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VACUUM PUMP

How to select the proper vacuum pump


Sealed system
For sealed system the capacity of the pump is determined by how fast the system can be evacuated to
a certain vacuum level. This capacity is called the evacuation time of the pump and is normally specified in
sec/I. This value is multiplied by the volume of the system in order to obtain the evacuation time to the
desired vacuum level.

With non-sealed system (lifting of porous material) the case is different. To maintain the desired vacuum
level the pump must have the capacity to pump away the air-leaking in by establishing the leaking flow ; it
is possible, by reading the pump data, to find the right pump for the application in question. If the leakage
occurs via a known aperture, the flow can be established according to the diagram.
When the leakage occurs through a porous material or in an unknown way, the flow can be established by a
test with a vacuum pump. The pump is connected to the system and the obtained vacuum level is read.
(It should be at least -20kPa)

VACUUM
PUMPS

Non-sealed system

AS-KIT (Air saving system)


Electrically driven, mechanical vacuum pumps normally work during the whole working period and the
vacuum requirements are controlled by a valve on the vacuum side. In system with compressed air-driven
vacuum pumps it is often possible to save a lot of energy. As these pumps have a faster reaction time (fast
start-up) the pump can be shut off when the vacuum is no longer needed. Many pumps can be delivered
with an Air saving system as option.

Specifications subject to change without notice.

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105

VACUUM PUMP

The example for vacuum system


EX) If, you have to move in packing box (50kg) with suction cup and suction time-within 0.3sec
using to the condition as follows :

Condition : air pipe length=3m, air pipe(hose) inner diameter=6mm, Quantity of suction cup ; 5 pcs
What is proper vacuum pump & suction cup model?

50kg

106

Specifications subject to change without notice.

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VACUUM PUMP
oving weight (kg)
Suction time

: 50

Suction cup material


Suction cup quantity (Pcs)

: PU

: 0.3 second

: VB75(B) Pu-12F

Selected suction cup

:5

: 75

Diameter of suction cup (mm)


Air vacuum hose length (m)

:3
:6

Inner diameter of air hose (mm)

: 0.55

Volume of suction cup (Nl)


Volume of vacuum air hose (Nl)
Selected vacuum Pump

: 0.085

: VTM 50L - 1834 - AS


: VMS14

Air supply control valve


Vacuum release control valve
Selected vacuum filter

: VMS18D-3-2
: VTF 34 - 2

(You can to be select to size of a vacuum filter according to capability of infected material.)

Vacuum switch (transiton singal for next movement)


Ball joint (to use in curve or uneven objects)
Level spring (to use to compensater differences in level)

: VP20C..

Vacuum manifold
Air filter / regulator (remove to dust, water, rust, etc.)
Hand valve (using to manual)

: VTDC34-14X5

: BJ 12

: L1230T

Needle valve (vacuum level controlling valve)

HOW TO SELECT SUCTION CUP SIZE

VACUUM
PUMPS

D = diameter size of suction cup (mm)


M = weight (kg)
MXN
50 X 2
U = vacuum level (-kPa, %)
D=113X
=113 X
= 65.2 mm
N = safety factor (2)
UXS
60 X 5
S = quantity of suction cup
VB75 = (You are desirable to select a little big size suction cup than the actual they size)

WHAT IS PROPER SUCTION CUP SIZE


VB75 (110cm3) = 0.11

X 5 (Pcs) = 0.55

0.55

(Quantity of vacuum pad : 5 Pcs)

V=

Xd2xL
X
4

( Please refer to page 18.19 for the Volume of suction cup)

AIR PIPE, SUCTION CUP & VACUUM FILTER


1000

3.14X0.6 2X300
4

1000

0.085

V = Capacity (liter)
d = inside diameter of air pipe (cm)
L = the length of air pipe (cm)

Filter (VTF34-2) : 160cm3 = 0.16

Needed vacuum capacit = the capacity of suction cup + the capacity of air pipe + the vacuum filter

THE SELECTION OF VACUUM PUMP


VTM25L : 0.795( ) X 0.66 = 0.53
VTM50L : 0.795( ) X 0.33 = 0.27
VTM75L : 0.795( ) X 0.248 = 0.20
VTM100L : 0.795( ) X 0.166 = 0.13
VTM50L or VTM75L

Specifications subject to change without notice.

Because when there is a vacuum leak from the work


piece or the piping and a drop in vacuum pressure
which causes the air pressure drop.

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107

VACUUM PUMP
AS - KIT

Air Saving

Has anyone ever told you that air is free? Well, think again because compressed air still uses energy and costs
money to use it. VMECA / VTEC s ongoing principle on saving air and giving you the highest performance have
always been our standard.

Air Saving Kit

VMECA / VTEC have always offered various ranges of compressed


air-driven vacuum pumps in the market.
VMECA / VTEC ensures the best solutions to customers by offering
the most efficient products in the market.
VMECA / VTEC s Air Saving-Kit(AS-Kit) effectively prevents
compressed air loss. Air Saving-Kit is a pneumatic control system
that cuts off the vacuum pump once the desired vacuum level has
been achieved, thus minimizing the energy (compressed air)
consumption of the vacuum pump.
In case the vacuum level drops below the working level (requried vacuum level), then the Air Saving-Kit reactivates
the vacuum pump allowing for safe handling of product. The Air Saving-Kit is the most suitable in sealed systems
(applications).

AS - Kit - Turtle Pump


Pneumatical vacuum switch, VPS-01 NC
Pneumatical Air ON/OFF Valve, 1/4
Hose of Poly-Urethane, D=4/1.5
Turtle Vacuum pump, Non-return type

Function

A vacuum control valve shuts off the flow of compressed air


to the pump when the pre-set vacuum level is reached (1).
The vacuum level is set by a screw. Because of minor
leakage in a vacuum system the vacuum level drops and
after a while the start up level of the valve is reached (2).
Then the pump will start and work until the shut off level is
reached again (3), etc.
(the section (a) is possible to be changed depending on the
level of airtight.)
108

Specifications subject to change without notice.

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VACUUM PUMP
AS - KIT

VACUUM
PUMPS

AS - Kit Products line-up

VACUUM PUMP
Pump Characteristics
Model
132 ~ 137

VTC 3021

132 ~ 137

VTC 3031

134 ~ 137

VTCL 3021

134 ~ 137

VTCL 3031

138 ~ 143

VTC 3022

138 ~ 143

VTC 3032

140 ~ 143

VTCL 3022

140 ~ 143

VTCL 3032

144 ~ 153

VTC 3122

144 ~ 153

VTC 3123

144 ~ 153

VTC 3124

144 ~ 153

VTC 3132

144 ~ 153

VTC 3133

144 ~ 153

VTC 3134

148 ~ 153

VTCL 3122

148 ~ 153

VTCL 3123

148 ~ 153

VTCL 3124

148 ~ 153

VTCL 3132

148 ~ 153

VTCL 3133

148 ~ 153

VTCL 3134

110

MAX.
Vacuum
- kPa (-inHg)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)

Supply Air
pressure
(MPa)
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6

Specifications subject to change without notice.

