MI;IC II;IC

LOi giOi thi~u.. Trang

M6'ddu """""""""",""""""""""""""" ... """"""""" ..'.'.'.'.'.'.'.'.::"

PMn L GiOithi~uv~hoa hQCNano 1

, /
1. Gi6ithi?uve hOahQcnanD 1
2. C6ngngh?nin cO'bantronghOah9cnano 2
" , ,
3. V(itli?ungu6nnanDniimgifirlhOah9Cva vtjtlYchatran 6
4.Phdn10000ivtjtli?unano 8
,
5. NhUngphuungphapnghiendrucdutrUevtjtli?unano l0
6. Ungc4mgcUav(itli?unano 13
7.Kilt 1u4n 18

PMn n. Cong ngh~bOahQcNano n~n 19

ChU'O11g1.Cong ngh~Nano Sol-Gel 19
1 PhuungphapSol-gel 19
11. Hc;dSol 21
12. Gel """"""""""""""""""""""""""" 39
11Cdchc;ddonphdn tantrongdungdjch 44
Ill. Diiu cM hc;dcdu 45
112.cdu trUecUahc;dcdu , 49
113.CO'cMphid triiln 51
III Cdcphuungphap kMc diiu cM hc;dnano 55
Illi. Solkhi 55
Ill2. CdcphuungphapFhahO'i 56
Ill3. Cti 'phuungphcipdWlgdjchkMc 61
IV PhdntCulhc;dpyrogen 62
V Kiltlu4n , 66
ChuO'ng2. Congngh~h~t MiceliNano 67
1 M(5tso khdini?mcO'ban 67
11 H?phOntanhqtMicell 67
12.TinhcMt cO'bancilah?phOntanh(llmicell 68
13. TinhcMt ai?ntk:h h?phOntanMzcell 69
11CMt ho(lla(5ngbi m(lt 70
Ill. CMt ho(lla(5nghi mijJionam 70
112.CMt hoqta(5ngbi m(ltionduvng " 71
113.CMt ho(lla(5ngbi m(lttrwlgtinhkh6ngion " 71
114. CMt hoqt a(5ngbi m(lt luffngc(1t: 71
115. CMt ho(lla(5ngbi 1l191
CGophOn tir (polyme ai?n ly) 72
III Cong ngh? h(llmicell-lo phim WIgaiiu chi hqt nano 72
1111.Miceli thu4n 72
111.2.Miceli aao 75
Ill3. Cac phim ~lnghqt micell nanDtrong vi nhfi turmg 76
1114.T6ng h9P hqt nanDtrong vi nhfi turmg 78
IV. Mota tinh cMt cila cdu trUenanDtqi bi m(lt chung long/rim va tuvng lac
gi£i:acac hqt 79
IV.I. Tinh cMt cUacdu trUephOn tLrtren bi mijJ cac hqt nanD 79
IV.2. Turmg lac cac bi m(ltrim trongpha long 80
V cdu trUc phOn tir bi m(lt d5' nanD va turmg lac bi m(lt cila hqt silic ddn
xudt alkoxide 89
VI. D(lctinhphOntanva Mt 4fcilasilicddnxudtalkoxide. ; 89
V.2. Phep ao turmg lac bi m(lt va cdu trUephOn tLrcila cac hqt silic co
'aur'rngkinhkhi1cnhau 91
V 3. Anh huimg cila aur'rng kinh len cdu trUe bi m(lt va turmg lac hqt 93
VI.Turmglacbi mijJva a(lctinhhuyinphilAlumina : 95
VII. Anh hzr61:gcila cdu trUep~ fir cUa lac nhOn phOn tan polymer len
tuvng lacbe m(ltva a(lctinhhuyenphil aluminaa(lc. 95
VI 2. Anh huimg cila a(5 pH ain d(ic tinh huyin phil co lac nhOn phOn tan
polymeranion. 100
VI 3. Anh huimg cila ham luvng lac nhOn phOn tan polymer len a(lc tinh
huyinphil aluminava tuvnglacbi m91. 102
VIA. Anh huimg cila m(tt a(5counter-ion ain a(ic tinh huyin phil alumina
104
ChU'O1lg
3. Cong ngh~ling dQngpha hOO bOahqcNano 107
1 GiOithi?uvdllingaQngphahoi hOah(JC 107
11. MiJa6u 107
12. NhfmgnguyenryeaMnci«1CVD 110
12.1.NhfmgnguyenIf;ea ban 110
12.2.CaeburYeaiduehinhtdea(J 112
12.3.CVDva ea so vOiCVDpoiyme 112
13. CaephuvngpMpCVD 114
13.1 CVDnhi?t(IhermalCVD) 114
13.2. CVD plasma- -Plasma Assisted CVD (con auve biit lIin nhu: la
CVDnangplasmaho(tcPECVD) 114
14. Kiiu binhphirnzmgCVD 116
14.1.BinhphirnzIngthanhbinhnong 116
14.2.BinhphirnzIngthanhbinhk;mh 117
14.3.BinhphirnzInglien4tC 118
14.4.BinhphirnzmgCVDghepai?nplasma 119
15. Caeki€uphirnzmgva
. . tidnehdtCVD
. , 120
15.1.Caechatco g6c vaphOitirtieubieu 120
15.2.Caephirnzmgnhi?tphGn 122
15.3.CaephirnzIngoxyhOava thUyphGn 123
