General Gr&R Procedure

General In this procedure the two components, repeatability and

Reproducibility, of the measurement variation will be determined and
evaluated.

The Gr&R-method is normally used to determine operator influencies.

However it can generally be used to determine any influencies for
measurement variation (e.g. variation from measurement system to
system, instead of operator to operator).

New measurement systems will be evaluated before acceptance

according to specification.

Purpose 1) Analysis of variance components

2) Calculation of gage capability Gr&R% or Cg

Application: 1) Find out operator influence on measurements (classical form)

2) Analysis of measurement tool matching
3) Analysis of test systems : tester – loadboard combinations

Realization a) 10 measurement objects (devices, wafer, sample,...) are measured

by one operator under constant conditions.
b) This procedure is repeated by 3 operators (-->repeatability )
c) a + b) will be repeated 3 times in relatively long time intervals,
e.g.: one day (-->reproducibility). The recording of the data will be
done for neutrality by a third person

Note:
For cost reduction the anlysis can also be done by 2 operators instead
of 3 or with 2 repetitions instead of 3. This however results in lower
confidence of estimation.

If no operator influence is possible by principle, the procedure is done

by one operator. To achieve equivalent confidence of estimation 30
measurement objects are necessary.

Gage Capability Calculation of Gr&R% with a confidence level of 99%:

5.15σr & R
Gr & R % =
USL − LSL
where
σr&R variation of the measurement uncertainty;
calculation see next pages
USL upper specification limit (of the product)
LSL lower specification limit (of the product)
 Alternative following characteristic can be determined:

( USL − LSL) δ
Cg =
6σ r & R
where
δ=0.35
Remark: there are different δ-values in varias companies.

Evaluation: Unless defined otherwise the following applies:

An existing measurement system is not r&R capable if

Gr&R% >30% resp. Cg (δ=0.35) < 1.0

A new measurement system is not r&R capable if

Gr&R%>10% bzw. Cg (δ=0.35) < 3.0

Corrective If measurement systems are not Gr&R-capable following corrective

actions actions may be applied for example:

- operator training
- check tolerance limits of the measured parameter
- system maintenance
- new measurement system

The catalog for corrective actions is specified for every location.

Variance σ 2r
Components repeatabil ity % =
σ2r & R

Infineon Technologies, QM, T.Wagner, for internal use only

MSA-Handbook
Version 1.0: 1999-08
Version 1.2: 2000-07