TFT -LCD JtljAidl~IJ.

~Btt~m~~m(J{J B ~:ii:~;zif~ ~~

PJlJ'CafJ}~~1}Pj LtO M_~jfi~

E-mail: scotthuang@auo.com

.~

~utpmti~J.#{;!!m zM'!j:1t~£:n:Ji f.itp~~, ;gMEEUjl,~B~z nm~~' fijmEE1M~m¥7c$ttp 0 ~ AD89lij1J~lHlN¥3m 8~3Oppm' ~~f.itp~~ ~*:l::89B1,I·

*iiFf9C$JliJ:!::ftfl~~btM~*zjj$.~1JD~ lii!.OO:~~*~B1.lU I ftti~).~ ~.btM*89~~~~~5.N~A*~90 mS/em :ti:~ I B~.[arp).~tl~ I .E!.JlUttl¥J ~~~~~~.~~~~~gm~~~. .~~~.~~A~mW~.~ft*.~lM mS/cm :ti:~D$5G~s;t!n o*~ffFiits 1.lm~®~~~~~~~.~Z~$*~~m ~ , ~~Ml±ID~NII*1l£ . &!iiftt..~~i\ ft$~~~~~ZS~.~·*~~$~ mM*~~7:ti:~~·8~~~M~~.~~ m~U_JJ~*aztl·

1Il.~ : 71~~ . 8~ .li.tU •. 71tiJ . 25tRIl

1. mr~

•• mffr~mm.~~.m •••• m ~J • l"~$Z4jtl\tn 20%~J!* ' m. ~tE~~ •• U!G*lI.lIt~lltt:§.!Git'!j:~flfJ~. z:lltl:1'~~~Mi®IUjJl!j. fEllHiF~{IX2)(3)(4~tB

1.l~Zt.ltI~p.x-arft~EEPJ r.~~ :

Ml,*~¥JJ®~(NH]) • &'{dt~(HCl) • ~. ~!!W.at.1i~~:f6)JtE~:fiijfG~~~*~~~ tp~ ~n!G3t1~ , RHZf!i1l • .aU:rul~l:BD~~~ S:ll89~o~®~~B.~~~SW~~ M~*'*3&.H . Hml'f*f&D:tEl!JtJB 90%~l:Zijt.fjrf®7.tU~~' ~~

30 ;~)$NH 2004.1 2

~lliD~.ZS~o~-~S~~ CP~~=$t{ti:9 '=$t{ti:9mt~ fJ~tp~ Local scrubber ~~~Pil A1I~~fi' ~Loca1 scrubber~lIfit· MW ~·~~~~lliD~~~~~~~.Z ;1;111'

~*~~Z8~'~~~)L~~mm ~I¥J' JltJiiI¥J!tWJ~~7Rtct~~tJf6~~s ;I;Iz~m~~~ •• gN~~~~~~~~ti~ ~~~~~~~'B~~~H~~. ~,*~m~iliADB~~AD*~S~ ~ , {§.:tEtJt.i1\mfiliDJlU'fftlDli! 1 fiJT~I¥.J*:l:81m ' PJ. § il1~~~1"IDf;$.*1 80'%~ 1 OOOIo2r:k:i 0

ft~8;t!~~~~~~Z:ft~.~~~~ ~~11r~ • m~ pH fM 8 ti.;t; • 211 1ItI.!tM~ 3 mS/cm :ti:i=i ·~~~Z~ 7I&lJ\ffD.I~ 2 t.PiC;t; , 1III~~T~ 0.22 m%r ' ~M m:~;l:ii~~rrHz 25% 0

2. 6jf~1J~ *if~$'[;~~~~~tttJ~~Z~B1,I,&_ B ;I;I~~z;l;l~ , UgffiD~tt15m¥JJztJ~~Ir (tit1J~::umM' .r#t--NIEAA435.10C ; MD--~

~dQ.:1J1* 5010) , 5t:trfJt~.PJ,b~ ~~~~S~Z~·tt~~~~s~Z m~I:BAD~~zMft{Un' J;{7H fl~~~~~*A~~~S~o