15.4.CaephirnzIngkhangtYI? 1~4
15.5.PhirnzmgafmgllingaQng 125
16. CaequatrinhxUIf ea banCVD 125
16.1.QuatrinhsirIf nwsstransport 125
16.2.QuatrinhphirnzInghOahQe 126
11LlingaQngphahoihoah(JC Polyme(CVP) 128
Ill. GiOithi?u 128
111.1.Poly-p-xylylenes(parylenes) 130
111.2.CaeM trimgh9]JvaSl,ftgothanhmitngmang 131
111.3. Anh InrO1zgeila cae thOng s6 lling aQng ten Sl,fpMt tri€n ci«116p
mitng 132
111.4.CaeehdtddnxudtthaytM eilaparylene-N 134
111.5.Tinhehdt 135
112.CVPci«1polyimide 137
112.1.CaeMtrimgh9]Jvasl,ftgothanhmitngmang 138
 112.1.Anh hur5ngcuacaethOngs6/ifng d9ng 139
Il2.2. TinhcMtcitamimg-mangpolyimideVDP 140
Il3. Polynapthalene 143
1l3.1.Cachi tritngh()pvas¥t(lOthanhmimgmang 143
Il 3.2.TinhcMt 144
Il4. Poly(p-phenylenevinylene) I44
Il4.1 Cachi 145
Il 4.2.ThanhpMn cdut(lOvacdutrUe. 147
Il 4.3.TinhcMt 147
Il5. Polyazomethine 149
Il5.1. T6ngh9]J 150
Il 5.2. Tinhchdt 152
111.Caevtj!li?umOiUngc4mgCVP 152
111.1.CVPcitajluoropolyme 152
IIll.1 Monomejlo hOatritng h()pplasma (pPFM): S¥tgo thanh mimg
mong 154
III 1.2.Anh hurYngcuacaethOngs6ltmg d9ng 155
Ill1.3. TinhcMt 156
IV. chi t(lOcaecopolymemOibiingCVDnhiijt """""""""""""""""""""'" ] 57
IV. 2. chi tgo silicon Dioxide-polyme nanocomposite bling CVD nhiijt ..158
IV. 2. 1. Cach t6ng h()p mimg mong PPX-C/SiO2 nanocomposite 158
IV.2.2. TinhcMt 159
V. Ung d1!J1g
citapolyme CVD 159
V.1. Ung d1!J1g
vi diijntU: 160
+'.1.1. Cae ung d1!J1gdiijn moi tMp - k trong ULSI (Ultralarge &ale
Intergrated) 160
v.1.2.CaeUngc4mgkit nang(encapsulation) va donggoi 161
v.1.3.LOpcam quanlithographytrongvi chi tgo 162
v.2. Ungd1!J1g quangh()c 162
v.2.1.~iLcthi€tbiphatsang 162
v.2.2. CiLc Ungd1!J1gquangh()c khongtuyin tinh (quangphi tuy€n)...I64
v.l. Ungd1!J1g
lOppM ngoai 166
V.3.1. Ungd1!J1gy
sinhh()c 166
v.3.2.Ungd1!J1glOppM baovi} 166
VI.K€tlu(£n : 166
ChlfO'Dg 4. CODg Dgh~ t1}'Hip ghep philo ttf ...169
1 MirtlJu 169
11 Mang mong tlem lOp theo Gong ngM tv lip ghip (Self-Assembled
Monolayer - SAA1) : 171
111.Mang mang tv lApghip alkanethiols (SAM of alkanethiols) 172
Ill. I Qua trinh tgo SAM trong dWlg djch alkanethiol 173
111.2. CO' chi hinh thCmh mang SAM-alkanethiols va tinh 6n tljnh cUa no
174
112.Mang tv lApghip SAM-alkylsiloxanes 175
112.1.Qua trinh hinh thCmhmang SAM-alkylsiloxanes ~ 175
113.Nhi1ngmangSAMkhac " 176
113.1Alkyl SAM 176
113.2.SAM- dihydroxyphenylethylamine (Dopamine) 177
113.3.Mang mong SAM alkanephosphoric axil (SAMAP) 178
114.DiJu chinh tinh cMt M m(tt theo GongngM SAM 179
114.1.fJiJuchinh nhOmchUr:: niing 179
114.2. DiJu khiin hogt tinh bJ m(tt tI(jng d{ravao kha nang nhqy cion
tliJu ki?n 179
III. Mang nhj phdn tic (self-assembled bilayers) va mang caD phdn
tic tl,f lAp ghep (self-assembled polymeric monolayers) nhiJ h6p
ph1,l v(it ly 182
1111. Mang nhjphdn tic (self-assembledbilayers) : 182
1112.Tl,flApghipcUacae hgthuyJnphitdimg mang tv lip ghip 185
1113.chi tgo cae hgt nanDdgng nhdn - vo (core-shell) dimg mang tv Jiip
ghip linnmOitrur3ng 187
III 4. chi tgo mang mong nano zeolit co tinh tljnh hurYng caD trong mOi
trur3ngmangcaDphdn tictv lip ghip 189
Ills. Patterningvi cdutrUevCrimangtv lApghip 190
IV.Kit lu(in 193

