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SAW Advantage
Functions Performed
Radar
Pulse Compression
ECM Jammers
ECCM
Direct Sequence Spread Spectrum-
Ranging
Wireless LAN
Digital Cellular
Personal Communication
System
TV IF Filter
Analog Cordless
Telephone
Digital Cordless
Telephone
Base Stations
Other Applications of
SAW Devices
Commercial Applications Functions Performed
Digital Microwave
CATV/MATV Headend
from: RF Monolithics
SAW Properties
Piezoelectric substrate acoustoelectric
conversion
Small surface perturbation: 0.1-20 Angstroms
Wave is trapped to surface (~ 1-15 wavelengths)
Velocity of ~ 2,500 10,000 m/sec
Efficient transduction and wave sampling
Versatile signal processing bandpass filtering,
resonator frequency control, spread spectrum,
radar, remote sensing, others
SAW Components
Transducers
Bidirectional
Multi-phase
Unidirectional
Single Phase
Unidirectional
Reflectors
Groove
Metallic
Implanted
Re-Generative
Elements
Transducers
Multistrip Couplers
Wave Guides
Beam Compressors
Convolvers
Non-linear Elements
Convolver
Transversal Filter
Rect ( 0 , t)
h1 ( 0 , t)
1
1
0.5
0.5
1
1
H ( f ) 20
H (f0 ) 30
dB
40
50
f
f0
H( f ) :=
Sa 2 ( f f0)
2
2
sin( x)
, 1
where Sa ( x) := if x 0 ,
x
SAW Models
MODELS
Transmission Line
Coupling of Modes
Uses superposition/convolution to
determine complete response
. Then
A 0 t sin(x 1 )
x1
2
sin(x 2 )
x2
1
2*f 0
Rect( 0 , t )
h1 ( 0 , t)
1
1
0.5
0
t
0.5
1
1
1
2*f 0
t n = n * Dt
N * Dt = t
N p * Dt = t/2.
where N is the total number of electrodes (half wavelengths) and Np is the total number of electrode pairs.
H(z) =
wherex n =
(zz 0 )
z 0 oN p
N
A 0 4f 0
sin(x n )
xn
(ff 0 )
f 0 oN p.
0
10
H ( f ) 20
H (f0 ) 30
dB
40
50
1
f
f0
sin 2 (x n )
x 2n
1
o
G a (u)
(uz) du
j K( f ) sinh ( ( f ) Ng p )
( f ) cosh ( ( f ) Ng p) + j ( ( f ) j ) sinh ( ( f ) Ng p)
Ng
S12( f ) :=
( 1) ( f )
( f ) cosh ( ( f ) Ng p) + j ( ( f ) j ) sinh ( ( f ) Ng p)
S12( f i )
S11( f i )
0.5
0
8
1.45 .10
0
1.46 .10
1.47 .10
1.48 .10
1.49 .10
1.5 .10
fi
1.51 .10
1.52 .10
1.53 .10
1.54 .10
1.55 .10
h(t) = S hi (t)
(20)
i=1
and
I
H(z) = S H i (z) = S
i=1
t/2
i=1 t/2
hi (t)e jzt dt
(21)
0.4
0.3
0.2
0.1
0
0.1
0.2
0.3
0.4
0.5
0.25
0.25
0.5
Relative SAW Amplitude
0
10
dB
20
30
40
50
0.75
0.8
0.85
Conductance
Frequency Response
0.9
0.95
1
1.05
Normalized Frequency (f/f0)
1.1
1.15
1.2
1.25
0.75
Acoustic Conductance vs
Apodization Technique
Wideband Response
Sawtek, Inc.
Coded
Transducer
-1 -1 1 -1 -1 1 1 -1
Data
Clock
Pulse
Generator
SAW Waveform
Qr =
oo C sWa
Ga ( f o )
and
oC sWa
Qg =
Gg
H e (z) =
G g /(z o C e )
bG a (f 0 ) G a (f)
z z0
z 0 C e + G a (f0) +j[ z 0 z ]
where b = G g /G a (f 0 ).
