Documenti di Didattica
Documenti di Professioni
Documenti di Cultura
Outlines
Introduction to Nanotechnology
Comparison of Different Nanolithography Techniques
Atomic Force Microscopy (AFM)
Scanning Probe Lithography (SPL) Techniques
Dip-Pen Nanolithography (DPN)
Fundamental Kinds of DPN
Process Steps to Work on DPN system
Effect of Different Process Parameters on DPN
Advance Features of DPN
Applications of DPN
Conclusions
Pankaj B. Agarwal
Introduction to Nanotechnology
Nanoscale Devices:
Pankaj B. Agarwal
Moores Law
The number of transistors per square inch on integrated circuits had doubled
every year. Moore predicted that this trend would continue for the foreseeable
future.
In subsequent years, the pace slowed down a bit, but data density has doubled
approximately every 18 months, and this is the current definition of Moore's Law.
Pankaj B. Agarwal
Material
Flexibility
Resolution
Accuracy
Speed
Equipment
Cost
Photolithography
Parallel
No
100 nm
High
Very Fast
$10M++
E-Beam
Lithography
Serial
No
15 nm
High
Slow
$1M-$20M
Micro-contact
Printing
Parallel
Yes*
150 nm
Low
Fast
$600k
Nanoimprint
Lithography
Parallel
No
20 nm
Low
Fast
$700k
DPN
Serial/
Parallel
YES
15 nm
High
High With
Parallel
Pens
$300k
Pankaj B. Agarwal
Pankaj B. Agarwal
Pankaj B. Agarwal
For
nano-grafting,
SAM
molecules
assemble on a gold surface from solution
onto areas shaved by force with a
scanning atomic force microscope tip.
Pankaj B. Agarwal
DPN
Pankaj B. Agarwal
Pankaj B. Agarwal
Direct Write:
Write the molecule of
interest directly onto the
surface as the ink.
Templating:
Write out an ink pattern in order to create,
or attach something else.
Pankaj B. Agarwal
Charge-based Recognition
Pankaj B. Agarwal
Ink Calibration
Pankaj B. Agarwal
Pankaj B. Agarwal
Humidity Range:
Minimum: 5% Rh,
Maximum: 75% Rh (below dew point)
Temperature Range:
Minimum: 2C less than RT
Maximum: up to 10C greater than RT
Pankaj B. Agarwal
Pankaj B. Agarwal
InkCAD Window
Pankaj B. Agarwal
InkCAD Window
Pankaj B. Agarwal
Pankaj B. Agarwal
Pankaj B. Agarwal
Ink Calibration
Pankaj B. Agarwal
Line Width: 60 nm
Ink Calibration
Pankaj B. Agarwal
Pankaj B. Agarwal
Pankaj B. Agarwal
Substrate-Ink Combination
Different ink-substrate combinations given in the following table are
reported by various research groups.
Ink
Substrate
Notes
Au
Ferrocenylthiols
Au
Silazanes
SiOx, GaAs
patterning on oxides
Proteins
Au, SiOx
Conjugated polymers
SiOx
DNA
Au, SiOx
Fluorescent dyes
SiOx
luminescent patterns
Sols
SiOx
Solid-state features
Metal salts
Si, Ge
Colloidal particles
SiOx
Alkynes
Si
Alkoxysilanes
SiOx
ROMP materials
SiOx
Pankaj B. Agarwal
MHA (C16H32O2S)
Hydrogen
Carbon
Sulphur
Oxygen
Pankaj B. Agarwal
ODT (C18H38S)
Hydrogen
Carbon
Sulphur
Pankaj B. Agarwal
Substrate Roughness
LFM images of MHA lines written on: (a) mica-peeled gold, yielding 14nm
minimum line width (b) evaporated gold, yielding 26nm minimum line width and
(c) sputtered gold, yielding 69nm minimum line width.
