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LEYBOLD VACUUM
GA 01.203/10.02
TRIVAC B
Rotary Vane Vacuum Pump
D 40 B, D 65 B
Cat. No.
112 86/96
113 45/46/47/55/56/57
Operating Instructions
Contents
Contents
Page
IMPORTANT SAFETY CONSIDERATIONS . .4
1
1.1
1.2
1.3
1.4
1.5
1.6
Description . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Supplied equipment . . . . . . . . . . . . . . . . . . . . . . 9
Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Spare parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Transportation . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Technical data . . . . . . . . . . . . . . . . . . . . . . . . . 10
2
2.1
2.2
2.3
2.4
2.5
2.6
Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Connection to the system . . . . . . . . . . . . . . . . 13
Electrical connection . . . . . . . . . . . . . . . . . . . . 14
Start-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Switching off/shutdown . . . . . . . . . . . . . . . . . . 17
3
3.1
3.2
3.3
3.4
3.5
3.6
3.7
3.8
3.9
3.10
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . 18
Checking the oil level . . . . . . . . . . . . . . . . . . . . 18
Oil change . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Cleaning the dirt trap . . . . . . . . . . . . . . . . . . . . 19
Removing and fitting the internal demister . . . . 20
Disassembly and reassembly of the
electric motor . . . . . . . . . . . . . . . . . . . . . . . . . 21
Replacing the shaft seal . . . . . . . . . . . . . . . . . 22
Removing and remounting the pump module . . 23
Leybold service . . . . . . . . . . . . . . . . . . . . . . . . 25
Storing the pump . . . . . . . . . . . . . . . . . . . . . . . 25
Maintenance plan . . . . . . . . . . . . . . . . . . . . . . 26
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . 27
EEC Declaration of Conformity . . . . . . . . .28
EEC Manufacturers Declaration . . . . . . . .29
GA 01.203/10.02 - 07/02
Note
We strongly recommend that you read
these Operating Instructions with care so as
to ensure optimum operation of the pump
right from the start.
Leybold-Service
If a pump is returned to LEYBOLD, indicate whether the
pump is free of substances damaging to health or
whether it is contaminated.
If it is contaminated also indicate the nature of the
hazard. LEYBOLD must return any pumps without a
Declaration of Contamination to the senders address.
Caution
Figures
The references to diagrams, e.g. (1/2) consist of the Fig.
No. and the Item No. in that order.
GA 01.203/10.02 - 07/02
Warning Failure to observe the following precautions could result in serious personal injury:
Before beginning with any maintenance or service work on the TRIVAC B, disconnect the pump from
all power supplies.
Do not operate the pump with any of the covers removed. Serious injury may result.
If exhaust gases must be collected or contained, do not allow the exhaust line to become pressurised.
Make sure that the gas flow from the exhaust port is not blocked or restricted in any way.
The standard version of the TRIVAC B is not suited for operation in explosion hazard areas. Contact us
before planning to use the pump under such circumstances.
Before starting up for the first time, the motor circuit (3 phase) must be equipped with a suitable
protective motor switch. Please take note of the information in these Operating Instructions or on the
electric motor (wiring diagram).
The TRIVAC B is not suited for pumping of:
- combustible and explosive gases or vapours
- radioactive and toxic substances
- pyrophorous substances.
Avoid exposing any part of the human body to the vacuum.
Never operate the TRIVAC B without a connected intake line or blank flange.
The location at which the TRIVAC B (including its accessories) is operated should be such that angles
over 10 from the vertical are avoided.
The location of the TRIVAC B should be such that all controls are easily accessible.
Under certain ambient conditions the TRIVAC B may attain a temperature of over 80 C
(176 F). There then exists the danger of receiving burns.
Note the symbols on the pump pointing to the hazards, and in the case of a hot pump wear the required
protective clothing.
Before pumping oxygen (or other highly reactive gases) at concentrations exceeding the concentration
in the atmosphere (> 21 % for oxygen) it will be necessary to use a special pump. Such a pump will
have to be modified and de-greased, and an inert special lubricant (like PFPE) must be used.
Before operating the TRIVAC B with atmospheric gas ballast (optional) check first compatibility with the
pumped media so as to avoid hazardous conditions during operation right from the start.
Before commissioning the TRIVAC B, make sure that the media which are to be pumped are compatible
with each other so as to avoid hazardous situations.
All relevant safety standards and regulations must be observed.
