force Microscopy. Measures electric force gradient

distribution above the sample surface. Performed using an electrically biased probe in
LiftMode (TappingMode height followed by a retrace with controlled spacing). See
Chapter 12.
Nanolithography - May use a probe tip to scribe or indent a sample surface by

mechanical pressure or may employ anodic oxidation to alter the chemistry of the
sample. Nanolithography is used to generate patterns, test for microhardness, etc. See
the NanoPlot reference manual. See Chapter 13.
These imaging techniques are described in this manual. Additional information may be available in
support notes (See Chapter 2). Contact Veeco if additional information is desired.
Rev. B
SPM Fundamentals
1.4
SPM Fundamentals
1.4.1 Terminology
This section contains a brief list of terms and abbreviations to assist the reader. Other terms and
abbreviations are referred to in the Index at the end of this manual.
AFMAtomic force microscopy; atomic force microscope (see SPM).
biasElectrical potential applied to a tip or sample which causes electron flow from one to the
other.
calibrationMeasurement of known features to ensure accuracy of SPM images.
cantileverFlexible portion of probe extending from the substrate and to which the tip is attached.
cantilever tuneProcess of finding a cantilevers natural, resonant frequency by exciting the
cantilever through a range of frequencies until maximum amplitude (resonance) is obtained.
DSPDigital signal processor. Computer processor used to control SPM feedback loop.
drive amplitudeAmplitude of the signal used to oscillate a tip in TappingMode.
drive frequencyFrequency of the signal used to oscillate a tip in TappingMode.
engagementProcess of bringing a probe tip and sample together in a controlled manner such that
useful information about the surface is obtained without damaging either the tip or the sample.
errorDifference between feedback signal value and feedback setpoint.
false engagementCondition where probe is not racking the sample surface while in feedback. It
may be caused by long range interactions or air damping. Selecting a more positive setpoint
(contact mode) or smaller amplitude setpoint (TappingMode) may correct the problem
feedbackProcess of self-correction of the error signal.
fluid cellAccessory used for imaging materials in fluid.
integral gainThe multiplier of correction applied in response to the average error signal.
probeThe mechanical device (usually a integrated substrate, cantilever and tip) used for
imaging.
probe holderRemovable appliance for mounting SPM probes.
proportional gainThe multiplier of correction applied in response to the error signal in direct
proportion to the error.
PSPD - Position Sensitive Photo Detector. Produces output based on the position and intensity of a
laser spot. The Innova AFM utilizes a quad photodetector (QPD) form of pspd.
Rev. B
SPM Fundamentals
QPD - Quad Photo Detector. A form of PSPD consisting of a four photodetector segment array.
The output of each segment varies with the total intensity of the laser spot (or portion of laser spot)
incident on the segment. The outputs of the four segments may be summed or differenced to
determine the position of the laser spot on the array. In TappingMode operation, the laser spot
oscillates across segment boundaries so the output of the QPD is an AC voltage.
RMS amplitudeRoot mean square (RMS) signal measured at the detector. (TappingMode only.)
SPMScanning probe microscopy; scanning probe microscope. A general term encompassing all
types of microscopy which utilize a scanned micro-sharpened probe and feedback circuitry to
image nanoscale phenomena. SPM modes of operation include AFM, ECSTM, EFM, MFM, STM,
and many others.
sensitivityAmount of movement produced by a scanner piezo by a specific input voltage.
setpointOperator-selected threshold used as the target of the feedback control loop.
spring constantAmount of force required to bend a cantilever a specific amount (typical units
are N/m).
tipholderSee probe holder
1.4.2 SPM Overview
Figure 1.4a Contact Mode Detection Method
Rev. B
SPM Fundamentals
An atomic force microscope (AFM) operating in contact mode, touches the surface of a sample
with a sharp tip (~2 m long and often less than 5 nm radius), which is located at the free end of a
cantilever 100-200m long. The cantilever has a spring constant lower than the forces binding the
atoms of the sample. As the scanner moves the sample under the tip, the contact force causes the
cantilever to bend or deflect in response to changes in height.
A detection scheme measures the cantilever deflection as the sample moves relative to the tip. This
detection scheme consists of a laser reflected off the back of the cantilever and onto a position
sensitive photodetector (QPD). The measured cantilever deflections are used by the computer to
generate a map of surface height.
1.4.3 The Feedback Loop

This section describes how the z feedback loop operates and introduces the feedback parameters
that are adjusted to get the best images.
The z feedback loop operates to maintain tip-sample interaction at a target (setpoint) value. The
signal at the QPD is compared to a reference signal (the setpoint value). The difference, or Error
signal, is amplified by the gain parameters and then used by the feedback system to generate a
voltage that is sent to the piezoelectric tube scanner. The voltage causes the scanner to extend or
retract as needed to minimize the Error signal. Since the scanner position tracks the sample height,
the signal sent to the scanner can be used to generate an image of height. The scan generator causes
the scanner tube to move the sample in the x and y directions in a raster pattern.
The definitions of the probe signal and the reference quantity (the setpoint parameter) depend on
the SPM mode being used. Various operating modes have been mentioned in section 1.3.3.
In Contact mode, the probe signal is the DC signal from the QPD (quad photo detector) that
represents the vertical bending or deflection of the cantilever as the cantilever responds to surface
height. The setpoint is the reference value for cantilever deflection (which relates directly to the
force between the tip and the sample).
In TappingMode, the probe signal represents the amplitude of cantilever vibration. In these modes,
the probe signal is determined from the AC signal from the QPD. The setpoint is the reference
value for the amplitude of cantilever vibration.
In STM, the probe signal is the tunneling current. The setpoint is the reference value for the
tunneling current.
In LFM, standard contact mode feedback is used while lateral force signals are monitored
passively.
Rev. B
SPM Fundamentals
1.4.4 Scan Size, Scan Rate, Feedback Parameters (gains) and Setpoint
Scan and feedback parameters are adjusted to obtain satisfactory imaging which depends on
obtaining a stable signal trace, free of noise or spurious signals. Iterative adjustment of some of the
parameters described in this section is usually required to produce a high quality image. All
parameters can be adjusted in real-time during a scan, without lifting the tip.
Scan Size
The scan size refers to the area of the sample which is being imaged. Since all scans are square,
scan width alone is specified to set the scan size. The scan size selected depends on the features of
interest and the size of the scanner.
For the standard Large Area scanner, the maximum scan size is >90 m. When using the 10 m
grating included with the Large Area scanner, a scan size of 30 m will display about three rows of
the grating. With a scan size of 10 m, only one row of the grating will be displayed.
A scan size may be chosen so that the features of interest are represented in reasonable proportions.
For example, using a 1 m calibration grating, a scan size of 5 to 10 m will display several rows of
the grating.
Generally, scan size should be selected to be greater than the lateral resolution multiplied by the
number of data points per scan line, i.e., the spacing between the pixels should be larger or
comparable in size to the area covered by each data point. Selecting a smaller scan size will result
in adjacent data points containing redundant information.
Scan Rate
The scan rate sets the frequency of the back and forth rastering of the sample beneath the probe.
Scan rate can be adjusted while acquiring an image. In general, as the scan size is increased, the
scanning velocity also increases (a longer line is scanned at the same scan rate, so the tip travels
faster over the sample). Large scan sizes usually are better imaged by decreasing the scan rate in
order to decrease the tip to sample scanning velocity.
Generally, slower scan rates give better resolution because the feedback system has time to
respond, while faster scan rates save time. If the scan rate is too fast, the feedback loop may not
respond appropriately to changes in height. As a result, the image may appear smeared (poor
surface tracking) or the tip may crash into protrusions on the surface, possibly damaging the tip
and/or sample. The scan rate setting interacts with the gain setting (see the following section). The
higher the gain setting, the faster the system can track the height and the faster the scan rate may be
set and still obtain good images.
The scan rate also depends on the type of image being taken. For images of height using a scan size
from 1 to 10 m and with feedback enabled, typical scan rates are from 1 to 4 Hz.
To determine which scan rate is best for a particular set of scan conditions, take several scans at
different rates and use a scan rate below the rate at which image quality begins to degrade.
Rev. B
SPM Fundamentals
Gain & Setpoint
How Z Feedback Works

When the feedback loop is optimized, the scanner motion matches surface height. The Z feedback
loop operates to keep the cantilever deflection (in contact mode) constant by adjusting the Z
position of the probe. The hardware components and signal pathways for Contact mode operation
are shown in Figure 1.4b.
Deflection
Setpoint
Deflection Signal
Figure 1.4b Hardware components and signal pathways for contact mode.
The cantilever deflection is compared to the setpoint value in the setpoint scrollbox (the reference
value for the z feedback loop), and an error signal is generated. The error signal is sent to the
feedback electronics, which generates a feedback voltage. This feedback voltage controls the
scanner tube, causing it to extend or retract. The probe to sample spacing is controlled to maintain a
constant cantilever deflection which minimizes the error signal. The feedback signal can be used to
generate an image of sample height.
Gain
The magnitude of the error signal is often insufficient to cause the z scanner to respond properly.
To obtain better response, a gain is specified. The gain (of the feedback loop) is a multiplier
applied to the Error signal to generate the feedback signal to the scanner. This parameter must be
optimized for each set of scan conditions. Higher gain values mean that the feedback loop is more
responsive to changes in deflection of the cantilever. Proper gain settings are required for good
imaging.
If the gain is too high, the feedback signal will over react to small changes and the system will
oscillate. Feedback oscillations appear on the signal trace as fringes or ripples. If the gain is set too
low, the z feedback will not track surface height properly. When surface tracking is poor, surface
features can appear lopsided or the tip can damage features on the surface or be damaged by the
sample.
Rev. B
SPM Fundamentals
Set gain by beginning with the default value. Gradually increase the value until the system begins
to show oscillation and reduce the gain until the oscillation ceases. An acceptable gain setting
usually will lie within a range of settings rather than at a single value.
Figure 1.4c shows the signal trace on the Profile Display in the scanning window. As the gain is
increased from the default value, the contours of the grating lines will be reestablished on the
Oscilloscope Display.
Figure 1.4c The signal trace on the oscilloscope display.

As the gain is increased further, oscillations and overshoots appear superimposed on the signal
trace of the grating as shown in Figure 1.4d. Gain should be reduced until the overshoots and
oscillations disappear.
Figure 1.4d Feedback optimized
Rev. B
SPM Fundamentals
When scan conditions change (for instance, at different portions of the sample), the gain parameter
should be verified as still optimized. If oscillations appear, lower the gain until the system is just
below the oscillation point.
Setpoint
In contact imaging mode, setpoint represents the amount of cantilever bending, or deflection. High
setpoint produces higher contact force between the tip and sample in contact mode. When the z
feedback loop is enabled, the system operates to keep the amount of cantilever bending constant by
moving the sample up or down. In TappingMode, setpoint represents the amplitude of cantilever
oscillation. High setpoint produces lower contact force between the tip and sample and because the
oscillation is less affected by interaction with the sample. The high setpoint relates to a high RMS
voltage resulting from higher amplitude oscillation of the cantilever. The remainder of this
discussion deals with contact mode setpoint. Additional discussion of TappingMode setpoint is
contained in Chapter 8.
The optimal value of the setpoint parameter depends on a number of factors, the most influential is
the sample. If horizontal streaking occurs in an image, the setpoint is too high (the cantilever is
exerting more force against the sample surface), and dirt (unidentified particles, material, etc.) is
being dragged on the sample. If streaking remains after reducing the setpoint value, the sample is
probably too soft to examine using contact mode -- or a softer cantilever may be needed. Setpoint
can be adjusted during a scan so that its effect may be observed in real time. When optimizing the
setpoint, it is useful to compare the forward and reverse traces on the oscilloscope display, as
described in Chapter 7.
If the setpoint is too low, the probe will not be able to track the sample height. Check the signal
trace on the profile display in the scanning window to see if it realistically represents the height.
When imaging the calibration grating with a setpoint value that is too low, the shape of the signal
trace will appear to flatten out, indicating that the probe is unable to follow the height.
Number of Data Points

The number of data points contained in an image can be specified: 16 x 16, 32 x 32, 64 x 64, 128 x
128, 256 x 256, 512 x 512, or 1024 x 1024. The default is 512 x 512.
In general, a larger number of data points results in higher resolution. For example, for the same
scan size, a 512 x 512 image contains 64 times the number of data points as a 64 x 64 image and
therefore has a higher resolution, however, collecting a 512 x 512 image takes more time.
Note:
10
An efficient way to increase the resolution of an image is to zoom in on a

smaller region to take a scan. This increases the number of data points per scan
size.
Rev. B
SPM Fundamentals
1.4.5 Main menu items

Scan Size
Scan sizeSize of the scan along one side of a square.
X and Y Offsets
X offset; Y offsetThese controls allow selection of the center of the area to be scanned.
Scan Angle
Scan angleCombines X-axis and Y-axis drive voltages, enabling the piezo to scan the sample at
variable X-Y angles.
Scan Rate
Scan rateSets the number of lines scanned per second.
Leveling
Leveling is used when the average surface of the sample is not parallel to the scanning plane. The
leveling options are:
None
1DAC - subtracts the average from the signal for each line
1D line fit - subtracts a 1st order least mean square fit for each line
1D bow removal - subtracts a 2nd order least mean square fit for each line
2D AC - subtracts the average for all the date acquired at the time
2D plane - plane tilt removal for all data acquired at the time
Taking Images in Low Gain Mode

CAUTION:
Rev. B
The high gain range is ~0 to 400 volts and the low gain range is ~0 to 100 volts. If switching
from high gain to low gain mode, avoid damage to the probe tip and sample in by raising the Z
stage a short distance using the z direction pad to ensure that the probe tip clears the sample
surface.
11
SPM Fundamentals
Both high- and low-gain modes are available on Innova. High gain mode accommodates most
applications. Low gain mode produces the best noise performance for ultra flat samples a atomic
resolution with the large area scanner. It is not usually necessary to select the low gain mode when
using the small area scanner.
High gain mode applies the full voltage range to the scanner to produce xy and z motion and is
most often used for scan sizes in the micron range. The maximum scan size in high gain mode is
limited by the available range of scanner motion. The maximum xy range of a Large Area scanner
is nominally 90 m. The maximum z range of a Large Area scanner is nominally 7.5 m.
Low gain mode uses only a portion of the scanner xy and z range and is generally used for smaller
scanson the order of tens to hundreds of nanometers. The range of xy motion is reduced to ~1/4
of its full range, and the range of z motion is reduced to ~1/3 of its full range. For example, the xy
range of a Large Area scanner is reduced to ~25 m, and the z range is reduced to ~2.5 m.
This section explains why low gain mode is important for obtaining improved lateral resolution
with smaller scan sizes and gives step-by-step instructions for switching from high gain to low gain
mode.
Using Low Gain Mode for Lateral Resolution

Low gain mode can be useful to look at smaller features on a sample. Without low gain mode, it
would not be possible to obtain the highest lateral resolution (below approximately 50 nm) for
small scan sizes.
The main factors limiting the lateral resolution of images are:
the scan size divided by the number of data points per scan line
the effective tip radius
the x-y detector resolution (if Closed Loop is enabled)
the scan DAC resolution
If a 10 m image is taken with 256 x 256 data points, then one data point is taken every 10 m/256,
or 39 nm, which represents the limit of the lateral resolution. Lateral resolution will be better by a
factor of 2 for a 10 m image taken with 512 x 512 data points, however, it will take twice as long
because there are twice as many lines of data.
In order to improve the lateral resolution as limited by the scan size without increasing the time to
take an image, use a smaller scan size. For example, for a 256 x 256 image and a scan size of 50 nm
(0.05 m), the lateral resolution limit improves to 50 nm/256, or 0.195 nm.
The lateral resolution is no better than the largest limiting factor. For small scan sizes (below 5
m), the largest limiting factor is not likely to be the scan size divided by the number of data points
per scan line. In general, do not select a scan size that is smaller than the lateral resolution (as
limited by any of the factors described here) multiplied by the number of data points per scan line.
Selecting a smaller scan size will result in adjacent data points containing redundant information.
12
Rev. B
SPM Fundamentals
In most cases, the primary limiting factor to the lateral resolution is the interaction area between the
tip and the sample, or the effective tip radius. The interaction area is affected by type of imaging
being performed, the characteristics of the surface being imaged (height, chemistry, surface fluids,
field effects). The sharpness and geometry of the tip also influence the interaction area and lateral
resolution.
In STM mode, the exponential relationship between tunneling current and tip-to-sample spacing
isolates the interaction between the tip and the sample to atoms at the very end of the tip. Thus,
even a very blunt tip with a radius on the order of 100 nm can be used in STM mode to achieve
atomic resolution when the tip has a single atom that protrudes more than its neighbors. This same
tip, however, may not be able to resolve features that are wide if those features are also very deep
(high aspect ratio features).
For other modes, the lateral resolution as limited by the effective tip radius is on the order of
nanometers to tens of nanometers. Factors such as tip wear and deformation increase the interaction
area for contact mode operation. The response of the measured signal to changes in tip-to-sample
spacing affects the lateral resolution for tapping (lift) modes. The way to determine the smallest
features that can be imaged using a particular tip in a particular operating mode is to optimize all of
the other factors that limit the lateral resolution and then experiment imaging small features on a
sample.
Assuming a small scan size and good tip conditions, the factor next most likely to limit the lateral
resolution is the resolution of the x-y detector, which is on the order of 1 nm. This limit applies only
if Closed Loop is on. Thus, the highest lateral resolution for small scan sizes is obtained with
Closed Loop off.
Note:
Closed Loop is not available with small area scanners.
Finally, the digitized step size of the scanner limits the lateral resolution. The voltage applied to the
scanner is digitized, and the number of possible voltage values depends on the number of bits of the
digital-to-analog converter (the DAC) used to send the voltage signal to the scanner. Innova uses
20-bit DACs for sending the voltage signal to the scanner, so the voltage can be expressed as a
20-bit number, which has 220 possible values. The total range of motion of the scanner can
therefore be divided into 220 digitized steps. In low gain mode with a Large Area scanner, the
minimum step size of the scanner is 25 m/220 steps = ~0.025 nm/step. For a Large Area scanner
and a 20-bit digital-to-analog converter, the resolution as limited by the step size of the scanner is
always 0.025 nm -- substantially smaller than the length of a typical chemical bond.
The feedback controls and displays used to optimize operation of the Z feedback loop are listed in
the following table and are described in the later sections
Rev. B
13
SPM Fundamentals
.
Control
Function
Z Position Bar
Graphically represents the scanner z position within the total

range of scanner motion and the working range of the scanner
for the last line of data collected.
Feedback signal
Graphically represents the probe signal and setpoint values.
Setpoint
Specifies the reference signal for the z feedback loop. In

contact mode, the setpoint sets the vertical force between the
probe and the sample that results in cantilever bending. For
STM, the setpoint sets the tunneling current between the probe
and the sample. In TappingMode, MFM and EFM, the setpoint
sets the amplitude of cantilever vibration.
PID Gains
Specifies the gains (multipliers) applied to the feedback signal

for proportional, integral and derivative feedback.
Feedback Box
When highlighted and checked indicates feedback is active.

Used to turn the z feedback loop on and off. When the
feedback loop is off, the Z position check scrollbox allows the
scanner to be extended or retracted.
Cartoon Window
Displays the cantilever/tip status (withdrawing, engaging,

engaged)
1.4.6 Z Position Bar: Monitoring the Scanner's Position

The Z Position bar is a tool for monitoring the scanner extension and retraction in response to the
feedback voltage. It is displayed on the left side of the main SPMLab window. The Z Piezo bar is
shown in the figure below.
Figure 1.4e The Z Piezo bar.
14
Rev. B
SPM Fundamentals
The bottom end of the Z Position bar represents the scanner's position when it is fully retracted.
The top end of the Z Piezo bar represents the scanner's position when it is fully extended. The
scanner tube retracts when the probe tip encounters peaks in the surface and extends when the tip
encounters valleys in the sample surface.
1.4.7 Feedback Signal: Monitoring the Feedback Signal and Setpoint

Values
The Feedback Signal bar is displayed to the left of the Z Position bar. The Probe Signal bar is a
graphical representation of the setpoint value and the probe signal. The numerical value of the
setpoint parameter is displayed in a scrollbox above the probe signal bar. The Probe Signal bar is
illustrated in Figure 1.4f. The appearance of the bar may vary depending upon the SPM operating
mode.
Figure 1.4f The Feedback Signal bar.
1.4.8 Setpoint: Setting the Reference Signal for the Feedback Loop
The setpoint scrollbox is used for specifying the setpoint, which is the reference signal for the
feedback loop that is maintained during an auto engage and a scan. For Contact mode, the setpoint
represents cantilever deflection, or force between the tip and the sample. For TappingMode, MFM
and EFM, the setpoint controls the amplitude of cantilever vibration. For STM, the setpoint
represents tunneling current. For LFM, the setpoint value also has an effect on the lateral force due
to friction. Increasing the setpoint value increases the force between the probe tip and sample. The
allowed range of values of the setpoint depend on the operating mode and the system calibration
parameter values.
In general, the setpoint value is increased (i.e., the value becomes more positive) the distance
between the probe and the sample decreases. In contact mode, increasing the setpoint value
decreases the tip-to-sample spacing in order to achieve a greater cantilever deflection, or vertical
force, between the probe and the sample. For STM, increasing the setpoint value, brings the probe
and the sample surface closer together to produce a higher tunneling current. During a scan, a
signal from the feedback loop is sent to the scanner, causing the scanner to retract or extend so that
Rev. B
15
SPM Fundamentals
the feedback signal matches the setpoint value. For TappingMode, increasing the setpoint value
results in a higher amplitude and a lower amount of force applied to the sample.
To enter a setpoint value: Enter a new value in the setpoint scrollbox and then press the [Enter]
key. Or, use the scrollbox arrows to scroll through a range of values. The increment of the scroll
box can be changed by double clicking inside the scroll box.
1.4.9 Setting the Gain of the Feedback Loop

Feedback is required to correct piezo positioning to accommodate changes in the sample. The gain
parameters control how much the feedback signal is amplified before being sent to the scanner.
The range of gain values is in arbitrary units scaled with the scanner z range of motion.
The optimum values for the gain parameters depend on a number of factors, including the scan rate,
the scan size, and the sample height. Higher gain values make the feedback loop more sensitive to
changes in the feedback signal. Usually, surface features can be tracked more closely when higher
gain values are used, however, if gain is set too high, the feedback signal will fluctuate in
overreacting to small changes.
CAUTION:
Do not lower the gain to zero. When the gain is set to zero, the feedback loop is disabled, and
the system will not track changes in surface features. If the feedback is completely disabled,
the tip can be damaged if the sample surface is very rough. For STM, some finite feedback
response is needed to prevent the tip from crashing into the sample.
To adjust gains: Enter a value in the Gain scrollbox and then press the [Enter] key. Or, use the
scrollbox arrows to scroll through a range of values.
Integral, Proportional and Derivative Gain

These settings affect the response time of the feedback loop. The feedback loop adjusts the z piezo
voltage to minimize the error signal (difference between the setpoint value and actual value).
Piezoelectric transducers have a characteristic response time to the feedback voltage applied. The
gains are multipliers of the feedback error signals. The large (multiplied) compensation causes the
piezo scanner to move faster in Z and compensates for the mechanical hysteresis of the piezo
element. The effect is smoothed because the piezo receives feedback at four or more times the rate
of the image display. The integral feedback signal is based on the sum of previous errors (this
method will correct a continuing set of errors too small to be corrected by other feedback methods).
The proportional feedback signal is based on the difference between the current signal and the
target. The derivative feedback signal is based on the difference between the current error signal
and the preceding error signal. The gains are multipliers for each of these feedback signals but the
units for gain are arbitrary. In most cases, the integral gain value has the largest effect in
optimizing feedback behavior in scanning probe microscopy.
16
Rev. B
SPM Fundamentals
1.4.10 Feedback Checkbox: Setting the Scanner's Z Position

The Z feedback toolbutton is used to enable or disable the z feedback loop. The feedback loop is
enabled when the toolbutton is engaged and disabled when not engaged. When the feedback loop
is disabled, a Z position scrollbox is displayed below the toolbutton. This scrollbox may be used to
manually extend or retract the scanner. Z position may be used to monitor the scanner position. By
default, the scanner extension is in microns (m).
The primary uses for manual control of the z position of the scanner are lithography and
manipulation. Refer to the NanoPlot manual for additional details
To manually extend or retract the scanner: Unclick the feedback toolbutton. The Z(m) scrollbox
should be displayed below the checkbox. Enter a value in the Z position scrollbox and then press
the [Enter] key, or use the scrollbox arrows to scroll through a range of values. Monitor scanner
extension on the Z Piezo bar.
CAUTION:
Rev. B
Be careful when using the Z(m) scrollbox to manually extend the scanner. Extending the
scanner too far will cause the probe to crash into the sample surface. A probe crash can damage
the probe, the scanner, and the sample.
17
SPM Fundamentals
18
Rev. B
Chapter 2
2.1
Advanced Imaging
Advanced Imaging
The standard configuration of Innova has the ability to produce nanoscale images using Contact
mode, TappingMode and STM (Scanning Tunneling Microscopy) mode for many sample types in a
typical laboratory environment. Lateral force microscopy and phase imaging are included in the
standard configuration and provide contrast mechanisms based upon material properties. These
capabilities give access to information beyond simple topography. Optional enhancements for the
Innova system provide additional capabilities including the capability of probing additional
material properties as well as enabling operation in a fluid and/or temperature controlled
environment to perform imaging of samples under relevant conditions (viz. biological samples,
electrochemical reactions, etc.).
This section provides brief descriptions of several advanced imaging modes and accessories,
however, development continues to produce additional methods and improve existing ones. To
order any of the options or to obtain information on these items or more recently developed
methods, contact your Veeco representative.
Rev. B
Innova User Manual - Ch. 2, Advanced Imaging
19
Advanced Imaging
Advanced Methods:
2.2
Advanced Methods:
2.2.1 Scanning Thermal Microscopy (SThM)

