Vacuum Metal Deposition

Howard J. Foster Center for the Irradiation of Materials by Cydale C. Smith

Materials
High purity glass Stainless Steel Oxygen Free High Conductivity (OFHC) Copper

Mean Free Path

Definitions of Vacuum Regimes

Rough Vacuum: ~0.1- 760 torr (atmospheric pressure is 760 torr) Medium Vacuum:~ 0.1 to 10-4 torr High Vacuum: ~ 10 -8 to 10-4 torr Ultrahigh Vacuum: < 10 -8 torr

Vacuum Pump Range

Mechanical Pump: 0.1- 760 torr Mechanical Pump: 0.1 to 10-4 torr Turbo,Cryo Pumps: ~ 10 -8 to 10-4 torr Ion Pump: < 10 -8 torr

Mechanical Pumps

Turbo Pump

Turbo Pump
After roughing, one often goes to a turbopump
a fast (24,000 RPM) blade achieves a speed comparable to the molecular speed molecules are mechanically deflected downward

Work only in molecular regime

use after roughing pump is spent (< 100 mTorr)

Usually keep roughing pump on exhaust

Cryopumping
A cold surface condenses volatiles (water, oil, etc.) and even air particles if sufficient nooks and crannies exist a dessicant, or getter, traps particles of gas in cold molecularsized caves Put the getter in the coldest spot helps guarantee this is where particles trap: dont want condensation on critical parts when cryogen added, getter gets cold first Essentially pumps remaining gas, and even continued outgassing Called cryo-pumping

Measurements

Pressure Gauges

Pressure Gauges

Pressure Gauge