Reprint from Industrial TOOLING 97, 9/10 September 1997 J. Stirnimann, A.

Kirchheim

New Cutting Force Dynamometers for High-Precision Machining

MiniDyn Type 9256 International patents pending

Kistler Instrumente AG Winterthur Winterthur, Switzerland Tel + 41 - 52 - 224 11 11, Fax 224 14 14 sales@kistler.ch Kistler Instrumente GmbH Ostfildern, Germany Tel (07 11) 34 07-0, Fax (07 11) 34 07-159 info@kistler-deutschland.de Kistler SA Les Ulis Cdex, France Tel 01 69 18 81 81, Fax 01 69 18 81 89 info@kistler.fr Kistler Instruments Ltd. Mill Lane, Alton, Hampshire, UK Tel (0 14 20) 54 44 77, Fax (0 14 20) 54 44 74 sales@kistler.co.uk Kistler Italia s.r.l. Milano, Italy Tel (02) 481 27 51, Fax (02) 481 28 21 kistler@tin.it

Kistler Instrument Corp. Amherst, NY, USA Tel (716) 691 51 00, Fax (716) 691 52 26 kicsales@kistler.com Kistler Japan Co., Ltd. Tokyo, Japan Tel (03) 35 78 02 71, Fax (03) 35 78 02 78 sales@kistler.co.jp Kistler Instruments (Pte) Ltd. Singapore Tel 469 67 73, Fax 469 56 84 kistler.sales@kistler.com.sg Kistler China Ltd. North Point, Hong Kong Tel 2591 5930, Fax 2591 1885 kcnlibin@vol.net Kistler Korea Co., Ltd. Seoul, ROK Tel (02) 555 60 13, Fax (02) 555 60 15 kistler@kornet.net

20.185e 9.97

Industrial TOOLING 97, Southampton Institute, 9/10 September 1997

New Cutting Force Dynamometers for High-Precision Machining

J. Stirnimann, A. Kirchheim Kistler Instrumente AG Winterthur, CH-8408 Winterthur, Switzerland

Abstract
Hi-tech products such as laser optics and hard disk components are being increasingly produced with high-precision machine tools. Dimensions and tolerances of components and also the resulting cutting forces are becoming smaller. Measuring the cutting forces to control machining forces and to achieve high quality is extremely important. Two new, miniaturized dynamometers for measuring minute cutting forces are described.

1 Introduction
High-precision machining is constantly increasing in importance. These new techniques can be applied in place of conventional machining methods for manufacturing complex components such as aspherical lenses at low cost or even making entirely new types products, e. g. machined from brittle materials. As the term high-precision machining indicates, the requirements for dimensional accuracy (0,2 m) and surface quality (Rt <0,05 m) in precision grinding, honing, lapping and polishing are very high [1]. These values are achieved only by meeting specific machine, machine environment, material, tool and process control requirements. At the same time, reliable and sensitive measuring instruments are needed for accurately analyzing, optimizing and monitoring these machining processes. Two new small, temperature-insensitive dynamometers, using highly sensitive piezoelectric 3-component force sensors, for measuring minute forces are described. They are particularly suitable for retrofitting to a large variety of machines.

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2 Progress in Manufacturing Techniques