.tEmmrJ"EZfifJ~:$tJj/~·r:p , t?gtAgPJT J;{;tE.OO:IrZTI:1f~7cl:I¥JMl~mfl'lN~ ~~~~.~~~5t:trf~7Mg.I¥J~.~~B 5tlt, ttW$~J...DU~tt~·

m7~-~7mS~zm~~~Z.~~~ ~*/J\ , J;{7I::~.millg~3(KM Opto E1ektronik LS21C, Gennany)W~p;jzs1;l{Ulrj, IDJ,m .~~~$~Dtm.~'~7mwD~ ~:a:WB1;I1¥J~~fllMJo

lif.~~~

flfflil6tfUJtJlifR~ilil¥Ja~pJ,it$lJlllflf8 ~.N~,~~~~ti~~·§~~mti $J~fi;ZjJ~itW~;tt:ft!fDttmJiZ9f.. ' 5tImEl:rW :lLZ~~Jm!' PJJJ~Itj{ •• r:p~IitI!itru5~ ~OzR· flJjtti$~Dziili?l~ 'flir1 J;{~.~~E~~.~iliD*W~.~H*~~ lB·

m-~iI.~f4at~ilInlbt:Xi!!:*~.f,§ ADBfJ 1.3rn * ~ iii 9 a.:::::: fIH'!f: IfUI ~ (Best AN Final-fog) , :Ii Ii ® :* It -j"- * (D! water) 1'Jlt.lt m 0.1 S-O.5literlmin' fUJtJiilim~~lWf ZJl1tnlG1\%~ iIt1m 8.4-20~m zM®1a:~' aU!ltzillUiU1t$m 170 CMM ' ~@~PJ,tI:*:ti~®~~.Z~ I!;jt~~.

~-*~~~~J.rn~**~~~~,~ ~~nru 2()'-'30 m Zjt1lft:f:r '~1f 7 MII'IIjf# 28 Ii ' Jt1:B9*~~~ 0.5-1 mm ' ftJ.f<;ti!J m4~lRlI'lIJi 2.77liter/min z§*7l<' 7M1wettru;~ ~O~Im~ 3 - 5 tp , 1rf~..lJE~B91JD~;Ut& 1!!1ij:11lH1!f.f1JD~:&~.· nm==fI~~1.fJ;t ~~2a~~$mZ~m~~~*~~I:BD U:&~~8:tm' ~_kpHfM8~' ~U fU51'£ 2 rnS/em ~ , ?fi7Iij'JHlhft-itf14 #tr:~ . $J~IZ9T~ 0.22 rn%r ' 19GfiD:ft~m~ft

~B9 250/0·B:U2B?t~Win~~J, 2 E~1W§$ ~~~$~~L~~~1f*Am~~~~~~f.f tIIn~ •

tittwmf~ttl¥Jin~

tttlf'F{f~Hf;!¥.JilIgil:lt:1J® ' 1t~~I!$$7Jcz pH 1it.tE 7' 8, 9 ~ 10(~~ 3mS/em)3ifJ8~ ij(~~ , $ii1PJ,tmm 1 ffl'~~::I: ' RP!I!iijllMl ~t?gT~ 0.44 m%r 1¥J~f'fiWfiiit •

~~J,L!¥.J,gil:ltflm8~1¥J~~3&~~1lR {i , a1M .. iiitlm~.f,§z~~:f!if.~m~ft{t4~ 1tx. ' ,giI:ttE~~:>f'~$.tr~1I"~lBD 8~Z$ \I 0 f:Im. Raoult's law ' *r:p~U:ff~RPft~m ~Z;fF;fiJfltt1tJflta~nifl:j , ~~z~~m.~ ~, ~.Ilttit~DI¥J~~{re(5), iiJfmiiJ~?&:

~8~·~flmW8~~~.~~~ {i , 1itI~~1f'H.f!1m~I:BA.Dm:$tatl:Un(;tt ,g1Jti.i::meJ--NIEAA452.70B)' ~ 7_~tI!rf ~~~~~Z*Itj{~*Z~'

m7m:>f'~mW"~~l¥JifI:j~.~*W~ 8~~'~~~1MPlm.~{~A.~Z~ AlJ<t:f:rPJ,~ifI:j~U' flJlWf~~~~Atit~ mnlbt ' :Mzfif.~:J;~~~~~1W •

3. ~~Jli~~-Jrn'i 8~~ffi

~ti~~mm~m®~~~~~m~~7.

M(H:J»04) , MD(CH3COOH).&mM(HN03)Zm. M'EI:r~~~*.~,~s~®~~~MM (CH3COOH).J.!lifl:j~~ a :I;Iz1;I~ 6 ffl' ' mtft (HN03~~s~m~ 66.7 ffl • tm~ 1 m ~°El:r~~fl81;11¥J~$MM:&m~~~ ~~'~*~~~J.$,mDffiD~~ 2.89pprn •

M~~~8~Z$~~iliAD.~mMz aJ3f~~*tm~2zm-~*'ffE~*Ei* flmA.D.J.!l~m.,~t:f:r •• :*~~*.~ 97.2% ' m.M:t~5&:*U 71.7% • ;fiPJ,~ ~zmIit*$Z5i~m~Jjtfuml!ft6)1ttb!l&' M