Max.Vacuum
Air
Flow
consumption
(Nl/m)
(Nl/m)
164
170
171
302
338
341
188
195
200
302
344
362
328
340
342
604
676
682
376
390
400
604
688
724
328
340
342
492
510
513
656
680
684
604
676
682
902
1014
1023
1208
1352
1364
376
390
400
564
585
600
752
780
800
604
688
724
906
1032
1086
1208
1376
1448

97
118
152
97
118
152
70
85
104
70
85
104
194
236
304
194
236
304
140
170
208
140
170
208
194
236
304
291
354
456
388
472
608
194
236
304
291
354
456
388
472
608
140
170
208
210
255
312
280
340
416
140
170
208
210
255
312
280
340
416

Noise level
(dBA)

50 ~60

60~65

60 ~65

60 ~65

Min. hose inner


(within 2m)
Air supply Vacuum
Exhaust
6

10

10

10

10

12

18

12

18

12

18

12

18

15

15

10

19

22

10

22

32

15

15

10

19

22

10

22

32

15

15

10

19

22

10

22

32

15

15

10

19

22

10

22

32

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VACUUM PUMP
Pump Characteristics

159 ~ 165

VS 144

159 ~ 165

VS 146

159 ~ 165

VS 148

161 ~ 165
161 ~ 165
161 ~ 165

171 ~ 177

171 ~ 177

173 ~ 177

173 ~ 177
184 ~ 193
184 ~ 193
184 ~ 193
184 ~ 193

188 ~ 193

VLS 144
VLS 146
VLS 148
MD 302
MD 303
MDL 302
MDL 303
PM 303 X 1
PM 303 X 2
PM 303 X 3
PM 303 X 4
PML 303 X 1

188 ~ 193

PML 303 X 2

188 ~ 193

PML 303 X 3

188 ~ 193

PML 303 X 4

MAX.
Vacuum
-kPa (-inHg)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)

Supply Air
pressure
(MPa)
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6

Specifications subject to change without notice.

Max.Vacuum
Air
Flow
consumption
(Nl/m)
(Nl/m)
302
338
341
302
338
341
302
338
341
302
344
362
302
344
362
302
344
362
164
170
171
302
338
341
188
195
200
302
344
362
302
338
341
604
676
682
902
1014
1023
1208
1352
1364
302
344
362
604
688
724
906
1032
1086
1208
1376
1448

97
118
152
97
118
152
97
118
152
70
85
104
70
85
104
70
85
104
97
118
152
97
118
152
70
85
104
70
85
114
97
118
158
194
236
304
291
354
456
388
472
608
70
85
104
140
170
208
210
255
312
280
340
416

Noise level
(dBA)

50 ~ 60

50 ~ 60

50 ~ 60

60 ~ 65

60 ~ 65

Min. hose inner


(within 2m)
Air supply Vacuum
Exhaust
6

10

10

10

10

10

10

10

10

10

10

12

12

15

15

10

19

22

10

22

32

12

12

15

15

10

19

22

10

22

32

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VACUUM
PUMPS

Model

111

VACUUM PUMP
Pump Characteristics
Model
VKX5
VKM5
VKM61
200 ~ 211 VKM62
VKX61
200 ~ 211 VKX62
VKX73
212 ~ 223 VKX74
VKM73
212 ~ 223 VKM74
VTOM5-(N)Stack
232 ~ 235 VTOM10-(N)Stack
VTOX5-(N)Stack
232 ~ 235 VTOX10-(N)Stack
VTM5-(N)Stack
236 ~ 241 VTM10-(N)Stack
VTM10X(N)B(BA,...NC)
VTM20X(N)B(BA,...NC)
242 ~ 247
VTM30X(N)B(C,...NC)
VTM5-A(B,...NC)
VTM10-A(B,...NC)
226 ~ 231
VTM20-B(C,...NC)
VTM30-B(C,...NC)
VTM20KD
VTM30KD
248 ~ 255 VTM40KD
VTM50KD
VTM60KD
VTM25L
VTM50L
VTM75L
262 ~ 265
VTM100L
VTM125L
VTM150L
VTL25
VTL50
VTL75
VTL100
266 ~ 269
VTL125
VTL150
VTL175
VTL200
VTM25
VTM50
VTM75
VTM100
270 ~ 273
VTM125
VTM150
VTM175
VTM200
196 ~ 199

112

Capacity
Min. hose inner
MAX.
Supply Air Max.Vacuum
Air
equivaient to Noise level
(within 2m)
Vacuum pressure
Flow
consumption electricity
moter
(dBA)
-kPa (-inHg)
(bar)
(Nl/m)
(Nl/m)
pump size(kw)
Air supply Vacuum
Exhaust
92 (27.17)
85 (25.1)
85 (25.1)
92 (27.17)
92 (27.17)
85 (25.1)
85 (25.1)
92 (27.17)
85 (25.1)
85
(25.1)
85
(25.1)

85
(25.1)

3-6

23

13-22

0.03

3-6

37

15-21

0.05

3-6
3-6
3-6
3-6
3-6

0.1

0.05

94

49-66

0.15

40-58

0.15

62

135

111

43.2-48
66-88
54-78

0.1
0.2
0.2

5.5

27XN

15 X N-21 X N

0.05 X N

5.5

24XN

21.6 X N-24 X N

0.05 X N

27XN

15 X N-21 X N

0.05 X N

30 X N-42 X N

0.1

5.5
5.5
5.5
5.5
5.5

35XN
32XN
35XN
74

5.5

149

5.5

37

5.5
5.5

5.5

3.4
3.4

120-168

390

180-252

1060

3.4

1370

6
6
6

1195
379

1682

5.8

2061
389

5.8

Specifications subject to change without notice.

1580

50-65

0.3

0.4
0.5

4~10
4~10
4~10

50-65

0.6

12

12x(N)

12

12x(N)
8

10

12
12
15

12

15

18

15

15

228-318

0.75

378-528

1.25

528-738

1.75

600-840

10

0.25

450-630

12

15

10

8
8

10
10
10
4
6
8

50-65

10

12

78-108

12

10

10

10

1.75

0.5

8~10

10

10

546-735
624-840

8~10

1.5

12

10x(N)

1.25

468-630

12

6
50-65

12

8~10

8~10

390-528

12

2.5

10

0.5

10

8~10

8~10

0.75

1.5

2.5

6
50-65

10

8~10

8~10

234-315

1.0

2.5

0.5

8~10

0.2
0.3

4~10

1380
1490

50-65

4~10

0.25

5.8
5.8

50-65

10

78-105

300-420

1200

50-65

4~10

10

684

1100

5.8

50-65

10

1.25

5.8

890

50-65

4~10

570

456

150-210

5.8

50-65

4~10

0.75

647

5.8

50-65

342

312-420

1303

0.1

50-65

0.25

228

990

820

0.3

50-65

114

156-210

1090

150-216

650

6
6

60-84

292

841

0.2

0.2

90-126

622

0.1 X N

60-84

220

365

0.1 X N

0.05

90-126

341

0.1 X N

15-25

220

3.4
3.4

60 X N-84 X N

30-42

149

5.5

30 X N-42 X N

74

5.5
5.5

43.2X N-48 X N

90 X N-126 X N

149

5.5

30 X N-42 X N

220

5.5

92
(27.17)

30-42

0.03

21.6-24

3-6

3-6

12-21

31

109

3.4

80
(23.62)