It is recommended to always operate the TRIVAC B with a suitable exhaust line which is properly
connected. It must slope down and away from the pump.
When moving the TRIVAC B always use the allowed means.
A lifting eye is provided as standard on the pump.
4
GA 01.203/10.02 - 07/02
Caution
Failure to observe the following precautions could result in damage to the pump:
Do not allow the ingestion of small objects (screws, nuts, washers, pieces of wire, etc.)
through the inlet port. Always use the screen which is supplied with every pump.
Do not use the pump for applications that produce abrasive or adhesive powders or
condensable vapours that can leave adhesive or high viscosity deposits. Please contact Leybold Sales
or Service to select a suitable separator. Also pease contact Leybold Sales or Service when planning
to pump vapours other than water vapour.
This pump is suited for pumping water vapour within the specified water vapour tolerance limits.
Avoid vapours that can condense into liquids upon compression inside the pump, if these substances
exceed the vapour tolerance of the pump (> 25 mbar for water vapour).
Before pumping vapours, the TRIVAC B should have attained its operating temperature, and the gas
ballast should be set to position I (position 0 = closed, position I = max. water vapour tolerance, 25
mbar).
The pump will have attained its operating temperature about 30 minutes after starting the pump. During
this time the pump should be separated from the process, by a valve in the intake line, for example.
In the case of wet processes we recommend the installation of liquid separators upstream and
downstream of the pump as well as the use of the gas ballast.
The exhaust line should be laid so that it slopes down and away from the pump so as to prevent
condensate from backstreaming into the pump. For this preferably use the flange on the side of the
motor.
The entry of particles and fluids must be avoided under all circumstances.
Reactive or aggressive substances in the pump chamber may impair the operating oil or modify it.
In addition, such substances may be incompatible with the materials of the pump (Viton, grey cast iron,
aluminium, steel, resins, glass etc.).
Corrosion, deposits and cracking of oil within the pump are not allowed.
Note
This information will help the operator to obtain the best performance from the equipment:
Normal amounts of humidity within the range of the pumps vapour tolerance will not significantly affect
pump performance when the gas ballast is active. Preferably use the exhaust flange located on the side
of the motor.
Caution:
In the case of custom pumps (with a Cat. No. deviating from the Cat No. stated in the
EC Declaration of Conformity) please note the information provided on a separate sheet.
GA 01.203/10.02 - 07/02
Description
Key to Fig. 1
1 Oil filter OF 40-65
2 Roots pump adapter
3 Exhaust filter AF 40-65
1 Description
TRIVAC B pumps are oil-sealed rotary vane pumps. The
TRIVAC D 40 B and D 65 B are dual-stage pumps. The
number in the type designation (40 or 65) indicates the
pumping speed in m3 h-1.
TRIVAC B pumps can pump gases and vapours and
evacuate vessels or vacuum systems in the fine vacuum
range.
Warning
GA 01.203/10.02 - 07/02
Description
Key to Fig. 2
1 Intake port
2 Dirt trap
3 Anti-suckback valve
4 Intake channel
5 Vanes
6 Pump chamber
7 Rotor
8 Cover plate, connection for inert gas ballast
9 Exhaust channel
10 Exhaust valve
11 Internal demister
12 Spring buckles
13 Cover plate, connection for oil filter
Fig. 2 Sectional drawing of the TRIVAC B
1.1 Function
The rotor (2/7), mounted eccentrically in the pump
housing (2/6), has two radially sliding vanes (2/5) which
divide the pump chamber into several compartments.
The volume of each compartment changes periodically
with the rotation of the rotor.
As a result, gas is sucked in at the intake port (2/1). The
gas passes through the dirt trap sieve (2/2), flows past
the open anti-suckback valve (2/3) and then enters the
pump chamber. In the pump chamber, the gas is passed
on and compressed, after the inlet aperture is closed by
the vane.
The oil injected into the pump chamber is used for
sealing and lubricating. The slap noise of the oil in the
pump which usually occurs when attaining the ultimate
pressure is prevented by admitting a very small amount
of air into the pump chamber.
The compressed gas in the pump chamber is ejected
through the exhaust valve (2/10). The oil entrained in the
gas is coarsely trapped in the internal demister (2/11);
there the oil is also freed of mechanical impurities. The
gas leaves the TRIVAC B through the exhaust port.
