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microflowSensTM - Technology Fast Flow Measurement in Gases

Product
The microflowSensTM Technology was developed especially for fast flow measurements. Due to a membrane system, the thermal mass is reduced to the minimum, resulting in a very fast response time and low power consumption. The membrane, just a few microns thick, is carried by a glass substrate, very ruggedized and thus easy to handle. The measuring resistors are wired in a Wheatstone type bridge on chip level. This minimizes the amount of external electronic devices, reduces error sources, and guarantees optimal correlation of individual bridge resistors. Arrangement of resistors in a row results in a temperature gradient caused by the flow, because the resistors are cooled down differently. The direction of the gradient gives information about flow direction.

Advantages
Very fast response time Detects ultra small mass flow Detection of flow direction Reduced power consumption Minimal thermal mass Mechanically robust and no moved components Simple electronical analysis Easy mounting Best price-performance ratio

Applications
Medical devices Differential pressure sensors HVAC and building control solutions

Technical Data
Measuring principle Measuring range Response senitivity Response time t63% Temperature range 2 Elements 2 Elements Required supply voltage Substrate thermal 0... 1 m/s 0.0001 m/s < 10 ms -20 ... +150 C Rhigh(0 = 650 10% RA, RD C) Rlow(0 = 500 10% RB, RC C) Typically 3 - 6 V Organic membrane on glass substrate

microflowSensTM - Technology Fast Flow Measurement in Gases


Mechanical Dimensions

Dimensions [mm]

AD

BD

1.5 1.4

5.7

1.08

AC

BC

7.5 10.8

1.6

Membrane Contacting area

Application Cicuit Diagram (recommendation)


The 4 Elements are connected internally into Wheatstone type bridge circuit. Between contacts AC and BD a constant supply voltage (VCC) shall be applied. The other two contacts AD and BC carry the bridge differential output signal. The bridge voltage V_Br = V1-V2 is dependent on mass flow (amplitude) as well as on the flow direction (polarity).
v [m/s] -0.4 -0.3 -0.2 -0.1 80 0.0 0.1 0.2 0.3 0.4

0.5

1.6

=1.0 8

1.3 4.8 5
RC V2 RB
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without the prior written consent of the copyright owner. Typing errors and mistakes reserved. Product specifications are subject to change without notice. V3.0-04/2007

0.5 2

VCC

40
Vout [mV]

RA V1
0 Flow [ml/min] 103 206

0 -206 -103

-40

RD

-80

GND
Typical signal curve between 0 .... 0.4 m/s

Optional: The chip design, the electrical connection and the sensor packaging we are able to develope and to produce customized