74

3-6

5.5

91
(26.87)

26

8
8

1.5

10

10

10

12
12
19
19
25
25
12
15
19
19
25
25
32
32
12
15
19
19
25
25
32
32

15
18

12
22
22
32
32
12
15
22
22
32
32
40
40
12
15
22
22
32
32
40
40

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VACUUM PUMP
Pump Characteristics

VTMM100
VTMM150
278 ~ 281 VTMM200
VTMM200F
VTM150LEF
VTM200LEF
VTM300LEF
292 ~ 297 VTM400LEF
VTM500LEF
VTM600LEF
VTM800LEF
VTMM200EF
VTMM300EF
VTMM400EF
298 ~ 303 VTMM500EF
VTMM600EF
VTMM800EF
VTMM1000EF
VTML200
VTML400
VTML600
306 ~ 309
VTML800
VTML1000
VTML1200
VTX5-(N)Stack
228 ~ 231 VTX10-(N)Stack
VTX10x(N-B(BA,...NC)
VTX20x(N-B(BA,...NC)
238 ~ 241
VTX30x(N-B(BA,...NC)
VTX5-A(B,...NC)
VTX10-A(B,...NC)
244 ~ 247 VTX20-B(C,...NC)
VTX30-B(C,...NC)
VTX20KD
VTX30KD
250 ~ 255 VTX40KD
VTX50KD
VTX60KD
VTX25
VTX50
274 ~ 277
VTX75
VTMX100
VTMX200
282 ~ 285
VTMX300
VTH50
VTH150
286 ~ 291
VTH300

Capacity
Min. hose inner
MAX.
Supply Air Max.Vacuum
Air
equivaient to Noise level
(within 2m)
Vacuum pressure
Flow
consumption electricity
moter
(dBA)
-kPa (-inHg)
(bar)
(Nl/m)
(Nl/m)
pump size(kw)
Air supply Vacuum
Exhaust
92
(27.17)

1.5
2

55-65

4
5

55-68

55-68

92
(27.17)
92
(27.17)
92
(27.17)

68-76

0.2
0.3

0.05
0.1
0.2
0.3

92
(27.17)

0.4
0.5

55-65
50-65
50-68
55-65

57-65

0.6
97
(28.64)
97
(28.64)
100.8
(29.76)

Specifications subject to change without notice.

0.4
0.8
1.2
1
2
3

0.3
0.9
1.2

15
20

0.2
0.3

14
18

12

0.1

14

12

10

0.1xN

14

10

0.05xN

12

18

14

15

10

12

12

92
(27.17)

12

10

40

15

32

14

92
(27.17)

10

10

22

91
(26.87)

19

10

1.5
3

10

63-68

60-65

32
25
32
40
40
45
50
50
32
40
40
45
50
50
65
32
40
50
50
65
75

32
40
32
40
60
60
70
70
75
40
60
60
70
70
75
95
40
60
70
75
90

100

8~10

2.5

8~10

10xN

12

12xN

8~10

8~10

10

8~10
2

6
4
6
8
8
8

10
6
8

10

15

10

12xN

12

4
6

12

10

10

12

6
55-65

25

10
12
12
15
12
15
19
19
25
32
12
15
19

VACUUM
PUMPS

Model

12
12
15
15
18
18
12
15
22
22
32
40
12
15
22

www.vmeca.com

113

VACUUM PUMP
Vacuum flow (Nl/m) at different vacuum level (-kPa)
Model
132 ~ 137

VTC 3021

132 ~ 137

VTC 3031

134 ~ 137

VTCL 3021

134 ~ 137

VTCL 3031

138 ~ 143

VTC 3022

138 ~ 143

VTC 3032

140 ~ 143

VTCL 3022

140 ~ 143

VTCL 3032

144 ~ 153

VTC 3122

144 ~ 153

VTC 3123

144 ~ 153

VTC 3124

144 ~ 153

VTC 3132

144 ~ 153

144 ~ 153

VTC 3133
VTC 3134

148 ~ 153

VTCL 3122

148 ~ 153

VTCL 3123

148 ~ 153

VTCL 3124

148 ~ 153

VTCL 3132

148 ~ 153

VTCL 3133

148 ~ 153

VTCL 3134

114

(-kPa)
MAX.
(-inHg)
Vacuum Feed
-kPa (-inHg) pressure (MPa)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93(27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)

0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6

Specifications subject to change without notice.

164
170
171
302
338
341
188
195
200
302
344
362
328
340
342
604
676
682
376
390
400
604
688
724
328
340
342
492
510
513
656
680
684
604
676
682
902
1014
1023
1208
1352
1364
376
390
400
564
585
600
752
780
800
604
688
724
906
1032
1086
1208
1376
1448

122.5
152
154
122.5
152
154
158
176
183
176
200
194
245
304
308
245
304
308
316
352
366
352
392
415
245
304
308
367
456
462
490
608
616
245
304
308
368
456
462
490
608
616
316
352
366
474
528
549
632
704
732
344
392
415
516
588
621
688
784
828

88
106
127.5
88
106
127.5
110
130
154
110
130
154
176
212
255
176
212
255
220
260
308
220
260
308
176
212
255
264
318
383
352
424
510
176
212
255
264
318
383
352
424
510
220
260
308
330
390
462
440
520
616
220
260
308
330
390
462
440
520
616

53
64
94
53
64
94
70
82
100
70
82
100
106
128
188
106
128
188
140
164
200
140
164
200
106
128
188
159
192
282
212
256
376
106
128
188
159
192
282
212
256
376
140
164
200
210
246
300
280
328
400
140
164
200
210
246
300
280
328
400

31.4
33
69
31.4
33
69
46
50
52
46
50
52
62.8
66
138
62.8
66
138
92
100
104
92
100
104
62.8
66
138
94
99
207
126
132
276
62.8
66
138
94
99
207
126
132
276
92
100
104
138
150
156
184
200
208
92
100
104
138
150
156
184
200
208

28.5
32
43
28.5
32
43
28
37.5
38
28
37.5
38
57
64
86
57
64
86
56
75
76
56
75
76
57
64
86
86
96
129
114
128
172
57
64
86
86
96
129
114
128
172
56
75
76
84
112.5
114
112
150
152
56
75
76
84
112.5
114
112
150
152

16.5
22
23.3
16.5
22
23.3
6.8
23
32
6.8
23
32
33
44
46.6
33
44
46.6
13.6
46
64
13.6
46
64
33
44
46.6
50
66
70
66
88
93
33
44
46.6
50
66
70
66
88
93
13.6
46
64
20.4
69
96
27.2
92
128
13.6
46
64
20.4
69
96
27
92
128

4.6
16.5
17.3
4.6
16.5
17.3
11.3
22
11.3
22
9.2
33
34.6
9.2
33
34.6
23.8
44
23.8
44
9.2
33
34.6
14
50
52
18
66
69
9.2
33
34.6
14
50
52
18
66
69
23.8
44
33.9
66
45.2
88
23.8
44
34
66
45
88

6.4
6.9
6.4
6.9
12.8
13.8
12.8
13.8
12.8
13.8
19
21
26
28
12.8
13.8
19
21
26
28
-

1.9
2.1
1.9
2.1
3.8
4.2
3.8
4.2
3.8
4.2
6
6.3
7.6
8.4
3.8
4.2
6
6.3
7.6
8.4
-

www.vmeca.com

VACUUM PUMP

Model
159 ~ 165

VS 144

159 ~ 165

VS 146

159 ~ 165

VS 148

161 ~ 165
161 ~ 165
161 ~ 165

171 ~ 177

171 ~ 177

173 ~ 177

173 ~ 177
184 ~ 193
184 ~ 193
184 ~ 193
184 ~ 193

188 ~ 193
188 ~ 193

188 ~ 193
188 ~ 193

VLS 144
VLS 146
VLS 148
MD 302
MD 303
MDL 302
MDL 303
PM 303X1
PM 303X2
PM 303X3
PM 303X4
PML 303X1
PML 303X2
PML 303X3
PML 303X4

(-kPa)
MAX.
(-inHg)
Vacuum Feed
-kPa (-inHg) pressure (MPa)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)

0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6

Specifications subject to change without notice.

