YAMANAKA CERADYNE, INC.

YAMANAKA CERADYNE, INC. 20-2 Kamiiekda-cho Kitashirakawa Sakyo-ku Kyoto 606-8287 Japan Tel:81-75-724-1560 Fax: 81-75-724-1540

Phosphorus Oxychloride, POCl3

Application : Phosphorus Oxychloride is used for solar cell, optical fiber materials and N-type diffusion doping materials.

POCl3, 6N
Metallic Impurity Ag Al Au Ba Bi Ca Cd Co Cr Cu Fe Ga Item OH Color Spec (ppb) < 1.0 < 6.0 < 1.0 < 1.0 < 1.0 < 5.0 < 2.0 < 1.0 < 3.0 < 2.0 < 15.0 < 2.0 Analysis Method ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS Spec < 10 ppm < 5 APHA Analysis Method FT-IR HAZEN Metallic Impurity K Li Mg Mn Na Ni Pb Sn Sr Ti Zn Spec (ppb) < 2.0 < 3.0 < 4.0 < 1.0 < 10.0 < 5.0 < 4.0 < 1.0 < 1.0 < 2.0 < 10.0 Analysis Method ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS ICP-MS

ICP-MS : Inductively Coupled Plasma Mass Spectroscopy FTIR : Fourier Transform Infrared Spectroscopy