Among manufacturing techniques used in current microsystems engineering, etching is the primary method used for making micromechanical structures. This is a continuation of those manufacturing techniques which have been tried and tested during decades of experience in microelectronics production [3]. Etching is, however, based on lithography as a structure-producing method and is only cost-effective for larger quantities. The same applies to X-ray lithography, in which molds are manufactured by means of X-rays and masks. Apart from poor cost-effectiveness, the range of shapes possible to make is restricted because of the anisotropy of silicon. For example, square edges can be achieved only in certain directions, and it is impossible to obtain surfaces of freely-chosen shape. In order to avoid these limitations, micro-machining offers a viable alternative for manufacturing micro-mechanical structures, in which sizes ranging from 10 m to 1000 m can be obtained with great flexibility (wide choice of materials), speed and an almost unlimited variety of shapes. The rate of metal removal in micro-machining is many times higher than the rate of material removal in etching, which means a substantial saving in time. A further advantage is that crystal orientation no longer limits the number of possible shapes. The quantities of components which are manufactured by micro machining are between 1 and 1000 while those which are manufactured by etching are in the range of 1000 to 1000000. In micro machining, average batch sizes are around 10 compared with about 3000 with etching [4]. Standard CNC-controlled machine tools with repeating accuracies of 10 m are used in precision machining. Ultra-precision machine tools with which optical components such as scanner mirrors are manufactured, even achieve accuracies in the nanometer range [5]. They do not, however, have the necessary flexibility for the manufacture of microscopically small geometries. One solution is using micro machine tools originally utilized in precision mechanics. A repeating accuracy of 1 m is achieved with displacement sensors having a resolution of <0,1 m. In order to achieve high cutting speeds with the very small tools involved, their speed must be very high (20000 to 50000 r/min). This requires measuring systems with a correspondingly high natural frequency in order to catch force peaks with high accuracy, too. New materials such as silicon or quartz place higher demands on the tools. The very small dimensions involved in micro-machining call for tools of extremely small dimensions: e. g. face millers and drilling tools with diameters of just 60 m are common. Diamond coatings are used for carbide tools in order to increase tool life. A further possibility is the use of monocrystalline or polycrystalline cutting inserts [4].

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3 Significance of Measuring Cutting Force

Measuring cutting forces allowed in the past to develop reliably and precisely conventional methods of machining by chip removal and to develop them further. One reason why cutting force measurements are so successful is that these signals are relatively easy to interpret. This contrasts with measurands such as acceleration or Acoustic Emission. The progress in machining methods mentioned in Section 2 also requires quantification and validation, where the cutting forces are an important parameter for evaluation, too. Cutting depths of ap = 2 m and feed rates of up to f = 2 m/r are parameters necessary for achieving the accuracies mentioned above. The maximum depth of cut is frequently less than 0,1 m. With such cutting parameters, only very small cutting forces occur which are often less than 1 N. Accurate information about the magnitude of the cutting force components and a high repeatability of the measurements is very important for both, machine tool designers and production engineers, as a solid base for correctly designing the machine components and for optimizing the machining process. Particularly important is the precise determination of the direction of the cutting forces by measuring all three components [2]. A further field of application of the cutting force measuring technique is developing tools. This includes e. g. investigating the suitability of materials such as diamond for use as cutting material. The choice of such materials is also leads to a completely different geometry of these cutting inserts. A different geometry, however, also means that the characteristics of the cutting process may change considerably. Measuring simultaneously the main cutting force, the feed force and the passive force with rigid piezoelectric dynamometers provides a sound base for immediately assessing newly developed tools. The more and more frequent use of high-speed cutting also requires a measuring instrument whose natural frequency is well above the frequencies excited during machining and which assures reproducible signals even for the lowest cutting forces.

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4 Dynamometers for Measuring Very Small Cutting Forces

Cutting force dynamometers so far used in production technique usually are all designed in a similar way. Four piezoelectric 3-component force sensors are mounted under preload with bolts between a base plate and a top plate, on which the work is attached. By summing the corresponding output signals from each of the four sensors, the magnitudes of the various components of the cutting forces acting on the work are obtained. The two new dynamometers for measuring very small cutting forces feature a particularly high temperature independence combined with a very flat, rigid structure (Figs. 1 and 2). On two opposite side faces of a center plate, serving as support for the work, two 3-component force sensors each are mounted in a vertical position. Two opposite sensors are preloaded between the center plate and one lateral flange plate at each end with a common preloading bolt. The dynamometer is fixed on the table of the machine tool with these lateral flange plates. This symmetrical push-pull arrangement of two sensors results in a nearly perfect compensation of temperature dependence [2].
11 7 Fischer DBEE 104 A 055-25 1 1 110 55 30 16 105 30 15
0 -0,1

( 1)

M 6 x12/18

6,4

31 66

32

107

92

40

9,6 9

30

45

40 150 185 220 240 260

45

Type 1689B5 Type 1687B5

Figure 1: 3-component dynamometer CompacDyn, Type 9254

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Rm

in.

