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D. BOONYAWAN
PBPF, Dept of Physics&Mat.Sci., Fac of Science, Chiang Mai University, Thailand
*ThEP Center, CHE, 328 Si Ayutthaya Rd., Bangkok 10400, Thailand
Diamond-like Carbon ?
500
Data: Data1_B
Model: Gauss
400 D- Peak Equation: y=y0 + (A/(w*sqrt(PI/2)))*exp(-2*((x-xc)/w)^2)
W eighting:
y No weighting
y0 0 ? 0
A2 45263.81962 ? 536.92968
-100
800 1000 1200 1400 1600 1800 2000
Chiang Mai University
1 m.
Cathodic vacuum
arc plasma source
The picture to showed beam profile of Ar with pressure 3.4×10-1 torr and
the microwave plasma 75 watt.
Chiang Mai University
RBS
RBS/Channeling
PIXE IL
e-gun
Sample holder
1.7 MV Tandetron accelerator Analysis Chamber
Chiang Mai University