ELN1M project fall 2010:

MEMS sensor interface study

and practice

Presentation #1

hans.j.alker@hive.no

ELN1M Project fall 2010

 The ELM1M Project
Three hardware items
A pressure sensor A computer system in A programmable sensor interface
classroom with ADC (Melexis demo kit)
hardware

What to do in this project (all teams get the same objective)?

1. Make a connection board to the sensor applying supply voltage
2. Make an interface to the classroom computer ADC system for a static
characterizing the sensor (I/O pressure) with equipment available
3. Make a 5-point I/O compensation curve for the sensor using the
programmable sensor interface
4. Report and present the result writing a scientific paper of the team findings
5. Presentation and report will be evaluated by the course lecturers and counts
30 % of scoring in the course (the rest 70 % is an individual written exam)
ELN1M Project fall 2010
MEMS sensor interface study and practice
Hardware/Software components

Computer software Computer system

LabView/Mathlab with ADC

Melexis demo board

Equipment for testing

the pressure sensor:
1. Pressure chamber
2. Pump for evacuating the
pressure chamber
3. Pressure meter
ELN1M Project fall 2010
 ELN1M project details:
SP82 pressure sensor from Memscap
Picture of the sensor

Fronter reference: ELN1M Dokumenter/project/sensor/SP_82_Pressure_Sensor.pdf

ELN1M Project fall 2010

SP 82 pressure sensor details
Vacuum chamber Diaphragm

Cap
Silicon Chip Set Gold Wirebonds

Transist or Header

Connect ing Pins

Pressure Connect ion Tubing

Pr essu r e

Cross section

Diaphragm with bridge piezoresistors

Silicon wafer with sensor chips
ELN1M Project fall 2010
 SP82 Diaphragm layout
BP BP

R3

Square diaphragm with

4 ion-implanted piezo-resistors R1 to
R4, R2 R4
PB: Bonding Pads,
temperature control components not
shown

R1

BP BP

piezoresistors
n-type substrate

ELN1M Project fall 2010

SP82 deflection bridge design
4-element bridge,
figure 9.4 in textbook

 R 0(1 + Ge) R 0(1 − Ge) 

= Eth VS  − 
 R 0(1 + Ge) + R 0(1 − Ge) R 0(1 − Ge) + R 0(1 + Ge) 
1 + Ge 1 − Ge 
=Eth VS  − 
 2 2 
Eth = VSGe
e: Strain in diaphragm

ELN1M Project fall 2010

 Analog-Digital Converter
National system NI PCI-6221 installed in one of the
classroom PCs
• Description of the computer ADC system is
found on the Fronter server under the folder
documents/project/computer AD-system

ELN1M Project fall 2010

 MLX90308 Programmable Sensor Interface
The demo kit
You find details in Fronter server folder:
Dokumenter/project/ mexesis electronics system

MLX90314
Microcontrollers

A closer description of the demo kit and

the chip will be given next week

ELN1M Project fall 2010