30

8 1

M 3 x4,5/6

25

24 5 1 5

75 12 70,5 43,5 80 12 12 12

12

12

19

8 39

57 75

Figure 2: 3-component dynamometer MiniDyn, Type 9256

As a result of the use of piezoelectric sensor materials, the two dynamometers can be characterized by the following main features: Low thermal error, Could be reduced substantially when comparing with previous dynamometers. High rigidity: Gives even under overload virtually negligible deformation. High natural frequencies: Compared with the excitation frequencies fA = 1500 Hz (n = 30000 r/min) in e. g. high-speed milling with a triple-edged tool, the natural frequencies of the dynamometer are still more than three times higher. Low threshold: Allows measuring at very small force levels with high reproducibility [1]. Low-profile design: Makes these dynamometers ideal for fitting them in the very confined spaces of an ultra-precision machine tool or surface grinding machine.

The top plates of the dynamometers have tapped holes for attaching the work. The dynamometer can be fixed on the machine table with magnetic plates, bolts or clamps. Good initial results from the use of the new dynamometers in conventional precision machining, wafer cutting and in ultra-precision machining have been obtained.

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mi

n. R

15

Technical data:
CompacDyn 9254 Measuring range Overload Response threshold Sensitivity Rigidity Natural frequency Dimensions Mounting area for the work Fx,y Fz Fz Fx,z Fy Cx,z Cy fox,y foy 500 ... 500 N 1000 ... 1000 N 1200 / 1200 N <5 mN 8,1 pC/N 4,3 pC/N 500 N/m 1 kN/m 3 kHz 4 kHz 260 x 107 x 32 mm 105 x 150 mm MiniDyn 9256 50 ... 50 N 50 ... 50 N 250 / 250 N <2 mN 11 pC/N 11 pC/N

>5 kHz >5 kHz 80 x 75 x 25 mm 40 x 80 mm

5 Examples of application
The two dynamometers can be installed in a variety of machine tools at low cost because of their low profile. Both dynamometers are particularly suited for grinding and ultra-precision machines, where the distance between tool and work mounting surface must be kept to a minimum for achieving a high rigidity. Applications are in the fields of precision milling, turning and grinding wafer cutting High-precision hard turning High-speed machining Ultra-precision machining

The measuring chain dynamometer charge amplifier can be combined with the Dynoware data acquisition software for investigations in the laboratory. This software runs under Windows 3.x or Windows 95 and accommodates up to 8 data channels. Measuring chain configurations and data are filed in a data base. Drivers are incorporated for remote controlling all Kistler electronics via RS-232C or IEEE-interfaces. Various graphical display modes allow for easy analysis and interpretation of the measured data. The measurements shown were made with the CompacDyn and MiniDyn dynamometers [2]. Following preliminary testing at Kistler, further field tests are currently being done especially with the MiniDyn dynamometer.

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5.1 Conventional Precision Machining

Measurements in the field of conventional precision machining (finish milling, reaming etc.) were carried out on a three-axis milling machine of the Deckel FP4 type. One aspect of these experiments was to find a lower limit for the application of the measuring instrument (threshold, signal-to-noise ratio) by varying the cutting parameters, yet none could be found. A seven-minute fine finish test (without coolant) was then used to determine whether the heat from cutting would influence the measuring signal. The result confirmed the extremely low temperature dependence expected from theoretical considerations and laboratory tests, which was up to fifteen times better than that obtained with similar conventional measuring devices.
foce [N]

Breakage of workpiece

time [s] Ft(x) [N] Fa(y) [N] Fn(z) [N]

Figure 3: Grinding of a silicon sensing rod: vc = 39 m/s, vf = 60 mm/min, ap = 0,3 mm, Materials: silicon Fn (z): normal force, Ft (x): tangent force, Fa (y): axial force

