1.2: PVD and CVD Technologies For Surface Processing of Engineering Materials

1st Workshop on Foresight of surface properties formation leading technologies of engineering materials and biomaterials in Gda sk, Poland
14th-16th June 2009
1st Panel on Surface properties formation technologies of engineering materials and biomaterials
1.2: PVD and CVD technologies for surface processing of engineering materials
J. Mikua, K. Goombek, D. Pakua, W. Kwa ny Silesian University of Technology
1st Workshop on Foresight of surface properties formation leading technologies

of engineering materials and biomaterials in Gda sk, Poland 14th-16th June 2009
1st Panel on Surface properties formation technologies of

engineering materials and biomaterials
1.2: PVD and CVD technologies for surface

processing of engineering materials
K. Goombek, D. Pakua, J. Mikua, W. Kwa ny
Silesian University of Technology
INNOVATIVE ECONOMY
NATIONAL COHESION STRATEGY
2009
2012
EUROPEAN UNION
EUROPEAN REGIONAL
DEVELOPMENT FUND
1st Workshop on Foresight of surface properties formation leading technologies of engineering materials and biomaterials in Gda sk, Poland 14th-16th June 2009
INNOVATIVE ECONOMY
2009
2012
EUROPEAN UNION
EUROPEAN REGIONAL
DEVELOPMENT FUND
INNOVATIVE ECONOMY
2009
2012
EUROPEAN UNION
EUROPEAN REGIONAL
DEVELOPMENT FUND
Technologies
PVD
CVD
Physical Vapour
Deposition
Chemical Vapour
Deposition
INNOVATIVE ECONOMY
2009
PACVD
Plasma Activated
Chemical Vapour
Deposition
2012
EUROPEAN UNION
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DEVELOPMENT FUND
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PVD
CVD
Deposition
Cycle Time
Properties
T = 800 - 1000C
T = 70 - 500C
T < 200C
8 24 hours
3-4 hours for cutting

tools
<3 hours
excellent adherence
uniform coating
thickness
typical coating
thickness 3 -5 m
amorphous,
homogenous,
extremely smooth
high hardness
coating thickness 2 - 3
m
excellent adherence
coating thickness up
to 20 m
Applications
PaCVD
cutting tools, forming

tools
cutting tools, forming

tools, components,
medical devices,
decorative
components , forming
tools, medical
devices, decorative
INNOVATIVE ECONOMY
2009
2012
EUROPEAN UNION
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Photovoltaics
2008
Fuel cells
2013
Batteries
Nuclear
Concentrating solar power
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1.2: PVD and CVD Technologies For Surface Processing of Engineering Materials

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1st Workshop on Foresight of surface properties formation leading technologies of engineering materials and biomaterials in Gda sk, Poland

14th-16th June 2009

1st Workshop on Foresight of surface properties formation leading technologies

1st Panel on Surface properties formation technologies of

1.2: PVD and CVD technologies for surface

3-4 hours for cutting

cutting tools, forming

cutting tools, forming

!>0;9"& !>0;9 & > 09A

NATIONAL COHESION STRATEGY

> 0<A5& > 0<A"& !>0<9)

Concentrating solar power

NATIONAL COHESION STRATEGY

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