Description
The Scanning Thermal Microscopy (SThM) package for Innova provides the capability of imaging
thermal conductivity (using conductivity contrast mode) and sample temperature (using
temperature contrast mode). The principle component of the SThM package is a thermal probe with
a resistive element. Thermal monitoring and control are performed by the Thermal Control Unit
(TCU). In conductivity contrast mode, the thermal probe is kept at a constant temperature. Changes
in sample thermal conductivity affect the heat flow between the self-heating probe and the sample.
This heat flow is monitored by measuring the voltage necessary to maintain a constant probe
temperature. In temperature contrast mode, temperature is monitored using a bridge circuit to
measure the probe resistance.
The SThM package consists of:
Box of SThM probes
Thermal Control Unit (TCU)
BNC cable to connect the Thermal Control Unit to the NanoDrive Controller.
BNC-type cable to connect the Thermal Control Unit to the thermal probe
15V Power supply
Cable to connect the power supply to Thermal Control Unit
Test sample for conductivity contrast imaging
Option Part Number: INST-3
Support Note Number: 013-426-000
20
Rev. B
Advanced Imaging
Advanced Methods:
2.2.2 Conductive AFM (C-AFM)

Description
Conductive Atomic Force Microscopy (C-AFM) is a secondary imaging mode derived from
Contact mode that characterizes conductivity variations across semiconducting materials and
across conducting or semiconducting material covered with a thin dielectric layer (on the order of a
nanometer). C-AFM performs general-purpose measurements, and has a current range of sub pico
amperes (pA) to micro amperes (A). The current amplifier can also support mA current levels
although these are rarely used in C-AFM analyses. C-AFM employs a conductive probe tip.
Typically, a DC bias is applied between the tip and the sample. While the z feedback signal is used
to generate a normal Contact mode topography image, the current passing between the tip and
sample is measured to generate the conductive AFM image which shows the conductivity
variations of the materials under test.
The Conductive AFM Imaging package includes:
Unmounted conductive imaging chip carrier with BNC connector
Low current amplifier and power supply
Amplifier mount
C-AFM cable
10 M surface-mount resistor sample
10 SCM-PIC unmounted Pt/Ir coated probes
Option Part Number: INCA-3
Support Note number: 013-427-000
Rev. B
21
Advanced Imaging
Advanced Methods:
2.2.3 Liquid Imaging:

Description
The MicroCell Kit enables imaging in liquids. Imaging of samples in liquid is a growing
application of AFM technology. This growth derives from a desire to minimize surface forces on
delicate samples, the need to observe biological specimens in their natural, fluid environments.
Imaging samples under fluid can eliminate attractive forces due to surface tension. This enables the
sample surface to be imaged with a minimum of cantilever tip force, which is advantageous when
imaging biological specimens and delicate materials. The need to observe biological samples in
liquid is readily understood since the property and dynamics of many living structures can be
preserved only under conditions that are as close as possible to their natural states. A separate
accessory is available for electrochemical AFM and STM applications (refer to Electrochemistry:
Section 2.2.10).
The MicroCell kit consists of the following components:
MicroCell
Open liquid cell
1ml syringe
Plastic tubing
Viton rubber shrouds
Innova scanner shield
Chip mounting fixture
Spare glass
Unmounted AFM Probes
Option Part Number: INLC-3
22
Rev. B
Advanced Imaging
Advanced Methods:
2.2.4 Electrostatic Force Microscopy (EFM)

Description
Electrostatic Force Microscopy (EFM) is a secondary imaging mode derived from TappingMode
imaging. EFM maps the electrostatic force gradient above the sample surface. Mapping is
performed using a patented two-pass technique, LiftMode. LiftMode separately measures
topography and another selected property (magnetic force, electric force, etc.) with the two-pass
procedure. During the first pass, the probe tip is controlled to track the surface so that topographical
information is obtained. During the second pass, the topographical information is used to move the
probe tip along the same track but keep it at a constant height (Lift Height) above the sample
surface.
In EFM, a voltage bias is applied to the probe tip. While scanning, the cantilever resonance
frequency or phase is influenced by the tip to sample separation. The influence of electrostatic force
is measured using the principle of force gradient detection. EFM can be used to image both
naturally occurring static charge domains and deliberately DC biased structures.
A more complete description of EFM operation is contained in Chapter 12
The following items are required for Innova EFM operation:
TappingMode cartridge
Unmounted probe chip carrier (00-107-0142)
Probe: conductive tips required, ie., DDESP, MPP-11150-10, etc.
The EFM package includes:
Unmounted chip carrier for EFM
Sample bias holder for optional external bias
10 SCM-PiT Pt/Ir coated probes
EFM test sample
Option Part Number INEF-3
Rev. B
23
Advanced Imaging
Advanced Methods:
2.2.5 Magnetic Force Microscopy (MFM)

Description
Magnetic Force Microscopy (MFM) is a secondary imaging mode derived from TappingMode
imaging. MFM maps the magnetic force gradient above the sample surface. MFM is performed
using a patented two-pass technique, LiftMode. LiftMode separately measures topography and
another selected property (magnetic force, electric force, etc.) with a two-pass procedure. During
the first pass, topographical information is obtained. During the second pass, the topographical
information is used to move the probe tip along the same track but keep it at a constant height (Lift
Height) above the sample surface as determined during the first pass.
In MFM, the probe tip is coated with a ferromagnetic thin film. While scanning, it is the magnetic
force that induces changes in the cantilever resonance frequency or phase. MFM can be used to
image both naturally occurring and deliberately written domain structures in magnetic materials.
A more complete description of MFM operation is contained in Chapter 11.
The following hardware items are required for Innova MFM operation and are included in the
MFM Tool Kit:
10 MFM probes (MESP)
MFM tip magnetizer
Non-magnetic sample holder
MFM test sample
Option Part Number: INMF-3
24
Rev. B
Advanced Imaging
Advanced Methods:
2.2.6 Force Modulation Microscopy (FMM)

Description
Force Modulation Microscopy enables collecting simultaneous topographic and material-properties
data. Force Modulation Microscopy is based on Contact mode feedback integrated with phase
imaging and can serve to complement TappingMode phase imaging. Specifically, the force
modulation mode offers both amplitude and phase detection for mapping variations in the
mechanical properties of a sample surface. Surface elasticity, adhesion, and related properties may
be analyzed. Variations in composition can also be distinguished, based on differences in surface
properties.
The Force Modulation Package consists of the following components:
FM Cartridge probe holder (p/n: 860-012-714)
TiO2 paint chip sample (p/n: 00-110-1106)
Also needed to perform FMM (not included in package) are probes suitable for FMM
such as FESP.
Option Part Number: INFM-3
2.2.7 Low Current STM

Description
The Low Current STM option extends the STM capability included in the default configuration of
Innova to permit STM imaging samples which produce lower tunneling currents than are needed to
produce acceptable images using the default capability. Current noise levels below 1.0 pA can be
achieved. The low current STM option requires the (separate) purchase of the C-AFM option (see
Conductive AFM (C-AFM): Section 2.2.2).
The Low Current STM package includes:
LCSTM Cartridge
10 STM probes (Pt/Ir)
Option Part Number INLO-3
Rev. B
25
Advanced Imaging
Advanced Methods:
2.2.8
Scanning Capacitance Microscopy (SCM)
Description
SCM characterizes the capacitance properties of the sample and provides a means for 2D dopant
profiling. The images are useful in analyzing doped semiconductor materials where the dopant
distributions are not readily determined by other means. The SCM option offered with Innova
provides a fully integrated hardware and software solution which maximizes setup efficiency. The
option includes closed-loop SCM Imaging to ensure a constant depletion volume.
The Innova SCM package includes:
SCM sensor
SCM cartridge
SCM probes (SCSI-ptmt-cp)
SCM Cable
SCM sensor fixture
PI expansion board (installed in Nanodrive controller by Veeco personnel)
Option Part Number INSC-3
2.2.9 Piezo Response Microscopy

Description
Piezo Response Microscopy (PZR), also known as piezoresponse force microscopy (PFM)
characterizes the local piezoelectric properties of a sample. An AC bias voltage is applied between
tip and sample during contact mode imaging with a conductive tip. The Magnitude and phase of the
response are recorded. The piezo response option is fully integrated in hardware and software so
that no external devices are required.
Option Part Number: INPR-3
26
Rev. B
Advanced Imaging
Advanced Methods:
2.2.10 Electrochemistry
Description
The Innova Electrochemistry option permits in situ Contact mode or STM studies of surfaces in a
controlled electrochemical environment. The electrochemistry option combines an
electrochemistry cell and probe cartridge designed for Innova and uses the VersaSTAT-3
potentiostat from Ametek/Princeton Applied Research.
Scans and electrochemical measurements can be taken simultaneously. An electrochemical
measurement can be interrupted or altered without affecting the progress of the scan, and a scan can
be interrupted or altered without affecting the electrochemical measurements. The V3 Studio
electrochemical software provided with the potentiostat displays the data in real-time in a window
separate from the SPMLab screen. This window can be hidden in the background while still
controlling the potentiostat.
The following components are included in the Electrochemistry option:
Electrochemistry probe cartridge
Open electrochemistry cell with protective scanner cover
VersaSTAT3-200
V3 Studio Electrochemical software package, installed in Innova computer
Potentiostat to Innova cable
Package of Unmounted MicroLever Probes (MLCT-AUNM)
Option Part Number:
INEC-30 - includes potentiostat
INEC-31 - does not include potentiostat
2.2.11 Surface Potential Microscopy (Kelvin Probe Microscopy)

Description
Surface Potential Microscopy (SPoM) or Kelvin Probe Microscopy (KPM) allows the
determination of the local electrostatic potential of the sample surface. This is achieved by applying
a combination of AC and DC bias such that the cantilever response at frequency of the AC bias
Rev. B
27
Advanced Imaging
Accessories and documents
drives the magnitude and sign of the applied DC bias. The implementation of surface potentiol
microscopy on Innova is exceptionally well integrated in hardware and software, yet exceptionally
flexible. Dual-frequency, single-pass potential measurements are enabled by the 2 full lock-in
amplifiers integrated in the control electronics. This approach minimizes topographic artifacts by
matching the electrostatic potential while in feedback. Additionally, Veecos patented Lift Mode
can be employed in a dual-pas, single-frequency approach to maximize the signal-to-noise ratio of
the potential measurement.
Option Part Number: INSP-3
2.3
Accessories and documents
2.3.1 Heater Cell

Description
The heater components are used to heat the sample to a desired temperature within the range of
ambient to 60C.
The Heater kit consists of:
A 60C heater element
Thermal Applications Controller
Option Part Number: INHTR-A60
28
Rev. B
Ch. 3 - Safety
Operating Safety
Chapter 3
3.1
Safety
Operating Safety
This section includes important information about the Innova system. It describes procedures
related to the operating safety of Innova and must be read and understood before operating the
Innova system.
WARNING:
The protection provided by the Innova system may be circumvented if the

procedures described in this User Guide are not followed. Personal injury or
equipment damage may result.
3.1.1 Safety Symbols

Table 3.1a lists symbols that appear throughout this User Guide and on the Innova system. Become
familiar with the symbols and their meanings. The symbols are used to emphasize operating safety
matters of the Innova system.
Table 3.1a Safety Symbols and Functions.
SYMBOL
FUNCTION
Direct current source

Alternating current source
Direct and alternating current source
Three-phase alternating current
Ground (earth) terminal
Protective conductor terminal
Rev. B
Innova User Manual - Ch. 3, Safety
29
Ch. 3 - Safety
Operating Safety
Table 3.1a Safety Symbols and Functions.

SYMBOL
FUNCTION
Frame or chassis terminal

Equipotentiality
Power on
Power off
Equipment protected by double or reinforced insulation
Refer to system documentation
Electric shock risk
3.1.2 Definitions: Warning, Caution, and Note

There are three terms that are used in this Uses Guide related to the operating safety of Innova:
Warning, Caution, and Note. These terms are defined in Table 3.1b.
Table 3.1b Safety Terms and Definitions.
TERM
DEFINITION
WARNING
Alerts of possible serious injury. Do not proceed beyond a

warning until conditions are fully understood and appropriate actions taken.
CAUTION
Calls attention to possible equipment or facility damage.
Note
Emphasizes or provides additional information.
It is important to read all warnings, cautions, and notes. Warnings, cautions, and notes include
information that are important to the operating safety of Innova system.
30
Rev. B
Ch. 3 - Safety
Operating Safety
3.1.3 Summary of Warnings and Cautions

This section includes warnings and cautions that must be followed whenever operating Innova.
WARNING:
Innova must be properly grounded before applying power. The mains power
cord must be inserted into an outlet with a protective earth ground contact.
WARNING:
The line voltage selection must be checked before applying power to Innova
system components. The line voltage selector switch is on the front panel of the
NanoDrive beneath the front cover and protective clear shield. The line voltage
selector switches can be set to the following voltages: 100 V, 120 V, 220 V, and
240 V. See section 3.1.5.
WARNING:
Do not open Innova. The NanoDrive and the base unit use hazardous voltages
and therefore present serious electric shock hazards.
WARNING:
Periodically inspect the cables of the Innova system to ensure they are not
frayed, loose, or damaged. Cables that are frayed, loose, or damaged must be
reported immediately to a local Veeco service representative. Do not operate
Innova when wires are frayed, loose, or damaged.
WARNING:
Do not connect or disconnect cables or components when power is applied.

Physical injury and/or equipment damage may result.
CAUTION:
All Innova system components must be handled with care. System components contain
delicate electromechanical components that can be damaged easily by improper handling.
CAUTION:
The power to the NanoDrive must be turned OFF before removing or installing the scanner.
CAUTION:
When removing and installing the scanner, personnel and equipment must be grounded to
ensure that the scanner is not damaged. The scanner is sensitive to electrostatic discharge.
CAUTION:
The four screws that connect the scanner to the base unit must be securely fastened to ensure
proper grounding. When the four screws are securely fastened vibrations are reduced and
maximum instrument performance is ensured.
CAUTION:
To preserve safety and EMC compliance, Innova must be used with the EMI filter supplied
with the Innova system.
CAUTION:
Operation of Innova without the cover may reduce EMC.
Rev. B
31
Ch. 3 - Safety
Operating Safety
3.1.4 Grounding Innova

Innova must be properly grounded before applying power to its components. The main power cord
must be inserted into an outlet with a protective earth ground contact. If there is no access to an
outlet with a protective earth ground contact, the Innova system must be grounded using the ground
connection of the NanoDrive. The location of the ground connection is shown in Figure 3.1a.
Ground
Connection
Figure 3.1a NanoDrive Rear Panel, Showing Ground Connection.
3.1.5 Setting the Line Voltage

The line voltage selection must correspond to the line voltage of the facility where the Innova
system is operated. The line voltage selection is made by setting 6 voltage selectors. These
selectors are located beneath the front cover of NanoDrive. The available line voltage settings are:
100V, 120V, 220V, or 240V.
To change the line voltage selection:
1. Ensure the power switch to the NanoDrive is turned off.
2. Unplug the NanoDrive power cord from the power outlet or back panel.
3. Remove the front cover.
32
Rev. B
Ch. 3 - Safety
Laser Safety
4. Remove the clear shield cover protecting the line voltage selector switches.
(Front cover and clear plastic shield

have been removed)
Power On/Off
Selector switches (6)
Figure 3.1b NanoDrive Voltage Selectors

5. Set the line voltage on each of the six (6) selectors to the desired value: 100V, 110V, 220V,
or 240V.
6. Replace the clear plastic shield and front cover.
The line voltage is now set to the appropriate value.
3.2
Laser Safety
Innova contains a diode laser powered by a low voltage supply with a maximum output of 0.2 mW
CW in the wavelength range 600 to 700 nm. Diode laser power up to 0.2 mW at ~670 nm could be
accessible in the interior. Innova should always be operated with the probe head properly installed.
Rev. B
33
Ch. 3 - Safety
Laser Safety
WARNING:
Use of controls or adjustments or performance of procedures other than those

specified herein could result in hazardous laser light exposure.
Figure 3.2a shows the warning labels located on the Innova probe head. Strict observance of these
warning labels is required.
Figure 3.2a Warning Labels on the Probe Head.

The Caution label in Figure 3.2a specifies that the probe head is a Class II laser product.
The aperture label is located in the cutout cavity of probe head and indicates that laser light is
emitted from the aperture indicated.
34
Rev. B
Ch. 3 - Safety
Specifications and Performance
Figure 3.2b shows the location of the laser safety compliance label on the rear panel of the
NanoDrive electronics module.
Figure 3.2b NanoDrive Rear Panel, Showing Location of Laser safety Compliance Label.
3.3

System Configurations
Probe Head
Operates in Contact mode, TappingMode

and STM modes.
Measurement Performance
Standard
Scanner
Scan range
Rev. B
Large Area (>90 m) piezoelectric scanner.

Maximum lateral scan range: >90 m.
Maximum vertical scan range: 7.5 m.
35
Ch. 3 - Safety
Optional
Scanner
Scan range
Small area piezoelectric scanner.

Maximum lateral scan range: 5 m.
Maximum vertical scan range: 1.5 m.
Microscope Stage
Translation range
Sample size
Tip-sample approach
Optical microscope
6 mm x 6 mm.
~45 mm x ~45 mm x 18 mm (thick).
Automatic with 3 independent stepper motors.
Optional on-axis microscope with color video
monitor for probe tip and sample view.
5:1 zoom, ~250 m field of view.
Standard 10X objective.
System power
115/230 V AC, 50/60 Hz, 600 W.
Dimensions and Weights
Innova
NanoDrive
15 in. (380 mm) x 14 in. (355 mm) x 14 (355 mm); 26 lb (12 kg).
14 in. (585 mm) x 23 in. (191 mm) x
23 in. (585 mm); 50 lb (23 kg).
17 in. (432 mm) x 7.5 in. (191 mm) x
17.5 in. (445 mm); 27 lb (12 kg).
Computer
Operating Environment
Temperature
Humidity
0C to 30C, 32F to 112F.

60%; non condensing.
Cleaning Agents
Base unit
Probe head
AEM and computer
WARNING:
CAUTION:
36
Isopropyl alcohol.
Isopropyl alcohol.
Isopropyl alcohol.
To avoid risk of electric shock, do not clean Innova system components when
power is applied.
Do not use acetone to clean Innova system components. Acetone may damage important
safety warning labels.
Rev. B
Ch. 3 - Safety
Innova User Documentation
3.4
3.4.1 Innova Users Guide

Innova User manual is a complete guide to operating the Innova instrument in: Contact mode,
TappingMode, STM, MFM and EFM modes. It provides an overview of the instrument system,
including important safety information, and provides all the necessary steps for setting up the
instrument and performing imaging and single point spectroscopy in air and in liquid. The manual
describes how to perform scanner calibration procedures and provides a brief tutorial in
Nanolithography using the Nanoplot applet.
3.4.2 SPMLab Display and Image Analysis

Document 004-1006 provides description and instruction on use of the analysis capabilities in the
Image Analysis application portion of the SPMLab software. Some of the capabilities are: surface
flattening, distance measurements, FFT analysis and many others.
Rev. B
37
Ch. 3 - Safety
38
Rev. B
Ch. 4 - Installation and Set-Up

Overview:
Chapter 4
4.1
Installation and Set-Up
Overview:
This chapter describes how to prepare the Innova instrument to take an image in Contact mode,
which is used for imaging the height of a sample. The sample in these tutorials is the 10 m
calibration grating provided with the Large Area scanner. The sample has been selected because its
features are relatively easy to identify.
Further details and background information related to many of the procedures in this chapter are
provided in Chapter 7 and Chapter 8.
This chapter assumes familiarity with Chapter 1. Before following the procedures in this chapter,
also ensure that:
The Innova instrument has been properly installed by a Veeco representative.
The computer components and control electronics, have been installed and set up
properly.
The cables are properly connected between the system components and the power cords
are plugged in.
WARNING:
4.2
This instrument contains a laser. Use of controls or adjustments or performance

of procedures other than those specified in this manual could result in hazardous
laser light exposure.
Facilities
The basic requirements for facilities, including utilities and floor space requirements are listed in
this section. Innova is designed to operate acceptably in what would be considered a typical
laboratory environment in terms of temperature and humidity. A user supplied vibration isolation
table (VT-GB or equivalent) is required for Innova and critical applications may require additional
protection against mechanical or acoustic vibration (including air buffeting).
Rev. B
Innova User Manual - Ch. 4, Installation & Setup
39

Facilities
4.2.1 Acoustic/Vibration Specifications

The following conditions must be met in order to achieve 1.0 angstrom RMS noise specifications:
Acoustic: Acoustic noise should not exceed 75dBC (Note C weighting).
Vibration: Vibration of the AFM mounting surface should not exceed VC-D in any
direction.
100
1959-940-A
Workshop (ISO)
Velocity Level in dB re 1 micro-inch/sec
90
32,000
Office (ISO)
80
16,000
Residential Day (ISO)
8,000
Perception Threshold (ISO)

Operating Theater (ISO)
4,000
70
BBN Criterion A
2,000
BBN Criterion B
60
1,000
BBN Criterion C
50
500
BBN Criterion D
250
BBN Criterion E
125
40
6.3
4
5
16
10
8
12.5
40
25
20
31.5
63
50
100
80
160
125
One-Third Octave Band Frequency in Hz

BBN Criterion A - Probe Test Equipment. 100X Microscopes
BBN Criterion B - 500X Microscopes. Aligners, Steppers to 5m Geometries
BBN Criterion C - 1000X Microscopes. Aligners, Steppers to 1.5m Geometries
BBN Criterion D - Steppers, E-Beams to 0.3m Geometries, CD Inspection Equipment.
Most SEMs to 50,000X
BBN Criterion E - Anticipated Adequate for Future Fabrication and Test Equipment
for Low Submicron Geometries
Figure 4.2a Vibration Criteria Plot
4.2.2 Space requirements

The following diagrams depict the minimum space requirements for the Innova system
components. An additional minimum of 6 (15 cm) is recommended around the controller and
SPM to provide adequate cooling airflow. The PC is a standard tower (mini or midi) configuration.
The PC and the PC system components (keyboard, mouse, monitors) are commonly used
components and are not discussed in this section. Innova must be mounted on a suitable vibration
isolation table but all other components may be placed on normal furniture and the NanoDrive is
commonly placed directly on the floor or a small riser.
40
Rev. B

Facilities
Innova
Figure 4.2b SPM Space Requirement

NanoDrive
Figure 4.2c Controller Space Requirement
Rev. B
41

Cable Connections
4.3
Cable Connections
The cable connections described in this section should have been made by the authorized Veeco
representative who initially installed the system. Nevertheless, it is prudent to perform a check by
noting the following steps, which will also serve as familiarization with the system.
Figure 4.3a Cable Connections for Innova System Components.

1. Ensure that all system components are turned off.
2. Set up the computer components, including the keyboard, mouse, and monitor.
a. Connect the keyboard cable to the keyboard connector on the back panel of the
computer unit.
b. Connect the mouse cable to the mouse connector on the back panel of the computer
unit.
42
Rev. B

Cable Connections
c. Connect the computer monitor cables to the computer monitor connectors on the back
panel of the computer unit.
3. Connect the Veeco supplied USB cable between the NanoDrive Controller and the back
panel of the PC.
4. Connect the 68 pin Low Voltage cable between the low voltage connector on the back panel
of the Innova microscope and the low voltage connector on the IO-I board of the NanoDrive
Controller. This cable carries low voltages signals (e.g. the setpoint) to the Innova
instrument.
5. Connect the 13 pin High Voltage cable between the high voltage connector on the back panel
of the Innova microscope and the high voltage connector on the IO-HV board of the
NanoDrive Controller. This cable carries high voltage signals that are applied to the
piezoelectric scanner.
6. Connect the 50-pin motor control cable between the motor control connector on the back
panel of the Innova instrument and the NanoDrive controller. The motor control cable carries
low-voltage signals to the stage.
7. Connect the video cable from the video BNC connection at the back panel of the Innova
microscope to the frame grabber card connector at the back of the PC.
Figure 4.3b NanoDrive Cabling Locations
Rev. B
43

Removing and Installing the Scanner
4.4
CAUTION:
The scanner is extremely fragile. The piezoelectric ceramic tube is easily broken/damaged by
mechanical shock. Use extreme care when handling the scanner. Do not apply any pressure to
the sample holder on the top surface of the scanner since this may result in scanner tube
damage/breakage
CAUTION:
Ensure the head is not installed and the optics are moved out of the way before removing or
installing the scanner.
CAUTION:
The power to the NanoDrive must be turned OFF before removing or installing the scanner.
Sample holder above
Scanner tube
Mounting Screws (4)

Connector
Figure 4.4a Scanner

To remove the scanner:
1. Move the optics out of the way.
2. Remove the Innova head.
3. If a sample is loaded, remove it from the sample holder.
4. Turn off the software
5. Turn off the NanoDrive controller
6. Loosen the four hex-head capscrews at the corners of the scanner using a 3/32" allen wrench.
7. Lift the screws to verify that they are not engaged (the screws are captive with the scanner
and will not be entirely removed. See Figure 4.4b.
44
Rev. B

Scanner Mounting
Screws (4)
Figure 4.4b Cover and Head Removed to Expose Scanner.

