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Figure 7.7.1:
Current-Voltage characteristics of a MOSFET with and without channel length modulation. ( Nd= 10 1 m)
17
cm , L =
-3
a variation of the measured threshold voltage with reduced gate length. The threshold variation is caused by the increased current with increased drain voltage as the applied drain voltage controls the inversion layer charge at the drain, thereby competing with the gate voltage. This effect is due to the two-dimensional field distribution at the drain end and can typically be eliminated by properly scaling the drain and source depths while increasing the substrate doping density.
(7.7.2)
The sub-threshold behavior is critical for dynamic circuits since one needs to ensure that no charge leaks through transistors biased below threshold.
(7.7.6)
7.7.9. Scaling
The reduction of the dimensions of a MOSFET has been has dramatic during the last three decades. Starting at a minimum feature length of 10 m in 1970 the gate length was gradually reduced to 0.15 m minimum feature size in 2000, resulting in a 13% reduction per year. Proper scaling of MOSFET however requires not only a size reduction of the gate length and width. It also requires a reduction of all other dimensions including the gate/source and gate/drain alignment, the oxide thickness and the depletion layer widths. Scaling of the depletion layer widths also implies scaling of the substrate doping density. Two types of scaling are common: constant field scaling and constant voltage scaling. Constant field scaling yields the largest reduction in the power-delay product of a single transistor. However, it requires a reduction in the power supply voltage as one decreases the minimum feature size. Constant voltage scaling does not have this problem and is therefore the preferred scaling method since it provides voltage compatibility with older circuit technologies. The disadvantage of constant voltage scaling is that the electric field increases as the minimum feature length is reduced. This leads to velocity saturation, mobility degradation, increased leakage currents and lower breakdown voltages. The scaling of MOSFET device parameters is illustrated by Table 7.7.1 where constant field, constant voltage and constant voltage scaling in the presence of velocity saturation are compared.
Table 7.7.1 :
Comparison of the effect of scaling on MOSFET device parameters. Compared are constant field scaling, constant voltage scaling and constant voltage scaling in the presence of velocity saturation. Boulder, December 2004
[n-MOSFET chain]
[p-
MOSFET
It is known that a MOS transistor with the source-body voltage different from zero has the threshold voltage modified by the body effect, that is if voltage (let's remember that for a n-MOSFET , with the source-body ),
then . The initial conditions of the chain nodes are set by the initial condition on the output. So if the output node is discharging, then one (and only one) nMOSFET is switching from off to on. It means that all the other MOSFETs are already on, and while the starting voltage of the output node is voltage . , all the internal nodes have as a starting
With the notations of previous paragraphs, the N-th (topmost) n-MOS transistor has , with source potential and the threshold voltage modified by the
body effect. All the internal transistors have has and . is given by:
with
and
and, if for :
, then
We can find an analogue equation for p-MOSFETs: knowing that, for the p-MOS chain depicted in figure 3.7(b), the drain potential of transistor is middle transistors transistor and , while ; for the
again is:
where
; thus we find:
The threshold variation is approximated in the model by a linear approximation given by:
with
and
constants:
In figure 3.8(a) and 3.8(b) the actual threshold variation (of a n-MOS transistor and a pMOS transistor) when a