PhAn]II. V~tIi~uDaDOkim lo,pva v~t Ii~uIai 195

ChU'O'J
Igt. V~tIi~uSol-Gel DaDO 195
1 V(itli?ulaiMn tinhhi1uCO'-
vo cO'nano 195
11 Vtjtli?ulaiMn tinhsicd1}ng1l}'C
lienkitvtjt ly 197
12 VtjtJi?ulaiMn tinhsicd1}ng1l}'C
lienkit h6ahQc 199
11HgtNanomaDquan 200
 Ill. Ht;dnano maoquan lagi ? 200
111.1.Djnh nghraht;dnano mao quint 200
111.2.Zeolite ' 201
111.2. Hmh thanh cau tCJonanomao quan theo mo hinh hoa co ai€u
khidn 203
112.QuatrinhnghienCUllhCJt nanomaoquan 204
113.Plntongphilpt6nghr;;pckit nanomaoquan. 208
113.1.Sil'd1jJ1gcmit hot;da(Jnghi m{ition duvng lam khuon 211
113.2.Sil'd1jJ1gcmithot;dd(Jnghi m{itphi ion lam khuOn 215
11.4.Plntongphapphan tichcdu trUeciLawjtJi?unano maoquan 218
115. Ungc4mgva trih1 vrngwjt li?unano mao quan 219
111.Zeolite nanotubelpolymerscomposites (znpc) " 221
mI. Zeolite nanotubelconductingpolymercomposites 221
111.1.1.Trimg hr;;ppyrrol 221
111.1.2.T6ng hr;;pzeolit nanotube - polyanilin composit 223
111.2.Zeolitenanotubepolymer-nanocomposit 225
111.3.Tridnvrng 226
W, V(itli?umimg m6ng diu trUenanoporous 226
W,l. V(itli?umimg mongai?n mot tkip 226
w'2. V(it li?u mimg mong cmit ai?n mot tkip co cdu tCJonanopor@us 229
W, 3. Plntong philp chi tCJoVljt Ji?u mimg mong ckit ai?n mot tkip co cdu
trUenanoporous 230
w,4. ,Lf tin~ va ai;ictinh ~i?n mot ciLav(it Ji?umimg mong ckit ai?n mot
thap co cau trUenano xop. " 233
IV. 5. Ung d1jJ1gva tridn vrng ciLa v(it li?u mimg m6ng ckit ai?n mOi tkip
co cdutrUenanoporous. 235

