Handbook of Lapping and Polishing

2006 by Taylor & Francis Group, LLC.

MANUFACTURING ENGINEERING AND MATERIALS PROCESSING A Series of Reference Books and Textbooks

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Geoffrey Boothroyd
Boothroyd Dewhurst, Inc. Wakefield, Rhode Island

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Computers in Manufacturing, U. Rembold, M. Seth, and J. S. Weinstein Cold Rolling of Steel, William L. Roberts Strengthening of Ceramics: Treatments, Tests, and Design Applications, Harry P. Kirchner Metal Forming: The Application of Limit Analysis, Betzalel Avitzur Improving Productivity by Classification, Coding, and Data Base Standardization: The Key to Maximizing CAD/CAM and Group Technology, William F. Hyde Automatic Assembly, Geoffrey Boothroyd, Corrado Poli, and Laurence E. Murch Manufacturing Engineering Processes, Leo Alting Modern Ceramic Engineering: Properties, Processing, and Use in Design, David W. Richerson Interface Technology for Computer-Controlled Manufacturing Processes, Ulrich Rembold, Karl Armbruster, and Wolfgang lzmann Hot Rolling of Steel, William L. Roberts Adhesives in Manufacturing, edited by Gerald L. Schneberger Understanding the Manufacturing Process: Key to Successful CAD/CAM Implementation, Joseph Harrington, Jr. Industrial Materials Science and Engineering, edited by Lawrence E. Murr Lubricants and Lubrication in Metalworking Operations, Elliot S. Nachtman and Serope Kalpakjian

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Manufacturing Engineering: An Introduction to the Basic Functions, John P. Tanner Computer-Integrated Manufacturing Technology and Systems, Ulrich Rembold, Christian Blume, and Ruediger Dillman Connections in Electronic Assemblies, Anthony J. Bilotta Automation for Press Feed Operations: Applications and Economics, Edward Walker Nontraditional Manufacturing Processes, Gary F. Benedict Programmable Controllers for Factory Automation, David G. Johnson Printed Circuit Assembly Manufacturing, Fred W. Kear Manufacturing High Technology Handbook, edited by Donatas Tijunelis and Keith E. McKee Factory Information Systems: Design and Implementation for CIM Management and Control, John Gaylord Flat Processing of Steel, William L. Roberts Soldering for Electronic Assemblies, Leo P. Lambert Flexible Manufacturing Systems in Practice: Applications, Design, and Simulation, Joseph Talavage and Roger G. Hannam Flexible Manufacturing Systems: Benefits for the Low Inventory Factory, John E. Lenz Fundamentals of Machining and Machine Tools: Second Edition, Geoffrey Boothroyd and Winston A. Knight Computer-Automated Process Planning for World-Class Manufacturing, James Nolen Steel-Rolling Technology: Theory and Practice, Vladimir B. Ginzburg Computer Integrated Electronics Manufacturing and Testing, Jack Arabian In-Process Measurement and Control, Stephan D. Murphy Assembly Line Design: Methodology and Applications, We-Min Chow Robot Technology and Applications, edited by Ulrich Rembold Mechanical Deburring and Surface Finishing Technology, Alfred F. Scheider

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Product Design for Manufacture and Assembly: Second Edition, Revised and Expanded, Geoffrey Boothroyd, Peter Dewhurst, and Winston A. Knight Process Modeling in Composites Manufacturing, edited by Suresh G. Advani and E. Murat Sozer Integrated Product Design and Manufacturing Using Geometric Dimensioning and Tolerancing, Robert Campbell Handbook of Induction Heating, edited by Valery I. Rudnev, Don Loveless, Raymond Cook and Micah Black Re-Engineering the Manufacturing System: Applying the Theory of Constraints, Second Edition, Robert Stein Manufacturing: Design, Production, Automation, and Integration, Beno Benhabib Rod and Bar Rolling: Theory and Applications, Youngseog Lee Metallurgical Design of Flat Rolled Steels, Vladimir B. Ginzburg Assembly Automation and Product Design: Second Edition, Geoffrey Boothroyd Roll Forming Handbook, edited by George T. Halmos Metal Cutting Theory and Practice: Second Edition, David A. Stephenson and John S. Agapiou Fundamentals of Machining and Machine Tools: Third Edition, Geoffrey Boothroyd and Winston A. Knight Manufacturing Optimization Through Intelligent Techniques, R. Saravanan Metalworking Fluids: Second Edition, Jerry P. Byers Handbook of Machining with Grinding Wheels, Ioan D. Marinescu, Mike Hitchiner, Eckart Uhlmann, W. Brian Rowe, and Ichiro Inasaki Handbook of Lapping and Polishing, edited by Ioan D. Marinescu, Eckart Uhlmann, and Toshiro K. Doi

2006 by Taylor & Francis Group, LLC.

