Physical vapor deposition

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Inside the Plasma Spray-Physical Vapor Deposition, or PS-PVD, ceramic powder is introduced into the plasma
flame, which vaporizes it and then condenses it on the (cooler) workpiece to form the ceramic coating.


PVD: Process flow diagram
Physical vapor deposition (PVD) describes a variety of vacuum deposition methods used to
deposit thin films by the condensation of a vaporized form of the desired film material onto
various workpiece surfaces (e.g., ontosemiconductor wafers).
The coating method involves purely physical processes such as high-temperature
vacuum evaporation with subsequent condensation, or plasma sputter bombardment rather than
involving a chemical reaction at the surface to be coated as in chemical vapor deposition.
The term physical vapor deposition originally appeared in the 1966 book Vapor Deposition by C.
F. Powell, J. H. Oxley and J. M. Blocher Jr., (but Michael Faraday was using PVD to deposit
coatings as far back as 1838). Physical vapor deposition coating is a product that is currently
being used to enhance a number of products, including automotive parts like wheels and pistons,
surgical tools, drill bits, and guns. The current version of physical vapor deposition was
completed in 2010 by NASA scientists at the NASA Glenn Research Center in Cleveland, Ohio.
This physical vapor deposition coating is made up of thin layers of metal that are bonded
together through a rig that NASA finished developing in 2010. In order to make the coating,
developers put the essential ingredients into the rig, which drops the surrounding atmospheric
pressure to one torr (1/760 of our everyday atmosphere). From there, the coating is heated with
a plasma torch that reaches 17,540.33 degrees Fahrenheit. In the automotive world, it is the
newest alternative to the chrome plating that has been used for trucks and cars for years. This is
because it has been proven to increase durability and weigh less than chrome coating, which is
an advantage because a vehicle's acceleration and fuel efficiency will increase. Physical vapor
deposition coating is gaining in popularity for many reasons, including that it enhances a
products durability. In fact, studies have shown that it can enhance the lifespan of an
unprotected product tenfold. Variants of PVD include, in alphabetical order:
Cathodic Arc Deposition: In which a high-power electric arc
discharged at the target (source) material blasts away some into
highly ionized vapor to be deposited onto the workpiece.
Electron beam physical vapor deposition: In which the material
to be deposited is heated to a high vapor pressure by electron
bombardment in "high" vacuum and is transported by diffusion
to be deposited by condensation on the (cooler) workpiece.
Evaporative deposition: In which the material to be deposited is
heated to a high vapor pressure by electrically resistive heating
in "low" vacuum.
[1][2]

Pulsed laser deposition: In which a high-power laser ablates
material from the target into a vapor.
Sputter deposition: In which a glow plasma discharge (usually
localized around the "target" by a magnet) bombards the
material sputtering some away as a vapor for subsequent
deposition.
PVD is used in the manufacture of items, including semiconductor devices, aluminized PET
film for balloons and snack bags, and coated cutting tools for metalworking. Besides PVD tools
for fabrication, special smaller tools (mainly for scientific purposes) have been developed. They
mainly serve the purpose of extreme thin films like atomic layers and are used mostly for small
substrates. A good example are mini e-beam evaporators which can deposit monolayers of
virtually all materials with melting points up to 3500 C.
Common coatings applied by PVD are Titanium nitride, Zirconium nitride, Chromium
nitride, Titanium aluminum nitride.
[3]

The source material is unavoidably also deposited on most other surfaces interior to the vacuum
chamber, including the fixturing to hold the parts.
Some of the techniques used to measure the physical properties of PVD coatings are:
Calo tester: coating thickness test
Nanoindentation: hardness test for thin-film coatings
Pin on disc tester: wear and friction coefficient test
Scratch tester: coating adhesion test
Advantages:
PVD coatings are sometimes harder and more corrosion resistant than coatings applied by the
electroplating process. Most coatings have high temperature and good impact strength, excellent
abrasion resistance and are so durable that protective topcoats are almost never necessary.
Ability to utilize virtually any type of inorganic and some organic coating materials on an equally
diverse group of substrates and surfaces using a wide variety of finishes.
More environmentally friendly than traditional coating processes such as electroplating and
painting.
More than one technique can be used to deposit a given film.
Disadvantages:
Specific technologies can impose constraints; for example, line-of-sight transfer is typical of
most PVD coating techniques, however there are methods that allow full coverage of complex
geometries.
Some PVD technologies typically operate at very high temperatures and vacuums, requiring
special attention by operating personnel.
Requires a cooling water system to dissipate large heat loads.
Application: (Reference: Achal Singh SRM-CEL) As mentioned previously, PVD coatings are
generally used to improve hardness, wear resistance and oxidation resistance. Thus, such
coatings use in a wide range of applications such as:
Aerospace
Automotive
Surgical/Medical
[4]

