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DLC Coating on Food Packaging Film

Using PIII-D Technique

D. BOONYAWAN
PBPF, Dept of Physics&Mat.Sci., Fac of Science, Chiang Mai University, Thailand
*ThEP Center, CHE, 328 Si Ayutthaya Rd., Bangkok 10400, Thailand

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Where are us?

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


What is PIII-D?

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


PIII-D benefits
• Higher ion energy (>1 keV)
• Low power (pulsed mode)
• Conducting to non-c materials used
• Selective species

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


DLC- benefits
• Flexible, Reusable & Biocompatible
• Reduced friction & wear
• Reduced gas permeability
(good gas barrier)
• Well adhere to polymer

Diamond-like Carbon ?

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Experiment

• PET & PVDC: 60 mm

• Ar sputtering prior deposition: 5 min


• C2H2 Deposit with – 3 kV pulse 20 mS
@200Hz
• Process time: 5, 10, 15 min

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Characterization

• Oxygen Transmission Rate (OTR)


• Color/transparency
• Atomic Force Microscope
• Raman spectroscopy

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Result : OTR

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Result: Color
Processing Times L a b ∆E
PVDC
0 (uncoated) 99.93 -0.01 0.02 0.00

5 91.15 0.30 6.02 10.64

10 90.35 0.36 13.14 16.25

15 85.90 1.21 18.11 22.93


PET

0 (uncoated) 100.00 -0.01 0.00 0.00


5 93.56 0.19 6.05 8.84

10 92.46 0.42 12.17 14.32

15 85.36 0.63 18.02 23.23


Chiang Mai University

IWPDA2009, 2-3 July, Singapore


PET 5/10/15 min

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Result: Transparency

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Result: Thickness I

PVDC 5 min PVDC 15 min

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Result: Thickness II

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Result: Raman PET

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Result: Raman PVDC

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Conclusions

• DLC coated PET & PVDC using planar PIII-D technique


• Growth rate ~ 10 -15 nm/min
• OTR reduced by 23% for PVDC and 21% for PET
• Films Transparency reached saturation same as OTR results
• Compare with CVD, lower in film growth rate and OTR but better in
unwanted compositions

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Thank you

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


G- Peak

500
Data: Data1_B
Model: Gauss
400 D- Peak Equation: y=y0 + (A/(w*sqrt(PI/2)))*exp(-2*((x-xc)/w)^2)
W eighting:
y No weighting

300 Chi^2/DoF = 84.52922


R^2 = 0.99601

y0 0 ? 0

200 xc1 1389.13982 ? 1.02402


w1 325.46658 ? 1.13869
A1 115660.53285 ? 625.0784

xc2 1557.52464 ? 0.25229

100 w2 129.63881 ? 0.80726

A2 45263.81962 ? 536.92968

-100
800 1000 1200 1400 1600 1800 2000
Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Force applied : Aligning:
Start 16 weeks

1 m.

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Plasma deposition system

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Dual filtered cathodic arc plasma,

Cathodic vacuum
arc plasma source

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Plasma Enhanced ALD system

Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Chiang Mai University

IWPDA2009, 2-3 July, Singapore


The picture to showed IR-heater, temperature variable from a few ten to
390°c at 200 VAC. and substrate holder area 11×11 cm2.
Chiang Mai University

IWPDA2009, 2-3 July, Singapore


(a) Bottom view (a) Bottom view

(b) Side view


(b) Side view

The picture to showed beam profile of Ar with pressure 3.4×10-1 torr and
the microwave plasma 75 watt.
Chiang Mai University

IWPDA2009, 2-3 July, Singapore


Analysis Techniques :
PIXE, RBS, RBS Channeling, Ion Luminescence

RBS
RBS/Channeling

PIXE IL
e-gun

Sample holder
1.7 MV Tandetron accelerator Analysis Chamber
Chiang Mai University

IWPDA2009, 2-3 July, Singapore

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