EE4330 Integrated Circuit Technology

Spring 2006

THE UNIVERSITY OF TEXAS AT DALLAS

ERIK JONSSON SCHOOL OF ENGINEERING & COMPUTER SCIENCE

EE 4330: Integrated Circuit Technology (3 semester hours)

Class Info: MW 3:30PM-4:45PM, ECSN 2.110, call number: 10822, Spring 2006
Instructor: Professor Walter (Wenchuang) Hu
Telephone: (972) 883-6329
Email: walter.hu@utdallas.edu
Website: www.utdallas.edu/~walter.hu/teaching/EE4330.htm
Office Hours: Wednesdays 5 PM – 6 PM or by appointment in ECSN 2.226
Textbook: “Introduction to Microelectronic Fabrication”, Richard C. Jaeger, Prentice Hall, 2002.
ISBN: 0-201-44494-1
Additional references: “Fundamentals of Microfabrication”, Madou, M. CRC Press, 2002.
“Silicon VLSI Technology” Plummer, J., M. Deal, P. Griffin. Prentice Hall, 2000.

Outline:
This course will teach you about the fundamental science and technologies of integrated circuits (IC) fabrication,
which include MOS and bipolar technologies, photolithography, oxidation, diffusion, ion-implantation, epitaxial
growth, thin and thick film components, and design and layout of integrated devices. New technology frontiers
beyond the textbook will also be introduced, which includes MEMS, advanced nanofabrication technologies, and
emerging nanotechnology applications. In addition, an on-site visit to Texas Instrument 300 mm IC fabrication
facility will be arranged. Prerequisites: EE 3310 or EE 3300.

Grading:
20% Regularly Assigned Homework
23% Midterm Exam I
23% Midterm Exam II
34% Final Exam

Rules and Regulation:

1. No eating, drinking, or smoking in classroom. No laptop computer use in classroom.
2. Students who miss the Midterm Exams or Final Exam without a valid excuse will receive a score of zero. Students
with a valid excuse for missing the Test or Final Exam MUST make arrangements beforehand or receive a score of
zero.

Homework: Homework will be assigned on Monday or Wednesday after the class and is due in the week. Each
student must turn in individual work. All assigned work will be collected at the beginning of the class. Late
homework assignments will not be accepted, unless arrangements were made beforehand.
 EE4330 Integrated Circuit Technology
Spring 2006

Tentative Schedule for EE4330: Integrated Circuit Technology

Lecture Topic Reading Homework
1/9 Overview I §1.1-2
1/11 Overview II §1.3-5 hw1
1/16 Martin Luther King, Jr. Day – no class
1/18 Lithography §2.1
1/23 Etching; Microscopy §2.2-6 hw2
1/25 Oxidation I §3.1-5
1/30 Oxidation II §3.6-10 hw3
2/1 Diffusion I §4.1--5
2/6 Diffusion II §4.6-8 hw4
2/8 Diffusion III §4.9-11
2/13 Midterm Exam I 3:30 PM (Monday)
2/15 Implantation I §5.1-4
2/20 Implantation II §5.5-6 hw5
2/22 Film Deposition (sputtering, evaporation) §6.1-2
2/27 Film Deposition (CVD, Epitaxy) §6.3-4 hw6
3/1 Contacts and Interconnections I §7.1-4
3/13 Contacts and Interconnections II §7.5-8 hw7
3/15 Packaging and Yield I §8.1-4
3/20 Packaging and Yield II §8.5-7 hw8
3/22 Visit Texas Instrument IC Facility
3/27 Midterm Exam II 3:30 PM (Monday)
3/29 MOS Process Integration I §9.1
4/3 MOS Process Integration II §9.2
4/5 MOS Process Integration III §9.3-4 hw9
4/10 Bipolar Process Integration I §10.1-5
4/12 Bipolar Process Integration II §10.6-10 hw10
4/17 MEMS/NEMS (NEW) §11
4/19 Advanced Nanofabrication Technologies (NEW) Handouts
4/24 Emerging Applications in Nanotechnology (NEW) Handouts

4/26 Final Exam 3:30 PM (Wednesday) Comprehensive