GA 01.203/10.02 - 07/02
During compression, a controlled amount of air the socalled gas ballast can be allowed to enter the pump
chamber by opening the gas ballast valve (position I).
The gas ballast stops condensation of vapours in the
pump chamber up to the limit of the water vapour
tolerance as specified in the technical data for the pump.
The gas ballast valve is opened (position I) and closed
(position 0) by turning the gas ballast knob (7/5) on the
front.
To enable the TRIVAC B to be used at intake pressures
as high as 1,000 mbar, a special lubricating system was
developed featuring force-lubrication of the sliding
bearings.
An oil pump (3/6) pumps the oil from the oil reservoir
(3/5) into a pressure-lubrication system which supplies
oil to all bearing points (3/2). From there the oil enters the
pump chamber area (3/4) of the vacuum pump.
The oil pump is fitted in the front end plate on the
coupling side of the pump module. The oil suction line is
placed low, resulting in a large usable oil reservoir.
Description
Key to Fig. 3
1 Accessories
2 Bearings
3 Non-return valve
4 Pump chamber of the TRIVAC
5 Oil reservoir
6 Oil pump
Key to Fig. 4
1 Oil reservoir
2 Spring
3 Control piston
4 Anti-suckback piston
5 Valve seat
6 Valve disk
7 Gas inlet
GA 01.203/10.02 - 07/02
Description
Oil N 62
(order from
LH Cologne, Germany)
1l
5l
20 l
1 centering ring,
Oil HE-200
(order from
LHVP, Export Pa.,
USA)
1 qt
12 qt case
1 gal
5 gal
98
98
98
98
198
198
198
198
006
049
007
008
1.3 Accessories
177 01
177 02
177 03
D 40 B . . . . . . 200 10 933
D 65 B . . . . . . 200 10 944
. . . . . . . . . . . . . . . . . . 390 26 014*)
1.5 Transportation
Caution Pumps which are filled with operating
GA 01.203/10.02 - 07/02
Description
D 65 B
-1
m h
46
75
Pumping speed*
m3 h-1
40
65
mbar
< 1 10-4
< 1 10-4
mbar
< 5 10-3
< 5 10-3
mbar
40
40
DN
40 KF
40 KF
1,7/2,6
2,0/3,3
Type of protection
IP
54
54
Connection ports
10
D 65 B
D 40 B
Saugvermgen
m3 . h-1
10
10
10
-1
-5
10
-4
10
-3
10
-2
10
10
-1
10
10
mbar
10
Druck
Fig. 5 Pumping speed characteristics of the TRIVAC D 40 B and TRIVAC D 65 B, 50 Hz operation, SI units
10
GA 01.203/10.02 - 07/02
Description
D 65 B
l
G Cat.-No.
l
G
(mm) (kg)
(mm) (kg)
Motor-connection voltage,
frequency
Motor
power
Rated
current
Speed
112 86
670
65
3~, 230-240/380-420 V 5 %, 50 Hz
240-265/415-460 V 5 %, 60 Hz
1500 W
6,9/4 A
6,4/3,7 A
1400
1700
53 dB(A)
57 dB(A)
380 66 011
112 96
748
80
3~, 230-240/380-420 V 5 %, 50 Hz
240-265/415-460 V 5 %, 60 Hz
2200 W
9,7/5,6 A
8,7/5 A
1320
1640
53 dB(A)
57 dB(A)
380 66 012
73
113 55
790
84
3~, 230-380 V 5 %, 50 Hz
2500 W
10,2/5,9 A
1400
56 dB(A)
200 10 411
471)
670
69
113 57
748
80
2200 W
50
113 56
4881) 61
without motor
1380
1660
-
55 dB(A)
59 dB(A)
-
200 10 412
4101)
10,5/6 A
9,5/5,5 A
-
113
113 46
1)
DN
b2
h1
Type
DN
a
mm
in.
mm (in.)
mm (in.)
mm (in.)
mm (in.)
mm (in.)