Pankaj B. Agarwal
Dwell Time/Speed
Pankaj B. Agarwal
Humidity Effects
Temperature Effects
The temperature dependencies of the growth rate of (A) ODT and (B) MHA
SAMs constructed from LFM images of dots, which were generated at nine
different temperatures in the 22-33C temperature range (Dwell Times: 2, 4,
and 8 Seconds)
Tip-Radius
Tips with larger radii will lead to larger minimum line widths. For a
blunter tip, the minimum tipmeniscussubstrate interaction area is
larger, and thus it follows that minimum line widths will be higher.
LFM images of MHA lines written on peeled gold with: (a) sharpened
tip, yielding 14nm minimum line width, (b) unsharpened tip, yielding
34nm minimum line width, and (c) super-unsharpened tip, yielding
57nm minimum line width
Courtesy: J. haaheim et. al., Ultramicroscopy 103, 117 (2005)
Pankaj B. Agarwal
Multiple Pens
Bias Option (Nano-Oxidation)
Universal Inkwells
2D-Nano Print Array
Pankaj B. Agarwal
Types of Pens
Pens
Passive
Single Pens
Active
Pankaj B. Agarwal
Passive Pens
Pankaj B. Agarwal
Active Pens
Those are similar the multiple pen array only difference is that even
you can select/actuate particular pen at a time.
HOW ?
Pankaj B. Agarwal
Nano-Oxidation:
Basic Concept:
In this process the bias is applied
between tip and substrate. The
water molecules (within the
meniscus) between tip and
surface are ionized and reacts
with surface to make its oxide
form.
Applications:
Useful to oxidize the metallic and
semiconductor surface at nanolevel.
In above experiment the 11 mm silicon oxide line is fabricated on silicon surface by
applying a sequence of 23X104 pulses of 20 V for 1 ms. The achieved oxide line width is ~
13 nm.
Courtesy: M. Calleja et. al., APL 76, 3427 (2000)
Pankaj B. Agarwal
Universal
Inkwells
Pankaj B. Agarwal
2D Nano-Print array
Pankaj B. Agarwal
Pankaj B. Agarwal
Pankaj B. Agarwal
Fabrication of
NIL Master Stamp
HIV detection
Applications
Cancer Diagnosis
DNA Writing
Fabrication of
Tunnel Junction
Pankaj B. Agarwal
1. Write regions of
octadecanethiol (ODT)
on Au thin film.
Si (100)
10 nm Au
5 nm Ti
Native SiO2
Si (100)
Si(111)
Si(100)
MHA
MHA
10-40 nm
Pankaj B. Agarwal
Si (100)
10 nm Au
5 nm Ti
Native SiO2
Si(111)
Si (100)
Si(100)
Si
Si(111)
Si(100)
Pankaj B. Agarwal
Pankaj B. Agarwal
Cancer Diagnosis
The tumor markers are used for detection and diagnosis of
cancer.
What are the Tumor Markers ?
Found in the blood, other body fluids, or tissues
High level of tumor marker may mean that a certain type of
cancer is in the body.
Examples of tumor markers include
CA 125 (ovarian cancer),
CA 15-3 (breast cancer),
CEA (ovarian, lung, breast, pancreas, and gastrointestinal
tract cancers), and
PSA (prostate cancer).
Pankaj B. Agarwal
Cancer Diagnosis
Immobilization of monoclonal
antibodies
oligonucleotides
patterned
on
Pankaj B. Agarwal
HIV Detection
HIV is an increasingly serious disease that requires
more research and better diagnostic solutions.
Pankaj B. Agarwal
Pankaj B. Agarwal
Pankaj B. Agarwal
Conclusions
DPN has many advantages over other nanolitholgraphy techniques
e.g.
High resolution (minimum line width reported: 14 nm)
Material flexibility
Fast writing process with parallel pens
Low Cost Process
Extensive chemistry is involved in DPN: So there is a lot of scope for
chemistry researchers.
Both direct writing and templating are possible.
In the era of inter-disciplinary, it makes bridge among different areas
of science like chemistry, biology, physics, material science.
DPN has enormous applications, which are not limited to only single
area but in various fields e.g. electronics, nanobiotechnology, biosensors
etc.
Pankaj B. Agarwal
Pankaj B. Agarwal
Pankaj B. Agarwal
Pankaj B. Agarwal