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Journal of Semiconductors
May 2013
Abstract: An analytic drain current model is presented for doped short-channel double-gate MOSFETs with a
Gaussian-like doping profile in the vertical direction of the channel. The present model is valid in linear and saturation regions of device operation. The drain current variation with various device parameters has been demonstrated.
The model is made more physical by incorporating the channel length modulation effect. Parameters like transconductance and drain conductance that are important in assessing the analog performance of the device have also been
formulated. The model results are validated by numerical simulation results obtained by using the commercially
available ATLASTM , a two dimensional device simulator from SILVACO.
Key words: drain current; DG MOSFET; transconductance; drain conductance
DOI: 10.1088/1674-4926/34/5/054001
EEACC: 2570
1. Introduction
The relentless advancements of electronics, information
technology (IT) and communications have been driven primarily by the exponential improvement in the CMOS technology1 . As CMOS scaling is approaching the limit imposed
by the severe presence of unavoidable short-channel effects
(SCEs), an alternative structure of the conventional MOSFET
is being sought. Double-gate (DG) MOSFETs are found to be
amenable to scaling compared with the conventional MOSFETs because of their capability to be scaled up to the very
shortest channel length possible for a given gate-oxide thickness2; 3 . In addition to the inherent property of suppressing
SCEs and steep subthreshold slope, DG MOSFETs offer high
drive current and transconductance attributed to the two channel property of the symmetrical DG device. Thus modeling the
drain current of the DG MOSFET becomes requisite because
it provides the fundamental skeleton for a circuit simulator and
also it is essential to get the physical insight4 .
Drain current models have been developed for undoped5 11 and doped short-channel DG MOSFETs13 18 .
Suzuki et al.5 proposed a lightly doped nC pC DG SOI
MOSFET having two threshold voltages related to nC and pC
polysilicon for the back and front gates respectively. Considering charge-sheet approximation, they5 derived a drain current
model in strong inversion and demonstrated high speed operation of the device. The current model5 neglected the shortchannel effects and regarded the device as long-channel even
for 0.1 m gate length. Taur et al.6 presented a continuous
analytic current model for undoped long-channel DG MOSFETs. They6 derived the currentvoltage (I V / characteristics in all the regimes of device operation from closed-form solutions of the Poissons equation and current continuity equation without the charge-sheet approximation. Hariharan et al.7
presented a drain current model for a short-channel symmetric
DG MOSFET. The channel region was kept undoped/lightly
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teristics with simulation results. The gm /ID ratio has also been
examined from the modeled transfer characteristics in order to
give an insight into the efficiency of the proposed structure.
The models discussed so far are valid for undoped DG MOSFETs. It should be noted that without using the body doping as
a tool for adjusting the threshold voltage, undoped DG MOSFETs need to rely on gate work function for achieving multiple threshold voltages on a chip, which imposes a technological
hurdle12 . Besides this, memory cell applications in DG MOSFETs require a doped body13 . From this viewpoint a number
of authors have proposed a drain current model for doped DG
MOSFETs13 18 . Kranti et al.14 presented an analytical drain
current model for long-channel graded channel (GC) DG SOI
MOSFETs. Their analysis was based on charge-sheet approximation. Based on their14 modeling, 2D simulation and experimental results, they showed that DG MOSFETs with laterally asymmetric channel engineering can achieve high values
of saturation drain current. They also compared their results
of GC DG MOSFETs with experimental and simulated data
of uniformly doped DG and single gate (SG) SOI MOSFETs.