h2
o
b1
l
b
b1
b2
135
264 234 206 166
5.31 10.4 9.21 8.11 6.54
135 (5.31)
135 (5.31)
213 (8.39)
213 (8.39)
213 (8.39)
h
355
14
h1
h2
336 308
13.2 12.1
l*
670
382
26.4
15
712 (28)
670 (26.4)
750 (29.5)
790 (31.1)
750 (29.5)
191 190
7.52 7.48
dimensions in mm
Fig. 6 Dimensional drawing for the TRIVAC rotary vane pumps (Dimensions a, l, b to b2 and h1 are approximate)
GA 01.203/10.02 - 07/02
11
Operation
1
2
3
Key to Fig. 7
1 Eye for moving the pump
2 Intake port
3 Exhaust port
4 Oil-level glass
5 Gas ballast knob
6 Threaded connection M 16 x 1.5
(for inert gas ballast)
7 Adapter
8 Cover plate
9 Cover plate; connection for oil filter
9
4
8
5
Fig. 7 Connections and controls
2 Operation
2.1 Installation
Warning
Caution
Caution
12
GA 01.203/10.02 - 07/02
Operation
Caution
Caution
Caution
Warning
GA 01.203/10.02 - 07/02
13
Operation
Delta connection
Star connection
Caution
14
GA 01.203/10.02 - 07/02
Operation
2.4 Start-up
Caution
Caution
GA 01.203/10.02 - 07/02
15
Operation
2.5 Operation
TRIVAC B pumps can pump condensable gases and
vapours, provided that the gas ballast valve (7/5) is open
and the pump has attained its operating temperature.
Warning
Caution
16
GA 01.203/10.02 - 07/02
Operation
Caution
Warning
Caution
GA 01.203/10.02 - 07/02
17
Maintenance
3 Maintenance
Warning
Caution
If the pump has pumped harmful
substances, ascertain the nature of hazard
and take adequate safety measures.
Observe all safety regulations.
If you send a pump to LEYBOLD for repair please
observe the information provided in Section 3.8.
Caution
Caution
c) Viscosity check
If the viscosity of N 62 at 25 C exceeds a level of
240 mPas (20% higher than the viscosity of fresh oil) an
oil change is recommended.
Caution
18
When wanting to check the oil, switch off the pump first
and drain out from the warm pump the required amount
of oil through the oil drain (9/4) into a beaker or similar.
Caution
GA 01.203/10.02 - 07/02
Maintenance
3
4
Key to Fig. 9
1 Oil-fill plug
2 Oil-level mark maximum
3 Oil-level mark minimum
4 Oil-drain plug
Fig. 9 Oil change
Remove the oil-drain plug (9/4) and let the used oil drain
into a suitable container. When the flow of oil slows
down, screw the oil-drain plug back in, briefly switch on
the pump (max. 10 s) and then switch it off again.
Remove the oil-drain plug once more and drain out the
remaining oil.
Screw the oil-drain plug back in (check the gasket and
reinstall a new one if necessary).
Remove the oil-fill plug (9/1) and fill in with fresh oil.
Screw the oil-fill plug (9/1) back in.
Caution
Required tool:
Allen key size 8.
Caution
Warning
For this purpose, remove the dirt trap (2/2) from the
intake port and rinse it in a suitable vessel with solvent.
Then thoroughly dry it with compressed air.
Caution
GA 01.203/10.02 - 07/02
19
Maintenance
Key to Fig. 10
1 Screw with small washer, spring,
large washer and O-ring
2 Frame for demister
3 Demister
4 Oil case
5 Gasket
6 Fixing screws
Required tools:
Allen keys size 6 and 8
Lift off the frame (10/2) and remove the internal demister
(10/3).
20
GA 01.203/10.02 - 07/02
Maintenance
Key to Fig. 11
1 Gasket
2 Coupling with fan blades
3 Hex. socket screws
4 Intermediate flange
5 Hex. socket screws
6 Electric motor
6
5
4
3
2
1
Warning
Loosen the threaded pin and pull the coupling with the
blade wheel (11/2) off the motor shaft.
Unscrew the hex. socket screws (11/3).
Remove the electric motor (11/6).
Clean all parts and check that they are in perfect
condition; if not, replace them with new parts.
Reassemble in the reverse order.
Caution
Required tools:
Screwdriver 1.0 x 5.5 mm (for junction box), open-jaw
wrenches size 7 and size 19 (for junction box), Allan keys
size 3 and size 6.
Possibly a puller for the coupling.
Disconnect the mains connection.
GA 01.203/10.02 - 07/02
21
Maintenance
Key
1
2
3
4
5
6
7
8
9
10
11
12
to Fig. 12
Coupling element
Cylinder head screw
Spring washer
Coupling (one half)
Key
Compression ring
O-ring
Shaft seal
Screws
Centering disk
O-ring
Bushing
12
11
10
9
8
7
6
5
4
3
2
Required tools:
Unscrew the hex. socket screws (12/9) and pull out the
centering disc (12/10).