2004.1 2 ;~)$NH 31

ItZ -71'fUm~ 3.1xlcr Mlatm ' Wl'MZ ~fUm. :m 2.1xlOs Mla1m ' W:Hitl!!~]!1lfI¥.J:*~5&$::t It ' ~un~*:Ml~~[].dt •

~ 1IN:¥-tiL flB~ ~B1;! _1£
;gm 1!181 1!181
~ mglNml ND<1.0 ND<l.O ~~
lfi~ ppb 867.9 ND<139 6 fff,!-;,J,J:
mit ppb 2891.5 43.3 13 66.7 ffi
~It ppb 24.6 ND<4.9 ~ 2 ::f~~~$HAtBtJM' ~Jl,t3&$. &~~AADl

~ pH. ~UM AP lliP ~ -
::f5M- mSlcm (PPb) (ppb) M:l'i
m HN~ 8.0 3.0 29,594 8,375 71.7%
- 'ffSRI
* CH,COOH 8.0 3.0 83,&41 2,386 97.2%
• HN~ 6.5 87.0 8,132 ND<13 99.9%
- l'IIts~
* CH,COOH !is 87.0
~ HND, 6.9 &8.8 8,265 1,012 87.7%
1Iajl
* CH1COOH 6.9 &8.8
~ HND, 7.1 &8.0 19A18 1,738 91.7%
Il!I 1Iajl
* CH1COOH 7.1 88.0 10,166 ND<:58.9 99.4% [g?tAtJbUn*6*Yo~ 2 • l=iJ~umllt}..tJ U;tf3:tE 8- 30ppm Zm.! ' ffijlt~z~~~. !R!t*:: • ~tTm~~I1M~M~ 40.8% ' .lim 5.86% ' ~.~~i9" ' El::rllt1lJm~ &HlH~UlHz"~~~U1:mMWtIf.· w m~AD~~Z±~~ffim~o

p).mUiKtesto 615, Germany):tEm~H Ji"~ 30 iHt~'J(~tin;f§f.f.ll¥:):ff 95%P). L'~~~mtJL~*.~ft,am±~m 41%Z~m ,ltflIDilGfitM1.i~· El::rJltOJ~lliD Z7S~P)'M'~± ' _[!JIM(fit~§*S-€twm£ 0 m .~~~*~mOO~~~8~~~·~* ~*$ffim~/J\t;~· IJJm' rmP). 0.2JJm ii1V ' ~1iI2ffijf;·

32 ;~)$NH 2004.1 2

I,OOO,IIIHI

108,329

100,000

18,833

u

{l' j 0,000

o

(3

-t:

'"

]l;

"0 .8 Il l:J o

4,051

983

1,000 ~ -

100

IU

Particle Siz ctrni cro)

t&ilfl!JBlt*6:!l ~~~.~.~~~lHtJ*~~MM* ffi'~OJ.~H*-*~8~~::f~ MWYFl±l·

PJ.~.Lm{f~-~~1frtI: 1JFUmmlZtlllJiit ' fr!i*~8~M~ .o~~~~ZM~$~[g~m~ (J]<..~6ffflj~rm 3-5 fP)~~~ff1J[]7I&~ • • i~~w.J.mi~Bi.lM • Jl:frjj[]m~ ~ltHfr1NPn7di8:t1· P)J:~ 1Jrrm~15~~mr;ttft!1.*~Utlln~&if ~8)~:!~Uft.W6,*~~~~' ~ ~~~m~~~8~_~·~~ tII~~FftY5~W7~pn~if{ 8~'~~~~~~~8~'

~2~$~$Bz~.$~~~m ~lliDM • in~8~ZqsrW1l$[. , tIIn~*5! jf.;8~MMt~B)jM~· ~~ 2 t:n9afif.lfijiffiW ~~7~1JlJfimt1ili~~~mn~' ~~LI:BDfl [(J!!faJ1I*~tc 1 ppm ]! ~,tlln~*Mjf.;tE 8 x'¥: jf.g~~(16 25-28"C)' BJ,I;.J,:~'lliB1,I~ ~m~'~~$El::r8~~~2~tt~,m% *;J'G~~~, :tEg?f-ft~~;r, I5-20"C), S 1;I~fI-.