Dies and moulds for all manner of material processing
Cutting tools
Firearms
Optics
Watches
Thin films (window tint, food packaging, etc.)
See thin-film deposition for a more general discussion of this class of manufacturing technique.
Contents
[hide]
1 See also
2 Notes
3 References
4 External links
See also[edit]
HPCVD
Chemical vapor deposition
Ion plating
Notes[edit]
1. Jump up^ He, Zhenping; Kretzschmar, Ilona (6 December
2013). "Template-Assisted GLAD: Approach to Single and
Multipatch Patchy Particles with Controlled Patch
Shape". Langmuir 29 (51): 15755
15761. doi:10.1021/la404592z.
2. Jump up^ He, Zhenping; Kretzschmar, Ilona (18 June 2012).
"Template-Assisted Fabrication of Patchy Particles with
Uniform Patches". Langmuir28 (26): 9915
9919. doi:10.1021/la3017563.
3. Jump up^ http://www.coatingservicesgroup.com
4. Jump up^ http://www.ionfusion.com/technology
References[edit]
Anders, Andre (editor). Handbook of Plasma Immersion Ion
Implantation and Deposition. New York: Wiley-Interscience,
2000. ISBN 0-471-24698-0.
Bach, Hans, and Dieter Krause (editors). Thin Films on Glass.
Schott series on glass and glass ceramics. London: Springer-
Verlag, 2003. ISBN 3-540-58597-4.
Bunshah, Roitan F. (editor). Handbook of Deposition Technologies
for Films and Coatings: Science, Technology and Applications,
second edition. Materials science and process technology series.
Park Ridge, N.J.: Noyes Publications, 1994. ISBN 0-8155-1337-2.
Glser, Hans Joachim. Large Area Glass Coating. Dresden: Von
Ardenne Anlagentechnik, 2000. ISBN 3-00-004953-3.
Glocker, David A., and S. Ismat Shah (editors). Handbook of Thin
Film Process Technology (2 vol. set). Bristol, U.K.: Institute of
Physics Pub, 2002. ISBN 0-7503-0833-8.
Mahan, John E. Physical Vapor Deposition of Thin Films. New
York: John Wiley & Sons, 2000. ISBN 0-471-33001-9.
Mattox, Donald M. Handbook of Physical Vapor Deposition (PVD)
Processing: Film Formation, Adhesion, Surface Preparation and
Contamination Control.. Westwood, N.J.: Noyes Publications,
1998. ISBN 0-8155-1422-0.
Mattox, Donald M. The Foundations of Vacuum Coating
Technology. Norwich, N.Y.: Noyes Publications/William Andrew
Pub., 2003. ISBN 0-8155-1495-6.
Mattox, Donald M. and Vivivenne Harwood Mattox (editors). 50
Years of Vacuum Coating Technology and the Growth of the
Society of Vacuum Coaters. Albuquerque, N.M.: Society of Vacuum
Coaters, 2007. ISBN 978-1-878068-27-9.
Powell, Carroll F., Joseph H. Oxley, and John Milton Blocher
(editors). Vapor Deposition. The Electrochemical Society series.
New York: Wiley, 1966.
Westwood, William D. Sputter Deposition. AVS Education
Committee book series, v. 2. New York: Education Committee,
AVS, 2003. ISBN 0-7354-0105-5.
Willey, Ronald R. Practical Monitoring and Control of Optical Thin
Films. Charlevoix, MI: Willey Optical, Consultants, 2007. ISBN 978-
0-615-13760-5.
Willey, Ronald R. Practical Equipment, Materials, and Processes
for Optical Thin Films. Charlevoix, MI: Willey Optical, Consultants,
2007. ISBN 978-0-615-14397-2.
Snyder, Tim. "NASAs PVD Chrome Coating Can Enhance Your
Driving Experience." 4wheelonline.com. 4wheelonline, 6 May 2013.
Web. <http://4wheelonline.com/nasa-pvd-chrome-
coating.226590.0>.
External links[edit]
Society of Vacuum Coaters
PVD Animationan animation of a generic PVD sputter tool
Physical vapor deposition
Categories:
Coatings
Plasma processing
Semiconductor device fabrication
Thin film deposition
History of Physical Vapor Deposition
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