22
If the centering disc does not come loose, use the forcing
thread into which screws (12/9) can be screwed in.
Remove the O-ring (12/11).
Force the shaft seal (12/8) out of the centering disk.
Pull off the bushing (12/12) from the shaft.
We recommend the use of a new shaft seal and bushing
for reassembly.
Before fitting the new shaft seal, moisten it slightly with a
little vacuum pump oil.
Using a suitable plastic or aluminium cylinder (shaft seal
driver) and a plastic hammer, force the shaft seal (12/8)
carefully and without bending it into the centering disk
(for position of shaft seal, see Fig. 12).
GA 01.203/10.02 - 07/02
Maintenance
Required tools:
If you do not have a shaft seal driver, place the shaft seal
on the centering disk and carefully
force it in with light blows of the plastic hammer.
Drain the oil and remove the oil case (see Section 3.4).
Pull the entire pump module (13/2) forward off the tie
rods (13/5).
Caution
Caution
GA 01.203/10.02 - 07/02
23
Maintenance
Key to Fig. 13
1 Hex. nuts
2 Pump module
4 Gasket
5 Coupling element
6 Tie rods
24
GA 01.203/10.02 - 07/02
Maintenance
GA 01.203/10.02 - 07/02
25
Maintenance
Check the oil level, change the oil Oil: N 62 or special and
if required.
alternative oils, see Section 1.3
Measurement/test quantity
Interval
Remarks
Operating/auxiliary
VE VP t 6m a n-a Refer also to the Operating Instructions
materials
Chapter: individual components.
x
chemically
mechanically
Clean the dirt trap in the intake Suitable cleaning agent and
port, change it as required.
compressed air.
and
Oil change:
First oil change after 100 operating hours.
Pump switched off and cold.
Change the oil when the pump is cold in order to
avoid releasing absorbed gases.
Clean the oil level glass with a cleaning agent
and blow it out with compressed air under a suction
hood.
Cleaning agent according to national / international
specifications.
26
Check the fan of the pump and the Brush and industrial vacuum
motor as well as the cooling fins on cleaner.
the motor for deposits and clean
as required.
Troubleshooting
4 Troubleshooting
Fault
Possible cause
Remedy
Repair*
Wiring is malfunctioning.
Motor protection switch incorrectly set
(3-phase motors only).
2.3
3.5
3.5
2.5.3/3.2
3.2
Service
3.3
Service
2.1
2.1/2.5.3
3.2
3.2
Service
Service
3.7
Service
Service
Motor is malfunctioning.
Oil temperature is below 12 C.
Oil is too viscous.
Exhaust filter or exhaust line is clogged.
Pump is seized up (sign: pump is jammed).
Pump does not
reach ultimate
pressure.
Pumping speed is
too low.
External leak1).
Anti-suckback valve is malfunctioning.
Exhaust valve is malfunctioning.
Oil is unsuitable.
Intake line is dirty.
Pump is too small.
Service
Service
Service
3.2
-
2.2
3.2
Oil is turbid.
Condensation.
Pump is excessively Oil level is much too low (oil is no longer visible).
noisy.
Silencing nozzle is clogged.
Intake pressure is too high.
Internal demister is clogged.
Coupling element is worn.
Vanes or bearings are damaged.
Degas the oil or change the oil and clean the pump. Precaution: open the gas ballast valve or insert a condensate trap.
2.5.2/3.2
Add oil.
Clean or replace the silencing nozzle.
Lower the intake pressure.
Clean or replace demister.
Install new coupling element.
Repair pump.
3.2
Service
3.4
3.5
Service
* Repair information: refer to the Section in the Operation Instruction stated here.
1) Bubble test: the warm pump with degassed oil is running without gas ballast and the intake blanked off. The exhaust line is led in to a vessel with water. If an evenly
spaced line of bubbles appears, then the pump has an external leak.
Key
VE
VP
t
6m
a
n-a
to
=
=
=
=
=
=
GA 01.203/10.02 - 07/02
We recommend that you service the pump every two years covering
the following:
Cleaning
Functional check.
This check should be run by the Leybold service.