302
338
341
302
338
341
302
338
341
302
344
362
302
344
362
302
344
362
164
170
171
302
338
341
188
195
200
302
344
362
302
338
341
604
676
682
902
1014
1023
1208
1352
1364
302
344
362
604
688
724
906
1032
1086
1208
1376
1448

122.5
152
154
122.5
152
154
122.5
152
154
176
200
194
176
200
194
176
200
194
122.5
152
154
122.5
152
154
158
176
183
176
200
194
122.5
152
154
245
304
308
368
456
462
490
608
616
176
200
194
344
392
415
516
588
621
688
784
828

88
106
127.5
88
106
127.5
88
106
127.5
110
130
154
110
130
154
110
130
154
88
106
127.5
88
106
127.5
110
130
154
110
130
154
88
106
127.5
176
212
255
264
318
383
352
424
510
110
130
154
220
260
308
330
390
462
440
520
616

53
64
94
53
64
94
53
64
94
70
82
100
70
82
100
70
82
100
53
64
94
53
64
94
70
82
100
70
82
100
53
64
94
106
128
188
159
192
282
212
256
376
70
82
100
140
164
200
210
246
300
280
328
400

31.4
33
69
31.4
33
69
31.4
33
69
46
50
52
46
50
52
46
50
52
31.4
33
69
31.4
33
69
46
50
52
46
50
52
31.4
33
69
62.8
66
138
94
99
207
126
132
276
46
50
52
92
100
104
138
150
156
184
200
208

28.5
32
43
28.5
32
43
28.5
32
43
28
37.5
38
28
37.5
38
28
37.5
38
28.5
32
43
28.5
32
43
2.8
37.5
38
28
37.5
38
28.5
32
43
57
64
86
86
96
129
114
128
172
28
37.5
38
56
75
76
84
112.5
114
112
150
152

16.5
22
23.3
16.5
22
23.3
16.5
22
23.3
6.8
23
32
6.8
23
32
6.8
23
32
16.5
22
23.3
16.5
22
23.3
6.8
23
32
6.8
23
32
16.5
22
23.3
33
44
46.6
50
66
70
66
88
93
6.8
23
32
13.6
46
64
20.4
69
96
27
92
128

4.6
16.5
17.3
4.6
16.5
17.3
4.6
16.5
17.3
11.3
22
11.3
22
11.3
22
4.6
16.5
17.3
4.6
16.5
17.3
11.3
22
11.3
22
4.6
16.5
17.3
9.2
33
34.6
14
50
52
18
66
69
11.3
22
23.8
44
34
66
45
88

6.4
6.9
6.4
6.9
6.4
6.9
6.4
6.9
6.4
6.9
6.4
6.9
12.8
13.8
19
21
26
28
-

1.9
2.1
1.9
2.1
1.9
2.1
1.9
2.1
1.9
2.1
1.9
2.1
3.8
4.2
6
6.3
7.6
8.4
-

www.vmeca.com

VACUUM
PUMPS

Vacuum flow (Nl/m) at different vacuum level (-kPa)

115

VACUUM PUMP
Vacuum flow (Nl/m) at different vacuum levels (-kPa)
Model
VKX5

196 ~ 199 VKM5

VKM61

200 ~ 211 VKM62

VKX61
200 ~ 211 VKX62
VKX73
212 ~ 223 VKX74
VKM73
212 ~ 223 VKM74
VTOM5-(N)Stack
232 ~ 235 VTOM10-(N)Stack
VTOX5-(N)Stack
232 ~ 235 VTOX10-(N)Stack
VTM5-(N)Stack
236 ~ 241 VTM10-(N)Stack
VTM10X(N)B(BA,...NC)
242 ~ 247 VTM20X(N)B(BA,...NC)
VTM30X(N)B(C,...NC)
VTM5-A(B,...NC)
VTM10-A(B,...NC)
226 ~ 231
VTM20-B(C,...NC)
VTM30-B(C,...NC)
VTM20KD
VTM30KD
VTM40KD
248 ~ 255
VTM50KD
VTM60KD
VTM25L
VTM50L
VTM75L
262 ~ 265 VTM100L
VTM125L
VTM150L
VTL25
VTL50
VTL75
VTL100
266 ~ 269 VTL125
VTL150
VTL175
VTL200
VTM25
VTM50
VTM75
VTM100
270 ~ 273 VTM125
VTM150
VTM175
VTM200
116

-kPa
MAX. -inHg
Vacuum
-kPa (-inHg)
92 (27.17)
85 (25.1)
85 (25.1)
92 (27.17)
92 (27.17)
85 (25.1)
85 (25.1)
92 (27.17)
85 (25.1)
85
(25.1)
85
(25.1)

23

12

37

26

26
74
31
62
94

109
111
135
27
35
24
32
27
35
74

149

85
(25.1)

28

18

27

22

99
16
29
13

1195
379
650
820
990

1090
1303

1200

23
8

1.35

30
40
11

13.5

24

18

7.2

1.98

2.4
4.8

0.66 - (N)Stack
1.32 - (N)Stack

5.4

2.4

32
8

18
24

19

16

12
9

12

9.6

2.7

4.8

1.2

23

19

16

12

40

32

22

10.5

2.4

0.66

22

10.5

2.7

22

10.5

43

21

52
99
26
99
99

31
62
92
16
31
62
92
62
92

200

110

256

259

169
327
481
634
789
937
200
374
490
607
750
907

1217
400
600
750
900

1020

1580

1200

1120

Specifications subject to change without notice.