10
15
20
25
0.6
0.8
1.2
1.4
f
f0
Normalized Frequency
Qr := 5
Ideal and Complete Matched Response
0
5
dB ( Sa (x(f , Qr) )
dB ( Ht (f , Qr)
10
15
20
25
0.6
0.8
1.2
f
f0
Normalized Frequency
1.4
Materials
Materials
Single crystal substrates
Quartz, Niobates, Tantalates
Piezoelectric Films
ZnO
AlN
Other Substrates
Glass
Si
GaAs
Diamond
LGS, LGN, LGT
From: Siemens
From: Siemens
MATERIAL CONSIDERATIONS
SAW Material Parameters
Material
Cut
Property
TC (ppm/ C)
k2 (%)
V(m/S)
Quartz (HC)
-20 Rotated Y
-32
0.25
3209
Quartz (ST)
+45.75 Rotated Y
Y
0.16
3157
-35
0.74
3230
-94
4.6
3488
-72
5.3
3977
OO1
-140
LiTaO 3 (YZ)
LiNbO 3 (YZ)
For YZ LiNbO 3 :
110
0.85
For YZ LiNbO 3
1620
Aluminum Metallization
{ Excellent Acoustic and Electrical Properties
{ Deposition
~ Sputter Deposition
~ Electron Beam Deposition
{ Aluminum alloys
~ Minimize mass flow
~ Increase Power Handling
~ Increase Reliability
Improvement
in Power
Durability of
SAW Filters
Regions 1 and 11 are free surface; regions 2 and 10 are bus bars;
regions 3, 5, 7 and 9 are gaps; regions 4 and 8 are the gratings; and
region 6 is the coupling bar. Each region can have different waveguide
properties.
Velocity (m/sec)
3150
3140
3130
3120
3110
3100
0.005
0.01
0.015
0.02 0.025
h/lambda
0.03
0.035
0.04
P o le Spacing, MHz
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0
0.5
1.5
2
2.5
Metal thickness, % of h/l
3.5
Figure 4. Pole spacing vs normalized metal fim thickness for a coupling width of 1. Beam
width is stepped in 2 increments with 4 wavelengths wide for largest pole spacing and 14
for smallest pole spacing. The crosses mark the maximum pole spacing. The open circles
are measured data of the pole spacing at a given metal thickness.
x 10
1.5
1
0.5
0
0
0.5
4
3
1.5
Coupling width
2
2
1
0
(h/lambda in %)
From: S.Richie
Test#5: PR/Al mask, 125W, 5SCCM C 2F6, P=32 microns, 45 min, graphite plate
Packaging
{ Currently most high volume packaging use
surface mount
{ Metal packages are primarily military
applications
{ Issues:
Assembly
process for
flip-chip
SAW filters
Source: Siemens
)(
P1 = 1 1 R1
2
(
(
)
)(
)(
) (
Slanted SAW
Filter Analysis
With and
Without
Diffraction Theoretical
From: S. Knapp PhD thesis
Slanted SAW
Filter Analysis
With
Diffraction
Predicted and
Experimental
From: S. Knapp PhD thesis
vm
c
p
vm
2h
1 , then
=
vm
fm
1 df m
1 dv m 1 dh
=
f m dT vm dt
h dT
dv m
Expand 1 v
in
dT
m
d c
=
dT
1 1
1 c d
=
2 c 2 3 2 dT
dc 1 d
dT dT
dc 1 1 d 1 dh
dT 2 dT h dT
LGT
LGN
LGS
RT
TC1
TC2
RT
TC1
TC2
RT
TC1
TC2
(x10^10) (x10^-6) (x10^-9) (x10^10) (x10^-6) (x10^-9) (x10^10) (x10^-6) (x10^-9)
C11 (N/m)
18.852
-78.239 -273.644
19.299
-56.335
-5.745
18.849 -43.908
-8.183
C66 (N/m)
4.032
-43.633 -901.446
4.116
15.247 -176.812
4.221 -22.432
-64.402
C33 (N/m)
26.180 -102.255 -107.715
26.465 -114.656
90.724
26.168 -91.904 -491.305
C44 (N/m)