8. Taking care to avoid damaging the scanner, pry the scanner up using the fingerholds on the
left and right sides of the scanner to disconnect the electrical connector from the Innova
stage. Using the allen wrench in the loosened screw, the scanner may be pried up very gently.
As a third alternative, remove the scanner by pulling the screws (use two diagonally opposite
screws).
CAUTION:
Do not allow the top of the scannerespecially the sample holderto come into contact with
another surface. If the scanner contacts another surface, the scanner tube may break.
9. After the electrical connector is disengaged, lift the scanner and tilt it to remove it from the
Innova stage.
10. Store the scanner on its side in the box originally supplied.
To install a scanner:
1. Insert the four hex-head screws into the scanner (as required).
2. Orient the scanner to align the scanner connector with the stage connector and insert the
scanner into the opening on the Innova stage. There is only one correct fit. The scanner
should fit snugly.
CAUTION:
Rev. B
The four screws that connect the scanner to the Innova base unit must be securely fastened to
ensure proper grounding. When the four screws are securely fastened, vibration is reduced and
imaging is improved.
45

Starting Innova
3. Tighten the four hex-head screws with a 3/32" allen wrench until the scanner is firmly
seated.
Note:
4.5
Whenever the scanner is changed, the system software must be reconfigured to

be consistent with the hardware.
Starting Innova
1. Turn the computer and monitors on. The computer on/off switch is located on the front panel
of the computer unit. The computer monitor on/off button is located on the front of the
monitor below the screen. Windows starts automatically and displays the desktop.
2. Turn on the NanoDrive. The on/off rocker switch is located on the lower left portion of the
front panel of the controller.
3. From the Windows START button, select All PROGRAMSVEECOSPMLAB XP
SPMLAB or double click the desktop icon for SPMLab.
To Remove the Probe Head:

1. Rotate the swing arm of the Innova Optics to move the objective lens away from the probe
head before moving the stage.
2. Use the motor stage controls to provide clearance between the probe and the sample.
3. If a probe cartridge is installed in the probe head, it can be removed by grasping the handling
prong and sliding the cartridge out of the head, as shown in Figure 4.5a.
Figure 4.5a Removing the Probe cartridge from the Probe Head.
46
Rev. B

Loading a Sample
4. Set the probe cartridge on a flat surface with the cantilever facing up.
5. Disconnect the electrical connector from the stage before removing the head.
Connector
Figure 4.5b Removing the Probe Head

6. Place the probe head on a flat surface or in its original box.
To install the probe head

1. Place the head on the three point motor stage mounts.
CAUTION:
Ensure that the head is properly seated on the three point mount.
2. Insert the electrical connector from the probe head into the connector on the stage, as shown
in Figure 4.5b.
4.6
Loading a Sample
1. Move the Innova Optics objective lens away from the probe head by rotating the swing arm.
Rev. B
47

Loading a Sample
CAUTION:
The objective lens must be out of the way before loading a sample. Otherwise, raising the
probe head will hit the objective lens, damaging both the probe head and the lens.
2. Open the Motors Stage window either by clicking the toolbutton

shown in Figure 4.6a.
or using the menu as
Figure 4.6a Menu to Open Motors Stage Window

3. Use the up arrow in the Motor Stage window to raise the probe head to provide ample
clearance for loading the sample.
Raise probe
Lower probe
Simplified
Note: The Motor Stage window may

be displayed in Simplified
or Extended form by clicking
the corresponding toolbutton.
Extended
Figure 4.6b Motor Stage Window Control to Position Probe Height

4. Secure the sample to one of the sample mounting disks supplied with the instrument.
CAUTION:
48
Do not let the sample mounting disk snap down hard on the magnetic sample stub. The
piezoelectric scanner (mounted underneath the sample holder) is a ceramic material that can
easily break under mechanical shock.
Rev. B

Installing a Chip Carrier
5. Slide the mounting disk gently onto the sample holder (the small round stub attached to the
top of the scanner) as shown in Figure 4.6c.
6. Position the mounting disk so that the sample is centered on the sample holder. The sample
holder magnet holds the sample mounting disk securely in place.
Figure 4.6c Sliding the Sample Mounting Disk Onto the Sample Holder.
7. Use the down arrow in the Motor Stage window, refer to Figure 4.6b to lower the probe head
to within several millimeters of the sample surface.
8. Move the Innova Optics objective lens into position over the sample.
4.7

The chip carrier, with pre-mounted cantilever probe, is installed on the probe cartridge. The size of
the cantilevers in Figure 4.7a is greatly exaggerated. The probe cartridge is then installed in the
probe head.
Figure 4.7a Microfabricated cantilever Chip Mounted on Chip Carrier.
Rev. B
49

Contact for Head (3x)

Handling prong
Chip Carrier
Spring clip
Figure 4.7b The AFM Probe Cartridge

The spring clip on the cartridge holds the slots in the chip carrier securely against the three balls in
the three-point mount of the probe cartridge. The spring clip has two small notches for the prongs
of the spring clip tool.
A special spring tool, shown in Figure 4.7c, must be used to lift the spring clip for removing and
installing a carrier.
Figure 4.7c The Spring Tool.

Note:
The spring tool should be kept in a secure place when not in use. If the tool is
lost, a charge will be made for a replacement.
1. Place the probe cartridge on a flat surface with the handling prongs facing to one side and the
spring clip facing up.
50
Rev. B

CAUTION:
Hold the chip carrier by the ceramic plate. Do not touch the microfabricated cantilever chip.
The cantilever chip is extremely fragile and can be damaged or broken easily.
2. Remove a new chip carrier from the box of chip carriers.

3. Ensure that the cantilevers have not broken off.
4. While holding the chip carrier, also hold the probe holder so that it will remain steady as the
chip carrier is inserted.
5. Place the chip carrier near the three-point mount, as shown in Figure 4.7d.
Figure 4.7d Lifting the Spring Clip.

6. Place the spring tool prongs under the spring clip, as shown in Figure 4.7d. The curved side
of the tool prongs should face down, and the flat side of the prongs should engage the notches
in the spring clip.
7. Gently lift the spring clip by pressing down on the handle of the clip tool.
CAUTION:
Rev. B
Do not bend the spring clip beyond its normal range.
51

8. Slide the chip carrier under the lip of the spring clip, as shown in Figure 4.7e, until the balls
engage the slots.
Figure 4.7e Inserting the Chip Carrier.

9. Wiggle the chip carrier from side to side to ensure that all three balls fit snugly. A correctly
installed chip carrier is shown in Figure 4.7f.
Figure 4.7f Correctly Inserted Chip Carrier.

10. Raise the handle of the spring clip tool to lower the spring clip to clamp the chip carrier.
11. Disengage the spring tool from the notches in the clip spring, and put the tool in a secure
place.
52
Rev. B

Loading a Probe Cartridge
4.8
Loading a Probe Cartridge
CAUTION:
Use only approved probe cartridges in the Innova head. An incorrect probe cartridge may
damage the instrument.
A chip carrier should be installed in the probe cartridge, as described above.

1. Grasp the probe cartridge by the handling prong.
2. Insert the probe cartridge into the probe head with the tip facing downward.
3. Ensure the probe cartridge clicks into place in the probe head (indicating that the 3-point
contacts are positioned correctly).
4.9
Using the WinTV32

WinTV displays an image of the sample seen through the optical microscope of Innova. The
following instructions show how to enable the Innova Optics and WinTV32.
4.9.1 Using the Innova Optics

This procedure assumes that the Innova Optics and the video monitor are properly installed and that
a probe head, a chip carrier, and a sample are already loaded.
CAUTION:
A stop inside the swing arm limits the arm rotation. Rotate the swing arm slowly to avoid
striking the probe head in the event that it or the head is not properly adjusted.
1. Rotate the Innova Optics swing arm slowly until the objective lens fits between the two arms
of the probe head.
2. The lens should be positioned directly over the cantilever and sample.
Rev. B
53

Using the WinTV32
3. Start WinTV32 by Start > All Programs > Hauppauge WinTV > WinTV32.
Figure 4.9a Start WinTV32 Directions

4. The sample will be illuminated with light from the Innova Optics. The video monitor
representation will brighten and display a blurry image.
54
Rev. B

Using the WinTV32
5. Zoom out to the widest field of view by moving the camera slider control fully to the left and
adjust the light intensity by sliding the light intensity control to obtain the best possible
image.
Light intensity
control slider
Camera slider
Figure 4.9b Light and Zoom Slide Controls

Optics Swing Arm
Focus knobs
Coarse
Fine
Optics Stage Adjustments

X-direction
Y-direction
Figure 4.9c Innova Optics Controls.

CAUTION:
Coarse focus moves the lens up and down. To avoid damaging the probe head and the lens, do
not drive the objective lens down into the probe head.
6. Adjust the coarse and fine focus adjustments to focus on the sample, refer to Figure 4.9c.
Rev. B
55

Using the WinTV32
7. Monitor the focus adjustment by looking at the WinTV display. The cantilever chip with
triangular-shaped cantilevers should be seen.
Figure 4.9d WinTV View of Cantilevers

8. Adjust the position of the cantilever until it is approximately centered in the view by using
the two optics stage position adjustments attached to the Innova Optics support plate to move
the Innova Optics relative to the base. See Figure 4.9e.
Figure 4.9e Stage Adjustments

9. Using the stage adjustments may cause the optical image to wobble. The Innova instrument
has built-in vibration isolation so the wobble will stop after making micrometer adjustments.
10. Adjust the fine focus using the small focusing knob (see Figure 4.9c) until the cantilever is
clearly visible and in focus.
56
Rev. B

Aligning the Deflection Sensor
4.10 Aligning the Deflection Sensor

4.10.1 Aligning the Laser Spot
Aligning the laser spot involves adjusting the laser spot onto the cantilever and then positioning the
reflected laser spot onto the desired portion of the QPD. The deflection sensor scheme is described
in SPM Overview: Section 1.4.2.
WARNING:
Use of controls or adjustments or performance of procedures other than those

specified may result in hazardous laser light exposure.
1. Ensure that the power to the probe head is on.

2. Turn the LASER ON/OFF switch to ON.
Figure 4.10a Laser On

3. Use the laser (cantilever) alignment controls (Figure 4.10b) to move the laser beam spot onto
the cantilever chip. An intense red reflection indicates the laser spot is at the front of the
cantilever chip above the cantilever.
Rev. B
57

Aligning the Deflection Sensor
4.10.2 Aligning the Deflection Sensor

QPD
Laser
Head
Head
Figure 4.10b Probe Head Alignment Controls and Laser Indicators.
1. Focus on the cantilever with the Innova Optics.
2. Adjust the laser spot to the end of the cantilever.
3. Center the laser spot on the end of the cantilever.
4. Adjust the QPD (Detector) alignment knobs to align the laser spot while watching the laser
position indicators on the front of the probe head (see Figure 4.10b). The central green LED
should be brightly illuminated and none of the red LEDs illuminated. It is normal to make
several adjustments, alternating between up/down and left/right to obtain proper alignment.
Near the correct position, the red lights are very sensitive, and some practice is needed to
make the adjustments so that all the red lights are off.
5 LEDs (center green)
Figure 4.10c QPD Alignment LED Indicators
58
Rev. B

Troubleshooting Tips
4.11 Troubleshooting Tips
Aligning the QPD may be especially difficult if the probe is defective. Residual strains
may cause a cantilever to bow and make alignment difficult. It may be advisable to
replace the probe.
If it is not possible to position the laser properly on the detector, insure the probe is
properly mounted or attempt aligning to the second cantilever.
The laser power is not on. -- Ensure that the head is properly connected to the stage and
check that the LASER ON/OFF toolbutton in the main window is clicked ON.
The laser spot doesnt come into view in the optics. -- It is important to ensure that the
laser spot is in the vicinity of the cantilever. Move the optics out of the way and adjust
the laser positioning controls until the spot can be seen near the cantilever.
It isnt clear what direction the steering knobs move the laser spot. -- Observe the
position of the spot on the sample surface and experiment with the knobs.
The brightness of the laser spot on the cantilever in the optical view is maximized, but
the laser intensity indicator does not illuminate. -- Do not try to maximize the brightness
of the laser spot in the optical view. The goal is to maximize the reflected light to the
QPD. When the spot is positioned so that the QPD is receiving the maximum reflected
light, the laser spot on the cantilever may not appear bright in the optical view.
The cartridge is not properly inserted in the probe head. -- Wiggle the cartridge in and
out to ensure that all three contact zones are engaged by the three balls on the cartridge.
The cartridge should feel firmly mounted when it is correctly positioned over the
contact zones.
The chip carrier is not properly inserted in the cartridge mount. -- Remove the cartridge
from the head and wiggle the chip carrier from side-to-side to ensure that all three balls
on the cartridge mount are engaged by the three slots on the chip carrier. The chip
carrier should click into place.
The cantilevers are broken. -- Examine the probe either visually or using the optical
microscope view to determine if the cantilever(s) are broken. Replace the probe as
required.
4.12 Typical startup

1. Power should be applied to the system components in the following sequence:
a. PC
b. Monitors (2)
c. Controller (which supplies power to the microscope)
Rev. B
59

Typical startup
2. To start the SPMLab software, double-click the SPMLab startup icon on the computer
desktop. Select Yes when asked to load DSP Code, see figure Figure 4.12a. The SPMLab
software window appears and may span one or two monitor displays. This large window will
contain all the areas and panels needed to control the microscope and analyze results.
Figure 4.12a System Status

3. After the DSP code is loaded, the System Configuration Window will appear. Select the
appropriate microscope and scanner. The example in figure Figure 4.12b shows Tapping
selected.
Figure 4.12b System Configuration Example

The SPMLab and controller systems allow up to 20 simultaneous image channels.
4. Select the scanner (Scanners).
5. Select Apply after inputting all microscope parameters.
60
Rev. B

Typical startup
6. Select Yes when asked to Would you like to turn the HV on.
7. The main SPMLab window, Figure 4.12c displays the toolbuttons for all functions and
feedback controls in the left portion of the window.
Function toolbuttons
Engage Indicator
Feedback controls
Tip bias controls
Optical Microscope light and intensity
Camera zoom
Laser on/off
Figure 4.12c Main SPMLab Window

Note:
Individual sections may be turned on/off by right clicking on the left toolbar
which will open a selection window for the sections to be displayed.
Figure 4.12d Section Selection Window
Rev. B
61

Deflection Sensor
4.13 Deflection Sensor

The probe head must detect extremely small movements of the cantilever as it interacts with the
surface of the sample. A deflection sensor measures these movements. The deflection sensor
reflects a laser beam off the back of the cantilever onto a position-sensitive photodetector (QPD).
This technique is known as beam bounce detection. As the cantilever bends, the position of the
laser spot on the QPD shifts. The shift in spot position indicates how much the cantilever has
deflected. In most implementations, the laser beam is directed (aimed or positioned) by
adjusting mirrors to locate the beam and spot as required. (Refer to Figure 4.13b.) For proper
Contact mode operation, two conditions must be met:
1. The laser spot must be positioned on the end of the cantilever as shown in Figure 4.13a.
2. The intensity of the reflected laser beam at the QPD must be above a certain level.
Figure 4.13a Correct Laser Spot Position.

When the laser spot is properly aligned on the QPD, the laser intensity indicator on the front of the
probe head is bright green, and none of the red laser position indicators are illuminated. It is
possible to accidentally align the deflection sensor with the laser spot reflecting off one of the legs
of the cantilever, the cantilever chip, or the sample surface. Under these conditions, the alignment
indicators may show the deflection sensor is aligned properly, but the instrument will not work
properly.
4.13.1 Alignment Knobs

The deflection sensor is aligned while the probe is not in contact with the sample surface, i.e.,
before performing an approach. When the deflection sensor is properly aligned, the laser beam
reflects off the back of the cantilever and onto the correct position on the QPD. The Innova probe
head uses two adjustable mirrors to position the laser beam in the deflection sensor: the cantilever
mirror and the detector mirror. The cantilever mirror positions the laser beam onto the cantilever
and the detector mirror positions the reflected beam from the cantilever onto the QPD.
62
Rev. B

Deflection Sensor
The angle of each positioning mirror can be changed with two sets of alignment knobs shown in
Figure 4.13b.
Detector
(QPD)
Cantilever
(Laser)
Head
Head
Figure 4.13b Probe Head Alignment Controls

The laser (cantilever) alignment knobs position the laser spot onto the cantilever. The laser spot
moves in the direction indicated by the arrows on the up/down (U/D) knob and the left/right (L/R)
knob.
The QPD (detector) alignment knobs position the laser spot onto the QPD deflection sensor. The
laser spot moves in the direction indicated by the arrows on the up/down (U/D) knob and the
left/right (L/R) knob.
Rev. B
63

Deflection Sensor
4.13.2 Laser Indicators

The laser position and intensity indicators located on the probe head are shown in Figure 4.13c and
Figure 4.10c. The indicators display the results of the mirror adjustments made with the alignment
knobs.
(red)
(green)
(red)
(red)
(red)
Figure 4.13c Laser Position and Intensity Indicators.
64
Rev. B

Deflection Sensor
The Laser Alignment window in the SPMLab program provides a visual representation of the laser
spot on the QPD. Open the Laser Alignment window either by clicking the
using the menu as shown in Figure 4.13d.
toolbutton or
Figure 4.13d Menu Selection for Laser Alignment Window

Fine align the laser using the laser alignment window indicator, Figure 4.13e and use the
adjustments on the head (ref. Figure 4.13b) to adjust the laser spot location (the pink spot) to the
center of the window.
Figure 4.13e Image of Centered Laser Spot

The voltage readout on the bottom left indicates the voltage sum of the four quadrants of the QPD
and indicates the intensity of the reflected spot -- a large value is desirable (depending upon the
cantilever, values between 0.5 and 5V are typical). The values on the axes indicate lack of
centering of the spot -- values near zero are desirable.
Rev. B
65

Motor stage controls
4.14 Motor stage controls

The motor stage window is used to control the distance between the probe and the sample. If the
probe is too close to the sample, it may be dragged across the sample and damage both the probe
and the sample. To avoid damaging either the probe or sample, set the probe to sample distance to
provide a safe clearance. Probe spacing can be adjusted using the controls in the Motors stage
panel.
Select to enable
distance scroll
Figure 4.14a Motors Stage Panel

Motor speed is adjusted by selecting Fast, Middle or Slow. Alternatively, enabling the Distance
scroll box and inputting a value in the input box permits incremental Z motion by the input value
when clicking the up or down toolbuttons.
The four quadrant arrow toolbuttons in the Control Mode portion of the window are used to align
the scanning plane and sample. By clicking on the arrows, pitch and roll can be adjusted.
The Stage Reset
tool causes the stage to return to its default level position.
Whatever tilt or roll is inherent in the sample or sample mounting is ignored.
CAUTION:
66
Frequent or repeated use of Stage Reset may cause a safety shutdown due to controller
overheating. Stage motors will be disabled (several minutes) until the controller temperature is
restored to a safe range.
Rev. B

Engage
4.15 Engage
Approaching the sample is a two-part process. First, the motor stage controls (as described in
section 4.14) are used to perform a manual approach to move the probe close to the sample surface.
Then, auto engage is used to bring the probe to the distance required for imaging. When an auto
engage has succeeded, the probe is said to be in feedback at the surface. The greater the distance
between probe tip and sample, the longer the auto engage process will require.
The Engage dialog box is shown in Figure 4.15a in two configurations. The configuration can be
changed between Simplify and Extend by clicking the toolbutton in the lower right of the
window.
Stop engage/
Disengage
Autoengage
Simplify Window
Extend Window
Figure 4.15a The Engage Panel
Rev. B
The engage process involves adjusting the sewing voltage, the motor step (0.4 m min.)
and the delay time (delay between motor step and sewing range).
The settings for these parameters are specified in the Extend window, however, the
default values will generally produce good results.
The Z Center checkbox causes the piezo range to be set at midrange after an
autoengage has been completed and the probe is in feedback.
The Auto Scanning checkbox causes scanning to occur immediately following a

successful engage (the probe scans but no data is produced).
The piezo/tip interaction distance can be adjusted manually using the 2 step buttons (up
and down). A right mouse click opens a window where the desired Z adjustment can be
entered.
67

Engage
Clicking the down arrow in either window initiates an automatic approach/engage using
the settings which are in the Extend window.
To autoengage, stop the engage process or disengage, click the appropriate toolbutton as
indicated in Figure 4.15a. Right clicking on the disengage tool
where the retreat step distance may be entered.
68
opens a window
Rev. B
Ch. 5 - Realtime Controls

The Scanning Control Dialog Window:
Chapter 5
5.1
Realtime Controls
The Scanning Control Dialog Window:
Figure 5.1a Main Scanning Window

The scanning control window controls all the real time parameters used for scanning an image. The
main window supports 3 scanning options:
1. Area scanning (highlight square)
2. Line scanning (highlight line box)
3. Point probe positioning (highlight point probe icon)
5.2
Area Scanning
The area scan window allows setting of:
Rev. B
Number of data points: (min. = 16x16 pixels, max = 1024x1024 pixels).
Innova User Manual - Ch. 5, Real Time
69

Area Scanning
Scan rate: sets the number of lines scanned per second in the x direction. (min. = 0.1 Hz,
max = 100.0 Hz).
Scan range: size of the scan along one side of a square (min. = 0 m, max = 5.0 m for
5.0 scanner and 90 m for 90 m scanner).
Rotation: combines x and y drive voltages such that the piezo scans the sample at
variable x y angles (scanning angle 0 to 360).
X and Y offset: these controls allows entering an offset of x and y from the center of the
full xy scan range.
Scan Area Tool
Automatic
Scaling
Power
Spectrum
Tool
Divide by 2
Multiply by 2
Figure 5.2a Profile and Power Spectrum
The profile and power spectrum display shows typical parameters for an area scan of a 10.0 m
grid. The profile shown on the figure depicts a height vs. scan range plot for the current line being
scanned. The vertical axis can be scaled automatically by selecting the A button or manually set by
highlighting either the X2 or divide /2 button. The power spectrum which describes how the power
of the signal is distributed with frequency can be displayed by highlighting the power spectrum
button. The scales for the power spectrum display can be adjusted with the tools on the right hand
side of the screen (log, auto, x2 or divided by 2).
70
Rev. B

Line Scanning
Once an image has been obtained, measurements can be made as follows:

1. Select the scan area toolbutton at the top of the scanning window. See Figure 5.2a.
2. Drag the image from the image window to the scan area window. See Figure 5.2a and Figure
5.3a.
3. Use the tools on the right hand side of the window to measure squares, distance or angles.
See figure Figure 5.3a.
5.3
Line Scanning
Any line scan can be obtained from a scanned image. Line scans can be obtained as follows:
1. Highlight the scan area icon on top of the scanning window.
2. Drag the image from the image window into the scan area window in the scanning window.
Figure 5.3a
Rev. B
Image Dragged Into Scan Area Window
71

Line Scanning
3. Click on the Line Scan toolbutton

. Draw the line for the scan in the scan area window.
The line scan window will appear. Select the channels desired by clicking the acquire icon.
Line Scan tool
Drawn line
Figure 5.3b Scan Line Drawn
72
Rev. B

Scanning Window Tools
4. Level the Line Scan signal by selecting a leveling option (AC only, 1D 1st order or 1D 2nd
order) And press start in the main scanning window.
Leveling
Options
Start scan
Figure 5.3c
5.4
Scan Leveled

A toolbar is on the right side of the Scanning window and contains five (5) toolbuttons (see Figure
5.4a) which are used to obtain information about the scanned image/sample.
1. Click the Area Scanning toolbutton
Rev. B
to activate area scanning instead of line scanning.
73

2. The Zoom toolbutton

is used to select a portion of the scan to be enlarged. After
clicking on the toolbutton, click and drag a square on the desired portion of the scanned
image as illustrated in Figure 5.4a.
Zoom Toolbutton
Toolbuttons
Figure 5.4a Zoom Area Selected
74
Rev. B

3. Right click in the center of the zoom square to display the zoomed image of the selected area.
Figure 5.4b Zoomed (Magnified) Image.

4. Press the Start scan tool
to perform a new scan of the selected area.
5. To revert to the original scan area, click the UndoZoom toolbutton

6. The Distance Measurement toolbutton
measurements on the scanned image.
Rev. B
is used to perform linear distance
75

7. After selecting the Distance Measurement toolbutton, click and drag a measurement line on
the scanned image and the distance will be displayed as shown in Figure 5.4c.
Figure 5.4c Distance Measurement Line Drawn with Click and Drag
8. The Angle Measurement tool
image.
76
permits angular measurements to be made on the scanned
Rev. B

9. After selecting the Angle Measurement tool, click and drag a line for one side of the angle,
then right click and drag the other side of the angle to display the angle as shown in Figure
5.4d.
Figure 5.4d Angle Measurement

10. The Cross Section toolbutton
analogous to a cross section.
is used to produce the height along a specified line
11. After selecting the Cross Section toolbutton, click and drag to define a line on the image for
cross sectioning.
12. When the line has been drawn, the Cross Section window will open and display the sample
height along the line.
Figure 5.4e The Cross Section Window
Rev. B
77

Probe Positioning
13. Clicking on the cross section plot at points of interest (see the blue triangular markers in
Figure 5.4e) will display information about the markers and their relative positions.
5.5
Probe Positioning
1. Select the probe position icon Move the cursor to the desired probe position. The
coordinates will appear on the left hand side of the scanning window.
Probe position
Figure 5.5a
Probe Position
2. A circle will appear to indicate the current probe position.