 2006 by Taylor & Francis Group, LLC.

Handbook of Lapping and Polishing

edited by

Ioan D. Marinescu Eckart Uhlmann Toshiro K. Doi

Boca Raton London New York

CRC Press is an imprint of the Taylor & Francis Group, an informa business

2006 by Taylor & Francis Group, LLC.

CRC Press Taylor & Francis Group 6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742 2007 by Taylor & Francis Group, LLC CRC Press is an imprint of Taylor & Francis Group, an Informa business No claim to original U.S. Government works Printed in the United States of America on acid-free paper 10 9 8 7 6 5 4 3 2 1 International Standard Book Number-10: 1-57444-670-3 (Hardcover) International Standard Book Number-13: 978-1-57444-670-8 (Hardcover) This book contains information obtained from authentic and highly regarded sources. Reprinted material is quoted with permission, and sources are indicated. A wide variety of references are listed. Reasonable efforts have been made to publish reliable data and information, but the author and the publisher cannot assume responsibility for the validity of all materials or for the consequences of their use. No part of this book may be reprinted, reproduced, transmitted, or utilized in any form by any electronic, mechanical, or other means, now known or hereafter invented, including photocopying, microfilming, and recording, or in any information storage or retrieval system, without written permission from the publishers. For permission to photocopy or use material electronically from this work, please access www. copyright.com (http://www.copyright.com/) or contact the Copyright Clearance Center, Inc. (CCC) 222 Rosewood Drive, Danvers, MA 01923, 978-750-8400. CCC is a not-for-profit organization that provides licenses and registration for a variety of users. For organizations that have been granted a photocopy license by the CCC, a separate system of payment has been arranged. Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation without intent to infringe. Library of Congress Cataloging-in-Publication Data Handbook of lapping and polishing / editors, Ioan D. Marinescu, Eckart Uhlmann, and Toshiro Doi. p. cm. Includes bibliographical references and index. ISBN-13: 978-1-57444-670-8 (alk. paper) ISBN-10: 1-57444-670-3 (alk. paper) 1. Grinding and polishing--Handbooks, manuals, etc. I. Marinescu, Ioan D. II. Uhlmann, Eckart. III. Doi, Toshiro. TJ1280.H424 2006 671.35--dc22 Visit the Taylor & Francis Web site at http://www.taylorandfrancis.com and the CRC Press Web site at http://www.crcpress.com 2006017436

2006 by Taylor & Francis Group, LLC.

Preface
Lapping and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. The Handbook of Lapping and Polishing is the first book written in English to thoroughly cover these processes. Even though these processes are very precise, there has been very little scientific research undertaken into the study and application of these processes. These processes may be characterized as more an art than a science. The aim of this book is to review all the developments of recent years so that a foundation may be laid to enable the transformation of these operations into more deterministic processes by the involvement of some mechanical and tribological science. The Fundamentals of Lapping (Chapter 2) will give an overview of the lapping process starting with the basics. The stock removal mechanisms of lapping and polishing are very different from any other processes, and because both lapping and polishing are free abrasive processes, most of their mechanisms are under a probability percentage. All abrasive processes have an overlap of rubbing, plowing, and scratching mechanisms that are functions of a large number of parameters of the process, of the abrasive, and of the work piece. All these make any prediction of outcomes of these processes very difficult. Most of the applications of these processes are kept as confidential as possible (proprietary information), and specific details are not seen in professional or technical journals and magazines. This is the reason for not having a book until now that emphasizes these processes. The editors of this book have put together the latest knowledge concerning these processes in three leading industrial countries: United States, Japan, and Germany. The contributors are from academia as well as from industry, and they all possess extensive experience in both the theoretical and application domains. Due to the high pace of development of the electronics and semiconductors industry, many of the presented processes and applications come from these industries, which are also the engines of the developments of these processes. Few people using a computer realize how much lapping, polishing, and chemomechanical polishing (CMP) are involved in the computers components. The most critical components of the disk drive are finished with special superlapping and nanopolishing techniques not to mention the CMP of the chips, which has already become a standard technology. Developments in the abrasive industry in recent years, mainly of the superabrasives, have generated more challenges for industries that utilize these processes. The reality that day-by-day we get finer diamond and cubic