27
Types: TRIVAC B;
Cat. Nos.:
D 40 B
D 65 B
11.91
06.95
07.96
11.98
28
GA 01.203/10.02 - 07/02
11.91
06.95
07.96
11.98
Types: TRIVAC B;
D 40 B without motor
D 65 B without motor
Cat. Nos.:
113 46
113 56
April 1983
GA 01.203/10.02 - 07/02
29
30
GA 01.203/10.02 - 07/02
GA 01.203/10.02 - 07/02
31
Belgien/Niederlande/
Luxemburg:
LEYBOLD N.V.
Leuvensesteenweg 542, 9A
B-1930 Zaventem
Phone: +32-2-71 10 083
Fax:
+32-2-72 08 338
LEYBOLD B.V.
Computerweg 7
NL-3606 AV Maarssen
Phone: +31-346-583 999
Fax:
+31-346-583 990
Italien:
LEYBOLD S.P.A.
Via Trasimeno 8
I-20128 Milano
Phone: +39-02-27 22 31
Fax:
+39-02-27 20 96 41
Spanien:
LEYBOLD S.A.
C/. Matar, 27
Polgono Industrial Les
Grases
E-08980 Sant Feliu de
Llobregat (Barcelona)
Phone: +34-93-666 46 16
Fax:
+34-93-666 43 70
Schweden:
LEYBOLD AB
Box 9084
40092 Gteborg
Phone: +46-31-68 84 70
Fax:
+46-31-68 39 39
Schweiz /
Liechtenstein:
LEYBOLD AG
Leutschenbachstrae 55
CH-8050 Zrich
Phone: +41-1-308 40 50
Fax:
+41-1-302 43 73
Volksrepublik China:
LEYBOLD (Tianjin)
VACUUM EQUIPMENT
MANUFACTURING Co.,
Ltd.
Beichen Economic
Development Area (BEDA)
Tianjin 300400, China
Phone: +86-22 26 972 016
Fax:
+86-22 26 972 017
e-mail:
leybold@public.tpt.tj.cn
Japan:
LEYBOLD Co., Ltd.
Head Office
Tobu A.K. Bldg. 4th Floor
23-3, Shin-Yokohama 3chome
Kohoku-ku,Yokohama-shi
Kanagawa ken 222-0033
Phone: +81-45-471 33 30
Fax:
+81-45-471 33 23
Singapore:
BALZERS and LEYBOLD
Singapore Pte. Ltd.
1 Tuas South Street 3
Singapore 638043
Phone: +65-865 18 65
Fax:
+65-862 22 95
Taiwan:
LEYBOLD Taiwan, Ltd.
2 F, No 416-1, Sec. 3
Chung-Hsin Rd.
Chu Tung, Hsinchu.
Taiwan R.O.C: 310
Phone: +886-3-583 39 88
Fax:
+886-3-583 39 99
Korea:
LEYBOLD Korea Ltd.
4th Fl. Shinan Bldg., 173-1
Jangchoog-dong 2ga,
Choong-ku
Seoul 100-392, Korea
C.P.O. Box 709
Phone: +82-2-227 11 567
Fax:
+82-2-227 11 568
07.02
Frankreich:
LEYBOLD S.A.
7, Avenue du Quebec
Z.A. de Courtaboeuf, B.P. 42
F-91942 Courtaboeuf Cedex
Phone: +33-1-69 82 48 00
Fax:
+33-1-69 07 57 38
e-mail:
Compuserve:100635,43
Gro-Britannien/Irland:
LEYBOLD LTD.
Waterside Way,
Plough Lane
GB-London SW 17 OHB
Phone: +44-208-97170 00
Fax:
+44-208-97170 01
bicom/OF
Canada:
LEYBOLD Canada Inc.
7050 Telford Way, Unit 5
Mississauga, Ontario
Canada L5S 1V7
Phone: +1-905-672 77 04
Fax:
+1-905-672 22 49
e-mail:
reachus@leybold.on.ca
Deutschland:
LEYBOLD VAKUUM
GmbH
Bonner Strae 498
D-50968 Kln
Phone: +49-221-347-1234
Fax:
+49-221-347-12 45
Internet: www.leyboldvac.de
e-mail:
sales@leyboldvakuum.com
ASIA
GA 01.203/10.02 - 07/02
USA:
LEYBOLD VACUUM USA
5700 Mellon Road
Export, PA 15632
Phone: +1-724-327 57 00
Fax:
+1-724-733 12 17
Internet: http://www.
leyboldvacuum.com
EUROPE
LISS_04929_2002
AMERICA