3. Click and drag the circle to reposition the probe.
4. For addition information on probe positioning, refer to Chapter 10.
78
Rev. B

LiftMode Settings
5.6
LiftMode Settings
The scanning window contains real time controls for the LiftMode. The LiftMode is used in MFM
and EFM and will be described in detail in Chapter 11 and Chapter 12.
1.
Figure 5.6a shows the LiftMode window for MFM.
Figure 5.6a LiftMode for MFM

2. The (four) parameters to specify are: start height, lift height, start delay and end delay.
This mode also allows the user to turn off the laser or disable the Tapping Drive on the lift
trace.
Rev. B
79

LiftMode Settings
3. Figure 5.6b shows the LiftMode window for EFM. The parameters in the LiftMode section
are the same as used with MFM. Select the Double Bias tab, select Enabled and choose to
apply a voltage bias to either the tip or the sample and enter the appropriate bias voltages.
Figure 5.6b LiftMode for EFM

4. Figure 5.6c shows the selection window that allows one to ground the sample or tip during
forward or backward trace.
Figure 5.6c Selection Window
80
Rev. B

Scanning Conditions Window
5.7
Scanning Conditions Window

The high gain and low gain settings are selected from this window. The low gain settings should be
used for atomic scale imaging with the large area scanner. There is also a HV on/off button.
Additionally overscanning (% of maximum) and x and y scanning movements can be selected in
this window. If the synchronizer option has been enabled, the synchronizer control will show up on
the right side of the scan conditions window.
Figure 5.7a Scanning Conditions
5.8
Point Spectroscopy Window

This window allows specifying parameters for measuring: Signal distance curves, IV curves (signal
vs. bias voltage) and to turn on/off the z linearizer and thresholds. Figure Figure 5.8a shows a
typical signal-distance curve. The following parameters can be specified:
Rev. B
Resolution (number of data points, the minimum is 16 pixels, maximum 1024 pixels).
Z start and Z end.
Approach and retreat rate
Cycle Hold time
Thresholds
81

IV Curves
Cycle hold time
Figure 5.8a Point Spectroscopy Signal-Distance
5.9
IV Curves
1. The signal current to voltage curve (bias line on tip or sample) is generated in the Point
Spectroscopy window. The following inputs may be made but the default values will usually
produce good results:
Resolution (number of data points, the minimum is 16 pixels, maximum 1024 pixels)
Approach and retreat rates
Z Start/End range
Cycle hold time
Bias line (tip or sample)
Thresholds - Trigger on deflection or height signals
2. The scaling for the graphs displayed on the right are adjusted by selecting full, auto or
manual on the left and right signal scales.
82
Rev. B

Signal Tracing Window
5.10 Signal Tracing Window

The Signal Tracing window allows a plot of a channel as a function of a driving signal. See Figure
5.10a.
Figure 5.10a Signal Tracing Window
5.11 Probe Position Window

1. Scan an image and drag the image to the scan area of the Scanning window.
Image from Tapping

Amplitude - Backward dragged
into Scanning window
Image channels
Figure 5.11a Image Dragged from Channel to Scanning
Rev. B
83

Probe Position Window
2. Open the Probe Positioning window by clicking the Probe position toolbutton
3. Select the Probe toolbutton
to add
a line of locations or the Frame
to add individual locations, the Line toolbutton

toolbutton to add a 2D array of locations.
4. The selected probe positions will be shown in the image and listed by coordinates in the
probe location window.
Coordinates of selected points
Selected points on image
Figure 5.11b Probe Positioning
84
Rev. B
Ch. 6 - Menus
File Menu
Chapter 6
Menus
The menu bar contains a list of menus. Menus contain menu items that provide
access to instrument controls. The menus and menu items of SPMlab are depicted
in the figures below.
6.1
File Menu
Figure 6.1a File Menu
Menu item
Rev. B
Function
Save data
Saves a copy of the images acquired. It is necessary to specify

the filename and location to save the file
Exit
Exits the program and returns to the desktop
Innova User Manual - Ch. 6, Menus
85
Ch. 6 - Menus
Setup Menu
6.2
Setup Menu
Figure 6.2a Setup Menu
Menu Item
86
Function
Microscope
Opens the system configuration window. Allows selecting the

microscope mode and allows selection of the type of scanner.
Laser
Opens the laser alignment window
Tapping
Opens the cantilever tuning window
Stage motors
Opens the stage motors window and allows moving the head
assembly
Closed Loop
Opens the closed loop window where x and y linearizer are

turned on and off and gains are specified
Engage
Opens the engage window and allows engaging, withdrawing

and selection of engage mode parameters
Recalibration
Enables the scanner calibration functions for xy or z.
Rev. B
Ch. 6 - Menus
Real Time Control Menu
6.3
Real Time Control Menu
Figure 6.3a Realtime Control Menu
Menu Item
Rev. B
Function
Scan Control
Opens the scanning window. Specifications include: the imaging channels, input scan parameters, activate LiftMode, activate
bias voltages for tip bias and sample bias, overscanning, closed
loop on/of, high/low gain HV and X/Y axis moves and control
scanning conditions.
Point
Spectroscopy
Used to measure force-distance curves and IV curves.
Signal
Tracing
A more generic version of the point spectroscopy capability

which allows selection of any available driving signal while
monitoring any available channel.
Probe
positioning
Allows recording specific coordinates and moving the probe to

the specified coordinates
Multimeter
Opens a digital multimeter and to monitor specified channels
Oscilloscope
Opens an oscilloscope window
87
Ch. 6 - Menus
Tools Menu
6.4
Tools Menu
Figure 6.4a Tools Menu
Menu Item
88
Function
Image
Analysis
Opens the SPMLab analysis software
NanoPlot
Opens NanoPlot Software
Rev. B
Ch. 6 - Menus
Window Menu
6.5
Window Menu
Figure 6.5a Window Menu
Menu Item
Rev. B
Function
Cascade
Displays window stacked on each other (see menu icon)
Tile
Horizontally
Displays windows with priority given to displaying width (see

menu icon)
Tile
Vertically
Displays windows with priority to height (see menu icon)
89
Ch. 6 - Menus
Toolbuttons
6.5.1 Control Pane Info Menu
Figure 6.5b Info Menu
Menu Item
6.6
Function
About
Provides information on the software release
System info
Provides system status information:

Microscope mode, scanner type and the number of activated
channels. It also gives a DSP status and DSP error status
Toolbuttons
Figure 6.6a Toolbuttons
90
Rev. B
Ch. 6 - Menus
Other Controls
6.7
Other Controls
Engage indicator
Z-position (if feedback

is off)
Feedback signal
Feedback on/off
Piezo position indicator
Gains
{
Bias voltage controls
Optical microscope light

Slide control
Microscope light on/off
Optical camera zoom

Slide Control
Laser on/off
Figure 6.7a Main Window Controls
Rev. B
91
Ch. 6 - Menus
Other Controls
Right clicking on a section of the Main Window controls will open a window which permits
selection of which control sections will be displayed or hidden.
Figure 6.7b Display/Hide Control Sections
The incremental values of the scroll controls
may be modified by double clicking in the
parameter window.
92
Rev. B
Ch. 7 - Contact Mode Imaging

Overview
Chapter 7
7.1
Contact Mode Imaging
Overview
This chapter assumes setup of Innova as described in Chapter 4. Further details and background
information related to many of the procedures in this chapter are provided in other chapters.
The Innova system is comprised of the piezo scanner, Optics and the AFM detection system and the
NanoDrive controller. The scanner houses the piezoelectric transducer. The piezo element
physically moves the sample in the X, Y and Z direction. The force detection system consists of a
laser which generates a spot of light that is reflected off of a microfabricated cantilever onto a
mirror and finally into a photodetector. The position of the spot is determined by circuitry which
generates a voltage from the difference between the photodiode segments. The circuit outputs a
voltage ranging from +10V to -10V depending upon the position of the spot on the photodiodes.
The Innova system maintains the tip at the end of the cantilever in contact with the sample surface.
The sample is scanned under the tip in X and Y. Features on the sample surface deflect the
cantilever, which changes the position of the laser spot on the photodiodes. This position change is
read by the feedback loop. The feedback loop moves the sample in Z to restore the spot to its
original position.
WARNING:
This instrument contains a laser. Use of controls or adjustments or performance

of procedures other than those specified could result in hazardous laser light
exposure.
7.1.1 Special Hardware Requirements:

Probes: DNP, NP or MLCT probes (General purpose Silicon Nitride cantilevers)
7.2
Startup
7.2.1 Cold start

If the system is already powered up and running skip to Warm Start: Section 7.2.2.
1. Turn the computer and monitors on. The computer on/off switch is located on the front panel
of the computer unit. The computer monitor on/off button is located on the front of the
monitor below the screen. Windows starts automatically and displays the desktop.
2. Turn on the NanoDrive. The on/off rocker switch is located on the lower left portion of the
front panel of the controller.
Rev. B
Innova User Manual - Ch. 7, Contact Imaging
93

Startup
3. From the Windows START button, select All PROGRAMSVEECOSPMLAB XP

SPMLAB or double click the desktop icon for SPMLab.
4. SPMLab will launch and display a System Status window shown in Figure 7.2a.
Figure 7.2a System Status Window

5. Click OK to proceed.
7.2.2 Warm Start

1. If system has previously been powered on with SPMLab running, SPMLab will launch and
display the system status window shown in Figure 7.2b.
Figure 7.2b Load DSP Code Again

2. Click OK to proceed.
3. SPMLab will launch in the same configuration as was last used. If this is not the desired
configuration, modify the configuration as described below.
94
Rev. B

Startup
4. Select SETUPMICROSCOPE, or click the Microscope toolbutton

System Configuration dialog box.
, to open the SPMLab
Figure 7.2c System Configuration

5. Configure the system software by making the following selections in the SPMLab System
Configuration dialog box.
MICROSCOPE: Innova
Mode: Contact
SELECT SCANNER: Select the menu item for the scanner that is currently installed
(Large or Small Area).
6. Click
to load the files corresponding to the configurations settings.
7. When the window asking Turn HV on appears, select Yes.
Figure 7.2d High Voltage Option Window
Rev. B
95

Approaching the Sample
7.3

1. Before attempting to approach the sample, ensure that the sample is properly mounted and
located as described in Loading a Sample: Section 4.6.
2. Before performing laser alignment, ensure that the chip carrier and probe cartridge are
properly installed as described in Installing a Chip Carrier: Section 4.7.
3. A tip-to-sample approach brings the probe tip into contact with the sample so an image can
be scanned.
7.3.1 Aligning Laser and Performing a Manual Approach

1. Enable the microscope optics and make necessary adjustments as described in Using the
WinTV32: Section 4.9.
2. Turn on the laser by clicking on the laser toolbutton.
in = On
out = Off
Figure 7.3a Laser On/Off Toolbutton
96
Rev. B

3. Click on the Laser Alignment toolbutton

to open the Laser Alignment window and
check the alignment of the deflection sensor by looking at the laser position and intensity
indicators on the probe head.
Figure 7.3b Laser Spot Centered

4. If realignment is necessary, follow the procedures in Aligning the Deflection Sensor:
Section 4.10 and Deflection Sensor: Section 4.13.
5. Bring the cantilever into the optics field of view.
6. Focus on the sample.
CAUTION:
Do not lower the probe head too far. If the probe tip hits the sample surface, both the probe tip
and the sample will be damaged.
7. Open the Motor Stage window by clicking on the Motor Stage toolbutton
and use the
motor stage buttons to lower the probe until the cantilever begins to come into focus in the
optical view. At this point, the cantilever will be close to, but not touching, the sample
surface. To avoid damage to the tip (a crash), use Slow when the tip is near the sample.
Figure 7.3c Motor Stage Control Window
Rev. B
97

8. Choose a setpoint for the deflection feedback. The setpoint must be a larger positive value
than the force deflection. If the laser has been aligned in the center, corresponding to a force
deflection of approx. zero, a setpoint of +2.0 V may be appropriate. See Figure 7.3d.
9. Perform Auto engage as described in the following section
7.3.2 Engaging
CAUTION:
Once the tip and sample are in contact, raise the probe head before turning off the power to the
probe head. When the system is engaged, the Scan window (see Figure 7.3d) will appear.
A successful engage process will bring the probe into contact with the sample surface.
1. Ensure the auto engage mode is activated and click the Engage toolbutton
2. During the engage process, the Z position bar (which represents Z piezo movement) will be
sewing and the cantilever icon will indicate Engaging.
3. Use the default P, I and D gains in the feedback control window (see Figure 7.3d) these
values may be optimized at a later time as described in Adjusting Feedback Parameters:
Section 7.5.3.
98
Rev. B

4. The engage process is completed when the feedback signal bar shows the setpoint value and
the Z position piezo bar is near mid range. The cantilever icon will indicate Engaged and
the scanning window will be open.
Figure 7.3d Engage Completed

CAUTION:
Improperly set Size and Gain parameters could result in damage to the tip or sample.
5. Ensure the Gain parameters are set to their default values.
Rev. B
99

Taking a Contact Mode Image
7.4

1. Click anywhere on the Scan window to bring it to the top.
2. Check that the proper channels are selected and click OK.
Figure 7.4a Channels Selected in Acquire Panel

3. Review the Area scan parameters (i.e., Scan range, Scan rate, etc.). Scan rates of 1-2 Hz are
typical.
4. Click the start button.
5. Activate the Profile option. Select the channel for display.
Figure 7.4b Scanning Window Profile Option
100
Rev. B

6. Move the scan window to the second monitor.

7. Click Windows in the menu bar and select Tile Horizontally. The images from the selected
channels will be displayed in the main window.
Select desired option(s)
Figure 7.4c Selected Channels in Main Window

8. Select the proper realtime processing option to remove, for example, tilt, as desired.
9. To cancel the scan before it is finished, check the start button again.
Rev. B
101

Taking Better Images
7.5
7.5.1 Before Beginning

This tutorial explains how to optimize the scan and feedback parameters to get the best
image.
Before following the steps in this chapter, perform an auto approach and take an image.
Scan parameters can then be adjusted. The Feedback controls are located on the left side of
the SPMLab main window and Scan controls are located in the scanning window.
7.5.2 Setting Scan Parameters

SCAN RANGE
1. Position the cursor over the number in the SCAN RANGE (m) textbox, and double-click to
highlight that number. Alternatively, click and drag the cursor to select the number.
2. Type in a new scan size in microns, and then press the [Enter] key. Alternatively, use the
scrollbox arrows to scroll through a range of values. It is unnecessary to type m for the
units.
3. A new scan with this scan size will start automatically.
4. Try a smaller scan with a scan width approximately half as wide.
The scan image should change. By choosing successively smaller scans, it is possible to zoom in on
the region of interest.
SCAN RATE
1. Position the cursor over the number in the Rate textbox and double-click to highlight the old
text. Alternatively, click and drag the cursor to select the number.
2. Type in a new scan rate in Hertz (= scan lines per second), and then press the [Enter] key.
3. A new scan will start automatically.
The scan rate can be adjusted while an image is being acquired. Image quality can be
monitored as the scan rate is adjusted. When the optimum scan rate is determined, take a
new image using that scan rate.
102
Rev. B

LEVELING
A tilted signal trace on the profile display indicates that the sample is tilted. The following
steps describe how to adjust for this tilt.
1. Select the image window containing the image to be leveled.
2. Click the scroll box and select the leveling type
3. The available leveling types are:
None
1DAC = zeroth order, line by line fit
1D line fit = first order, line by line fit
2DAC = zeroth order, plane fit
2D plane fit = 1st order, plane fit
7.5.3 Adjusting Feedback Parameters

The purpose of adjusting the feedback parameters is to obtain stable imaging conditions.
These parameters are described in greater detail in other chapters.
OPTIMIZING THE PROPORTIONAL, INTEGRAL AND DERIVATIVE GAIN

CAUTION: Severe oscillation may damage the probe and/or sample.
1. Begin with the default gain value.
2. Click proportional gain in the feedback window. The gain value will increase in 0.001
increments.
3. Click the scroll up tool
until the system begins to oscillate.
4. Stop when oscillations begin appearing superimposed on the signal trace of the grating in the
Oscilloscope Display.
5. Lower the gain incrementally by clicking the scroll down tool
until the oscillations
disappear. The goal is to be close to, but not beyond, the point at which oscillation appears.
The proportional gain value is now optimized.
6. Repeat this procedure for integral gain. Usually integral gain changes produce the greatest
effect.
7. Derivative gain setting may be experimented with to attempt to improve the trace.
Rev. B
103

SETPOINT
1. Position the cursor over the number in the setpoint scrollbox, and double-click to highlight the
old value. Alternatively, click and drag the cursor to select the number.
2. Type in a new setpoint value, and then press the [Enter] key. Alternatively, use the
scrollbox arrows to scroll through the range of setpoint values.
3. Click the start scan toolbutton to begin a new scan.
4. Adjust the setpoint while a scanning to see the immediate effect.
OPTIMIZING THE SETPOINT

1. Ensure that both the forward and reverse scan checkboxes are checked for the height signal in
the channel selection tab of the scanning window.
2. To adjust the setpoint, type a new value in the setpoint scrollbox, and then press the
[Enter] key.
Alternatively, use the scrollbox arrows to scroll through the range of setpoint values.
The setpoint can be changed while scanning is progress.
3. Compare the forward and reverse traces on the line profile display.
When the setpoint is optimized, the two traces will be nearly identical.
SELECTING THE NUMBER OF DATA POINTS

1. Activate the scan window and ensure the area scan is activated by clicking on the scan area
button.
2. Use the resolution scrollbox to select the image pixel size.
Scan
Continuous
Scan
Capture tool
Continuous
Capture
Scan Area
Button
Resolution
Scrollbox
Figure 7.5a Scanning Window Controls
104
Rev. B

LFM Imaging
3. Experiment by taking images using several different numbers of data points.
CAPTURING IMAGES
1. All images are saved to the computer hard drive as long as the capture tool (see Figure 7.5a) is
enabled.
2. To perform continuous scans, enable the Continuous Scan toolbutton (Figure 7.5a).
3. To save all images continuously, enable the Capture Tool and Continuous Capture tool
(Figure 7.5a).
4. Alternatively, a single frame scan can be saved after it is complete by the menu sequence:
File > Save.
7.6
LFM Imaging
Lateral Force Microscopy (LFM) is an extension of Contact mode that can provide additional
information about the sample surface by measuring the torsional deformation of the cantilever
(represented by the LFM signal) as well as the vertical bending (represented by the deflection
signal).
After completing performing Contact mode imaging, LFM images may be taken without
interrupting the imaging session. Since the LFM signal is always available during Contact mode
operation, monitor it by the following:
Open Scan window
Select Channels tab
Select Lateral signal - Forward and/or Backward
Figure 7.6a Lateral Signal - Backward Selected
Rev. B
105

LFM Imaging
WARNING:
Observe all Warning and Caution statements in Chapters 1-4 when using the
Innova system.
This section assumes familiarity with taking Contact mode images with Innova and that the
system is installed and set up.
7.6.1 Taking an LFM Image

A good LFM image is relatively easy to identify when imaging the 10 m calibration grating.
Also, image quality is not as sensitive to scan parameter adjustment as it might be for other
samples. While it might seem that a grating would only show contrast due to changes in height,
there are sometimes contaminants on the grating surface that are sticky. These contaminants
produce contrast in LFM images due to changes in frictional coefficients.
When taking an LFM image, it is often useful to view both height and LFM data collected from
both the forward and reverse sweeps of the scanner in order to distinguish between frictional and
topographic information.
Setting Up the System

1. Place a calibration grating on the scanner sample mount.
2. Install the probe head.
3. Make the following selections in the Microscope database configuration dialog box:
4. Select SETUPMICROSCOPE, or click the Microscope toolbutton
SPMLab System Configuration dialog box.
, to open the
5. Configure the system software by making the following selections in the SPMLab System
Configuration dialog box.
MICROSCOPE: Innova
MODE: Contact
SELECT SCANNER: Select the file that has the scanner calibration values for the scanner
that is currently installed.
6. Click
106
Apply
to load the files corresponding to the configurations settings.
Rev. B

LFM Imaging
7. When the window asking Turn HV on appears, select Yes.
Figure 7.6b High Voltage Control Window

8. Align the deflection sensor.
9. Perform an approach to bring the tip into feedback at the sample surface.
Selecting the LFM Signal

1. Open the Scan window and select channel height (forward and backward) and Lateral signal
(forward and backward).
Figure 7.6c Channels Selected in Acquire Window

This selection of channels generates both left-to-right and right-to-left LFM and height data.
Rev. B
107

LFM Imaging
7.6.2 How LFM Works

An instrument producing LFM data is equipped with a cantilever detection scheme that measures
both vertical and lateral bending of the cantilever. In Contact mode, vertical bending of the
cantilever is measured, representing changes in sample height. By measuring lateral bending (or
twisting) of the cantilever as well, LFM data is used to monitor motions arising from forces on the
cantilever that are parallel to the plane of the sample surface. Such forces can arise from changes in
the frictional coefficient of a region on the sample surface or from onsets of changes in height.
LFM is therefore useful for measuring lack of homogeneity in surface materials and producing
images with enhanced edges of topographic features.
The LFM Signal

As with Contact mode, LFM uses a beam-bounce detection scheme, employing a
QuadPhotoDetector (QPD) to measure the bending of the cantilever. In LFM, the QPD is used to
detect both lateral and vertical deflection of the cantilever. Figure 7.6d illustrates a QPD.
Figure 7.6d A QuadPhotoDetector (QPD)

LFM is able to collect both topographic (Contact mode) and frictional (LFM) information during a
single scan. The topographic information is represented by vertical deflection of the cantilever,
which produces a difference upper and lower quadrants of the QPD. This signal difference is
termed the A-B or deflection signal, referring to the upper and lower halves of the QPD in
Contact mode, and is represented by:
Deflection signal = (A+C) (B+D)

Topographic information is also represented by the height signal, which is a function of the A-B
signal.
Frictional information (the LFM signal) is represented by torsional deflection of the cantilever,
which is measured as the difference between the left and right quadrants of the QPD:
LFM signal = (A+B) (C+D)

By acquiring both the height and LFM signals, an instrument operating in LFM can produce height and
LFM images simultaneously.
108
Rev. B

LFM Imaging
LFM Tip-Sample Interaction

This section describes how LFM images correlate with changes in frictional coefficients and height
on a sample surface. This description will helps to compare and interpret the information in LFM
and Contact mode images.
Figure 7.6e illustrates how a cantilever responds to changes in height, and how that response
correlates with the resulting LFM and height data. Vertical motion of the cantilever is depicted as a
change in the vertical position of the cantilever. Lateral motion of the cantilever is depicted as a
change in the angle of the tip with respect to the horizontal.
Figure 7.6e shows that a change in sample height creates both vertical and lateral changes in
cantilever position. The lateral component is not reflected in the height image, which is based on
the feedback loop driven by the vertical bending of the cantilever. Figure 7.6eb shows the
topography signal trace that would result from the height of Figure 7.6ea.
Figure 7.6e Cantilever Response to Change In Height with Corresponding Topography and LFM Signal Traces.
Figure 7.6ec shows the LFM signal trace that would result from the height of Figure 7.6ea. As the
figure shows, the LFM data reflects only the lateral components of bending (e.g., bending to the
right at the rise in height produces a positive signal and bending to the left at the drop in height
produces a negative signal).
Figure 7.6f illustrates how a cantilever responds to changes in frictional coefficients and how that
response correlates with the resulting LFM and height data.
Figure 7.6fa shows a change in frictional coefficient that causes the cantilever to bend to the right
for a scan that is taken from left to right. If the scan is taken from right to left, as illustrated in
Figure 7.6fb, the cantilever bends to the left as it passes over the change in frictional coefficient. A
change in height causes the same type of cantilever bending illustrated in Figure 7.6e.
Figure 7.6fc shows a topography signal trace resulting from the surface of Figure 7.6fa: the data
only reflect the change in sample height. Figure 7.6fd shows the LFM signal trace that would result
from a scan taken from left to right. Figure 7.6fe shows the LFM signal trace that would result from
a scan taken from right to left. The sign of the LFM signal flips for the change in friction, but not
Rev. B
109

LFM Imaging
for the change in height. Changes in height appear on an LFM image as adjacent dark/bright
regions. By identifying these adjacent dark/bright regions, and by viewing data from two scan
directions, a user looking at an LFM image can distinguish between contrast changes due to
changes in frictional coefficient and those due to changes in height. Image subtraction, available in
the SPMLab analysis software, can be used to reduce topographic effects in LFM images.
Figure 7.6f Cantilever Response to Change in Frictional Coefficient and Height, and Corresponding Contact
Mode (AFM) and LFM Signal Traces.
Side-by-side height and LFM data therefore provide complementary information. By monitoring
the LFM signal, the contribution of lateral cantilever bending to a Contact mode image can be
inferred. Conversely, having the Contact mode information available confirms that contrast
changes on an LFM image that are due to changes in height, rather than frictional coefficient.
When scanning, the fast scan direction to be selected to be x or y (horizontal or vertical). As an
image is being taken, the scanner rasters back and forth over each scan line in the fast scan
direction, and then advances to the next line in the slow scan direction. To maximize LFM signals,
choose the scan angle so that the fast scan direction is perpendicular to the cantilever axis (scan
angle 0 or 180 degrees. Once a fast scan direction has been selected, forward or reverse sweep data
can be selected for viewing. For example, if fast scanning is x scan, data collected from the
110
Rev. B

LFM Imaging
right-to-left sweep of the scanner, or from the left-to-right sweep of the scanner, or from both
sweep directions may be selected for viewing.
Fast Scan Direction
Figure 7.6g Fast Scan for Optimum LFM Data
Rev. B
111

LFM Imaging
112
Rev. B
Ch. 8 - TappingMode Imaging

Overview
Chapter 8
8.1
TappingMode Imaging
Overview
This chapter describes an example of a TappingMode imaging session. Briefly, TappingMode
imaging is performed by monitoring the oscillation amplitude and phase of an oscillating cantilever
probe. The probe to sample distance is set so that the probe tip lightly contacts (taps) the sample
surface during the cantilever oscillation. As the probe interacts with the surface of a sample, the
oscillation amplitude or phase relation to the exciting signal changes in response to the interaction.
The interaction provides the basis for producing an image of the sample.Throughout this chapter,
many of the settings used are default values of the program. Experienced users may wish to
override the defaults based on their knowledge of the sample and imaging requirements. In
general, the default settings are acceptable starting points for most applications.
One advantage of TappingMode AFM is reduction of frictional forces which exert torque on the
cantilever. Unlike traditional Contact mode which maintains a constant cantilever deflection, the
TappingMode feedback loop keeps the cantilever oscillating at a constant amplitude. The tip on the
cantilever is oscillated at a frequency near or at the cantilever resonance. A laser beam is reflected
off a microfabricated cantilever, onto a mirror, then onto a photodiode. As the cantilever vibrates,
the laser spot oscillates across the photodiode and produces an AC voltage. The signal from the
photodiode is rectified, then lowpass filtered into a DC voltage (measuring the RMS Amplitude).
The RMS amplitude is proportional to the amount of cantilever motion.
The feedback system compares the RMS amplitude to the setpoint voltage. The two voltages are
kept equal by controlling the amplitude of cantilever movement. The sample surface is in close
proximity to the cantilever such that the tip touches the surface only at the lowest point of its
oscillation. The RMS voltage is reduced to the setpoint voltage by the feedback loop moving the
sample nearer to the tip. The sample reduces the cantilever movement until the desired RMS
voltage is reached. The oscillation amplitude of the cantilever is held constant by the piezo moving
the sample in Z as it is simultaneously translated in X and Y.
Engagement in TappingMode AFM requires that the setpoint voltage be smaller than the RMS
voltage when the probe to sample distance is large (far from engaged). The tip to sample spacing is
reduced until the RMS amplitude is at the setpoint.