12
28
54
73
14
28
54
73
54
73
93

11
20
60
10

60

47

32

40
60
80

124

76

43

149

449

293

522
589
139

119
83

221

122

360

193

418
94

51

323

197

614
678
729
149

456
515
574
74

279

146

453

291

366
530
597
654
701

33
65
97

314
363
37
73

182

60
64
25
49
73
96

1.32 - (N)Stack

16

4.8
16
16
24
32
17

92

97.2

162

102

218

134

294
27
54
82

18
36
54

218

162

108

216

144

135
189

72
90

126

2.7
4.1
5.4
6.6
8.5
7

0.8

21

2.4

33.3

1.6
3.2
3.8

39.6

4.32

0.8

15

2.4

49

228

189

4.1

36

109

267

1.32

27

152

138

4.1 - (N)Stack

64

18

56

2.7 - (N)Stack

14

49

28

77

1.32 - (N)Stack

33

40

144

109

290

4.8

80.6

146

254

0.66 - (N)Stack

4.8

120

192

282

32

0.45 - (N)Stack
0.9 - (N)Stack

2.4

152

241

356

521

94

116

110

471

79

138

220

416

63

187

473

390

47

237
102

547

32

129

176
245

32

161

266
370

32
12

100

354

47

12

16

40

115

236

16

20

135

137

1.8

2.64

25

13

0.9

17

29

16

1380
1490

12

3.6

2.4

11

220

1100

25

54

21

5.4

14

389
890

13

0.46

1.32

15

1060

647

62

42

1.2

4.8

0.7

17

1682
2061

47

2.7

2.8

21

228

1060

32

78

0.66

35

24

2.4

12

72

27

16
11

54

1.2

20

10

13

341

841

2.7

5.5

16

147

622

14

0.45

18

220
292

16

36

147

1370

90
(26.57)

31

220

365

80
(23.62)

52

52

390

91
(26.87)

10

74

149

11

147

149

12

220
37

15

69
87

118
10
20

10

40

20

30
50
60
70
80

25

1.6
3.2
4

30

4.8

40

6.4

35

5.6

www.vmeca.com

VACUUM PUMP
Vacuum flow (Nl/m) at different vacuum levels (-kPa)

VTMM100
VTMM150
278 ~ 281
VTMM200
VTMM200F
VTM150LEF
VTM200LEF
VTM300LEF
292 ~ 297 VTM400LEF
VTM500LEF
VTM600LEF
VTM800LEF
VTMM200EF
VTMM300EF
VTMM400EF
298 ~ 303 VTMM500EF
VTMM600EF
VTMM800EF
VTMM1000EF
VTML200
VTML400
VTML600
306 ~ 309 VTML800
VTML1000
VTML1200
VTX5-(N)Stack
228 ~ 231 VTX10-(N)Stack
VTX10x(N-B(BA,...NC)
VTX20x(N-B(BA,...NC)
238 ~ 241
VTX30x(N-B(BA,...NC)
VTX5-A(B,...NC)
VTX10-A(B,...NC)
244 ~ 247
VTX20-B(C,...NC)
VTX30-B(C,...NC)
VTX20KD
VTX30KD
250 ~ 255 VTX40KD
VTX50KD
VTX60KD
VTX25
VTX50
274 ~ 277
VTX75
VTMX100
282 ~ 285 VTMX200
VTMX300
VTH50
VTH150
286 ~ 291
VTH300

-kPa
MAX. -inHg
Vacuum
-kPa (-inHg)
90
(26.57)

1290

4200

4400
5500
6600

2410
4820
7230
9640

12050

100.8
(29.76)

216

1016

420
528

216
290

190.8

1800

1260

878.4

489.6

381.6

2950

2020

3450
4200
1540
2310
3080
3850
4620
6164
7700
1688
3376
5064
6752

8440

1608
2450
3340

1016
1781

1171
1464

528

290

216

2342
793

1588

1116

1323
2119
2646
580

1306
435
580
725
870

1160

1160

3480

1740

6696

540
648
864

432

2320

2900

432

580

290

4464

5580

324

1080

1160
1740

1018

1450

2232

3348

636

763.2

3055
5090

816

508.8

979.2

1058

4076

652.8

254.4

1757

2036
2545

326.4

870

1450

3.2

144

80

40

6.4

144

244.8

585.6

20

216

439.2

900

40

180

642

838

72

162

216
648
864

1080
1296

144

60
80

97.2

194.4

92

259.2

105.6

11.52

576

388.8

158.4

17.28

144

80

40

6.4

80

12.8

120

19.2

480
768
216

324

518.4
120

288

160

432

240

360
576
720
144

160

400
80

576

320

864

35

32

27

22

18

12

18
52

16
47

14
41

11
33

185

108

62

36

18

16

14

11

185

108

52

47

41

33

185

108

290

171

32

124

247

185
365
521
695

1037

18
72
72

144

35
52
69
86

32
32
47
63
78
93

102

292

207

132

411

260

148
424
568
844

1096

521

423

1042

35

198

1355
185

147
846

Specifications subject to change without notice.

105
309
615
813
106
307
614

66

27
27
41
54
66
78
35
69

198

102

398

211

530
66

198
396

18
6

12

22

18

12

33
44
55
65
27
54
81

289

216

210

26

5.4

18

108

105

2.7

22

139

32

26
26
35
43
51
21
42
63

84

162

126

21

15

78

156

18
18
23
29

90

120

54

39

16

25.6
32

6.4

19.2
32

38.4

2.4

0.45 - (N)Stack
0.9 - N)Stack

4.8

1.8

1.2
2.4
7.2

0.9

- (N)Stack

2.7

- (N)Stack

1.2

0.45

4.8

1.8

2.4
7.2
4.8
7.2
9.6
12

23

168

108

240

30
60

9.6

25.6

14.4

45

23

160

34
15

14.4

12.8

200

480

8.67

80

400

72

36

62

124

40

120

11

200

240

14

60

320

160

720

211.2

100

288
432

132

200

15

5.76

384

288

17

52.8

6.4

4.32

129.6

21

13

40

4.5

192

32

24

27

39.6

10128

332

97
(28.64)

290

700

14460

124

97
(28.64)

520

2400

11000

92
(27.17)

1010

3100

2600

8800

92
(27.17)

1530

1260

3300

92
(27.17)

109

2100

2200

92
(27.17)

146

1540

6100

92
(27.17)

291

2200

2150

5010

92
(27.17)

562

1206

1680
91
(26.87)

844

1740

12

- (N)Stack

0.9
2.7
1.8
2.7
3.6
4.5
5.4
4.2

1.5

35

12.6

4.5

69

26

45
92

8.4
17
33

3
6

12

9.6

7.2

3.6

1.2

78

54

15.6

7.2

27

VACUUM
PUMPS

Model

7.8

3.6

0.3

0.48
0.96

www.vmeca.com

117

VACUUM PUMP
Time, s/l, evacuate a volume to different vacuum level (-kPa)
Model
132 ~ 137

VTC 3021

132 ~ 137

VTC 3031

134 ~ 137

VTCL 3021

134 ~ 137

VTCL 3031

138 ~ 143

VTC 3022

138 ~ 143

VTC 3032

140 ~ 143

VTCL 3022

140 ~ 143

VTCL 3032

144 ~ 153

VTC 3122

144 ~ 153

VTC 3123

144 ~ 153

VTC 3124

144 ~ 153

VTC 3132

144 ~ 153

144 ~ 153

VTC 3133
VTC 3134

148 ~ 153

VTCL 3122

148 ~ 153

VTCL 3123

148 ~ 153

VTCL 3124

148 ~ 153

VTCL 3132

148 ~ 153

VTCL 3133

148 ~ 153

VTCL 3134

118

(-kPa)
MAX.
Vacuum Feed (-inHg)
(-kPa) pressure (MPa)

75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)

0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6

Specifications subject to change without notice.