Chuong 2. Nanocomposittes gAmva kim lo~ khAi 237

1 Gi67thi?u 237
II Nanocomposite ceramic/kim loCJi 238
l'll~Nanocomposite chi tCJob&nghr;;pkim cO'hQc 241
112.Nanocomposite chi tCJofirt6ng hr;;psol-gel 243
113.Nanocomposite chi tCJob&ngt6ng hr;;pphun nhi?t 247
111.V(itli?ulai chUr:nang 251
mI. Nanocomposit n€n kim loCJilai cacbonnanotube , 251
 Ill2. Nano composit chUr:niing kich tfntrYcnhO 254
Ill3. Nanocomposit kit bao 256
Ill4. Cac zmgch,mgcita sri nanocomposite 267
104. Ungch,mgcita hr;ttnanocomposite 269

ChU'O1lg
3. Xuetac Nano 271
1 Gi6'ithi?'uvexUctOenanD 271
11. Cac thanhpMnphan tirtqo nen hoqt tinhvcu16chQn l(JCxitc tac 274
12. Congng~ dibJcM xUclacnano 279
12.1.KjJthu(ztkhftcchUmdi?ntir : 279
12.2.KjJthu(ztquangkhftc 280
12.3.KjJthz!dt.
theocongng~ Sol-Gel 281
11XitclacnanaTitaniumdioxide-no2 283
111.Gi6'ithi?'u.." 283
112.Titaniumdioxide 284
113. TinhcMt cootitaniumdioxide 286
114.NguyenIf cO'bimcooxUclacquanghOadj tM 287
115.TiO2sird1Jl1g
lamchdtxUclacquang 289
116.TinhU'anwc va sieuU'anuUc 293
116.1.G6ctiipxUc 293
116.2.TinhU'anuUc 293
117.Ungd1Jl1gcitaxUc lacnanDTiO2 297
117.1.BJ m(i:tt7!sgch 298
117.2.TinhchdtcMng ma 300
117.3.Hi?uzmgdi?tkhudn 302
117.4.lion sgchkhOngkhiva khirmilL 302
117.5.ChUr:niingt7!lamsgch 302
117.6.TinhchdtsieuU'adimva U'anwc 303
117.7.Ctius6 t7!sgch 303
117.8.Xitclacquanghoa TiO2lamsgch m6itru&ng 303
117.9.Xitclacquanghoa no2 v6'ihi?uzmgquangdi?n 305

Phin IV. Polyme eiu true Nano va Nanpeoposit... ... ... ... ... 307
. $.
ChU'O1lg1. Polymer can trUeNano 307
1 Mlrdlm 307
 , ,
11. GiOithi?uve polymercau trUencmo 307
12. DiJu khidn cdu trUepolymer 309
II Trimg hqp living 309
111. CO'cM trimg hqp living 309
111.DiJu chinh hinh dqng cilapolymer 313
111.1.Tritnghr;rp
polymer hinhsao (starpolymer) 313
111.2.Polymer hinh ban chiti (polymer brusher) 316
111.3.Polymer Dendrimer 320
111.4.DiJu chinh hinh dqngpolymer 323
IV. Hznh thiti h{Jccila copolymer khr5i 325
"""""""""""""""""""""""""""""'"

V cdu trUencmod1!Gtrenchiatachpha kMi 327

VI.cdu trUencm6c4ratrencacpha dungmoich{Jn19C 331
VI.1.H?lienkit ngcmg18i 332
V12.H?lienkitngcmgv6 333
VI3.L6ngncmo 335
VII cdu trUencmotirmicellekhr5icacchdthoqtttinhM m(d 336
VIIITritng ngung phon tan co eMu khidn (Controlled Dispersed
CondensationPolymerization- CDCP). 339
VIII1.CDCPtrongmoitrur'mgnuifc 340
VII12.CDCPtrongmoitrur'mgCO216ngtOiht;m 342
VIII 3. Tritng ngung phon tan co aiJu khidn conducting polymer cdu trUe
ncmo """" , 344
IX. Kit lu(rnva tridn v9ng 345