Probes: TESP, RTESP (Silicon cantilevers) for general purpose imaging -- employed in this
example.
FESP for light tapping on soft samples
LTESP for hard tapping on soft samples
Rev. B
Innova User Manual - Ch. 8, Tapping AFM
113

Startup
8.2
Startup
1. Set up with the appropriate probe and cartridge for TappingMode operation. Refer to Chapter
4.
2. With the system properly installed and turned on, launch SPMLab by double clicking the
desktop icon and select Yes when asked to load the DSP code.
Figure 8.2a System Status Window

3. The System Configuration window will appear and show the previous configuration settings.
To perform TappingMode imaging, select settings as shown in the figure. These settings
provide a reasonable set of initial settings and may be changed later as desired. When the
appropriate selections have been made, select Apply to proceed.
Figure 8.2b System Configuration

4.
The Turn HV on panel will appear. Select Yes.
Figure 8.2c Turn HV (High Voltage) On
114
Rev. B

Cantilever Tuning - Manual Tuning Method
5. Laser alignment is described in Aligning the Deflection Sensor: Section 4.10 and Deflection
Sensor: Section 4.13 in this manual. Ensure the alignment is proper before proceeding with
this exercise.
Note:
A explanation of most toolbuttons will appear when the mouse cursor is

hovered over the button.
7. A representation of the laser spot will be displayed. The spot should be centered on the cross
hairs using mechanical controls on the SPM.
Figure 8.2d Laser Spot Centered
8.3

Tuning consists of determining the proper frequency, amplitude and phase of the signal used to
oscillate the cantilever. This section describes the manual tuning process. Cantilever tuning can also
be accomplished automatically using the autotune function which is described in the following
section (8.4).
1. Click on the Cantilever tuning dialog toolbutton
window.
Rev. B
to open the Cantilever Tuning
115

2. Set the Range setting to 0 - 600 kHz or select an appropriate range for the probe in use (the
resonance of TESP probes is near 300 kHz so 600kHz is appropriate) and click the
Start/Stop Frequency Sweep
toolbutton.
Figure 8.3a Set-up and Start Scan
116
Rev. B

3. An initial plot of amplitude and phase vs. frequency will be generated.
Figure 8.3b Initial Plot of Response vs. Frequency

4. To expand the area of interest, select the Pan/Zoom option and click and drag a zoom box on
the plot area.
Rev. B
117

Note:
The zoom box must be drawn from Northwest (10 oclock) to Southeast (4
oclock) in order to zoom. If drawn in other directions, the result is an
unzoom to the original plot.
Figure 8.3c Zoom Box Dragged on Plot
118
Rev. B

5. When the mouse button is released, the zoom box expands and the zoomed plot is shown.
Figure 8.3d Plot expanded to zoom box

6. Repeat dragging zoom boxes as required to obtain an expanded display of the amplitude and
phase plots.
Figure 8.3e Zoom Again
Rev. B
119

7. Continue to zoom until the peak response is displayed over some width on the plot.
Figure 8.3f Peaks Exhibit Width

8. Click the Start/Stop Frequency Sweep toolbutton to regenerate the plot over the zoomed
frequency range then select Set Frequency.
Figure 8.3g Select Frequency
120
Rev. B

9. Position the mouse cursor at the peak of the amplitude curve and click to select the peak
frequency.
Figure 8.3h Select Amplitude Peak

10. Position the cursor at the peak so that a dotted vertical line is displayed and note where it
crosses the phase curve (in this example, the vertical line crosses the phase plot at a phase
value of approximately 1 volt).
Figure 8.3i Phase Value at Amplitude Peak
Rev. B
121

11. Adjust phase by clicking the Phase Autonulling toolbutton

. The Phase scroll box will
display the phase value (in degrees) where the phase signal is 0 volts (at the specified
frequency).
Phase Autonulling Toolbutton

Phase Scrollbox
Figure 8.3j Adjust Phase
Note:
122
Phase adjustment is not required for basic tapping mode imaging because the
feedback loop utilizes amplitude, not phase. Phase adjustment is, however,
required to obtain the desired contrast in Phase Imaging, that is, when
selecting the Phase as a channel to be recorded.
Rev. B

Autotune
12. The setpoint value is automatically calculated (60% of peak amplitude).
Figure 8.3k Setpoint Voltage Calculated

Note:
8.4
Typical peak amplitudes should be 5-6V. This can be accomplished by either

increasing/decreasing the drive amplitude and/or by either
increasing/decreasing the input gain. The input gain represents a gain applied to
the cantilever signal. Working at high input gain values (20 or greater) implies
small amplitude oscillation of the cantilever.
Autotune
Autotune automates much of the cantilever tuning process. It automatically selects the cantilever
tune frequency based on the maximum response within a specified frequency sweep range. If
selected, autotune also adjusts drive amplitude and phase. The results of autotune, based on user
specifications usually produces good results and is easier than the manual tune process previously
described (see 8.3). The procedure for autotuning is:
Note:
Rev. B
Throughout this procedure for autotune, accepting the default values in any
window will generally provide good results. The example screens are for
illustrative purposes.
123

Autotune
1. Select the frequency range for the autotune sweep, refer to Figure 8.4a (the maximum
response will be found within this range).
Figure 8.4a Drop Down Selection of Frequency Range
124
Rev. B

Autotune
2. Drive amplitude for cantilever oscillation can be set in either of two ways. The Drive
Amplitude value may be scrolled up/down as shown in Figure 8.4b
Figure 8.4b Drive Amplitude Selection

3. Another way of setting the drive amplitude is by enabling the Adjust Drive Amplitude
check box and entering a value in the Target Tapping Signal input box as illustrated in
Rev. B
125

Autotune
Figure 8.4c. When a value is entered for the Target Tapping Signal and autotune is
performed, any value in the Drive Amplitude box will be overridden.
Figure 8.4c Autotune Drive Amplitude Setting
126
Rev. B

Engage
4. Autotuning is performed by clicking the Scan toolbutton and will produce a display similar
to that of Figure 8.4d.
Figure 8.4d Autotune Scan Performed
8.5
Engage
Engage is the process of moving the sample and tip closer to each other until a desired degree of
interaction occurs. The Setpoint defines whether or not the SPM is engaged/operating in
TappingMode. When the cantilever is oscillating freely, a characteristic ac voltage results. As the
cantilever nears a sample and begins to interact with it, the oscillation amplitude (and the
corresponding ac voltage) is reduced. In this illustrated example, the free oscillation corresponds to
5.75 volts and 3.5 volts defines the value at which the tip is engaged with the sample and which
feedback will attempt to maintain as the sample height changes. A setpoint of greater than 5.75
volts would imply that the tip is held far enough away from the sample that there is no interaction
(therefore no imaging). A setpoint of 0 volts would occur when the cantilever is not oscillating
because it is in solid contact with the sample. Lower setpoints imply higher contact forces between
tip and sample with consequently higher probability of damage to the tip or sample. The suggested
setpoint value of 60-70% of the free amplitude is a rough starting value and depends upon the
sample.
Rev. B
127

Engage
1. Click the Engage control dialog
toolbutton
Figure 8.5a Engage Control Dialog Toolbutton

2. The Engage window opens. Use Setpoint = 3.5
Figure 8.5b Engage Window
128
Rev. B

Engage
3. Click on the Engage tip: auto toolbutton
Figure 8.5c The Engage Window and Engage Toolbutton

4. During the engage process, the scanning and channel windows appear automatically
Figure 8.5d Scanning and Channel Windows
Rev. B
129

Scanning Windows
8.6
Scanning Windows
1. The channel windows display images based on different criteria and many channels are
available. The available channels can be viewed by opening the Channel window.
Figure 8.6a Menu Selection to Open Acquire Window

2. The desired display channels can be selected in the Acquire window. The figure shows the
default selections and they will be used in this example
Figure 8.6b Acquire Window
130
Rev. B

Scanning Windows
3. For ease in viewing, drag the Scanning window onto the second monitor screen.
Figure 8.6c Scanning Window on Second Monitor

4. Again, for viewing ease, select Window - Tile Horizontal (or Tile Vertical)
Figure 8.6d Menu to Tile Windows
Rev. B
131

Scanning Windows
5. Tiled windows permit all window to be viewed simultaneously.
Figure 8.6e Windows Tiled
132
Rev. B

Scanning Windows
6. In the Scanning window, click on the Start/Stop Scanning toolbutton.

Profile selected
Start/Stop
Scanning
Height selected
Figure 8.6f Begin Scan

7. Select Profile and the current line being scanned will appear in the display.
8. Figure Figure 8.6f shows the height channel selected. Use the scroll window to select the
desired channel for display.
9. Scanning will begin and images will appear in the channel windows. Beside each channel
window a drop down window allows leveling to be selected. The figure shows one of the
Rev. B
133

Scanning Windows
drop down menus and 1D Line Fit leveling specified, which is a common choice, especially
for height data.
Figure 8.6g Initial Scan and Set Leveling
Figure 8.6h Scans Shown with Histograms on Leveled Images

10. Use either the image data or the profile view in the scanning window to optimize scan and
feedback parameters.
134
Rev. B
Ch. 9 - STM Imaging

Overview
Chapter 9
STM Imaging
9.1 Overview
This chapter describes STM imaging and includes information on STM tips used to take STM
images. The instructions in this chapter assume familiarity with setting up the system and taking an
image.
WARNING:
Follow all Warning and Caution statements in Users Guide when using the
Innova system.
9.2
Probes: CLST-PTBO or 20 mil or 0.5 mm tungsten or PtIr wire
STM Cartridge: see Figure 9.2c
Wire cutter (for cutting probe wire)
1/16 hex allen wrench
Preparing and Loading STM Tips

STM tips can be prepared using several different methods. This section describes the commonly
used method of cutting a wire. A new STM tip must be prepared when first setting up for STM and
also whenever the tip being used becomes damaged or oxidized.
STM imaging of a surface with high aspect ratio features (sharp or steep) requires etched tips,
which have a much higher aspect ratio than tips made using wire cutters. With a relatively blunt cut
wire tip, a tunneling current may occur between the side of the tip and the side of a surface feature,
resulting in tip imaging effects in the STM image.
For STM imaging of an atomically flat surfacee.g., the surface of graphiteblunt cut wire tips
may be more stable over time than etched tips and result in better STM images. However, blunt tips
can also cause multiple tip imaging effects.
Rev. B
Innova User Manual - Ch. 9, STM Imaging
135
Ch. 9 - STM Imaging

9.2.1 Using Wire Cutters to Make STM Tips

Reasonably good tips can be produced by cutting tungsten or PtIr wire at a 45 angle with a pair of
sharp wire cutters. The recommended wire diameter to use is 0.020" (20 mil wire or 0.5 mm wire).
The following items are required:
20 mil or 0.5 mm tungsten or PtIr wire
a strong pair of wire cutters (appropriate for the type/gage of wire)
a pair of needle-nose pliers
To make a tip by cutting wire:

1. Cut off a piece of wire between 1 and 1.5" long using a strong pair of wire cutters.
2. Grip one end of the wire tightly with a pair of needle-nose pliers.
3. Orient the wire cutters at a 45 angle relative to the wire, as shown in Figure 9.2a.
WARNING:
STM tips are very sharp. Be careful when handling an STM cartridge with a tip
loaded. Avoid leaving the STM cartridge on a table or other work surface with
the exposed tip pointing up. Store the STM cartridge and tip in a container with a
lid.
Cut the wire by using the wire cutters to pull and twist the end of the wire while snipping.
Figure 9.2a Holding Wire Cutters at a 45 Angle to Cut an STM Tip.
136
Rev. B
Ch. 9 - STM Imaging

The resulting tip may not appear as sharp as it is. Tungsten STM tips oxidize fairly quickly and
should be discarded after 1 to 2 days. Platinum iridium STM tips, on the other hand, do not readily
oxidize and may be kept and used for a much longer time before degradation affects image quality.
The overall shape of tips made using wire cutters is not well-defined. STM images taken using
these relatively blunt tips can show multiple tip imaging effects. Sharper, higher aspect ratio
tungsten tips can be made using a tip etcher.
9.2.2 Using the STM Cartridge

STM imaging requires a specially designed STM cartridge, which contains a small hole for
inserting an STM tip, as shown in Figure 9.2c and Figure 9.2d.
0.020" tungsten tip

inserted into cartridge
STM tip
set screw for

tightening tip
Figure 9.2b Side View of STM Cartridge with Tip Inserted.
Front
Back
Figure 9.2c STM Cartridge Photos and Schematic
Rev. B
137
Ch. 9 - STM Imaging

On the top side of the cartridge, a round metal contact pad delivers the tunneling current signal to
the control electronics.
CAUTION:
Keep the area around the metal contact pad clean.
The tip is tilted relative to the sample instead of pointing straight down. The tilt allows seeing the
tip using the on-axis optical view.
The STM cartridge is installed in the probe head in the same way as the AFM cartridge, with the tip
pointing down. The instructions below explain how to insert STM tips into the STM cartridge.
WARNING:
STM tips are very sharp. Be careful when handling an STM cartridge with a tip
loaded. Avoid leaving the STM cartridge on a table or other work surface with
the exposed tip pointing up. Store the STM cartridge and tip in a container with a
lid.
Use a tip that has been made using wire cutters or an etched tip. Insert the back end of the tip first.
Note:
It is not necessary to be able to see the tip using the on-axis optical view.
However, to see the tip in the on-axis view, have the sharp end of the tip
extend from the STM cartridge approx. as far as the AFM cantilever chip on
the AFM cartridge. If the tip is too long or too short, locating the tip using the
on-axis optical view may be difficult.
9.2.3 To Insert a Tip Into the STM Cartridge:

1. Use a 1/16 hex allen wrench to loosen the set screw on the top side of the STM cartridge.
2. Grip the STM tip near its middle using a pair of needle-nose pliers.
3. Feed the back end of the tip through the hole in the underside of the cartridge, as shown in
Figure 9.2d below. The underside of the cartridge is the side with the three embedded silver
balls.
4. Keep feeding the tip through the hole until only approximately 3 mm of the sharp end shows.
Keep the wire as straight as possible when feeding it through the hole. Quite often, the back
end of a tungsten tip splinters and becomes difficult to fit through the hole. If this happens,
trim the end with wire cutters to remove the splinter.
138
Rev. B
Ch. 9 - STM Imaging

5. Check that the tip length is about right by comparing the STM cartridge with an AFM
cartridge that has a cantilever chip loaded. The STM tip should extend out about as far as the
AFM cantilever chip does on the AFM cartridge. It is usually easier to see the tip in the
on-axis optical view if the vertical distance between the tip and the underside of the cartridge
is between 2 and 3 mm.
Figure 9.2d Inserting a Tip Into the STM Cartridge.

6. Tighten the set screw on the top side of the STM cartridge using an allen wrench. The set
screw is a 1/16" allen head.
7. Cut the back end of the tip with wire cutters after the tip is inserted and the set screw is
tightened. The back end of the tip should not extend more than about 5 mm. Otherwise, the
back end of the wire may scratch the objective lenses of the optical view.
CAUTION:
Be careful to cut the back end of the wire short enough to avoid scratching the objective lens.
9.2.4 To Store an STM Cartridge with a Tip Loaded:

1. Place the cartridge in a container with a lid with the sharp tip pointing up.
2. Close the lid of the container.
9.2.5 To Remove a Tip from an STM Cartridge:

1. Loosen the set screw on the cartridge.
2. Grip either end of the tip with needle-nose pliers, and pull the wire out of the hole.
Rev. B
139
Ch. 9 - STM Imaging

Taking an STM Image
9.3
Taking an STM Image

STM mode is often used for taking images with atomic resolution, however this type of imaging
can be difficult for instruments operating in air, as an STM is highly sensitive to surface
contaminants and water layers.
STM can be used to image metals as well as semiconductors without thick insulating oxide layers.
For example, STM images can be taken of gold, graphite, and semiconducting oxides. STM cannot
be used to look at insulating samples (e.g., Al2O3) because no tunneling current will flow between
the tip and an insulating sample, and the tip will crash into the sample surface during engage.
Two examples of samples that can be used to demonstrate the capabilities of an STM operating in
air are a gold-coated calibration grating and a highly oriented pyrolytic graphite (HOPG). The
large, easily identifiable features of a calibration grating make it a good sample for a first image.
Graphite is easily cleaved and is often used to demonstrate atomic resolution in air. Both samples
provide a reflective surface that make it easier to perform a manual approach.
9.3.1 Startup
1. Install a small area scanner as described in Chapter 4. STM studies usually are concerned
with atomic resolution. Although the large area scanner can also achieve atomic resolution,
the small area scanner is recommended.
2. Click on the Microscope Set-up tool
scanner is specified.
and select Scanners to insure that the Small area
Figure 9.3a Select Small Area Scanner
140
Rev. B
Ch. 9 - STM Imaging

Taking an STM Image
3. Select Scanning Window and inspect Conditions settings to insure that HV gains are set
appropriately. High is recommended for the Small area scanner; Low is strongly
recommended for the large area scanner.
Figure 9.3b HV Gains Set Low

4. Load an HOPG (graphite) sample.
5. Ensure that the closed loop controls are off. (Not applicable for the small area scanner).
Figure 9.3c Closed Loop Off
Rev. B
141
Ch. 9 - STM Imaging

Taking an STM Image
6. Use the following scan parameters:
Setpoint: 1 nA (or more if required to bring the sample into feedback)
Bias: Sample, 100 mV
Scan Rate: 12-25 Hz
Scan Size: 4.0 to 8.0 nm
Gains: Low values, e.g., 0.1
9.3.2 Troubleshooting
Check the electrical resistance of the path between the STM tip and the probe head using a
multimeter on the Ohms setting.
1. Place one probe of the multimeter on the right brass screw of the two brass screws on the
probe head which are positioned directly above the probe cartridge, which connects to the
metal contact pad of the STM cartridge.
2. Place the other probe of the multimeter on the metal cylinder of the STM cartridge that holds
the STM tip wire.
The resistance between the probe head and the tip should be small for STM operation, typically
~0.2 .
If the STM cartridge is too loose or too tight, the conducting path may be disrupted. Try adjusting
the position of the probe cartridge to establish good contact. If this does not help, call Veeco
Customer Support for help in diagnosing the problem.
142
Rev. B
Ch. 9 - STM Imaging

Taking an STM Image
9.3.3 Preparing for Engage

Figure 9.3d shows settings preparatory to performing auto engage.
Refer to Use the following scan parameters: on page 142.
Setpoint is 1.0000 nA
Integral and Proportional Gains are set as shown.
Figure 9.3d Settings Prior to Engage

Other parameters, such as the number of pixels per scan line, are set to default values that need not
be changed. The default number of pixels per scan line is 256.
The high scan rates and low gains employed here will cause significant contrast to appear in the
error signal (current image). The limiting case of very high scan rates and low gains, where all the
information is contained in the current image, is sometimes called constant height mode. The
opposite limit of slower scan rates and higher gain, where the error signal is minimized and most
information is in the height image, is called Constant Current mode. On flat samples, it is often
easiest to begin in constant height mode and gradually adjust parameters toward settings for
constant current mode, once the desired contrast begins to appear.
Before initiating an approach, move the tip as close to the sample as possible by eye. However, be
careful that the tip does not touch the sample surface. The closer the tip is to the sample surface, the
less time the approach will require.
If using the Innova on-axis optics, the focus of the tip will be used for approach. If using separate
optics, it is easiest to perform a tip-to-sample approach using the oblique view.
Rev. B
143
Ch. 9 - STM Imaging

Taking an STM Image
To bring the tip close to the sample using the optical view. The following steps refer toFigure 9.3e:
Figure 9.3e Preparing for Engage

1. Click the Motor Stage window
2. Use the positioning controls on the head to find the cantilever tip in the optical view and then
focus on it.
3. Adjust the coarse and fine focus knobs on Innova to focus on the sample surface.
4. Move the tip toward the sample using the z direction pad.
5. On the TV monitor, watch for the shadow of the tip on the sample surface as the probe
engages the sample.
6. Watch the tip approach close to the sample while using the down arrow tool.
7. Stop the approach when the tip is within a few millimeters of the sample surface.
9.3.4 Engaging
If desired, open a multimeter window and set it to display AL3-STM signal. This display allows
viewing the STM current signal in raw (volts) units.
Figure 9.3f Second (AL3-STM Signal) Multimeter Window
144
Rev. B
Ch. 9 - STM Imaging

Taking an STM Image
Note:
It is important to select Fine in the engage dialog window because the STM
current generally becomes immeasurably small within a few nm of the
surface. For this reason, tip sewing is needed throughout the engage process.
Click the Engage tool to begin an auto approach. In STM mode, this initiates the following
sequence of steps:
The scanner extends, moving the sample toward the tip with feedback enabled.
The system monitors the tunneling current, checking for the setpoint value as the
scanner extends.
If the setpoint value is obtained, then the engage process stops.
If the setpoint value is not obtained with the scanner fully extended, then the system
retracts the scanner and lowers the probe head one step (of the stepper motor) toward the
sample.
The above steps are repeated until the tunneling current matches the setpoint value.
The engage sequence is a slow process. The reflection of the tip may flicker in the optical view with
each step. The Current signal in the multimeter window display should approach the setpoint value,
and then stop.
When the approach stops, the tip will be within 1 nm of the surface but will not actually be in
contact. After a successful engage, the green Piezo bar should show that the scanner has stopped
moving and is extended to about half of its full range.
Rev. B
Note:
The tip should never touch the surface in STM mode. If the tip makes contact,
both the tip and the sample will be damaged. Contact between the tip and the
sample, referred to as a tip crash, is indicated by an increased current reading
on the multimeter display. If the tip crashes, it must be changed before
proceeding.
Note:
Operating at low currents in ambient STM is inherently challenging. It is not

uncommon for contamination to produce unstable feedback and/or false
engages. Should a false engage occur, i.e., a spike in current causes the system
to enter an engaged state, clicking the approach button again will restart the
approach process.
145
Ch. 9 - STM Imaging

Taking an STM Image
When the engage has been successful, the display should appear similar to:
Figure 9.3g Engage Successful

The AL3-STM signal multimeter will show a non-zero voltage and the status tool will indicate the
SPM to be engaged.
9.3.5 Starting a Scan and Optimizing STM Scan Parameters

The following steps describe how to take a constant-current mode STM image. This section
describes how to optimize the current and bias parameters used for taking an STM scan. The
optimal values of these parameters depend on a number of factors, including the sample, whether it
is semiconducting, and what type of semiconductor it is. Optimizing these parameters is usually a
trial-and-error process.
The setpoint parameter sets the tunneling current during an STM scan. The tunneling current is
given in nanoamps (= 10-9 amps). The tunneling current between the tip and the sample in STM is
analogous to the force interaction between the tip and the sample in AFM. With feedback enabled
and the feedback setting optimized, the system operates to keep the tunneling current constant by
raising or lowering the sample.
146
Rev. B
Ch. 9 - STM Imaging

Taking an STM Image
Since the tunneling current varies exponentially with tip-to-sample spacing, the setpoint current
basically controls the tip-to-sample spacing during a scan. Raising the setpoint value brings the tip
closer to the sample, while lowering the setpoint value moves the tip farther from the surface.
Ideally, the tip should never come into contact with the surface during an STM scan, as both the tip
and the sample surface will be damaged; e.g., the tip can leave a small pinhole or dent in the surface
if it is driven into the surface.
Typically, the setpoint is less than 5 nanoamps for STM.
The tip-to-sample bias during a scan is set using the sample bias and tip bias parameters. If the
sample is biased negative relative to the tip, then the STM image will represent tunneling from
filled electronic states on the sample surface. If the sample is biased positive relative to the tip, then
the STM image will represent tunneling into empty electronic states on the sample surface. The tip
and sample biases are given in volts.
The bias settings have an indirect effect on the tip-to-sample spacing. In constant-current mode
with feedback optimized, the system attempts to maintain a constant tunneling current by varying
the tip-to-sample spacing. If the tip-to-sample bias is increased, the tunneling current also
increases. The system therefore pulls the sample away from the tip to maintain constant tunneling
current.
Typically, the bias between the tip and the sample should be lower than about 2 V in air. If the bias
is larger than about 2 V, the STM will not be operating in the tunneling regime. The optimal bias to
use depends on whether the sample is conducting or semiconducting. With conducting samples, a
lower bias setting may be used. With semiconducting samples, use higher bias settings, but less
than 2 volts. A typical bias range for STM is from about 0.1 to 2 V.
Figure 9.3h shows typical settings for an STM scan using the small area scanner on HOPG.
Figure 9.3h Typical Scan Settings for Atomic Resolution Imaging Using STM or Contact Mode AFM
Rev. B
147
Ch. 9 - STM Imaging

Considerations While Taking an STM Image
Figure 9.3i STM Image Showing Atomic Resolution on HOPG. 4nm x 4nm Image Size, 100mV Bias, 1nA
Current Setpoint.
9.4
Considerations While Taking an STM Image
9.4.1 Sample Characteristics

Ideally, for a relatively flat, featureless sample, each signal trace should look similar to the one
before. If scanning a sample with closely spaced periodic features (for instance, a 1 m gold
grating), look for features with the same spacing in the signal trace.
9.4.2 Optimizing Image

A signal trace that jumps erratically or that is jagged indicates that the scan parameters are not
optimized. For instance, a saw-tooth signal trace might be an indication that the tip is tapping the
surface as the sample is scanned. To increase the tip-to-sample spacing, decrease the tunneling
current by lowering the setpoint value. As usual, scans size, offsets and angle can be important in
achieving the desired image content.
9.4.3 Increased Risk of Sample/Tip Damage

Since the STM tip is held rigidly in place on the STM cartridge, it is much easier to damage both
the tip and sample surface during a scan if the tip makes contact. (The AFM tip, on the other hand,
is mounted on a flexible cantilever.)
148
Rev. B
Ch. 10 - Single Point Spectroscopy

Overview
Chapter 10 Single Point Spectroscopy

10.1 Overview
Spectroscopy is performed by ramping either tip/sample separation or bias voltages with the tip at
a single XY location. This can serve to analyze mechanical or electrical properties of the sample at
a single point. Different elements or compounds will produce different attraction/repulsion
signatures. This chapter provides an illustrative spectroscopy analysis session using z-ramping (i.e.,
force distance curves). Settings for specific analyses may vary from the illustration and may require
some experimentation to produce suitable results. The program default settings usually provide
reasonably useful starting values.