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5.2 Wafer Cutting

Another example illustrates the use of the dynamometer in wafer cutting at the Kistler test laboratory (Figure 4). A glass plate to which the wafer was attached with an adhesive, is fixed on the dynamometer. The feed is obtained from the moving unit carriage-dynamometer. A CBN disk (n = 10000 r/min, D = 75 mm, vc = 38 m/s) cuts the wafer at a feed rate of vf = 60 mm/min. Again the analysis of the cutting forces leads to conclusions about the process control. The measuring result clearly demonstrates that even very small forces (tangential force of 500 mN) can be measured with high resolution and without drift. Measurements at the University of Tokyo, Faculty of Engineering, during cutting of silicon wafers, aluminum oxide and non-alkaline glass confirmed a high resolution and reproducibility of the measured data complete absence of drift even in measurements lasting more than 3 minutes More extensive tests with feed rates up to vf = 6 m/min revealed no disturbing force spikes on reversal of the carriage direction. This dynamometer can thus also be used in grinding of longer duration, i. e. lasting through several carriage strokes without interference from inertial effects from the carriage motion on the very small signals.
4 force [N] 3,5 3 2,5 2 1,5 1 0,5 0 0,5 1 2 3 4 5 6 7 8 9 10 time [s]

Figure 4: Wafer cutting: vc = 38 m/s, vf = 60 mm/min, ap = 2 m, Materials: silicon and glass, Fn (z): normal force, Ft (y): tangent force, Fa (z): axial force

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5.3 Ultra-precision machining

Tests are being conducted at the Fraunhofer Institute for Production Technology (IPT) in Aachen on ultra-precision cutting of brittle materials such as germanium or zinc sulfide. The materials are cut with monocrystalline diamond tools on an ultra-precision machine by turning to a surface quality Rt of 20 nm. Such components are used in optical systems. In order to achieve a process control which is both reliable and reproducible, cutting forces must be measured for gaining insight into the chip formation process and for determining optimal cutting parameters. The cutting forces are in a range between several hundred and about 10 mN. The tests were performed using the new 3-component dynamometer. Figure 5 shows the test arrangement. The dynamometer is mounted on the x-slide of the ultra-precision lathe used, which are of the Rank-Pneumo MSG 325 type. The work, a slice of the material to be investigated (Cleartran), is mounted on the dynamometer using an aluminum adapter. The diamond cutting tool is mounted on a disk outside the lathe center line and makes one cut per revolution (fly cut method or single-point milling) [2]. Initial measuring results show the low threshold of the dynamometer. Good resolution of the cutting forces Fc of between 350 mN and 50 mN is achieved with a variation in the feed rate f of between 20 2 m/r.
cutting force [mN]

Tool

400 350 300 250 200 150 100 50 0 50 0 5 10 15 20 25 30 35 40 time [s]

Workpiece

Dynamometer Type 9254

Figure 5: Ultra-precision machining: vc = 145 m/min, f = 20 ... 2 m, ap = 20 m, Material: Cleartran (ref. IPT Aachen)

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6 Conclusions
The measuring results obtained in precision machining or ultra-precision cutting demonstrate the low threshold, small temperature dependence and high rigidity of the new 3-component dynamometers CompacDyn and MiniDyn. These features are obtained by using highly sensitive piezoelectric sensors mounted in a special and novel way in the miniature dynamometers. These measuring instruments offer a highly accurate method for analyzing and optimizing precision and ultra-precision machining used as a manufacturing technique. Their small dimensions, low profile and flexible clamping facilities ensure their successful application in other areas, such as in assembling and in quality control.

Bibliography
1 Klocke, F.; Koch, K.-F.; Zamel, S.; Technologie der Hoch- und Ultraprzisionsbearbeitung, ZWF, 90 (1995)5, S. 217-221 Kirchheim A.; Sidler A.; Stirnimann J.; Zerspankraftmessung bei der Feinstbearbeitung, ZWF, 91(1996)6, S. 284-286 Heuberger A. (Hrsg.); Mikromechanik: Mikrofertigung mit Methoden der Halbleiterfertigung, Berlin, Springer-Verlag, 1991 Westkmper E.; Hoffmeister H.W.; Gbler J.; Spanende Mikrofertigung, F & M, 104 (1996) 7-8, S. 525-530 Taniguchi N.; Current Status in, and Future Trends of, Ultraprecision Machining and Ultrafine Materials Processing, Manufacturing Technology - CIRP Annals Vol. 3272 (1983) 2, S. 1-10

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