Chmmg1. PolymeClay/Nanocomposit 349

1 NcmoclayhUuca 349
11. GiOithi?ukhoangsetBentonit- Clay 349
12. TinhcMt cUaClay 352
12.1Kichthur'Jcht;tt 352
12.2. ThanhpMn hOah{JccUaBentonittinhcM 353
12.3.Xac ainhdi?ntichMm(dva a(Jtrurmgnil trongnuifc 353
12.4.PhontichRonghen 354
12.5.Phontichnhi?t 355
12.6.Dungluvngtraoadi ion 356
12.7.NghiencUuhinhthitih9Ccilabentonit 357
 II. chi tqonanoclayhfium 358
11.1.Quatrinhbiin tinhhfiucO'hoakhoangset 358
112.PhirnUngtrooa6i ..ion 358
II.3. chi tqov4tli?unanDclayhfiuCO' 361
113.1.Nguyenli?u 361
113.2.Anh huVngcUas6 nhOmthi trongmu6iamoniwn 366
113.3.NghiencUucdu trUenanoclay hfiumblingpM Mngngoqi... 367
Il3.4. Nghien cUuhinh thai h(JCcUananDclay hfiu CO' 368
113.5.Nghien cUutinh cMt uu dau cila nanDclay hfiu cO' 370
III. GiOithi?u vd Polyme clay/ nanocomposit : 372
IV. Epoxy clay nanocomposit. 376
IV.1. chi tqo v4t li?u.chi tqo theo SO'ad Gongngh? hinh 2.21 376
, ,
IV.2.NghiencUucautrUeva tinhchatcilav4tli?u 377
IV.2.1. Nghien cUu c6u trUe nanD cila epoxy clay nanocomposit bling
nhiiuxqRonghen 377
IV. 2.2. Nghien cUu tinh cMt nhi?t cila epoxy clay nanocomposit 378
IV.2.3. Nghien cUu hinh thai hQc v4t li?u epoxy/ clay nanocomposit. . 380
. V.chi tqo va nghien cUutinh cMt cilapolyamit/ clay nanocomposit 382
v.1.M6'aau: 382
v.2. chi tqov4tli?u 383
V.3. TinhcMt cilapolyamit/clay nanocomposit 384

Phin V. CachoncAutrUeNanova s(}'iNano 389

ChU'O'Ilg
1. Cachon cAutrUeNano """"""""""""""""""""""""""""""""""'" 389
1 T6ngquanvdcacboncdutrUeNano 389
11. Graphit 390
12. cdu trUecacbonnanDdqnghinhcau 391
13. Caebonx6p 393
11Caebonnanotube ; 395
Ill. Caephuvngphdp t6nghop caebonnanotub 396
111.1.Nanotubeaa turmg 396
111.2.Caechinncarbonnanotubethfmg 398
111.3.Carbonnanotubeaon tuVngSWNTs 400
112.cdu trUeva tinhcMt 402
113.CO'chihinhthanh 408
 114. Carbon nanotube bidn a6i bling h6a hQc 410
114.1.Pha tqp bling boron va nita 410
114.2.Nanotube m6; tube ai~n a4Y va tube chlrcnang h6a 412
115. Cae thidt hi, tinhcMtvacdu trUeai?n Ur 413
115.1.Cdu trUeva tinh cMt ai?n tU: 413
115.2.Cae thidt hi ai?n Urva ai?n hO"a 414
111.Nanotube va ca 427
1111.GiOithi?uchung 427
1112.Phuvngphap t6ng hr;pchung 431
111.3.Cdu trUe " 433
m4. CaetinhcMt va Ungd1!l1g
cilananotubeva ca 437

Chtro'llg2. SQiNano 441

1 GiOithi?u chung 441
11 Phuvngphap t6ng hr;p 442
11.1.Pha! tridns(li nano blingpha khi 442
11.1.1.Phat tridnhai -16ng- ran 442
111.2.Phat tridnvOiSl!tr9'giitp cila oxide 444
11.1.3.Phat tridnhoi - ran 445
11.1.4.Caephan Ungcarbon hOanhi?t 446
112. Cacphurmgphdp khclctrongpha khi 448
113.Phuvngphap dung djch cM tqo s(li nano 450
113.1. CM tqo cdu trUc tinh tM dj huVng caD bling cae phuvng phap
khOngditngkhuon 450
113.2.T6nghr;psird1!l1g
khuon 451
113.3.Phuvngphapdungdjch-16ng-ran 456
113.4.T6nghr;pnhi?t- dungmoi 458
Ill. fJi§uchinhquatrinhphattridn 458
IV. TinhchirtcUas(linano 459

TiUIi~uthamkhao 461
Tirkhoava tirvi~t ffit 463