Probes: Typically the same probe which is used to obtain an image of the sample so that the point
spectroscopy site can be selected.
10.2 Startup
1. Double click the SPMLab icon to launch the program.
2. If NanoDrive is not turned on, the following message will appear.
Figure 10.2a Cold Start Message

3. After NanoDrive is turned on, click OK to proceed.
Rev. B
Innova User Manual - Ch. 10, Spectroscopy
149

Startup
4. The system configuration panel will appear. The panel will typically display the previous
setting and should be changed to Contact mode and the Apply toolbutton clicked.
Figure 10.2b Select System Configuration

5. The Turn HV on window will appear. Click Yes.
Figure 10.2c Turn HV On
150
Rev. B

Startup
6. Start WinTV32 by Start > All Programs > Hauppauge WinTV > WinTV32.
Figure 10.2d Turn on WinTV32
Rev. B
151

Align Laser
7. The WinTV32 window will open.
Figure 10.2e WinTV32 Window
10.3 Align Laser

1. Use the adjustments on the Innova head to align the laser as described below.
QPD
Positioning
Laser
Positioning
Head Position
Left/Right
Head Position
Front/Back
Figure 10.3a Adjustments on Innova Head
152
Rev. B

Engage
2. Align the laser by:

a. Use stage positioning controls to position the cantilever in the field of view.
b. Use laser positioning controls to place the laser spot on the end of the cantilever.
c. Use QPD controls to center the representation of the spot onto the crosshairs in the laser
alignment window
a
c
b
Figure 10.3b Laser Spot on Cantilever and Centered on QPD
10.4 Engage
1. Use the focusing adjustment on Innova to focus onto the surface of the sample, then use the
Motors Stage controls to lower the cantilever until it begins to come into focus.
Figure 10.4a Focus on Sample and Lower Cantilever to Near Focus

2. Open the Engage window by clicking the Engage Control toolbutton
Rev. B
153

Prepare to Ramp
3. Select Z Adjustment in the engage window and click on the Engage toolbutton
Engage
toolbutton
Figure 10.4b AutoEngage, Z Adjust Selected

4. During the engage process, the scanning and image windows appear automatically.
Figure 10.4c Engage Successful
10.5 Prepare to Ramp

1. Select the point mode tool
and the scan area tab in the Scanning window in order to
view the current probe position. If desired, image data can be dragged from one of the image
display windows into the scanning window and the probe position can be changed
interactively (by click-and-drag), so that the single point spectroscopy will be performed at
the point of interest.
154
Rev. B

Prepare to Ramp
2. Drag the Scanning window and reposition the WinTV window to suit personal preference.
To display the image windows simultaneously, use Windows > Tile Horizontally.
Figure 10.5a Tile Screens Horizontally

3. Open the Point Spectroscopy window by clicking the Point Spectroscopy Control dialog
toolbutton
.
Figure 10.5b Point Spectroscopy Screen Opened

4. In the Point Spectroscopy window, specify the Z start and Z end values (maximum and
minimum Z voltage range).
Rev. B
155

Ramp
Note:
If values outside the permissible/possible range are entered for Z start and Z
end, the program will correct the values to acceptable ones.
Figure 10.5c Specify Z Range
10.6 Ramp
1. Begin ramping by clicking the Start/Stop Scanning toolbutton
Figure 10.6a Perform Line Scan
156
Rev. B

Ramp
2. To obtain the standard trace in the figure, select the Z Inverse option
Figure 10.6b Specify Z Inverse

Note:
Refer to the support note for additional details.
3. The response of piezo positioning devices is inherently non-linear. The non-linear response
can be characterized and compensated for in hardware and software. This scanner
linearization feature is activated by enabling the Z piezo linearizer (= closed-loop Z mode).
Figure 10.6c Enable Z Piezo Linearizer if Desired
Rev. B
157

Sample Session with Probe Positioning
4. Since the probe has usually been brought into feedback before ramping, the Z-position
maintained during feedback is usually a useful reference point. The relative Z-position
refers the Z-start and Z-end positioning to the feedback point instead of referring it to zero
volts of the Z-DAC drive voltage
10.7 Sample Session with Probe Positioning

This sample session describes how to obtain force distance curves for multiple sites:
Note:
Obtaining force distance curves at multiple sites follows procedures previously

described in Probe Position Window: Section 5.11. The descriptions in this
section are somewhat abbreviated versions of the earlier instructions.
1. Scan the area containing the site(s) of interest.

2.
Drag the scanned image into Scanning window.
3. Open the Probe Positioning window and click on the scanned image in the Scanning
window at the locations to measure force distance curves. As the locations are selected, the
coordinates of the locations will appear in the Probe Positioning window.
Location Coordinates
Selected locations
Figure 10.7a Probe Positioning and Scanning Window
158
Rev. B

4. Open the Point Spectroscopy window and enable Merged to Probe Position.
Figure 10.7b Select Merged to Probe Position

5. Click Move probe in the Probe Positioning window to start or stop the force distance curve
measurements at the specified sites.
Figure 10.7c Perform Force Distance Measurements and Save Results
Rev. B
159

6. When the force distance curves have been produced, save the data by clicking the Save
toolbutton in the Probe Positioning window. This will open a typical windows to specify
the file name and location for the saved data.
7. The saved data file is a text file (with the default file extension: .pos) which may be used
for analysis.
8. Use the Table toolbutton
to display the force curve data as a table. Clicking on a
column heading selects a force curve for display when the probe positioning tool has been
used to acquire a series of curves which results in a table with multiple columns.
160
Rev. B
Ch. 11 - MFM Imaging

Overview
Chapter 11 MFM Imaging

11.1 Overview
MFM (Magnetic Force Microscopy) requires a separate accessory which is not included in the
basic Innova system. This chapter provides a basic description of MFM. A detailed support note is
included with the accessory.
MFM imaging utilizes the Interleave and LiftMode procedures. LiftMode is also used in EFM (see
Chapter 12). In MFM, a tapping cantilever with a magnetized tip is scanned over the sample in
TappingMode to obtain topographic information. Using LiftMode, the tip is then raised above the
sample surface. Surface height from the initial scan is added to the lift height to maintain constant
separation during the lifted scan. The influence of magnetic force is measured using the principle of
force gradient detection. In the absence of magnetic forces, the cantilever has a resonant frequency
f0. This frequency is shifted by an amount f proportional to vertical gradients in the magnetic
forces on the tip. The shifts in resonant frequency tend to be very small, typically in the range
1-50Hz for cantilevers having a resonant frequency f0 ~100kHz. The shift in resonant frequency
produces a change in both amplitude and phase (for a given drive frequency). These frequency
shifts can be detected using: phase detection, which measures the cantilevers phase of oscillation
relative to the piezo drive and amplitude detection, which tracks variations in oscillation
amplitude. Phase detection usually produces results that are superior to amplitude detection.
This chapter contains an illustrative example of program setup and imaging in MFM. It is assumed
that the Innova system and MFM applications module are properly installed and powered up as
described in the Innova user manual. Detailed information on probe preparation and installation is
contained in the MFM support note which is included with the accessory.
11.2 Special Hardware Requirements

Probes: MESP Series probes (cobalt/chrome coated)
MFM Tool Kit INMF-3 which includes
Rev. B
MFM Probe magnetizer
non-magnetic sample holder
MFM standard sample
MESP probes
Innova User Manual - Ch. 11, MFM Imaging
161

Startup
11.3 Startup
1. Launch the SPMLab program by double clicking the program icon. The System Status
window will appear.

2. Load the DSP code by clicking the Yes toolbutton and select the correct microscope
configuration (Tapping).
162
Rev. B

Startup
3. When the appropriate selections have been made, click Apply and the Turn HV on window
will appear.

4. Turn on HV by clicking the Yes toolbutton.
Note:
Some procedure details have been omitted and are described in the MFM
support note.
6. The Laser Alignment display provides a representation of the laser spot location on the QPD
(quad photo detector). Make adjustments on Innova as required to center the spot.
Figure 11.3d Laser Alignment
Rev. B
163

Cantilever Tuning
11.4 Cantilever Tuning

Cantilever tuning can be performed manually or using Autotune. Both procedures are described.
11.4.1 Manual Cantilever Tuning:

1. Open the Cantilever Tuning window by clicking on the Cantilever tuning dialog toolbutton
Cantilever
Tuning
Figure 11.4a Cantilever Tuning
164
Rev. B

Cantilever Tuning
2. Generate a response plot by clicking the Start/Stop Frequency Sweep toolbutton.
Start/Stop
Frequency
Sweep
Figure 11.4b Initial Response Plot

3. Select the Pan/Zoom option and drag a selection box over a frequency range around the
lower peak response. (Typical resonance frequencies for MFM tips are in the 60-70kHz
range.)
Note:
Drag the box from a NorthWest to SouthEast (10 oclock to 4 oclock)

direction to zoom, any other direction to revert to the original plot.
Pan/Zoom option
Figure 11.4c Pan/Zoom on Low Frequency Peak

Rev. B
165

Cantilever Tuning
4. Continue to draw selection boxes until the peak exhibits some width and click on the
Start/Stop Frequency Sweep toolbutton to produce a new scan within the range of interest.
5. Select the Set Frequency mode and move the cursor to the peak of the amplitude curve.
This will display the value of the amplitude as well as the frequency indicated by the cursor.
In this example, the amplitude is 6.695 volts at a frequency of 67.635 kHz.
Set Frequency
Figure 11.4d Check Peak Amplitude Voltage and Frequency

Adjust the phase setting and re-scan as required until the phase voltage at the frequency for peak
amplitude is approximately 0 volts. In this example, the phase was changed from 190 degrees (see
figure Figure 11.4d) to 310 degrees.
Adjust phase
Figure 11.4e Adjust Phase to Align 0 Volts at Peak Amplitude
166
Rev. B

Cantilever Tuning
11.4.2 Cantilever Tune with Autotune

As illustrated inFigure 11.5f
1. Select Autotune
2. Select an appropriate frequency Range (24-300 kHz for MESP probes).
3. Enable Use Current Frequency Range.
4. Enable Adjust Drive Amplitude.
Start/stop
scan
Figure 11.4f Cantilever Tuning Window Settings for AutoTune

5. Click the Start/stop Scan toolbutton.
Rev. B
167

Engage
6. When AutoTune is completed, peak frequency and phase will be optimized.
Figure 11.4g AutoTune Completed
11.5 Engage
1. Using the adjustments on Innova, adjust the focus so that the WinTV2000 image shows the
sample surface to be in focus.
Note:
Most surfaces being scanned in MFM are highly polished and it may be
difficult to focus on the surface. Usually slight scratches, blemishes or
contaminants exist to assist focusing.
2. Use the Motor stage controls to lower the probe until it begins to come into focus and select
the engage toolbutton.
Engage toolbutton
Figure 11.5a Focus on Sample Surface
168
Rev. B

Engage
3. In the Engage window, set the engage mode to Auto, select Z center and click the engage
toolbutton.
Engage
Auto
Z Center
Figure 11.5b Engage

4. When engage is completed, the channel screens will appear and WinTV will show the
sample surface in focus and the probe in sharper focus than before engage.
Figure 11.5c Engaged, Optics Focused

5. Click the stop/start button to begin a scan. Ensure that the scan and feedback settings result
in satisfactory surface tracking.
6. Stop the scan and select Mode in the scanning window, select the Lift tab and enable lift
mode. Choose a lift height (30-60 nm is typical depending upon the sample and scanning
conditions). Click Ok to exit the dialog and activate the settings. The lifting occurs during
the backward probe motion.
Rev. B
169

Engage
Note:
The start height parameter is usually not needed. It allows a higher initial lift
height when needed to overcome adhesion on sticky samples.
LiftMode
Enabled
Start/Stop Scan
Figure 11.5d Initial Scan to Check Setup

7. Click the menu selection Channels in the Scanning window and select appropriate channels
for viewing MFM.
Note:
The backward channels now carry the remark (Liftmode) Choose

Tapping > Phase > Backward (Liftmode) to observe the MFM data.
Select
Channels
Figure 11.5e Select Channels for MFM
170
Rev. B

Engage
8. Tile channel windows and click Start/Stop Scan toolbutton to obtain MFM images.
Figure 11.5f Completed MFM Scan

9. To increase MFM contrast, reduce the lift height setting. A lift height setting too small will
introduce strong artifacts from mechanical contact with the sample during the lift mode scan.
These artifacts usually appear as pronounced spots or horizontal streaks in the backward (lift)
phase line.
Rev. B
171

Engage
172
Rev. B
Ch. 12 - EFM Imaging

Overview:
Chapter 12 EFM Imaging

12.1 Overview:
EFM (Electric Force Microscopy) requires a separate accessory which is not included in the basic
Innova system. This chapter provides a basic description of EFM. A detailed support note is
included with the accessory.
EFM imaging utilizes the LiftMode procedure. LiftMode is included with the basic Innova system
and is also used in MFM (see Chapter 11). In EFM, a tapping cantilever with a special conductive
metal coated tip is first scanned over the sample in TappingMode to obtain topographic
information. Using LiftMode, the tip is then raised above the sample surface while bias is being
applied. Surface height from the initial scan is added to the lift height to maintain constant
separation during the lifted scan. The influence of electric forces is measured. In the absence of
electric forces, the cantilever has a resonant frequency f0. This frequency is shifted by an amount f
proportional to electric forces on the tip. The shifts in resonant frequency tend to be very small,
typically in the range 1-50Hz for cantilevers having a resonant frequency f0 ~100kHz. The shift in
resonant frequency produces a change in both amplitude and phase (for a given drive frequency).
These frequency shifts can be detected using: phase detection, which measures the cantilevers
phase of oscillation relative to the piezo drive and amplitude detection, which tracks variations in
oscillation amplitude. Phase detection usually produces results that are superior to amplitude
detection.
This chapter contains an illustrative example of program setup and imaging in EFM. It is assumed
that the Innova system and the accessory is properly installed and powered up as described in the
Innova user manual. Detailed information on probe preparation and installation is contained in the
support note. A special probe carrier is required which permits the probe to be electrically biased
through a connection (red colored socket) on the Innova stage.
Rev. B
Innova User Manual - Ch. 12 - EFM Imaging
173

Special Hardware Requirements

Electric Field Microscopy kit which includes:
Unmounted chip carrier with lead (00-107-0142)
Sample holder with external bias lead
EFM sample
SCM-PIT probes
Probes: SCM-PIT
Carrier with
Attached Cable
Figure 12.2a Carrier Connection for EFM Plugs Into Black Socket at Front of Microscope Base
12.3 Startup
This section describes starting the program and making initial adjustments to Innova.
1. Launch the SPMLab program by double clicking the program icon. The System Status
window will appear.
174
Rev. B

Startup
2. Load the DSP code by clicking the Yes toolbutton and select the correct microscope
configuration (Tapping).

3. When the appropriate selections have been made, click Apply and the Turn HV on window
will appear.

4. Turn on HV by clicking the Yes toolbutton and on the Main window click on the toolbutton
to Display Laser Alignment.
Figure 12.3d Display Laser Alignment
Rev. B
175

Cantilever Tuning
5. The Laser Alignment display provides a representation of the laser spot location on the QPD
(quad photo detector). Make adjustments on Innova as required to center the spot.
Figure 12.3e Laser Alignment
12.4 Cantilever Tuning

1. Open the Cantilever Tuning window by clicking on the Cantilever tuning dialog toolbutton
Cantilever
Tune
Figure 12.4a Cantilever Tuning
176
Rev. B

Cantilever Tuning
Generate a response plot by clicking the Start/Stop Frequency Sweep toolbutton.
Start/Stop
Frequency
Sweep
Figure 12.4b Initial Response Plot

2. Select the Pan/Zoom option and drag a selection box over the lower peak response.
Rev. B
177

Cantilever Tuning
Note:
Drag the box from a NorthWest to SouthEast (10 oclock to 4 oclock)

direction to zoom, any other direction to revert to the original plot.
Pan/Zoom Option
Figure 12.4c Pan/Zoom on Low Frequency Peak
178
Rev. B

Cantilever Tuning
3. Continue to draw selection boxes until the peak exhibits some width and click on the
Start/Stop Frequency Sweep toolbutton to produce a new scan within the range of interest.
The new scan will appear approximately as shown
Figure 12.4d Zoomed Response Plot
Rev. B
179

Cantilever Tuning
4. Select the Set Frequency mode and move the cursor to the peak of the amplitude curve.
This will display the value of the amplitude as well as the frequency indicated by the cursor.
In this example, the amplitude is 6.695 volts at a frequency of 67.635 kHz.
Set Frequency
Figure 12.4e Check Peak Amplitude Voltage and Frequency
180
Rev. B

Engage
Adjust the phase setting and re-scan as required until the phase voltage at the frequency for peak
amplitude is approximately 0 volts. In this example, the phase was changed from 190 degrees (see
figure Figure 12.4e) to 310 degrees.
Adjust phase
Figure 12.4f Adjust Phase to Align 0 Volts at Peak Amplitude
12.5 Engage
1. Using the adjustments on Innova, adjust the focus so that the WinTV2000 image shows the
sample surface to be in focus.
Note:
Rev. B
Most surfaces being scanned in EFM will be highly polished and it may be
difficult to focus on the surface however, there will usually be slight scratches,
blemishes or contaminants to assist focusing.
181

Engage
2. Use the Motor stage controls to lower the probe until it begins to come into focus and select
the engage toolbutton.
Engage toolbutton
Figure 12.5a Focus on Sample Surface

3. In the Engage window, set the engage mode to Auto, select Z adjust and click the engage
toolbutton.
Engage
Auto
Z Center
Figure 12.5b Engage
182
Rev. B

Engage
4. The channel screens will appear automatically during the engage process and WinTV will
show the sample surface in focus and the probe in sharper focus than before engage.
Figure 12.5c Engaged, TV Focused

5. Click the stop/start button to begin a scan. Ensure that the scan and feedback settings result
in satisfactory surface tracking.
6. Stop the scan and select Mode in the scanning window, select the Lift tab and enable lift
mode. Choose a lift height (30-60 nm is typical depending upon the sample and scanning
conditions). Click Ok to exit the dialog and activate the settings. The lifting occurs during
the backward probe motion.
7. The start height parameter is usually not needed. It allows a h.
LiftMode,
Enabled
Figure 12.5d Initial Scan to Check Setup
Rev. B
183

Set Tip Bias Voltage
8. Click the menu selection Channels in the Scanning window and select appropriate channels
for viewing EFM. Select Tapping Phase - Backward (LiftMode) to obtain EFM data
Figure 12.5e Select Channels for EFM

9.
Begin scanning and modify settings (range, rate, etc.) as required to produce desired images.
10. Tile channel windows and click Start/Stop Scan toolbutton to obtain EFM images
12.6 Set Tip Bias Voltage

EFM can be utilized to map conductive regions in composite samples. Applying a bias voltage
between probe and sample will create electric fields and field gradients based on the distribution of
the conductive component(s).
1. In the main panel on the left of the screen, enable the bias line and select tip or sample bias as
desired.
2. In the Scan window, select Mode and select Double Bias
Figure 12.6a Select Double Bias
184
Rev. B

3. Click the check box for Enabled.

4. Enter the desired Bias Voltage(s). It may be desirable to select a non-zero bias as a second
voltage (during the lift line) and a zero voltage as first voltage (during the main line), so that
the bias voltage is being applied only when the probe is not touching the sample.
Rev. B
185

186
Rev. B
Ch. 13 - Nanolithography
Overview:
Chapter 13 Nanolithography
13.1 Overview:
NanoPlot is an optional application which may be purchased separately and embedded within
SPMLab to facilitate nanolithography applications. NanoPlot provides tools to produce line
drawings and geometries and utilities to permit importing of graphics produced using other
graphics generating software.
Nanolithography utilizes the precise positioning controls of the SPM to produce graphic images at
the nanoscale. The images which can be produced range from simple geometries and line figures to
false grey scale two dimensional graphics. Images may be produced by engraving the sample with
the point of the SPM probe (scratching) or by applying an electrical potential to the probe and
utilizing an electrochemical process (anodic oxidation) with the sample.

Probes: The probe type will depend upon the particular mode of lithography and the sample
material. Commonly used probes include:
SCM-PIT, MESP and DDESP-FM for anodic oxidation
TESP for scratching
13.2 Startup
With SPMLab running,
1. From the menu bar, select: Tools > NanoPlot
Figure 13.2a Start NanoPlot Application
Rev. B
Innova User Manual - Ch. 13 - Nanolithography
187
Additional Instructions and Information
2. The NanoPlot window will open.
Figure 13.2b NanoPlot Application in SPMLab
13.3 Additional Instructions and Information

Detailed descriptions of the features of NanoPlot and using NanoPlot for nanolithography are
contained in the separate user manual NanoPlot Software User Guide p/n 004-1002.
13.4 Nanolithography - A Sample Session

Nanolithography is typically accomplished in either of two modes: Scratching or anodic oxidation.
Scratching, as the name implies, forces the probe tip into the sample to create an indentation by
displacing the sample material. Scratching involves dragging the probe in Contact mode and is like
drawing with a stick in the sand. Oxidation requires electrical biases to be applied to the probe tip
or sample and the reaction in the fluid layer which is present under ambient conditions on the
sample surface forms an oxidation layer on the sample. Anodic oxidation can be performed using
either Contact or TappingMode AFM and is like creating an image by making a series of dots on
paper with a pen. Oxidation may also be performed in Contact mode. In either scratching or
oxidation modes, the tip/sample location is controlled using closed-loop piezo positioning so that
very small and very precise lithography can be produced.
This section describes a nanolithography session using the oxidation mode. The sample session
assumes familiarity with earlier sections of this manual and omits some details which have been
discussed previously.
188
Rev. B
Nanolithography - A Sample Session
1. Load a conductive tip with proper electrical contacts to permit applying an electrical bias.
Connection
Figure 13.4a Anodic Oxidation Chip Carrier and Stage Connection

2. Setup for TappingMode operation for 5 m scan range + 1Hz scan rate + 256 pixel
resolution.
3. Scan the sample.
4. Open NanoPlot.
5. Enable Bias Line and Tip.
Rev. B
189
6. Menu Tools > Setup in NanoPlot to enter SetPoint and Tip Bias.
Figure 13.4b Select or Set Circled Items

7. Use NanoPlot tools to draw or import graphics.
8. Click Etch.
9. Scan the sample to view results of nanolithography
190
Rev. B
Note:
The procedure for scratching nanolithography parallels the preceding

example except no bias is being applied and the Z-Depth function is used to
decrease the probe to sample distance sufficiently so the probe is in permanent
contact with the sample during the lithography move. When performing
scratching lithography in contact mode, the setpoint function can be employed
alternatively to obtain the required increase in force during the lithography
move.
Figure 13.4c Nanolithography Sample w/Settings
Rev. B
191
192
Rev. B
Ch. 14 - Calibration
Overview
Chapter 14 Calibration
14.1 Overview
This chapter describes how the scanner of the Innova instrument works and how to calibrate the
scanner to maintain its optimal performance.
The scanner is a crucial component of the Innova system. The precision of the scanner motion is
largely responsible for the quality and reliability of data. Understanding both the scanner's role in
producing images as well as how to calibrate the scanner is therefore an important part of operating
the instrument.
Typically, a Large Area scanner is provided with the Innova system. An optional small area
scanner, which is useful for high resolution applications, is also available for use with Innova. This
chapter focuses on the most common case of calibrating the large area scanner in high-gain,
closed-loop mode. Analogous procedures apply for low gain mode, for open-loop operation and
for the (open-loop) small area scanner.
Open loop scans may exhibit more nonlinearity and hysteresis.

PG Platinum coated calibration grating
STR-10 Surface height Reference Die
STS2 Surface height Standard
Rev. B
Innova User Manual - Ch. 14, Calibration
193
Test the X and Y Detector:
14.3 Test the X and Y Detector:

Upon starting the system, it is a good idea to check the status of the X and Y Linearizer signals to
make sure they are behaving normally. This will be useful for the next step (XY Calibration) which
depends upon the Linearization detectors working normally. To check the X-Linearizer signal,
open the Signal Tracing window (Realtime Control > Signal Tracing). Select DAC 0 X Channel
from the Driving Signal pull down menu, and check the Bi-Direction box below it. Then select the
X Linearizer data channel checkbox to plot the signal. The expectation is that the scanner range
will be approximately 100 microns and that this corresponds to voltage numbers larger than 5V on
the linearizer. The example here shows a typical symmetrical X signal trace, producing about 8V
on the linearizer. The same procedure can be used to evaluate the Y Linearizer. Just select DAC1 Y
Channel from the Driving Signal pull down menu and select the Y Linearizer checkbox from the
Channel list. If the signals look normal, then proceed to the next step.
Figure 14.3a Signal Tracing Window

If the linearizer signals are clipped (horizontal) near the end of the DAC voltages, the linearizer
may require alignment. Refer to the scanner alignment support note (013-432-000) for details.
194
Rev. B
Calibrating X and Y Measurements:
14.4 Calibrating X and Y Measurements:

With the Closed Loop controls for X and Y on, acquire a large area scan (close to maximum value:
100) of the 10 XY Pitch, 200nm Z Height calibration grid standard that is supplied with the
system accessories. Make sure that it is aligned as close to perpendicular orientation as possible so
that the structure features appear to be parallel to the edges of the scan window. After the image is
acquired, Left Click & Drag the image over into the Scanning control window. From the main
application window menu bar, under the Setup pull down menu, choose Recalibration > XY
Recalibration. Select the Angle Measurement Tool to the right of the image. Draw the X and Y axis
lines along the edges of the grid pattern to measure the angle of the image skew. To start the X axis
line, left click on the origin point and drag from right to left. Release the left mouse button. Then
place the cursor back on the origin point and right click the mouse. Drag the Y axis line along the
vertical features and release the button at the end of the desired line. The angle value is displayed in
the window as the current measurement. If the value is significantly different from 90 degrees, then
click the red and blue down arrow tool that opens the input dialog box. Type in the desired angle
and press Enter. The crosstalk factor is calculated and displayed. (If the coefficient value reported is
a positive number, change it to a negative number.) Select the Use It arrow tool as the option to
save the measurement, and the crosstalk correction factor will be entered into the scanner file. See
example:
Figure 14.4a Horizontal and Vertical Reference Lines Dragged Onto Image
Rev. B
195
Calibrating X and Y Measurements:
It is a good idea to rescan the sample at this point to make sure that the correction works properly.
If further correction is necessary, continue the angle / crosstalk correction process. Collect a
suitable scan of the standard grid and drag it into the Scanning control window. Choose Setup /
Recalibration / XY Recalibration and activate the Distance Measurement dialog by clicking the
button with the line segment icon on the right side of the Scanning window. The label XY
Recalibration should appear on the left side of the window under the parameters input section.
Click on the downward pointing red/blue arrows. To perform the X axis calibration make sure that
the X radio button is selected and then draw a horizontal line across a set of features (known
distance) in the image. The software will show the measured distance in the display box above the
arrows. Type in the correct (nominal) distance in the Distance dialog box. Example: If your line
covers 8 pitches, type in 80, if it covers 9 pitches type in 90. Repeat this procedure to calibrate
the Y axis, by selecting the Y radio button and drawing the line vertically. Once completed, rescan
the standard sample image and check the results.
Figure 14.4b X-axis Calibration Line Drawn
196
Rev. B
Calibrating Z Measurement:
14.5 Calibrating Z Measurement:

