Assignment (laboratory session)

Objective: Assignment (laboratory session) is designed to maximize the students understanding of the basics of a microfabricated resonator - one of the key elements that make up todays micro systems. Device:
123 movable comb fingers on each side (top & bottom)
'o!able fingers $. m - m .% m $ m
1&.& m

Anchor

- m

.% m
Area0 6%57... m$ -% m 1. m 1$&% m Anchors .% m -% m 1-& m

51 m /ength0 1.1 m2 3idth - m2 4hickness0 $ m2

Fig .1 !er!ie" of the de!ice layout

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4he de!ice to be tested is a '8')-dri!en micro gyroscope "ith optical readout. 4he gyroscope is dri!en electrostatically "ith a comb-dri!e resonator. *n this experiment7 "e "ill focus on the fre9uency characteristics of the '8') comb-dri!e resonator. :ey dimensions of the resonator are sho"n in the abo!e figures0 (4hickness of the structure is $ m7 gap spacing bet"een the structure and substrate is $ m). 'ore details can be found in the de!ice layout design0 ;4esting<de!ice.gds= on course "ebsite. Session 1: Understand the mechanism of the comb-drive microresonator. (Home work) >1. ?eri!e the applied !oltage Vx and static displacement relationship for the microresonator7 "hen dri!en by single-side dri!ing mechanism as sho" in Fig.$. 8stimate the stable operation !oltage and maximum stable tra!el range of the comb dri!e.
Folded-beam Flexure Movable Shuttle Coriolis Sensing Ground Plane

Comb Drive

Vx

Fig.$ 'icro resonator single-side dri!ing mechanism "ith ?# !oltage Vx >$. ?ra" a mechanical e9ui!alent model of the microresonator. @i!en a polysilicon structure thickness of $ m7 Aoungs 'odulus of 1.6% B 1%11 Ca7 material density of $--% kgDm-7 and !iscosity of the air of 1.1 B 1%-. (sDm$7 estimate the e9ui!alent spring constant7 mass7 and damping coefficient of the model. >-. 8stimate the resonant fre9uency and > factor of the resonator.

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Session 2: estin! of microresonator ("ab Session) @eneral )teps0 1. #arefully put the de!ice on the probe station7 adEust the microscope7 and !isually check the de!ice. $. Align and position the probes under the microscope7 place them carefully on the bonding pads7 and make sure they are electrically connected to the pads. -. #onnect the probes to the signal generators and !oltage sources. &. 4urn on the C#7 and run the image capturing soft"are. .. #apture the de!ice image under operation7 and measure the !ibration amplitude and record. >&. )ingle-side dri!ing #onnect the signal generators and !oltage sources according to the follo"ing schematic diagram. Apply Fb G -% Folts7 and Fac G -%cos($ft) Folts. )can the fre9uency f from - kHz to 1 :Hz "ith incremental steps of 1%% Hz. At each dri!ing fre9uency7 record the !ibration amplitude of the de!ice. Ieport your experimental results and explain the phenomenon obser!ed.
Folded-beam Flexure Movable Shuttle Coriolis Sensing Ground Plane

Comb Drive

Vac

Vb

Fig.- 'icro resonator single-side dri!ing mechanism >.. Cush-pull dri!ing

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#onnect the signal generators and !oltage sources according to the follo"ing schematic diagram. Apply Fb G -% Folts7 Fac1 G 1%cos($ft) Folts and Fac$ G 1%cos($ftJ11%) Folts. )can the fre9uency f from - kHz to 1 :Hz "ith incremental steps of 1%% Hz. At each dri!ing fre9uency7 record the !ibration amplitude of the de!ice. Ieport your experimental results and explain phenomenon obser!ed.
Folded-beam Flexure Movable Shuttle Coriolis Sensing Ground Plane

Comb Drive

Vac1

Vb

Vac2

Fig.& 'icro resonator push-pull dri!ing mechanism >6. >K. Ieport the experimental resonant fre9uency and >-factor of the de!ice. Are there any discrepancies bet"een the analytical and experimental resultsL 8xplain.

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