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Etching
Revised: 2013-11-07
Source:
www.microchemicals.com/downloads/application_notes.html
Concentrations
All chemicals concentrations mentioned in this chapter with a * refer to a conventional concentration listed in the last section of this document.
Aluminium
Aluminium has a density of 2.7 g/cm3 and therefore
belongs to the light metals. Its crystal structure is cubic face centred.
Due to its high electric conductivity, aluminium is used
for conductors in microelectronics where it is often alloyed with copper in order to prevent electro migration, or with silicon in order to prevent the formation
of (silicon-consuming) aluminium-silicon alloys.
Al: cubic face centred
With a standard potential of -1.66 V, aluminium does
not belong to the noble metals. However, the formation of a very thin (few nm) Al2O3 film makes it very inert in many substances. Therefore, Al
etchants require at least compounds for dissolving Al2O3 as well as for etching (or, respectively,
oxidizing) aluminium.
3.5
3.0
2.5
2.0
1.5
1.0
0.5
20
74 ml H3PO4*
2.5 ml HNO3*
23.5 ml H2O
24
28
32
36
etch temperature (C)
40
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