Cleanroom classifications

Cleanrooms are classified according to the number and size of particles permitted per volume of air. Large numbers like "class 100" or "class 1000" refer to FED !"D #0$E% and denote the number of particles of size 0.& 'm or larger permitted per cubic foot of air. "he standard also allo(s interpolation% so it is possible to describe e.g. "class #000". ) discrete particle counting% light scattering instrument is used to determine the concentration of airborne particles% e*ual to and larger than the specified sizes% at designated sampling locations. !mall numbers refer to +!, 1-.-- 1 standards% (hich specif/ the decimal logarithm of the number of particles 0.1 'm or larger permitted per cubic metre of air. !o% for e0ample% an +!, class & cleanroom has at most 10& 1 100%000 particles per m2. 3oth F! #0$E and +!, 1-.-- 1 assume log log relationships bet(een particle size and particle concentration. For that reason% there is no such thing as zero particle concentration. "he table locations (ithout entries are non applicable combinations of particle sizes and cleanliness classes% and should not be read as zero. 3ecause 1 m2 is appro0imatel/ 4& ft2% the t(o standards are mostl/ e*uivalent (hen measuring 0.& 'm particles% although the testing standards differ. ,rdinar/ room air is appro0imatel/ class 1%000%000 or +!, $.5.6

[edit] US FED STD 209E cleanroom standards

maximum particles/ft S! $0%& 'm $0%2 'm $0%( 'm $0%) 'm $) 'm e"ui#alent & 4& 7 4 1 +!, 4 &0 4&0 7& 40 10 +!, &00 7&0 400 100 +!, & &*000 1%000 7 +!, . &0*000 10%000 70 +!, 7 &00*000 100%000 700 +!, 8 Class 9! FED !"D #0$E (as officiall/ cancelled b/ the :eneral !ervices )dministration of the 9! Department of Commerce ;ovember #$% #001%576586 but is still (idel/ used.

[edit] S! &+,++-& cleanroom standards

Class maximum particles/m FED STD 209E e"ui#alent $0%& 'm $0%2 'm $0%( 'm $0%) 'm $& 'm $) 'm S! & 10 # S! 2 100 #10 S! ( 1%000 #47 10# 4& 8 Class 1

S! + 10%000 #%470 1%0#0 4&# 84 Class 10 S! ) 100%000 #4%700 10%#00 4%&#0 84# #$ Class 100 S! , 1%000%000 #47%000 10#%000 4&%#00 8%4#0 #$4 Class 1000 S! . 4&#%000 84%#00 #%$40 Class 10%000 S! / 4%&#0%000 84#%000 #$%400 Class 100%000 S! 9 4&%#00%000 8%4#0%000 #$4%000 <oom air

[edit] 0S )29) cleanroom standards

maximum particles/m Class $0%) 'm $& 'm $) 'm $&0 'm $2) 'm Class & 4%000 0 0 0 Class 2 400%000 #%000 40 Class ( 1%000%000 #0%000 -%000 400 Class + #00%000 -0%000 -%000 3! &#$& Class 1 also re*uires that the greatest particle present in an/ sample does not e0ceed & =m.5$6

[edit] 123 EU classification5106

under e"uipped Class conditions 0%) 'm Class 4&00 7 Class 4&00 0 Class 4&0000 C Class 4&00000 D maximum particles/m under e"uipped under 4or5in6 conditions conditions ) 'm 0%) 'm 0 0 #000 #0000 4&00 4&0000 4&00000 n>a under 4or5in6 conditions ) 'm 0 #000 #0000 n>a