0.03
0.027
0.26
0.019
0.015
0.01
0.035
0.027
0.028
0.028
0.013
0.012
0.018
0.016
0.014
0.011
0.01
0.01
0.018
0.014
0.013
0.013
0.009
0.008
0.018
0.016
0.014
0.01
0.009
0.008
0.008
0.007
0.006
0.011
0.01
0.01
0.006
0.005
0.004
0.005
0.004
0.003
0.018
0.014
0.013
0.012
0.009
0.009
0.01
0.0067
0.006
0.017
0.014
0.012
0.016
0.0085
0.0079
0.0089
0.0057
0.0053

0.12
0.1
0.058
0.09
0.07
0.048
0.084
0.08
0.08
0.09
0.08
0.07
0.065
0.05
0.029
0.043
0.032
0.026
0.04
0.036
0.032
0.037
0.032
0.03
0.065
0.05
0.029
0.04
0.03
0.019
0.03
0.025
0.015
0.043
0.032
0.026
0.03
0.02
0.01
0.02
0.018
0.01
0.04
0.036
0.032
0.029
0.028
0.027
0.025
0.02
0.02
0.037
0.032
0.03
0.03
0.028
0.02
0.023
0.018
0.015

0.21
0.19
0.09
0.1
0.18
0.07
0.17
0.15
0.12
0.17
0.15
0.12
0.108
0.07
0.043
0.05
0.055
0.037
0.08
0.075
0.06
0.073
0.06
0.047
0.108
0.07
0.043
0.07
0.06
0.03
0.05
0.048
0.023
0.05
0.045
0.037
0.038
0.03
0.02
0.027
0.02
0.01
0.08
0.075
0.06
0.057
0.05
0.04
0.04
0.037
0.03
0.073
0.06
0.047
0.05
0.05
0.04
0.04
0.03
0.029

0.38
0.3
0.1
0.32
0.28
0.09
0.29
0.25
0.2
0.29
0.25
0.2
0.2
0.16
0.05
0.17
0.15
0.047
0.145
0.125
0.1
0.14
0.128
0.098
0.2
0.16
0.05
0.13
0.1
0.033
0.095
0.08
0.025
0.17
0.15
0.047
0.1
0.09
0.03
0.08
0.07
0.02
0.145
0.125
0.1
0.097
0.083
0.06
0.07
0.065
0.055
0.14
0.128
0.098
0.09
0.08
0.06
0.07
0.063
0.052

0.47
0.4
0.25
0.42
0.38
0.2
0.38
0.3
0.28
0.38
0.3
0.28
0.25
0.23
0.13
0.23
0.22
0.12
0.195
0.15
0.155
0.19
0.16
0.15
0.25
0.23
0.13
0.16
0.13
0.08
0.12
0.1
0.06
0.23
0.22
0.12
0.14
0.12
0.06
0.1
0.09
0.05
0.195
0.15
0.155
0.127
0.1
0.09
0.09
0.075
0.073
0.19
0.16
0.15
0.12
0.01
0.09
0.09
0.075
0.071

0.73
0.64
0.5
0.73
0.64
0.42
0.8
0.4
0.36
0.8
0.4
0.36
0.395
0.34
0.25
0.38
0.33
0.23
0.5
0.2
0.18
0.45
0.25
0.2
0.395
0.34
0.25
0.24
0.21
0.16
0.18
0.16
0.12
0.38
0.33
0.23
0.24
0.21
0.14
0.18
0.16
0.1
0.5
0.2
0.18
0.27
0.13
0.12
0.02
0.1
0.09
0.45
0.25
0.2
0.26
0.13
0.12
0.2
0.1
0.09

1.62
0.8
0.69
1.62
0.8
0.6
0.8
0.6
0.8
0.6
0.81
0.5
0.355
0.81
0.48
0.35
0.4
0.35
0.43
0.32
0.81
0.5
0.355
0.54
0.26
0.23
0.4
0.2
0.17
0.81
0.48
0.35
0.54
0.24
0.02
0.4
0.2
0.15
0.4
0.35
0.26
0.2
0.2
0.15
0.43
0.32
0.26
0.2
0.2
0.15

1.2
1.05
1.2
1
0.795
0.71
0.78
0.7
0.795
0.71
0.4
0.35
0.3
0.26
0.78
0.7
0.4
0.33
0.3
0.25
-

3.8
3.5
3.8
3.4
2.01
1.75
1.98
1.72
2.01
1.75
1.27
1.17
0.95
0.87
1.98
1.72
1.27
1.13
0.95
0.85
-

www.vmeca.com

VACUUM PUMP

Model
159 ~ 165

VS 144

159 ~ 165

VS 146

159 ~ 165

VS 148

161 ~ 165
161 ~ 165
161 ~ 165

171 ~ 177

171 ~ 177

173 ~ 177

173 ~ 177
184 ~ 193
184 ~ 193
184 ~ 193
184 ~ 193

188 ~ 193
188 ~ 193

188 ~ 193
188 ~ 193

VLS 144
VLS 146
VLS 148
MD 302
MD 303
MDL 302
MDL 303
PM 303X1
PM 303X2
PM 303X3
PM 303X4
PML 303X1
PML 303X2
PML 303X3
PML 303X4

(-kPa)
MAX.
Vacuum Feed (-inHg)
-kPa (-inHg) pressure (MPa)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
75 (22.15)
93 (27.46)
93 (27.46)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)
60 (17.72)
70 (20.67)
75 (22.15)

0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.22
0.3
0.4
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6
0.4
0.5
0.6

Specifications subject to change without notice.

0.019
0.015
0.01
0.019
0.015
0.01
0.019
0.015
0.01
0.028
0.013
0.012
0.028
0.013
0.012
0.028
0.013
0.012
0.03
0.027
0.026
0.019
0.015
0.01
0.035
0.027
0.028
0.028
0.013
0.012
0.019
0.015
0.01
0.011
0.01
0.01
0.006
0.005
0.004
0.005
0.004
0.003
0.032
0.023
0.022
0.017
0.014
0.012
0.016
0.0085
0.0079
0.0089
0.0057
0.0053

0.09
0.07
0.048
0.09
0.07
0.048
0.09
0.07
0.048
0.09
0.08
0.07
0.09
0.08
0.07
0.09
0.08
0.07
0.12
0.1
0.058
0.09
0.07
0.048
0.084
0.08
0.08
0.09
0.08
0.07
0.09
0.07
0.048
0.043
0.032
0.026
0.03
0.02
0.01
0.02
0.018
0.01
0.09
0.08
0.07
0.037
0.032
0.03
0.03
0.028
0.02
0.023
0.018
0.015

0.1
0.18
0.07
0.1
0.18
0.07
0.1
0.18
0.07
0.17
0.15
0.12
0.17
0.15
0.12
0.17
0.15
0.12
0.21
0.19
0.09
0.1
0.18
0.07
0.17
0.15
0.12
0.17
0.15
0.12
0.1
0.18
0.07
0.05
0.055
0.037
0.038
0.03
0.02
0.027
0.002
0.01
0.17
0.15
0.12
0.073
0.06
0.047
0.05
0.05
0.04
0.04
0.03
0.029