Z axis calibration is performed using the Line Scan feature. First, select Z Recalibration from the
Setup > Recalibration menu. Select the Line Scan mode icon from the Scanning control window.
Enter the line scan parameters manually or choose a line position graphically on the image
displayed in the Scanning control window using the previously acquired image of the grid. Start the
Line Scan. In the Line Scan window, select the 1-D Line Fit option to avoid tilt in the line scan data.
Click on the distance measurement icon on the right side of the Line Scan control window. Click on
the Z Recalibration item in the Line Scan menu bar to bring up the Z Height calibration dialog box.
Select the Distance Measurement icon on the right and click on the lines in the graph to select 2
cursor positions. Note that the cursors can be set on either the forward or reverse trace lines, but
both cursors need to be set on the same trace to obtain a measurement. The Z Height calibration
dialog will display the current measured height. Type in the known height of the reference standard
(0.2 microns or 200 nm in this case) in the "New" dialog box (not in the "Range" box). Press Enter
to have the value accepted by the software.
Figure 14.5a Before Typing In New Measured Height:
Figure 14.5b After Typing In the Nominal (known) Z Height:
Rev. B
197
Calibrating Z Measurement:
14.5.1 Calibrating the Z-Linearizer:

Follow the same procedure to calibrate the Z-Linearizer.
Note:
Z-Linearizer data may be inverted from height. In addition to the

"Z-Linearizer" data channel, a channel named "Height Sensor" also exists on
the list of available signals, which provides linearized Z measurements without
the inversion. Z-linearizer data is always in volts while Height Sensor
data is in nm, reflecting the current calibration factor. Z-linearizer, not
Height Sensor is the data type used in the calibration procedure.
In the example below we can see a Z Lin value of 104.2mV per 200nm. This results in a factor of
1.92nm/mV.
Figure 14.5c Z-Linearizer Calibration
198
Rev. B
Ch. 15 - Thermal Tune

Overview
Chapter 15 Thermal Tune

15.1 Overview
This chapter describes the method of Thermal Tune characterization of the probe prior to
performing imaging or analysis that depends upon the spring constant of the probe or its
mechanical resonance in liquid. The Thermal Tune method observes and monitors the oscillation of
the probe which occurs from environmental excitation (i.e., thermal effects) which is less subject to
outside influences which are present when the excitation is produced by piezo stimuli.
Various analyses or measurements such as point spectroscopy require that the spring constant of the
probe be known. It may be important to have an accurate value for the spring constant to avoid
damage to the sample or to avoid confounding results from one or more samples that require a
change in probe. Often it is sufficient to use the spring constant information which is supplied with
the probe, however, a set of probes will invariably exhibit variation. Critical applications may
benefit from the Thermal tune method of determining the spring constant.
Tapping mode applications stimulate the probe at a frequency near its mechanical resonance.
Determining the resonance is often difficult when imaging in liquids. Exciting the probe through a
range of frequencies applied through the piezo device usually produces multiple or vague
resonance peaks at several frequencies because of the damping effect of the liquid. The Thermal
tune method determines the resonant frequency by determining a response peak due to thermal
stimulation of the probe. This peak is a good indication of the probe resonance and the frequency
may be used as a drive frequency for imaging in liquid.
Note:
Thermal tune is available in SPMLab 7.11 or later. Contact Veeco if an

upgrade is required.
15.2 Set-up
The thermal tune procedure is the same whether the experiment will be performed in contact mode
or tapping mode. It should be noted that tapping mode imaging in liquid typically uses a probe
which is also used for contact imaging in air and liquid. The probes commonly used for tapping
mode imaging have high resonant frequencies in air but liquid damps the oscillation. The common
choice of probe for tapping mode imaging in liquid is the short, narrow-legged DNP or DNPs. Even
softer cantilevers can be used for contact mode but typically these do not perform well for tapping
mode imaging in liquid.
1. Mount the specimen to be imaged. If the imaging is to be performed in liquid, the thermal
tune procedure is performed with the specimen in the liquid.
2. Set-up Innova to perform contact mode imaging as described in Chapter 7 up to engaging.
Rev. B
Innova User Manual - Ch. 15, Thermal Tune
199

Set-up
15.2.1 Calibrate Sensitivity

Before performing Thermal tune, it is necessary to calibrate sensitivity using the procedure in Point
Spectroscopy. See Chapter 10.
1. After engage is complete, select the Point Spectroscopy tool
Figure 15.2a Select Point Spectroscopy

2. This will open the Point Spectroscopy window
Figure 15.2b Point Spectroscopy Window
200
Rev. B

Set-up
3. For later reference, click on the drop down window to see what the display options are. Note
that only two y-axis options are available: V or m.
Options
Figure 15.2c Y-axis options

4. Refer to Chapter 10 if required and change the parameters in the left portion of the window
as needed and generate a good force/distance plot
Figure 15.2d Produce a Force/Distance Plot
Rev. B
201

Set-up
5. Select the Slope/Angle measurement tool
Figure 15.2e Slope/Angle Measurement Tool

6. Move the cursor onto the slope and click, then select a second point on the slope and click
again. When the second point is selected, a value for sensitivity will appear. In this
example, the value is 0.0195 and it is pasted into the Thermal Tune procedure and will be
seen again in the next section. The exact value will depend upon the cantilever type and laser
adjustment. Deflection sensitivity values between 0.01 m/V to 0.1 m/V are typical.
Point 1
Point 2
Figure 15.2f Select Points to Determine Sensitivity
202
Rev. B

Thermal Tune
7. Click the Calibrate toolbutton and a Deflection Sensitivity Calibration message window will
appear.
Figure 15.2g Deflection Sensitivity Calibration Completed

8. Click OK to close the window.
9. Disengage
15.3 Thermal Tune

1. Ensure that the probe is disengaged
2. Make the menu selection: Setup > Thermal Tune.
Figure 15.3a Select Thermal Tune
Rev. B
203

Thermal Tune
3. The Thermal Tune window will open. Notice that the sensitivity value 0.0195, which was
determined in the previous section, is shown in this window. The spring constant value
which is displayed is a remnant from some earlier analysis and is not valid. A correct spring
constant will be determined later in this procedure.
Figure 15.3b The Thermal Tune Window.

Note:
204
In the Acquisition section of the Thermal Tune window, Average is selected by

default and the Continuous Scan toolbutton is also selected by default. With
these settings, the spectrum analysis of probe oscillation will be performed
repeatedly and a running average of the analysis displayed. For some
applications it may be desired to specify a specific number of iterations by
entering that number in the window in the Acquisition section. The default
value of 0 results in continuously repeating/averaging spectrum analysis until
the acquisition is manually stopped.
Rev. B

Thermal Tune
4. Clicking the Start/Stop toolbutton will begin to perform/average spectrum analyses and
display the number of analyses performed in window at the bottom of the screen until the
toolbutton is again clicked. The example was stopped at 209 iterations.
Figure 15.3c Example Scan

Note:
Rev. B
The acquisition is usually permitted to continue until the average response

produces a fairly smooth peak.
205

Thermal Tune
5. After the acquisition has been stopped, select the measurement tool
corner of the window.
in the upper right
Figure 15.3d Select Measurement Tool

6. Click and drag a zoom window around the response peak
Zoom window
Figure 15.3e Click/Drag a Zoom Window
206
Rev. B

Thermal Tune
7. Release the mouse button and the selected zoom area will be displayed. As the cursor is
moved on the response curve the values of the curve are displayed at the bottom of the
screen.
Figure 15.3f Zoomed Area Display

8. Click the Fit toolbutton to produce a curve fit of the response and display the frequency peak
and Q of the response.
Figure 15.3g Curve Fit and Statistics
Rev. B
207

Thermal Tune
Note:
If desired/needed, the curve fit may be removed and redrawn by clicking on the
Fit toolbutton.
Note:
When performing thermal tune in liquid, the observed resonant frequency is

typically 1/3 to 1/2 the resonant frequency in air and Q is typically less than
100.
9. Click the Calibrate toolbutton and the spring constant value will be updated
Figure 15.3h Calibrate and Get Spring Constant

10. If the sample is to be imaged in liquid, record the peak frequency (in this example, 30.8098
kHz) as a reference for determining the tapping drive frequency. For Point Spectroscopy, the
spring constant value has been pasted and provides an additional option in Point
208
Rev. B

Additional Options
Spectroscopy as shown in the revised window. This option allows force curves to be
displayed and saved in force units.
Figure 15.3i Point Spectroscopy Option Includes N
15.4 Additional Options

There are additional options/controls available in Thermal Tune. To access these options, click on
the Extend Acquisition tool.
Figure 15.4a Extend Acquisition Tool
Rev. B
209

Additional Options
Additional controls are displayed
Figure 15.4b Extended Acquisition Control Options Shown
15.4.1 Input Gain

1. If Data Capture is toggled, raw data (not spectrum analysis) is displayed. The raw data
should be displayed without exceeding the screen range (clipping, saturation) as shown in the
example.
Figure 15.4c Gain Good
210
Rev. B

Additional Options
2. If the data extends out of the screen range, the input gain is set too high and must be adjusted
to produce an acceptable level as illustrated in Figure 15.4c
Adjust
as needed
Figure 15.4d Gain Too High
15.4.2 Check for Aliases

Unless a specific frequency range has been specified, spectrum analysis is performed from zero to
the Nyquist frequency (half the sampling rate). If the peak response occurs beyond the upper limit
of the range, the peak response is reflected around the upper limit. For instance, if the upper limit
of frequency is 50kHz and the actual peak is at 57 kHz (that is, 7 kHz higher than the upper limit),
the spectrum analysis will indicate a peak (an alias) at 43 kHz (i.e., 7 kHz lower than the upper
limit).
To detect aliasing, enable the option Check for aliases and perform a scan. Multiple scans are
performed with the sampling rate incremented upward for each scan. If aliasing is present, the
Rev. B
211

Additional Options
reflected peak will occur at different locations. Peaks truly located below the Nyquist frequency
will appear at the same frequency (their true frequency) regardless of the sampling ratem.
Figure 15.4e Example of Check for Aliases Display with No Aliasing
212
Rev. B
Appendix A Synchronizer
Notice:
This section describes specialized applications for advanced users. Operation of the Innova system
does not require familiarity with the contents of this section except for those specialized
applications. In general, the majority of users may skip this section unless, and until, the
Synchronizer capability is known to be required.
A.1
Introduction:
Veeco Innova Synchronizer is an option which provides the capability to synchronize the image
scanning operations of an Innova AFM with the operation of another device. The synchronization
is performed by handshaking signals between the two instruments. The Nanodrive controller can
output handshaking signals with designated voltage levels and durations. It can also accept input
handshaking signals with designated voltage levels.
The Innova synchronizer requires no additional hardware. The handshaking signals are fed in and
out via the interface board installed in the standard configuration Nanodrive controller. The
Synchronizer option requires SPMLab Version 7.11or higher. Contact Veeco to purchase the
Synchronizer option functionality and refer to option part number INSYNC.
Rev. B
Innova User Manual
213
Appendix A: Synchronizer
Set-up
A.2
Set-up
A.2.1
Handshaking Out-put Signals

1. Use a BNC cable to connect the OUT2 output on the NanoDrive back panel to the
accepting terminal of the synchronizing device.
OUT2
Figure A.2a
214
BNC Connections
Innova User Manual
Rev. B
Set-up
2. Select Realtime Control > Synchronizer Control.
Figure A.2b
Menu Selection for Synchronizer Window.
3. In the Synchronizer window, specify the pulse required by the synchronizing device.
Check boxes:
Active: checked.
Handshake: unchecked.
Test: checked. (Changes the Apply button to Run for testing synchronization
handshaking. When imaging, Test should be unchecked.)
Figure A.2c
Rev. B
Synchronizer Window Output Checkboxes
Innova User Manual
215
Set-up
Pulse Characteristics: (see Figure and Figure A.2d)
High level: the upper level of the output voltage pulse.
Low level: the lower level of the output voltage pulse.
Pulse width: the duration of the voltage pulse (in milliseconds.
Figure A.2d
CAUTION:
Output Pulse Illustration
Ensure the output voltage levels are compatible with the receiving device to prevent
electronics damage.
4. When the Run button is clicked, the NanoDrive controller outputs a single pulse. During the
output, the Synchronizer window becomes temporarily busy, depending on the pulse width,
then returns to the idle state.
216
Innova User Manual
Rev. B
Set-up
A.2.2
Set Up Handshaking Input Signals

1. Connect a BNC cable between "IN2" connector on the NanoDrive back panel to the output
terminal of the synchronizing device.
IN2
Figure A.2e
Rev. B
IN2 BNC Connection on Nanodrive
Innova User Manual
217
Set-up
2. In the Synchronizer window, define the Nanodrive input handshaking pulse.

Checkboxes: (see Figure A.2f)
Active: checked.
Handshake: checked.
Tuning: checked.
LED indicator
Figure A.2f
218
Synchronizer Window Input Checkboxes
Innova User Manual
Rev. B
Set-up
3.
Pulse characteristics: (see Figure A.2g)
High level: the upper level of the input handshaking pulse. Maximum: 10V.
Low level: the lower level of the input handshaking pulse. Minimum: -10V.
Rising Edge: When checked, the rising edge is used for handshaking, otherwise, the
falling edge is used.
Handshake
Output Signal
Handshake
Input Signal
Figure A.2g
Handshake Sequence (a) Rising Edge and (b) Trailing Edge
4. Click Run. The NanoDrive controller should immediately output a voltage specified by
high level in the Pulse Out section, then wait for the handshake signal to lower the output
to the low level. The small LED (see Figure A.2f) indicates the status of the handshake
signal. It has three states:
Rev. B
green: ready to use the handshake
red: waiting for handshaking signal.
gray: inactive (handshake cannot be used).
Innova User Manual
219
Configure Software
A.3
Configure Software
1. Specify the handshaking signals as described in the preceding sections.
2. Un-check the Tuning selection and click Apply to activate the synchronizer.
Figure A.3a
Activate the Synchronizer
3. Open the Scanning Conditions window using the menu selection Conditions.
Figure A.3b
220
Menu Select Conditions
Innova User Manual
Rev. B
Configure Software
4. In the "Scanning conditions" window, select the operations to be synchronized.
Figure A.3c
Select Synchronization Operations
5. The available operations include:

Image operations:
Beginning: When checked, the Nanodrive controller outputs a specified handshaking output signal
when it is ready to begin a new image scan. If Handshake is enabled (see the checkbox in Figure
A.3a), Nanodrive will wait for a handshaking input signal to start the scan.
End: When checked, the Nanodrive controller outputs a specified handshaking output signal when
it finishes scanning an image.
Forward line:
when it is ready to begin a scan line in the forward direction. If Handshake is enabled (see the
checkbox in Figure A.3a), Nanodrive will wait for a handshaking input signal to start the scan.
it finishes scanning a line in the forward direction.
Pixels: When checked, the Nanodrive controller outputs a specified handshaking output signal
when it is ready to move to the next pixel in the forward direction. If Handshake is enabled (see
the checkbox in Figure A.3a), Nanodrive will wait for a handshaking input signal to start the scan.
Backward line:
when it is ready to begin a scan line in the backward direction. If Handshake is enabled (see the
checkbox in Figure A.3a), Nanodrive will wait for a handshaking input signal to start the scan.
it finishes scanning a line in the backward direction.
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Run Synchronizer
Pixels: When checked, the Nanodrive controller outputs a specified handshaking output signal
when it is ready to move to the next pixel in the backward direction. If Handshake is enabled (see
the checkbox in Figure A.3a), Nanodrive will wait for a handshaking input signal to start the scan.
Note:
Since the end of a forward line is usually also the beginning of the next
backward line, Nanodrive will output two handshaking pulses when both
checked. The same is true for the end of backward line and the beginning of
forward line.
5. Click OK to apply the selected synchronizations.
A.4
Run Synchronizer
1. In the Scanning control window, click the Start/Stop scanning button to start scanning and
synchronization will be performed.
Figure A.4a
Start Scanning Will Apply the Synchronization Setup
2. To change synchronization operations, stop scanning and change parameters described in

Section A.3.
3. To change synchronization signal levels, change values in the synchronizer window and
click Apply.
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Rev. B
Appendix B Open Hardware
Note:
This section describes specialized applications for advanced users. Operation of the Innova system
does not require familiarity with the contents of this section except for those specialized
applications. Even advanced modes such as Scanning Capacitance Microscopy do not usually
require Open Hardware features. In general, the majority of users may skip this section unless, and
until, the Open Hardware capability is known to be required.
B.1
Introduction
The included Open Hardware feature provides wide flexibility in the configuration of the Innova system.
The Open Hardware option provides access to the configurable electronics including: DACs, ADCs,
Multiplexers, lock-in amplifiers, signal generators, and others. With Open Hardware access, the various
accessible items may be configured as needed for special requirements of imaging or testing.
It is important to understand several aspects of the Open Hardware feature:
Any changes made are implemented immediately.
The default SPMLab values will appear in the various control windows until Get
Parameters is executed.
There are no safeguards. Reversing feedback or other actions can cause the system to behave
erratically and may result in damage to the probe and/or sample.
None of the changes made using Open Hardware controls will be saved. By closing and reopening SPMLab, all normal default conditions will be restored.
Open Hardware is available in SPMLab Vr. 7.10 r1 or later.
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Open Hardware
Software Setup
B.2
Software Setup
1. Menu select: Tools > Open HW Access.
Figure B.2a Open Hardware Access Selection

2. Note the caution in the pop up message window. When ready to proceed, click Yes. If No is
clicked, the operation will be stopped.
Figure B.2b Caution: Open Hardware Access for Advanced Users!
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Software Setup
3. The Open hardware tool bar will display on the right side of the SPMLab main window.
Figure B.2c Toolbar for Open Hardware Access

The tool button functions are:
Feedback control
Multiplexers control
DAC and ADC control
Tip voltage control
IOMOD control (dual channel lock-in)
Innova Interface board control (IO-I)
Innova High Voltage board control (IO-HV)
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Open Hardware
Open Hardware System Diagram
B.3

The Open Hardware functions allow the user to take direct control of electronics hardware in the NanoDrive
controller. The following section describes the Innova system and NanoDrive controller in great detail.
B.3.1
Innova Systems Diagram
Figure B.3a displays the main components of the Innova system. The three main components are the SPM
Instrument, the NanoDrive Controller and the PC. During normal operation, the DSP inside the NanoDrive
controller controls the Instrument, receives commands from the PC and sends data back to the PC.
NanoDrive Controller (configured for Innova)

PC
USB
DSP Board
(DSP & FPGA)
SPM
Instrument
Data Acquisition
Board
Interface
Board
(IO-I)
Lock-in
Board
HV Board
(IO-HV)
Optional Boards:
IO-X signal access
Digital Bus
(IO-MOD+)
Analog Bus
Optional external signal access
(Innova)
Figure B.3a Innova Systems Diagram
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Open Hardware
The sub-functions of the NanoDrive controller are split over a number of modular boards:
1. Data Acquisition board:
This board handles most of the Analog to Digital conversions (ADC) and a number of the
Digital to Analog conversions (DAC). It interacts with the other boards through the
digital and analog bus.
2. IO-I Interface board:
This board interacts directly with the Innova SPM instrument and handles all of the low
voltage signals coming and going to the instrument.
3. IO-MOD+ Lock-in board:
This is a two channel lock-in board that is, as an example, used during Tapping mode to
generate the Tapping drive and determine the Tapping amplitude and phase. It normally
interacts with the other boards through the analog and digital bus, but has powerful input
and output capabilities through the BNCs mounted on its front panel.
4. IO-HV High Voltage board:
This board generates all the high voltages needed for the scan motion.
5. Optional boards:
Rev. G
Additional boards, such as the IO-X Signal Access board, can be placed in the NanoDrive
controller and interact with the other boards through the analog and digital bus.
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Open Hardware
B.3.2
Open Hardware Access Controls
The Open Hardware feature in the software allows for direct interaction with the different boards in the
NanoDrive controller, outside of the normal SPMLab software routine. The diagram in Figure B.3b gives an
overview of the Open Hardware functions and where they interact with the NanoDrive controller.
NanoDrive Controller (configured for Innova)

DSP Board
x
x
Main clock
XYZ Feedback selection and
settings
Data AcquisitionBoard
x
x
8u ADC channels with input selection with filters, gain,

offset
64-to-1 multiplexer for monitoring selection
x
13 DAC channels (24bit(x1), 16bit(x4), 12bit(x8)
x
Tip voltage control
Interface Board(IO-I)
x
x
x
x
Switchable connections to the bus

Switchable BNC outputs
Dither drive selection
Tip sample bias selectors
Lock-in Board
x
Two lock-in channels with drive signal generation,

amplitude control, variable gains and filters, switchable
bus inputs and outputs, switchable BNC outputs
HV Board
x
x
x
x
High voltage enable/disable

switchable High/Low gain
Monitor connections to bus
Z-Voltage source selection
Digital Bus
Analog Bus
Optional Boards:
IO-X signal access
Figure B.3b Open Hardware Functions Diagram
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Open Hardware
Input/Output Signal Access
B.4
Input/Output Signal Access

The Open Hardware functionality includes the ability to access input and output signals using BNC
connectors situated on the backside of the NanoDrive controller as described in the following section.
Additional access points exist on the back of the Innova microscope base via four BNC connectors, however,
the BNC connectors on the microscope base are used almost exclusively for electrochemistry. Thus, they do
not play a significant role for the Open Hardware functionality described in the following section.
In particular, AUX1 on the back of the microscope base provides STM bias options in electrochemistry,
AUX2 is connected to sample bias (work electrode in electrochemistry), AUX3 is connected to tip bias (black
pin on microscope stage, serves as counter electrode in electrochemistry), and AUX4 is used as reference
electrode access in electrochemistry (via red pin on stage, through a buffer amplifier). When not in
electrochemistry mode, AUX4 functions as floating differential input that can be configured using Open
Hardware Access and connected to an ADC via AL3. However, AUX4 cannot be used with STM as AL3
serves as STM current line. The outside shells of BNCs 1 to 3 are connected to analog ground.
For general purpose input and output, use the BNC connectors on the backside of the NanoDrive controller,
rather than those on the backside of the microscope.
B.5
Open Hardware Functions
B.5.1
Feedback Control
Open the Feedback Control window by clicking on the Feedback Control
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toolbutton.
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Open Hardware
Figure B.5a Feedback Control Window

Feedback controls/Parameters:
DSP Clock: Main FB period in sec. This changes the overall speed of the controller. At
values below 10.0 sec. (= 100kHz), errors may occur on some applications
X/Y/Z Channel: For each of the Z, Y and X Channel sections, the PID Coefficients are
different from the feedback values in the SPMLab main window GUI. The values in this
window are the actual values applied to the hardware feedback loops while the values in the
GUI are scaled for convenience.
Inverse: When checked, the polarity of the feedback signal is reversed.
Note: Reversing the feedback loop will cause system oscillation.
B.5.2
On: When unchecked, the feedback loop is inactive. When checked, the feedback
operation is active. The value is the actual value of the target under feedback control
(feedback input signal).
Setpoint: The set point value for the feedback loop.
ADC: The ADC used to measure the input signal that is under feedback control.
DAC: The DAC used to output a signal to exercise control
Get Parameters Button: When clicked all the parameters in the window are updated to
display the current status of all the parameters in the window. To change any parameter or
setting, change the parameter and <Enter> from keyboard.
Multiplexer Control
Open the Multiplexers Control window by clicking the Multiplexers control
toolbutton.
Figure B.5b Multiplexers Control Window
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This dialog permits setting the multiplexers present on the data acquisition board. There are two types of
multiplexers. The first type has 16 inputs and the output feeds an ADC channel. The second is a 64-to-1
multiplexer that can be used to access more signal lines and is primarily used in the Oscilloscope and
Multimeter functions.
The 16-to-1 ADC Multiplexers
MUX
Gain
ADC
0..6
2 kHz
9
Offset
Offset
DAC
10 kHz
LPF
50 kHz
Line
AL0..AL15
Each ADC channel has one 16-to-1 multiplexer. Since there are 8 ADC channels there are also 8 such
multiplexers. Seven of them, those that are associated with ADCs 0 through 6, are freely accessible through
the multiplexer dialog. See the upper section of the dialog shown in Figure B.5b. Since all of these ADC
channels have identical functions, their control is combined in that upper section. The general functions of the
selection boxes in the dialog are shown in Figure B.5c.
Figure B.5c ADC Multiplexer Diagram
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Open Hardware
In standard SPM applications the analog lines (AL) have pre-defined signals on them, generated by the
different boards in the NanoDrive controller. Table B.5d lists the signals on the AL lines per application. It
also lists the default ADC that is used by the SPMLab software to monitor those signals. The actual ADC
number assigned to a certain signal can vary depending on software configuration.
STM Sensor
ADC0
ADC0
ADC4
ADC4
ADC0/
4
ADC0
ADC0
ADC
SCM Phase
AL4
ADC0
ADC0
ADC0/4
Tapping Amplitude
ADC0
ADC0
ADC5
LC-STM Sensor
ADC0/4
C-AFM Signal
ADC5
PRM Signal
ADC6
FMM Phase
AL5
ADC6
SCM Feedback Bias
ADC6
SEPM Potential
ADC6
AL6
X LIN
ADC3
ADC3
ADC3
ADC3
ADC3
AL7
Y LIN
ADC2
ADC2
ADC2
ADC2
ADC2
ADC2
AL8
Z LIN
ADC1
ADC1
ADC1
ADC1
ADC1
ADC1
AL9
IN 1
ADC5
ADC5
ADC5
ADC5
ADC5
AL10
IN 2
ADC6
ADC6
ADC6
ADC6
ADC6
Tapping Phase
ADC4
ADC3
ADC3
ADC3
ADC2
ADC2
ADC2
ADC1
ADC1
ADC1
ADC3
ADC3
ADC2
ADC2
ADC2
ADC1
ADC1
ADC1
ADC5
PRM Amplitude
ADC5
FMM Amplitude
ADC5
SEPM Error
AL12
ADC5
SCM Detector
ADC3
Tapping Phase
ADC4
T_B Fast Filtered
AL13
SCM Sensor
AL14
AL15
ADC3
ADC4
SCM Amplitude
AL11
Surface Potential
AL3
ADC5
ADC1
Force Modulation
SUM
ADC0
Piezo Response
AL2
ADC5
SCM
ADC1
C-AFM
ADCO
Lateral Signal
EC-STM
Deflection Signal
AL1
EC-tapping
AL0
EC-contact
Signal
LCSTM
Analo
g
Line
STM
Contact Mode
Tapping Mode
Modes:
T-B Fast
ADC6
ADC6
ADC6
Table B.5d Analog Lines with Default ADC Selections