5.110
21.653 -11.987
4.956
-14.137 -379.544
5.371 -44.046 127.130
C14 (N/m)
1.351 -359.568 1604.810
1.485 -478.918 -1943.861
1.415 -309.099 261.107
C13 (N/m)
10.336 -111.390 -557.682
10.225
-31.269 947.985
9.688 -61.952 -1446.007
EXPANSION-Y
0.000
6.087
4.736
0.000
6.673
-4.135
0.000
5.630
5.979
EXPANSION-Z
0.000
3.827
5.030
0.000
5.060
0.000
0.000
4.079
4.577
DENSITY (g/m^3)
6150.400
-16.016 -14.502 6028.900
-18.410
9.010 5739.200 -15.340
-13.460
Piezo e11
-0.456
-22.800 -981.000
-0.452
99.300 456.000
-0.402 329.000 199.000
Piezo e14
0.094 1587.000 2293.000
0.061 2306.000 5053.000
0.130 -342.000 2287.000
Relative epsilon 11
18.271
-65.480 -35.960
20.089 171.400 -290.500
19.620 322.900 -1073.000
Relative epsilon 33
78.950 -1417.000 -16.100
79.335 -1596.000 -2935.000
49.410 -737.100 543.900
(f-fo)/fo (ppm)
Fractional
Frequency
Change
&
200.00000
0.00000
-200.00000
20
40
60
80
100
120
140
160
180
200
-400.00000
-600.00000
-800.00000
-1000.00000
-1200.00000
Temperature
TCF
Temperature
Coefficient
of
Frequency
15
10
5
0
-5
-10
-15
y = -0.128x + 8.3054
-20
0
25
50
75
100
125
Temperature (Celsius)
150
175
200
_
_
_
_
Transduction
Reflection
Re-Generation
Non-Linearities
Technology Issues
RF Filters
v Low Loss <3 dB
v Low Cost
v Small
v Good Performance
v Handle High Power
v Integrateable
IF Filters
v Low Loss <2 dB
v Low Cost
v Small
v Good Performance
v Integrateable
Bandwidths
v 30 kHz to 1.2 MHz
v 100 MHz for video
Transmission Formats
v Analog - Digital - Video
Narrowband
Filter
Response
Technological Advances
Semi-Resonant Devices
8 Single Phase Unidirectional Transducers (SPUDT)
8 Natural SPUDT (NSPUDT)
8 Single Pole Resonators
8 Multipole Resonators
8 Transverse Coupled Resonators
8 Reflector structures
8 Multitransducer structures
SPUDT Advantages
Low-loss SAW Filters (~3-15dB)
Reduced triple transit
Low pass band amplitude ripple
Small group delay distortion
Small size compared to multi-transducer
approaches
Simple matching circuits (1-2 reactive elements)
Relatively insensitive to matching element
variations
Easy to fabricate - single level metal
Abbott 1989
10
Amplitude (dB)
20
30
40
50
60
70
118
119
120
121
122
123
124
Frequency (MHz)
125
126
127
128
129
Regions 1 and 11 are free surface; regions 2 and 10 are bus bars;
regions 3, 5, 7 and 9 are gaps; regions 4 and 8 are the gratings; and
region 6 is the coupling bar. Each region can have different waveguide
properties.
Ladder Circuit
Structure
Sawtek, Inc.
Quadrature System w/ AM
h22 SAW Modulator Filter Pulse Response Derived from Theoretical and Measured Frequency Responses
Figure 83. Three Term Even Series SAW Modulator Filter Pulse Responses Derived from
Theoretical and Measured Frequency Responses
Handset Vendors-World
Challenges
Higher Frequencies
Lower Losses
RF Front End Integration
New Materials
Competition