0.32
0.28
0.09
0.32
0.28
0.09
0.32
0.28
0.09
0.29
0.25
0.2
0.29
0.25
0.2
0.29
0.25
0.2
0.38
0.3
0.1
0.32
0.28
0.09
0.29
0.25
0.2
0.29
0.25
0.2
0.32
0.28
0.09
0.17
0.15
0.047
0.1
0.09
0.03
0.08
0.07
0.02
0.29
0.25
0.2
0.14
0.128
0.098
0.09
0.08
0.06
0.07
0.063
0.052

0.42
0.38
0.2
0.42
0.38
0.2
0.42
0.38
0.2
0.38
0.3
0.28
0.38
0.3
0.28
0.38
0.3
0.28
0.47
0.4
0.25
0.42
0.38
0.2
0.38
0.3
0.28
0.38
0.3
0.28
0.42
0.38
0.2
0.23
0.22
0.12
0.14
0.12
0.06
0.1
0.09
0.05
0.38
0.3
0.28
0.19
0.16
0.15
0.12
0.1
0.09
0.09
0.075
0.071

0.73
0.64
0.42
0.73
0.64
0.42
0.73
0.64
0.42
0.8
0.4
0.36
0.8
0.4
0.36
0.8
0.4
0.36
0.73
0.64
0.5
0.73
0.64
0.42
0.8
0.4
0.36
0.8
0.4
0.36
0.73
0.64
0.42
0.38
0.33
0.23
0.24
0.21
0.14
0.18
0.16
0.1
0.8
0.4
0.36
0.45
0.25
0.2
0.26
0.13
0.12
0.2
0.1
0.09

1.62
0.8
0.6
1.62
0.8
0.6
1.62
0.8
0.6
0.8
0.6
0.8
0.6
0.8
0.6
1.62
0.8
0.69
1.62
0.8
0.6
0.8
0.6
0.8
0.6
1.62
0.8
0.6
0.81
0.48
0.35
0.54
0.24
0.2
0.4
0.2
0.15
0.8
0.6
0.43
0.32
0.26
0.2
0.2
0.15

1.2
1
1.2
1
1.2
1
1.2
1.05
1.2
1
1.2
1
0.78
0.7
0.4
0.33
0.3
0.25
-

3.8
3.4
3.8
3.4
3.8
3.4
3.8
3.5
3.8
3.4
3.8
3.4
1.98
1.72
1.27
1.13
0.95
0.85
-

www.vmeca.com

VACUUM
PUMPS

Time, s/l, evacuate a volume to different vacuum level (-kPa)

119

VACUUM PUMP
Time, s/l, evacuate a volume to different vacuum level (-kPa)
Model
VKX5

196 ~ 199 VKM5

VKM61

200 ~ 211 VKM62

VKX61
VKX62
VKX73
212 ~ 223 VKX74
VKM73
212 ~ 223 VKM74
VTOM5-(N)Stack
232 ~ 235 VTOM10-(N)Stack
VTOX5-(N)Stack
232 ~ 235 VTOX10-(N)Stack
VTM5-(N)Stack
236 ~ 241 VTM10-(N)Stack
VTM10X(N)B(BA,...NC)
242 ~ 247 VTM20X(N)B(BA,...NC)
VTM30X(N)B(C,...NC)
VTM5-A(B,...NC)
VTM10-A(B,...NC)
226 ~ 231
VTM20-B(C,...NC)
VTM30-B(C,...NC)
VTM20KD
VTM30KD
248 ~ 255 VTM40KD
VTM50KD
VTM60KD
VTM25L
VTM50L
VTM75L
262 ~ 265
VTM100L
VTM125L
VTM150L
VTL25
VTL50
VTL75
VTL100
266 ~ 269
VTL125
VTL150
VTL175
VTL200
VTM25
VTM50
VTM75
VTM100
270 ~ 273
VTM125
VTM150
VTM175
VTM200
200 ~ 211

120

-kPa
MAX. -inHg
Vacuum
-kPa (-inHg)
92 (27.17)
85 (25.1)
85
(25.1)

92
(27.17)
92
(27.17)
85
(25.1)

85
(25.1)

92
(27.17)
85
(25.1)
85
(25.1)
85
(25.1)

0.26

0.80

0.218

0.556

0.258
0.1

2.356

3.44

0.796

1.516

2.4

3.56

0.3

0.57

0.21

0.247
0.277

0.109

0.109
0.054

0.027

0.007

0.25

0.186

0.104

0.186

0.058

0.104

0.056
0.032

0.01

0.014

0.046

0.013

0.25

0.5

0.069

0.023

0.5

0.278

0.139

0.041

0.5

0.186

0.139

0.041

0.104
0.556

0.218

0.912

0.024
0.016

0.25

0.125
0.083
0.12

0.062
0.047
0.031

1.388
1.576
0.788
0.788
0.394
0.295
1.576
0.788
0.394
0.295
0.394
0.295
0.197
0.164
0.131
0.24
0.12
0.09
0.06

0.0061

0.0147

0.0302

0.053

0.017

0.045

0.09

0.18

0.0134

0.012

0.027

0.008

0.021

0.0069
0.0049
0.0043

0.006

1.178
0.589

2.65
3.44

0.015

0.066
0.050
0.033

0.0311

0.0050

0.0127

0.0279

0.0135
0.0113

0.0296
0.0258

0.033
0.239
0.125
0.094
0.063
0.055
0.047
0.039
0.027

1.32
5.45
2.89

20.53
9.79

10.216

1.317

2.579

0.441

0.647

0.245

0.359

0.212

5.29

5.27

0.898

0.425

5.41

1.317

0.647

0.196

10.4

0.86

2.635

0.441

0.294

2.58

10.216 / (N)Stack
5.158 / (N)Stack

2.635

0.589

4.8

5.27

3.64

1.72

0.589

3.87

13.95

1.178

2.356

2.54

5.594

7.45

0.647
3.44
0.86
0.86

0.431
0.286
0.66
0.33

0.898

1.317
0.898
0.658
0.549
0.439
1.02
0.51

1.935 / (N)Stack
5.158
1.935
2.579
1.935
1.289
1.074
0.859
1.64

4.6

0.82

2.3

0.159

0.248

0.383

0.621

1.73

0.089

0.143

0.215

0.36

1.01

0.106
0.071
0.34
0.18

0.165
0.115
0.53
0.27

0.087

0.110

1.98

0.441

0.057

0.019

7.2

1.72

5.08

5.158 / (N)Stack
2.579 / (N)Stack

0.035

0.037

3.81

2.58

5.158

19

2.635

1.72

0.021

0.022

0.05

19.19

10.22

1.72

0.012

0.023

Specifications subject to change without notice.