The analysis took into account the effect of length and doping
of the high and low doped regions to develop a compact model
suitable for device design. Moldovan et al.15 presented an analytical and continuous model for a highly doped long-channel
DG SOI MOSFET. Valid from below to well above threshold, a unified charge control model was derived. The channel current was expressed as an explicit function of the applied
voltages targeting baseband analog circuits. However, the dependency of drain current on channel doping was not demonstrated. Cerderia et al.16 derived a compact current model of
symmetric short-channel DG MOSFETs. The channel doping
was considered in the range of concentrations between 1014
and 3 1018 cm 3 . The mobile charge density was calculated
using the difference of potentials at the surface and at the center of the Si doped channel. They16 performed the variation
of the transfer and output characteristics as a function of channel doping and other device parameters in linear and saturation
regions. Choi et al.17 presented a drain current model of fully
depleted (FD) short-channel symmetric DG MOSFETs with
doped silicon body. The model furnished a continuous simple
closed-form expression of drain current in all operational regions. The parabolic approximation was used to estimate the
channel potential. The drain current modeling was divided into
subthreshold current and strong inversion current. In strong inversion, the drift current of doped DG MOSFETs was modeled
by considering inversion-layer capacitance based on chargesheet approximation. However, the model used a fitting parameter () providing nearly analytic results. The channel doping
concentration was considered up to 1 1019 cm 3 . The surface potential based continuous drain current model for doped
DG MOSFETs was reported by Jin et al.13 . They13 considered a wide range of doping concentration. The total current
model consisting of both drift and diffusion components was
compared with simulation results and showed very good agreement in subthreshold, linear and saturation regions at different
body doping concentrations. An equivalent thickness concept
based model depending on channel doping concentration of
doped DG MOSFET was proposed by Sallese et al.18 . Valid
for relatively high doping, equivalent thickness is further used
to calculate the mobile charge density and drain current of the
device for all operation regions. However, maintaining uniformity of dopants throughout the channel region is not an easy
task because, during many of the fabrication stages like diffusion and threshold adjust implantation, the doping profile becomes nonuniform in the practical MOS devices12 . Further,
the ion implantation provides a Gaussian profile for the doping
distribution in the doping region of any device12 . Therefore,
a drain current model for Gaussian doped DG MOSFET especially in linear and saturation regions of device operation is
needed.
In the present work, for the first time, an analytical drain
current model for short-channel DG MOSFETs with Gaussianlike doping profile in the vertical direction of the channel has
been presented. The drain currents in linear and saturation region are obtained by calculating the charge densities in the
channel region. The analysis has been extended to obtain the
expressions for transconductance and drain conductance. It
should be noted that to make the model fully analytical in nature, the actual Gaussian function has been replaced by an approximate Gaussian-like function19 . The present work may
be seen as the continuation of our previous works12; 20; 21 on
Gaussian doped DG MOSFETs. A 2D device simulator, ATLASTM , has been used to validate the model results22 .
2. Model formulation
The schematic structure of the DG MOSFET used for the
drain current and simulation is shown in Fig. 1 where, the notations L, tsi and tox are the channel length, silicon film thickness
and gate oxide thickness of the device, respectively. The x- and
y-axes of the 2D structure are taken along the source-channel
interface and center of the channel respectively, as shown in
the figure. The Gaussian-like doping profile19 , say Nb .x/, is
considered in the vertical direction of the channel:
h
i
Nb .x/ D Np c .a C 2bX/2 2b exp aX bX 2 ;
(1)
x Rp
p
where X D
, Rp is the projected range, p being the strag2p
054001-2
dV .y/
;
dy
(2)
n0
dV .y/
1 C .0 =2vSat /
dy
(3)
where vSat is the saturation velocity of carriers. The denominator in Eq. (3) signifies that the mobility is degraded due to
the velocity saturation effect. It may be noted that, in shortchannel devices, the lateral electric field along the channel
becomes comparable to the electric field at the velocity saturation point (ESat D 2vSat =n0 /, and hence the drain current starts to be affected by velocity saturation. In the present
on-current model for short-channel DG MOSFETs, the value
of saturation velocity is taken as (11.4) 107 cm/s7; 24 ;
n0 D 0 =1 C .VGS Vth /, a fitting parameter ranging
from 0.01 to 0.1; Vth is the threshold voltage of the device12
and 0 is the low field mobility. In our analysis, the Arora
model for low field mobility has been taken into account for
electron mobility as a function of temperature and doping concentration25 :
2:33
T
0:57
1252
T
300
0 D 88
C
:
Nb .x/
300
1C
T 2:546
1:432 1017
300
(4)
In charge-sheet approximation, the inversion charge Qinv ,
seen in Eq. (2), is assumed to be located at the silicon surface
like a very thin sheet of charge and is the difference of the total
silicon body charge (QTotal / and depletion charge (QBulk / as17
i.e.,
Qinv D QTotal QBulk :
(5)
Cox 2VGS
Vfbf
Vfbb
f .y/
b .y/ ;
(8)
2Cox VGS
Vfb
s .y/ :
(9)
Cox 2VGS
2.f C b C V .y// :
(10)
Further, as the channel region is assumed to be fully depleted, the depletion charges QBulk can be obtained as
Vfbf
QBulk D
Vfbb
tsi
2
tsi
2
Nb .x/dx;
(11)
QBulk D
2p qcNP .2bXf
.a C 2bXb / exp
a/ exp aXf
aXb bXb2 ;
bXf2
(12)
where,
Xf D X jxD
tsi
2
Xb D X jxD tsi D
2
tsi C 2Rp
;
p
2 2p
tsi
2Rp
;
p
2 2p
(13)
(14)
with the help of Eqs. (10) and (12), Equation (5) can be written
as
Qinv D
Eg
kT
Nbb
s C
C
ln
;
2q
q
ni
Vfbb D M
(6)
(15)
where Cox D "ox =tox is gate oxide capacitance, "ox being the
permittivity of the SiO2 , f .y/ and b .y/ are the front and
back surface potentials at x D tsi =2 and x D tsi =2 respectively12 ; Vfbf and Vfbb are the flat band voltages related to the
Plugging Eqs. (3) and (15) into Eq. (2) and integrating on
both sides from source to drain gives the following expression
of drain current in the linear region as
054001-3
Wn0
n0 VDS
L 1C
2vSat L
VDS
Cox 2VGS Vfbf Vfbb 2 f C b C
VDS
2
n p
q 2p cNP .2bXf a/ exp aXf bXf2
!
