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standard deviation:
22 (n-1) i=1 s2= ~ with: n-1 n-1 22 22 1- 2,(n-1) 2, (n-1) < s2 < n-1 n-1 2 where 2 1- 2,(n-1) and 2, (n-1) are the numbers that capture between them 1- of the2 (n-1) distribution
Lecture 12: Control Charts for Variables
(xi-)2
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= 0.745
0.01
LCL 0.0003
20 40 60 80
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Range R is related to the sigma in terms of a constant (depending on sample size) that is listed in statistical tables: R1+R2+ ... +Rm R= m = R d2
Lecture 12: Control Charts for Variables
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UCL = 507.1
239.9
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Rational Subgrouping
Rule of thumb: use only groups with IIND data, if possible. (Independently, Identically, Normally Distributed). Wafer
Lot Batch The natural grouping of semiconductor data might not lead to IIND subgroups!
Lecture 12: Control Charts for Variables
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0.2
UCL 0.203
0.1
0.096
0.0 1.0 X chart, n=5, A2=0.577 0.9 0.8 0.7 0.6 0.5 0 20
LCL 0.0
Lot No
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0.745
LCL 0.514
0 20 40 60 80
If this looks too good, it might be because of the "mixture" patterns in it! Lecture 12: Control Charts for Variables
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Process Capability
Process specifications and control limits are, in general, different concepts. A process might be in control without meeting the specs, or might be meeting the specs without being is control...
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CP
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Special Patterns
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UCL (+3)
Center Line
7 LCL (-3)
1. Any point beyond 3s UCL or LCL. 2. 2/3 cons. points on same side, in A or beyond 3. 4/5 cons. points on same side, in B or beyond. 4. 9/9 cons. points on same side of center line. 5. 6/6 cons. points increasing or decreasing. 6. 14/14 cons. points alternating up and down. 7. 15/15 cons. points on either side in zone C.
Lecture 12: Control Charts for Variables
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This assumption is not important for the x chart (thanks to the central limit theorem). The R chart is much more sensitive to this assumption. If the underlying distribution is not normal, watch for signs of correlation between x and R.
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The probability that the shift will be detected on the mth sample is: m-1(1 - ) And the average number of samples that we need for detecting this shift is: ARL = 1 1 - also known as the Average Run Length
Lecture 12: Control Charts for Variables
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x - s control charts
When n is larger (>10), then using the standard deviation s gives better results. Although s2 is a good, unbiased estimator of the variance, n
(xi-x)
i=1
n-1 s is a biased estimator of sigma. A correction factor is a function of n and can be found is tables. In summary: s = 1 s i and s unb. estim of sig m i=1 C4 CL s = B 3,4 s B 3,4 = 1 3 C4 CL x = x A 3s A 3 =
Lecture 12: Control Charts for Variables
s =
1-C 4 3
C4 n
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0.10
0.05
0.00 0.15
0.10
0.05
0.00 0
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40
60
80
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Control Charts for Individual Units Moving Range chart for Temp. Control:
5 4 3 2 1 0 4 2 0 -2 -4
Lecture 12: Control Charts for Variables
UCL 3.92
LCL -3.19e+0
0 20 40 60 80 100 Time
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Summary, so far
Continuous variables need two (2) charts:
chart monitoring the mean chart monitoring the spread
Rational subgrouping must be done correctly. Charts are using Control Limits - Spec limits are very different (conceptually and numerically). The concept of process capability brings the two sets of limits together. A chart is a hypothesis test. It suffers from type I and type II errors. Violating the control limits is just one type of alarm, out of many.
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