1.178

5.46

0.118

0.0143

0.0048

2.356

1.98

0.076

0.03

0.0055
0.0052

1.989

3.63

0.044

0.030

0.009

1.429

0.86

0.026

0.048

0.012

0.59

1.29

0.014

0.011

0.019

0.1

0.88

1.84

0.08

0.013

0.0047

0.05

0.046

10.16

1.23

4.91

0.04

0.015

0.0058

0.0294

6.896

0.89

3.889

1.018

10.216

3.445

2.688

0.678

0.39

5.27

2.455

1.34

1.619

0.25

10.16

5.27

1.78

0.848

0.139

0.041

0.6

6.89

2.635

2.529

0.278

0.054

0.9

3.44
1.72

1.748

0.278

0.109

0.38

1.2

1.178

1.128

0.556

0.218

0.758

0.788

2.36

0.628

0.508

0.187

0.5

1.58

0.59

0.408

0.177

1.18

0.38

0.14

0.05

0.0051

90
(26.57)

1.576

0.08

0.02

80
(23.62)

0.2

0.06

0.018

91
(26.87)

4.91

0.398

0.129

0.054
85
(25.1)

3.38

0.278

0.109

1.52

2.4

0.56

0.22

0.13
0.09

0.062
0.051
0.416
0.209
0.157
0.105
0.092
0.078
0.065
0.054

0.20
0.14

0.095
0.078

0.255
0.175
0.85

0.41
0.31

1.15
0.87

0.43
0.32
0.22
0.19
0.15
0.14
0.12

0.686

1.122

1.91

4.210

0.259

0.445

0.788

1.644

0.260

0.460

0.345
0.173
0.151
0.129
0.108
0.090

0.593
0.297
0.223
0.186
0.153

1.05

0.526
0.394
0.329
0.274

2.190
1.097
1.960
0.823
0.686
0.67

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VACUUM PUMP
Time, s/l, evacuate a volume to different vacuum level (-kPa)

VTMM100
VTMM150
278 ~ 281
VTMM200
VTMM200F
VTM150LEF
VTM200LEF
VTM300LEF
292 ~ 297 VTM400LEF
VTM500LEF
VTM600LEF
VTM800LEF
VTMM200EF
VTMM300EF
VTMM400EF
298 ~ 303 VTMM500EF
VTMM600EF
VTMM800EF
VTMM1000EF
VTML200
VTML400
VTML600
306 ~ 309 VTML800
VTML1000
VTML1200
VTX5-(N)Stack
228 ~ 231 VTX10-(N)Stack
VTX10x(N-B(BA,...NC)
VTX20x(N-B(BA,...NC)
238 ~ 241
VTX30x(N-B(BA,...NC)
VTX5-A(B,...NC)
VTX10-A(B,...NC)
244 ~ 247
VTX20-B(C,...NC)
VTX30-B(C,...NC)
VTX20KD
VTX30KD
250 ~ 255 VTX40KD
VTX50KD
VTX60KD
VTX25
VTX50
274 ~ 277
VTX75
VTMX100
282 ~ 285 VTMX200
VTMX300
VTH50
VTH150
286 ~ 291
VTH300

-kPa
MAX. -inHg
Vacuum
-kPa (-inHg)
92
(27.17)

0.0053

0.0144

0.031

0.063

0.105

0.173

0.297

0.526

1.097

0.0032

0.0076

0.0165

0.029

0.054

0.090

0.153

0.274

0.67

0.0033

0.009

0.02

0.0046
0.0031

0.011

0.0075

0.00250
91
(26.87)

0.008

0.015

0.0008

0.0023

0.005

0.01

0.0031

0.0075

0.0164

0.0038

0.0082

0.001

0.0015
0.0013
0.0012

0.0021

92
(27.17)

0.005

0.0013

0.0007

92
(27.17)

0.0011
0.0009
0.0006
0.0005
0.0004
0.258

0.003

0.0018
0.0056
0.0033
0.0028
0.0019
0.0016
0.0055
0.0027
0.0021
0.0014
0.0012
0.0009

0.129
0.129
0.064
0.048
0.258
0.129
0.064
0.048
0.064

92
(27.17)

0.048
0.032
0.027
0.021

97
(28.64)
97
(28.64)
100.8
(29.76)

0.04

0.004

0.0017

0.0008

92
(27.17)

0.029

0.015

0.0023

92
(27.17)

0.0164

0.047

0.007

0.0006

92
(27.17)

0.025

0.028
0.014
0.011

0.0093
0.0064
0.0049
0.029
0.011
0.006

Specifications subject to change without notice.

0.796
0.398
0.398
0.199
0.149
0.796
0.398
0.199
0.149
0.199
0.149
0.099
0.083
0.067
0.068
0.035
0.023
0.017
0.012
0.009
0.07

0.025
0.013

0.01

0.006

0.03
0.02

0.012

0.004

0.008

0.0123

0.022

0.0072
0.0062
0.0041
0.0036
0.0124
0.0062
0.0047
0.0031
0.0026
0.0021
1.516
0.758
0.758
0.379

0.029
0.014
0.013
0.011
0.007
0.006
0.029
0.014
0.011
0.007
0.006
0.005
2.4
1.2
1.2
0.6

0.078
0.054
0.071

0.129
0.090
0.11

0.128

0.027

0.041

0.064

0.035
0.021
0.018
0.013
0.054
0.041
0.027
0.024
0.021
0.014
0.012
0.054
0.027
0.021
0.014
0.012
0.009
3.56

0.055
0.033
0.028
0.021
0.090
0.068
0.045
0.040
0.034
0.022
0.018
0.090
0.045
0.034
0.023
0.018
0.014
4.91

1.78

2.455

0.89

1.227

1.78

2.455

0.673

0.758

1.2

1.78

2.455
0.917

0.379

0.6

3.56
0.89

0.284

0.44

0.673

0.284

0.44

0.673

0.158

0.25

0.371

0.379
0.189
0.126
0.134
0.067

0.6

0.29
0.20
0.26
0.13

0.89

0.445
0.297
0.49
0.25

0.046

0.095

0.167

0.024

0.047

0.082

0.036
0.018
0.12
0.05

0.025

0.064
0.031
0.25

0.097
0.048

0.17

0.083

0.44
2.4

0.153

0.053

0.284
1.156

0.223

0.123
0.061
0.55
0.17

0.085

0.917
4.91

1.227
1.227
0.917
0.613
0.511
0.409
0.736
0.368
0.246
0.184
0.123
0.092
0.92

0.272
0.136

0.085
0.051
0.043
0.032

0.394
0.274
0.31
0.21
0.16
0.11
0.09
0.08
0.05

0.153

0.274

0.076

0.137

0.115
0.067
0.057
0.038
0.031
0.153
0.076
0.057
0.038
0.031
0.024
6.896
3.445
3.445
1.722

0.068
0.057
0.274

0.045
10.16
5.08
5.08
2.54

10.16
2.54

0.714

1.016

0.272
0.186
0.141
1.446
0.41

0.205

015

0.67

0.335
0.252
0.168
0.147
0.67

0.168

0.057

1.906

0.376

0.22

0.068

0.103

1.287

0.563

0.26

0.335

1.906

1.126

0.29

0.137

1.287

0.569

0.44

0.294

0.103

5.08

0.858

0.58

0.120

3.445

1.722

0.87

0.503

1.906

1.722

0.67

0.206

1.287
6.896

0.823

2.54

1.273
0.848
1.598

0.252
0.147
0.125

19.19 (N)Stack
9.594 (N)Stack
9.594 (N)Stack
4.797 (N)Stack
3.595 (N)Stack
19.19
9.594
4.797
3.595
4.797
3.595
2.398
1.999
1.599
2.7

3.76

0.9

1.264

0.448

0.631

1.88

0.799

1.35

0.397

0.674

0.197

0.336

0.533
0.256
2.2
0.6
0.3

VACUUM
PUMPS

Model

3.39
1.17

0.585

0.948
0.473
4.986
1.82
0.91

9.18

3.586
1.798

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121