So the multiplexer dialog can be used to change signal lines assigned to a certain ADC. For example, when
in Tapping Mode, ADC5 can be switched over from AL0 to AL9. Now instead of reading the deflection
signal it will read the signal that is input on BNC IN1 on the IO-I board. Be aware that the SPMLab
software will still name the signal as deflection signal even though it will show the IN1 signal as it is
unaware of any changes made through the Open Hardware controls.
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ADC7 and the Monitor Multiplexer

The eighth 16-to-1 multiplexer, which is associated with ADC 7, is typically used for the built-in oscilloscope
function. That means its channel setting is automatically changed to access all channels sequentially. To
control this multiplexer manually, the Oscope Enable button must be unchecked (see middle section of
Multiplexer Control dialog shown in Figure B.5b). The second type of multiplexer has 64 inputs. It too is
typically controlled by the oscilloscope function. To control it manually, the Oscope Enable button must be
unchecked. The output of the 64-to-1 multiplexer is driven onto AL15. Hence, to read any of its inputs, one of
the 16-to-1 multiplexers must be set to AL15 and the corresponding ADC must be read via software. It is also
possible to access AL15 electrically through several of the signal access BNCs. The following table lists the
input functions of the 64-to-1 multiplexer.
NR
Description
NR
Description
0
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
39
30
31
GMon0 (must be enabled elsewhere)

HVMon0 (must be enabled elsewhere)
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
DACmon0 (VTIP)
DACmon1
DACmon2
DACmon3
DACmon4
DACmon5
DACmon6
DACmon7
DACmon8
DACmon9
DACmon10
DACmon11
DACmon12
3.3 V digital supply
5.0 V digital supply
DGnd digital ground reference
+15V analog supply (div. by 2)
-15V analog supply (div. by 2)
+5V supply of DACs
-5V supply of DACs
5.00V reference for calibration
-5.00V reference for cal. verification
2.50V reference for cal. verification
AGnd analog signal reference
5V supply of ADC0 and ADC1
+15V digital supply (div. by 2)
-15V digital supply (div. by 2)
Unused, open
Unused, open
Table B.5e Monitor Line Assignments

The Gmon and HVmon signals come from interface boards. Unless they are enabled there, these signals are
open inputs. When open, they are not constrained and typically drift towards a rail.
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Open Hardware
Detailed Control Descriptions

The Multiplexer Control window is divided into three sections:
Section 1 = 0-6 ADC muxes: ADCs from no.0 to no.6 can be configured to take different signals for each
ADC. Additionally, each ADC can also be individually configured for offset, gain and filters.
ADC channel: Selects the ADC to configure.
Line: Selects the signal to be routed to the ADC
Offset: When checked, offset to ADC signal is enabled.
Gain: When checked, gains to ADC signal are enabled.
10 kHz filter: When checked, the 10 kHz filter is enabled.
2 kHz filter: When checked, the 2 kHz filter is enabled.
Red arrow button
Question Mark button

: When clicked, retrieves the settings for the selected ADC
channel. Whenever a new ADC is selected, the Question Mark button must be clicked to
display settings for that ADC.
: When clicked, applies the settings to the selected ADC.
Section 2 = 7th ADC muxes: ADC no.7 can be set up to take different signals. This is implemented by
configuring the mux. Additionally, the output of this ADC can also be configured to display on the
oscilloscope window.
Line: Selects the signal to be routed to this ADC
Disable: When checked, ADC 7 is disabled.
Oscope Enable: When checked, data is displayed in the oscilloscope window.
Red arrow button

: When clicked, retrieves the settings for ADC #7.
Section 3 = 64x1 mux: Multiplexer controls which signal is routed to AL15 (which can then be measured
by an ADC.
234
Line: Selects the signal to be routed to AL15.
Disable: When checked, routing is disabled.
Red arrow button

: When clicked, retrieves the settings for ADC #7.
Innova User Manual
Rev. B
Open Hardware
B.5.3
DAC and ADC Control
This window allows one to directly set certain DAC outputs and read the ADC values. Table B.5f lists the
DACs that can be set. Some DACs are continuously updated through the regular SPMLab software and will
not retain the value set by this dialog. For example, in the closed-loop XY operation setting, the X-DAC will
momentarily set the X-DAC to a different value, but 10sec later the closed-loop feedback will correct the
position offset and change the X-DAC output correspondingly.
Note: When the tip is engaged or close to the sample, changing the DAC values can result in tip or
sample damage.
DAC#
Description
DAC0 - XDac
DAC1 - YDac
DAC2 - ZDac
DAC3 - VTip Dac
DAC4 - Aux Dac1
DAC5 - Aux Dac2
DAC6 - Aux Dac3
DAC7 - Aux Dac4
DAC8 - Aux Dac5
DAC9 - Aux Dac6
DAC10 - Aux Dac7
DAC11 - Aux Dac8
DAC12 - Aux Dac9
DAC13 - Aux Dac10
DAC14 - Aux Dac11
DAC15 - Aux Dac12
DAC16 - Offset Dac0
DAC17 - Offset Dac1
DAC18 - Offset Dac2
DAC19 - Offset Dac3
DAC20 - Offset Dac4
DAC21 - Offset Dac5
DAC22 - Offset Dac6
DAC23 - Offset Dac7
Low Voltage X
Low Voltage Y
Low Voltage Z
Tip or Sample Bias Voltage
Auxiliary DAC1
Auxiliary DAC2
Auxiliary DAC3
Auxiliary DAC4
Auxiliary DAC5
Auxiliary DAC6
Auxiliary DAC7
Auxiliary DAC8
Auxiliary DAC9
Auxiliary DAC10
Auxiliary DAC11
Auxiliary DAC12
Offset DAC for ADC0
Offset DAC for ADC1
Offset DAC for ADC2
Offset DAC for ADC3
Offset DAC for ADC4
Offset DAC for ADC5
Offset DAC for ADC6
Special purpose
Table B.5f Available DACs with Description
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Open Hardware
Open the DACs & ADCs window by clicking
Figure B.5g DACs & ADCs Window
DAC: Use the drop down list to select the desired DAC and move the slider control to
adjust the DAC output for each DAC of interest. The output range is from 10V to +10V for
each DAC.
ADC: Use the drop down list to select the desired ADC. Enable the ADC readout by
clicking the red LED button
. When enabled the LED button will turn green
and the value of the ADC will be displayed.
B.5.4
Tip/Sample Voltage Control
Use this dialog to set the tip or sample bias voltage directly, or to add a modulation voltage to the tip or
sample bias. The VTMOD signal allows one to add a modulation signal to the tip or sample bias. The
VTMOD amplitude and frequency are set in the IOMod Control dialog and the VTMOD signal needs to be
enabled in the IOMod Control dialog. By selecting both Enable and VMOD the bias voltage will have
both the DC and AC components.
A schematic diagram of the controls is shown in Figure B.5h.
VTIP DAC
/100
VTIP
VTMOD
+VMOD
+VMOD/100
Enable
Figure B.5h Tip/Sample Bias Control Diagram
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Rev. B
Open Hardware
Open the VTIP Control window by clicking on the
toolbutton.
Figure B.5i VTIP Control Window
Rev. G
Slider: Adjust to desired tip voltage. Range is from 10V to +10V.
+ VMOD/100: Green = Routing to +VMOD/100. Red = Inactive.
+ VMOD: Green = Routing to +VMOD. Red = Inactive.
Enable: Green = Active. Red = Inactive.
Get Parameters: Retrieves the status of tip voltage control.
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Open Hardware
B.5.5
IOMod+ Control
This dialog allows for the full control of the dual channel lock-in. Any changes made in this dialog are
applied instantaneously, however, the parameters are not updated if the window is already open and some of
the values are changed using the regular SPMLab software controls (like the cantilever tuning window).
Use the Get Parameters button when switching back and forth between the IOMod Control dialog and the
regular SPMLab functions.
Open the IOMOD Control window by clicking the
toolbutton.
Figure B.5j IOMod Control Window
238
Sections 1&2: Controls for Lock-in amplifiers A or B.
Amplitude: The lock-in drive signal amplitude (peak-to-peak).
Frequency: The lock-in operating frequency.
Drive Phase: The lock-in reference signal phase.
Demod phase: The phase lag for the lock in amplifier.
Source: The signal to be analyzed by this channel.
Input BNC Shell is Grounded: When checked, input BNC shell is grounded.
Input Gain: Gain applied to input signal before performing lock-in analysis.
Post Gain: Gain applied to input signal after performing lock-in analysis.
Filter select: Types of filters to be applied.
Filter Freq: Filter cut off frequency.
Innova User Manual
Rev. B
Open Hardware
Rev. G
Section 3: Analog Lines.
AL4: Signal to be routed to AL4.
Section 4: BNC.
BNC1: Signal to be output through BNC1 on the IOMod+ board (at rear of Nanodrive
controller).
BNC2: Signal to be output through BNC2.
Section 5: Modulating Signal Enable.
Z_BI_MOD: Green = Apply the Drive of Channel A to the Z-BI-MOD line. Use the
Dither Drive Source in the IOI Board control window to connect that line to the dither
piezo. Red = Disabled.
Z-MOD: Green = Apply the Drive of Channel A to the Z-MOD line. Use the Z-Voltage
Sources selector in the IO-HV Control window to connect the Z-MOD line to the Zpiezo, or as addition to the regular Z-DAC voltage. Red = Disabled.
VTMOD: Green = Apply the Drive of Channel A to the VTMOD line. Use the VTIP
Control window to add this modulation voltage to the regular tip or sample bias. Red =
Disabled.
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Open Hardware
B.5.6
Innova Interface Board Control
This dialog controls the Innova Interface Board (IO-I board). It allows for putting certain signals on analog
lines (AL), selecting the sources for generic output BNCs and selecting the sources for the dither and bias
voltages. Always avoid turning on multiple signals for the same AL line. Turn off connections first, before
making new connections.
Open the Innova Interface Board window by clicking the
toolbutton.
Figure B.5k Innova Interface Board Control
240
Input AL Connections: Controls the routing of signals. Mark check boxes of desired
options.
Out BNCs: Controls the routing of signals to the two BNCs on the IO-I board (at rear of
NanoDrive controller).
Out 1: Signal to be output through OUT1 BNC.
Out 2: Signal to be output through OUT2 BNC.
Dither Drive Sources: Controls the routing of signals to be applied to the dither piezo.
ZMOD BNC to dither: Green = overrides the dither drive source selection and connects
the dither to the ZMOD BNC on the IO-I panel. Red = disabled.
Bias Voltage Sources: This is to select the control of tip/sample/STM bias.
Tip: Controls the tip voltage.
Sample: Controls the sample voltage.
STM/NC: Controls the STM voltage.
Get Parameters? Updates the status of all parameters in this window.
Innova User Manual
Rev. B
Open Hardware
B.5.7
High Voltage Board Control
This dialog controls the Innova High Voltage board (IO-HV board). It allows selection of the low voltage Z
sources (which is the input of the high voltage amplifier), enabling of monitor lines, selection of the high
voltage gain and enabling or disabling of individual xyz outputs.
Schematic diagrams of the high voltage controls are shown in Figure B.5l through Figure B.5p.
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Figure B.5l High Voltage Controls Diagram 1
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Figure B.5m High Voltage Controls Diagram 2
Rev. G
Innova User Manual
241
Open Hardware
9
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Figure B.5n High Voltage Controls Diagram 3
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Figure B.5o High Voltage Controls Diagram 4
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Innova User Manual
Rev. B
Open Hardware
9
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Figure B.5p High Voltage Controls Diagram 5

Open the High Voltage Board window by clicking the
toolbutton.
Figure B.5q Innova High Voltage Board, PRIMARY
Z voltage Source: Selects the voltage source applied to the piezo tube for Z motion. The
selected checkbox source is activated.
Monitor Lines: Selects the signals to be monitored. The checkbox activates the selected
signal (group).
HV Enable: Enable / Disable the high voltage.
Rev. G
When pressed, enables the high voltage output for all X/Y/Z.
When pressed, enables the high voltage output for Z.
When pressed, enables the high voltage output for Y.
When pressed, enables the high voltage output for X.
Low Gain: This is to enable / Disable the low gain option for X/Y/Z.
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Open Hardware
Examples
B.6
X: When checked, enables the low gain option for X.
Y: When checked, enables the low gain option for Y.
Z: When checked, enables the low gain option for Z.
Get parameters? Updates the status of all the parameters in this window.
Examples
B.6.1
Changing a Signal on a Channel
This example shows how to reconfigure an ADC input to another source. It is a way to add external signals
to the measurement channels or look at signals that are not configured by default. This example shows how
to use IN2 on the IO-I board as input during Tapping Mode imaging.
Note: The input signal always has to be between -10V and +10V!
Start with the assumption that the system is configured for Tapping Mode. From Table B.5d, it can be seen
that by default the IN2 channel or the IO-I board is not being measured. Another way to see is by opening
up the channels list in the scanning control window, see Table B.6a.
Figure B.6a Default Channel Selection for Tapping Mode

To add IN2 as one of the measurement channels, the following steps need to be executed:
1. First open the Open Hardware panel, if it is not already open.
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2. Open the IO-I board control and enable IN AUX2 to AL10.
Figure B.6b Enable AUX IN2

3. From Table B.6a choose a signal that will be replaced with the IN2 signal. For example, since we
are in Tapping Mode we can safely replace the TM Deflection signal with IN2. Be careful,
especially if you are replacing one of the critical signals, such as Tapping Amplitude, which is
used for feedback.
4. From Table B.5d, it can be seen that the Deflection signal in Tapping Mode by default is assigned
to ADC5. Open the Multiplexer Control window and verify by selecting first ADC Channel 5, and
then clicking on the ?.
Figure B.6c Multiplexer control with ADC5 Queried

5. Figure B.6c shows that by default ADC5 was assigned to AL0, which is the deflection signal. Now
change the line to AL10 (=IN2) and press the arrow button to apply the change.
Figure B.6d Multiplexers with AL10 assigned to ADC5

6. Depending on the signal type additional filters can be applied. Figure B.6d shows an additional
2kHz low pass filter applied to the input.
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7. All that is left if to connect the external signal (between -10V and 10V) to IN2 of the IO-I board.
8. The TM Deflection signal now will show the IN2 signal. However, the regular SPMLab
software is not aware of the changes, so the default names will still be listed as AL0 - TM
Deflection even though it now really is AL10 - IN2.
Figure B.6e Reconfigured Signal

9. By changing modes or restarting SPMLab, the default configuration will be reloaded and all
changes made with the Open Hardware panel are overwritten.
B.6.2
Changing the Lock-in Output to Amplitude Times Cos (Phase)
In Tapping Mode, by default, the system feeds back on the Amplitude of the cantilever oscillation. This can
be easily changed using the Open Hardware panels.
This example assumes that everything was already setup correctly to do regular Tapping Mode imaging
using the SPMLab default settings. Follow the next steps to change the z-feedback from Amplitude to
Amplitude x cos(phase):
1. It is highly recommended to withdraw the tip from the surface. Changing feedback signals can
easily lead to instable feedback loops and result in tip or sample damage.
2. Open the Open Hardware panel if that is not already open.
3. Open the IOMod+ Control window and select Get Parameters to fill in the current parameters.
Figure B.6f IOMod+ Control Dialog Before Making Modifications

4. In Tapping Mode, by default, the system is set to feedback on Amplitude, which is AL4. See
Table B.5d for details.
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5. The quickest way to change this to Amplitude x cos(phase) is to click the selection box in the top
right of the IOMod+ Control dialog and select Signal x COS (phase) as the AL4 line signal.
Figure B.6g IOMod+ Control Dialog Showing the Options for AL4
6. Verify that the feedback loop still has the correct sign, e.g. z is retracted when the signal is smaller
than the setpoint, and re-engage to the sample. Feedback polarity can be switched in the
Feedback Controls dialog, see Section B.5.1.
B.6.3
Turning on the 2kHz Low Pass Filter for a Measurement Channel
This example shows how to change the default filter settings in front of the ADC measurement channels. The
first step is to find out which ADC carries the signal on which to apply the extra filtering. Use Table B.5d to
determine which analog line and which (default) ADC carry the signal.
For example, to add a filter to the IN1 signal in contact mode:
1. Open the Open Hardware control panels
2. Open the Multiplexer Control dialog
3. Verify that AL9 (=IN1) is connected to ADC5 by selecting ADC channel 5 and pressing the ?
button. This will also list the default filter settings for that channel.
Figure B.6h Default ADC5 Settings in Contract Mode
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4. Now select the filter settings you want to use and hit the arrow button to apply the change.
Figure B.6i ADC5 with Additional 2kHz Low Pass Filter Set
B.6.4
Z-Feedback on a Different or External Channel
This example shows how to change the z-feedback to a different or external signal. If the switch over has to
happen while the tip is engaged on the surface, it is highly recommended to do a dry run with the tip
disengaged from the surface, in order to make sure all feedback settings are correct.
There are a few options on how to switch feedback signal through the Open Hardware panels:
1. Change the feedback ADC# in the Feedback Control window
2. Change the AL line assignment to the feedback ADC using the Multiplexer Control dialog
3. Change the signal on the AL line, for example through the IOMOD+ control dialog.
B.6.5
Switching to Deflection Mode Feedback During Tapping Mode Imaging

1. Open the Open Hardware panels.
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2. Open The Feedback Control dialog and press the Get parameters button.
Figure B.6j Feedback Control Dialog During Tapping Mode

3. Figure B.6j shows that in Tapping Mode the default z-feedback ADC is #0, and that the Inverse
box is unchecked during Tapping Mode.
4. In contact mode the inverse box for this dialog is checked. This discrepancy is due to the
difference in behavior of the deflection versus amplitude signal. The deflection signal increases
with increasing bend of the cantilever (=decreasing tip-sample distance) whereas the amplitude
decreases with decreasing tip-sample distance.
5. From Table B.5d it can be seen that during Tapping Mode the deflection signal is present on AL0
and assigned to ADC5 by default. It is good practice to verify the assignment by opening up the
Multiplexer Control dialog. Select ADC channel 5 and press the ? button.
Figure B.6k Verification of the ADC5 to AL0 Assignment

6. In order to switch the feedback over from Tapping Amplitude to TM Deflection, go back to the
Feedback Control window:
a. Temporarily disable feedback by deselecting the On box.
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b. Check the inverse box.

c. Change the Z-channel ADC to #5.
d. Change the setpoint to an appropriate value for contact mode feedback.
e. Change the PID parameters if needed.
f.
Turn the feedback back on by checking the on box.
b
a, f
c
d
Figure B.6l Feedback Control Dialog with Feedback on ADC5
B.6.6
Nanomanipulation at Contact Force
The example described in 5.5 can be used to do Nanomanipulation at a contact force.

1. First take an image in Tapping Mode or the sample.
2. Now use section 5.5 to switch to contact mode.
3. Drag and drop the previously taken image in the Scanning Control window.
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4. Switch to tip positioning.
5. By moving the tip position around you can manually scratch or press on the surface. The setpoint
will determine the mount of force applied.
6. Reversing the steps of section 5.5 will turn the system back into Tapping Mode.
7. Now you can take another image to see the results of the nanomanipulation.
B.6.7
Second-Harmonic Detection
This example shows how to use the 2nd channel of the lock-in to detect the 2nd harmonic component of the
cantilever oscillation.
First, setup the system for regular Tapping mode, and take an image. By default it will use the first lock-in
channel (channel A) to measure the amplitude of the cantilever oscillation. The second channel (channel B) is
not used, so that channel can be configured to look at the second harmonic of the cantilever oscillation.
Use the following steps to set this up:
1. Open the Open Hardware panels.
2. Open the IOMod+ control dialog.
3. The Tapping drive frequency is displayed in the Channel A - frequency box. However, the number
of digits at which the frequency is displayed is less than the accuracy at which was set using the
Tuning window. So in order to accurately set the 2nd harmonic we must first set the Channel A
frequency to an exact value. For example, the cantilever frequency in Figure B.6m was set to
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328.2845 kHz but in order to know the frequency exactly a value of 328.29 was typed into the
frequency box of Channel A.
Figure B.6m IOMOD+ Control Dialog Set-up for 2nd Harmonic Detection
4. Now, multiply the frequency of Channel A by a factor 2 and use that as the frequency of Channel
B.
5. Switch the Source for Channel B to AL14. This is the fast deflection signal and the same source
as Channel A.
6. In the Analog Lines section of the IOMod+ Control dialog, switch the AL12 line to the
Amplitude of Channel B.
7. Open up a Multimeter window and display AL12.
Figure B.6n Multimeter Displaying the Second Harmonic Signal on AL12

8. Set the Post Gain for Channel B to x2.
9. Increase Input Gain for the Channel until the reading on the Multimeter shows a reasonable
signal, somewhere between 1V and 5V is recommended.
10. The 2nd harmonic signal is now available on AL12 and all that is left is to connect AL12 to one
of the measurement ADCs. For example, the TM Deflection signal can be swapped with AL12.
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For this, open up the Multiplexer Control window and find the ADC that is looking at the TM
Deflection signal. By default this is ADC5 connected to AL0.
Figure B.6o ADC5 connected to AL12 with additional filtering applied

11. Connect ADC5 to AL12 by setting the values as shown in Figure B.6o and clicking the arrow
button
12. Now the SPMLab software TM Deflection signal will show the Amplitude of the 2nd harmonic
of the cantilever oscillation
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Index
A
AFM probe cartridge 50
Align Laser 152
Aligning Laser 96
Alignment Knobs 62
anodic oxidation 188
Area scanning 69
Auto Approach 143
B
Bias Line 189
C
Cable Connections 42
Calibration 193, 199
Calibration References 193
cantilever 4
Cantilever Tuning 115, 176
Channel 130
Channel Selection 100, 184
chip carrier 52
Closed Loop 86, 141
Contact AFM principles 93
Contact Imaging 93
Contact Information iv
D
Deflection Sensor 58, 62
E
EFM Imaging 173
Engage 86, 99, 127, 153
F
feedback 4
Feedback Loop 6, 16
Feedback Signal 15
G
Gains 16
H
high gain 81
I
Indentation 188
Installing a Chip Carrier 49
Integral Gain 16, 103, 143
IV curves 82
L
Laser Indicators 64
Laser on/off 57
Leveling 103
LFM Imaging 105
LFM Signal 107
Lift Mode 79, 161
Line scanning 71
Loading a Sample 47
low gain 81
M
MFM 161, 173
MFM Imaging 161
Mode 161
Motor Speed 66
Motor Stage 97
Motor stage 66
Multimeter 87
N
NanoPlot 88, 187
Number of Data Points 10, 104
O
Oscilloscope 87
Other Controls 91
oxidation mode 188
P
Pan/Zoom 117, 165
phase curve 121
phase detection 161, 173
phase setting 166
Point Spectroscopy 81, 87
Point Spectroscopy window 155
Probe Position 87
Probe positioning 78
Index
Probe Positioning Window 83, 158, 160
Profile 100, 133
Proportional Gain 4, 16, 103, 143
S
Scan angle 11
Scan Parameters 102
Scan Range 102
Scan Rate 7, 11, 102
Scan Size 7, 11
Scanner 2, 44
Scanning conditions 81
Scanning Window 141, 158
Select Frequency 120
Set Frequency 166, 180
Setpoint 5, 10, 14, 15, 104
Signal Tracing 87
Signal Tracing window 83
Single Point Spectroscopy 3
Space requirements 40
Spectroscopy 149
SPM 5
spring tool 50
Stage adjustments 56
Stage Reset 66
Start/Stop Frequency Sweep 165
STM Cartridge 137
STM Image 140, 148
STM Tips 135
System Configuration 60, 114
T
Tapping AFM 113
These 11
Tip Bias Voltage 184
V
Veeco Contact Information iv
W
WinTV32 53, 151
X
X and Y offsets 11
Z
Z piezo linearizer 157
Z Position Bar 14
zoom box 117

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Document Revision History

Signal Access Module and SAM

Ch. 2 - Advanced Imaging 19

Ch. 4 - Installation and Set-Up 39

Ch. 5 - Realtime Controls 69

Ch. 7 - Contact Mode Imaging 93

Ch. 8 - TappingMode Imaging 113

Ch. 9 - STM Imaging 135

Ch. 10 - Single Point Spectroscopy 149

Ch. 11 - MFM Imaging 161

Ch. 12 - EFM Imaging 173

Ch. 13 - Nanolithography 187

Ch. 14 - Calibration 193

Ch. 15 - Thermal Tune 199

Ch. A - Synchronizer 213

Ch. B - Open Hardware 223

Figure 1.1a Innova system components

Innova User Manual - Ch. 1, Introduction

1.3.1 Special Hardware Requirements

1.3.2 Scanner Types

Figure 1.3a Scanner options

1.3.3 Scanning Techniques

Innova User Manual - Ch. 1, Introduction

TappingMode Imaging (patented)- Measures height by tapping the surface with an

STM Imaging - Scanning Tunneling Microscopy. Utilizes tunneling current which

Single Point Spectroscopy - Provides single point measurements for a detailed

MFM Imaging - Magnetic Force Microscopy. Measures magnetic force gradient

EFM Imaging - Electric Force Microscopy. Measures electric force gradient

Nanolithography - May use a probe tip to scribe or indent a sample surface by

Innova User Manual - Ch. 1, Introduction

Innova User Manual - Ch. 1, Introduction

1.4.2 SPM Overview

Figure 1.4a Contact Mode Detection Method

Innova User Manual - Ch. 1, Introduction

1.4.3 The Feedback Loop

Innova User Manual - Ch. 1, Introduction

Innova User Manual - Ch. 1, Introduction

Gain & Setpoint

How Z Feedback Works

Innova User Manual - Ch. 1, Introduction

Figure 1.4c The signal trace on the oscilloscope display.

Figure 1.4d Feedback optimized

Innova User Manual - Ch. 1, Introduction

Number of Data Points

An efficient way to increase the resolution of an image is to zoom in on a

Innova User Manual - Ch. 1, Introduction

1.4.5 Main menu items

Taking Images in Low Gain Mode

Innova User Manual - Ch. 1, Introduction

Using Low Gain Mode for Lateral Resolution

the effective tip radius

the x-y detector resolution (if Closed Loop is enabled)

the scan DAC resolution

Innova User Manual - Ch. 1, Introduction

Closed Loop is not available with small area scanners.

Innova User Manual - Ch. 1, Introduction

Graphically represents the scanner z position within the total

Graphically represents the probe signal and setpoint values.

Specifies the reference signal for the z feedback loop. In

Specifies the gains (multipliers) applied to the feedback signal