Microwave Processing of Semiconductors

Charu Lata Dube

Microwave heating method : A new approach

 In this technique we exploit the atomic behaviour of starting materials. The atomic moments interact with MW field which leads to volumetric heating.  The state (a- or poly-) of a material play an important role in the microwave-material interaction.  Heating predominately results due to Electric, Conduction, Microwave resonance and Magnetic Losses.

Characteristics of MW Processing
 Volumetric Heating.  Inverted Temperature profile, with smaller temperature gradient, leading to more uniform temperature profile.  Accelerated (faster) and self-limiting Heating.  Different materials exhibit greatly different heating behaviour in the E and H microwave fields.

Modes of MW Processing
Multi Mode Processing : Domestic Oven Single Mode Processing
E-field configuration H-field configuration