2006 by Taylor & Francis Group, LLC.

boron nitride (CBN) grits is changing these industries. It is not unusual today to talk about nanogrit, mainly in the case of diamonds. Relatively new technology such as obtaining diamonds by explosion has allowed the development of products with grits as small as 5 nm. To use these grits, avoiding the formation of clusters is a challenge, which has only been partially solved. Most of the knowledge used in the study of lapping and polishing has been borrowed from tribology, the science of wear, friction, and lubrication. A book I wrote in 2004 (Tribology of Abrasive Processes) was exclusively dedicated to the application of tribology to abrasive processes, but had more emphasis on the grinding process, which is largely used in industry. Not many researchers from the tribology field are dealing with manufacturing processes, even though this marriage is a winwin solution. Lately more people, mainly from academia, have been taking this approach, and the results are great. The audience for this book is very large. The book can be useful for a large category of professionals starting with technicians and engineers and extending to researchers and academics. The book can be used also as a complementary textbook for undergraduate and graduate studies. Finally, I would like to sincerely thank all the contributors to this book, including their companies and universities for allowing them to spend the time required for writing the chapters of this book. Ioan D. Marinescu Toledo, Ohio

2006 by Taylor & Francis Group, LLC.

Editors
Dr. Ioan D. Marinescu is a professor of mechanical, industrial, and manufacturing engineering at the University of Toledo. He is also the director of the Precision Micro-Machining Center of the College of Engineering of the same university. Professor Marinescu is the author of more than 15 books and over 300 technical and scientific papers. He has given lectures and workshops in more than 40 countries around the world. Dr. Eckart Uhlmann is a professor of production engineering at the Technical University of Berlin. He is also the director of the Institute for Machine Tools and Management, a Fraunhofer Institute. Professor Uhlmann is well known in Germany and internationally through his studies in abrasive processes, especially in coated abrasive processes, lapping, polishing, and grinding with lapping kinematics. Dr. Toshiro K. Doi is a professor of mechanical engineering at the School of Education of Saitama University. He is also the director of the Precision Engineering Laboratory at Saitama University. Professor Doi is a world expert in chemomechanical polishing, the field in which he published several books and over 100 papers in Japan and abroad. He is the author or coauthor of more than 170 patents.

2006 by Taylor & Francis Group, LLC.

 2006 by Taylor & Francis Group, LLC.

Contributors
Thomas Ardelt Technische Universitat Berlin Berlin, Germany Ion Benea Engis Corporation Wheeling, Illinois Toshiro K. Doi Saitamata University Saitama, Japan Masanobu Hanazono SONAC, Inc. Nara, Japan Uwe Heisel Universitat Stuttgart Stuttgart, Germany Daizo Ichikawa Fujikoshi Machinery Corp. Nagano, Japan Junichi Ikeno Saitama University Saitama, Japan Ken-ich Isahikawa Kanazawa Institute of Technology Ishikawa, Japan Toshio Kasai Tokyo Denki University Tokyo, Japan Masaharu Kinoshita Nitta Haas, Inc. Tokyo, Japan Ioan Marinescu University of Toledo Toledo, Ohio Hitoshi Ohmori Institute for Physical and Chemical Research of Japan (RIKEN) Saitama, Japan Mariana Pruteanu Insaco Inc. Quakertown, Pennsylvania Naga Jyothi Sanku University of Toledo Toledo, Ohio Hitoshi Suwabe Kanazawa Institute of Technology Ishikawa, Japan Keisuke Suzuki SONAC, Inc. Nara, Japan Eckart Uhlmann Technical University of Berlin, Institute for Machine Tools and Management Berlin, Germany Hitomi Yamaguchi Utsunomiya University Tochigi, Japan

2006 by Taylor & Francis Group, LLC.

 2006 by Taylor & Francis Group, LLC.

Table of Contents
Chapter 1 Introduction Ioan Marinescu Chapter 2 Fundamentals of Lapping Eckart Uhlmann Chapter 3 Lapping of Ductile Materials Ioan Marinescu, Ion Benea, and Naga Jyothi Sanku Chapter 4 Lapping of Brittle Materials Ioan Marinescu, Ion Benea, and Mariana Pruteanu Chapter 5 Lapping and Lapping Machines Toshiro K. Doi and Daizo Ichikawa Chapter 6 Polishing Technology Toshiro K. Doi Chapter 7 Chemical Mechanical Polishing and Its Applications in ULSI Process Toshiro K. Doi

2006 by Taylor & Francis Group, LLC.