o
2
.a C 2bXb / exp aXb bXb
VDS
(16)
ID D
or,
ID D
Cox Wn0
.2VGS
0 VDS
L 1C
2Sat L
Vt
VDS / VDS ;
(17)
where
Vt D Vfbf C Vfbb C 2f C 2b
p
C q 2p cNP .2bXf a/ exp aXf bXf2
.a C 2bXb / exp aXb bXb2 =Cox ;
or,
ID D
ID0
;
n0 VDS
1C
2vSat L
(19)
(21)
where QInvSat D Cox .2VGS Vt VDS /jVDS DVDSat is the inversion charge density at saturation and VDSat is drain saturation voltage and can be obtained as follows.
At VDSat , the surface channel collapses near the drain end
and the drain current becomes zero or pinched-off. Hence,
@ID
D 0:
(22)
@VDS VDS DVDSat
Now utilizing Eq. (17) in Eq. (22), we get the following
expression of drain saturation voltage as
q
K1 K12 4K2 K3
VDSat D
;
(23)
2K2
where K1 D Cox , K2 D 0 Cox =Sat L and K3 D
K1 .2VGS Vt /. Further, as the drain voltage (VDS / exceeds
the saturation voltage (VDSat /, the pinch-off point at the drain
end starts to shift gradually towards the source end. Thus, the
(24)
VDT D VDSat 1
where K D 1
VDS
VDSat
ln .1 C exp K/
;
ln .1 C exp /
(28)
@ID
gm D
:
(29)
@VGS VDS
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Hence, transconductance in the linear region can be obtained by using Eqs. (17) and (29) as:
gml D
Cox Wn0
L
n0 VDS
1C
2
2vSat L
C
.2VGS Vt
1 C .VGS
.2VGS Vt VDS /
1 C .VGS Vth /
VDS / n0 VDS
n0 VDS
1C
2Sat L
Vth / 2vSat L
VDS :
(30)
B
@ q
Cox
K12
4K2 K3
C7
A5 :
(31)
@ID
gd D
:
(32)
@VDS VGS
Combining Equations (17) and (32) gives,
gdl D
W Cox 0
L
.1 C n0 VDS =2vSat L/ .2VGS
.n0 =2vSat L/ .2VGS
Vt
Vt
2VDS /
VDS / VDS
(33)
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054001-6
Fig. 8. Variation of gm =ID ratio with device channel lengths (L/ for
peak doping positions. Asymmetry is introduced through keeping the
peak doping position at other than the center i.e. at Rp D 5 nm.
Fig. 10. Variation of drain conductance (gd / with drain-to-source voltage (VDS / for peak doping concentrations, Np D 1 1017 cm 3 and
Np D 1 1018 cm 3 .
Fig. 9. Variation of drain conductance (gd / with drain-to-source voltage (VDS / for different gate-to-source voltages (VGS /.
4. Conclusion
An above-threshold drain current model of doped shortchannel DG MOSFET with a vertical Gaussian-like doping
profile has been derived for the linear and saturation regimes of
device operation. Variation in drain current as well as transconductance and drain conductance of symmetric and asymmetric
DG MOSFETs is studied in terms of various device parameters.
In terms of gm /ID ratio, the symmetric DG MOSFET is found
to be more efficient compared to the asymmetric structure. An
excellent matching has been found between the model and numerical simulation results.
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