Ui9Gi\It1<z pH M 7 • 8 • 9 • 10 1Z9fiJJ<1'I ~~·~pHM~~·8~.~~~~·~,I;.J, ;lj1J[] 1 fffzft;.I<UfrU, $!~(:§~.m 0.44 m%r· 8~~~M§t 0

:BOO-i9G~m~~fU~' ~~EI::r 3 mS/em ~H~' pH fi~ 6.9--7 Zt:J:rttti'

12

I

~~fJ 10 5lCti • ~Mtt1tEB 3rnS/em ~reJ:?t 8~S/emft~·~*ft~~~iliDZS~~.~ fl£ • MUM 86mS/cm P),J: · l~tl;I~U%~m :k . ::fU$g~ . tnJlI 3 ' 4 ~::fll§!l~. ~rZS~~~o~B~~~M*~.~~ 3rnS/crn 1F.f' $~Df§~,Ijt;tt 9().....9S%PJ.J:' ~~~ft 88:mS/cm ~ , ~D~!HM7I ,Ijt~~8~%ft~'lliD~~~~.~·8 i.lm$IC°

~a.*M.~m.'~.K~J:*~~ B8rnS/em W!P~Mff~' ~ 5 5lCtl~~ 75mS/cm tr.;(5 , ~~ D ~§J;Jij!l:~m 7O-S0%tr.;(5 , Ji *1iltfl~Hiij , m~~ , If.l!tIEl7t~ 9~S/em tl· ItJltD ' *$m~ 88-90m.s/cm. tr.~~~~JB*~'~~~~'*$m Az~~~M.,~~~aT~!l:~'®~~ .~~~o~lI,Ijt~~~tnJ~sm~o

~J:~~$~$.l!tZn~~OO8~~~ ~ftt- 0 1&~(9) , Hz~U~f@i . ~g.&

U1mz~~fW2.i!B$JWrf~ '~),JIt~$ ~rHfiZl±\ADMU' ="/;:.Z$; ~3&*~ltm-;?(:*Jt-3&~' ~~~93.1%' _[ ~~s~~,~*tnJ~2M~°tnJ~6M~' ft~j(fiil~fJ.mMi~$~II'ff' ~fffi:ITmt.fR ar(N031'&SMfR.T(CH3COO}tElj($ , ~~ ~_1Mt~~~, ~~.l:fr' *$mt.~ aT&MM~T~ili::f~J:ff'~~J AieilfU 87- 88 mS/em tlr~~ 71 rnS/em IF.j ,

*$~M~.r&mMm.T.~ili •• ::f~J: 7t,~~ftBieilfUtl~M&R~~$$ mNj($'~~.~~~K·~3m~::f~m ~~wr~.l!t·~ftT"%~~~~~·

~ 3 ::fFi'!Ja1(l7j(1!tf~u· ~.TU% :ru:t~~AA?£

fiU pH M~(ti%) ~JE -
mSJcm CH1COo-l%) No.-(%) cr(%) !f;Wl
50.20 6.90 7.47 1.04 1fS1l
87.30 6.90 16.37 3.53 1mS1;I
82.80 6.90 22.42 5.49 1mS1;I
74.50 6.90 26.14 7.00 1mS1;I *1JD
71.50 6.90 7.99 2.08 flS1;I
88.80 6.90 13.43 3.57 1Ms1I "II
35.00 6.90 3.68 0.91 1fs1I
88.00 6.90 14.44 3.77 1Is1I
78.00 6.90 9.77 2.49 1rsll
55.24 8.20 ND ND 2.79 1rsll
M)~~
58.90 7.20 1.77 0.38 2.81 ~
s1m tf:lJtJ
95.20 7.06 6.41 1.67 2.38 1Is1,! fl.
104.70 7.10 10.32 3.1 2.71 1Is1,!
100.10 7.10 14.16 4.59 2.31 1msi.'!
90.80 7.17 15.97 5.72 2.31 1msi.'! 2004.1 2 ;~)$NH 33

pJ.mgit1tfPJU-~ · ~mbAMz 4.5 m3~t:pm~~~ 60 -90mS1cm' ~

WJ~:fi!t~A ' fims~ · ~ii*fm6 105 mS/cmZti· ~sH§:, E±UttrtJ~' * t:pZ~~~~~S~,~~~ fi.R~~~U~~1ttE~~s1;'fo

•• ~*~Uff-,~~m~7ft~,. ~~5.~L*~.tt.g5.~(1~3mS/cm)*]I! 3~~~M~,m~~~~A~.~~OOWma ~~~8~~~L* •• ~~~~ft~$. ~~A~¥.~Z~'~~6m~a~OO~~ ffr.ii ' .IlU~~.*5U!Jj\~I\IZiI!r.ii ' iJlU~ ~*Uff-tE pH ~ 12.8 ~ • ft~¥.~~ 116mS/cm a

1 ........ 0..sfc:Ja -+-CH3COO·(%) -+-NOJ-{%) 1

100 90 80

1116 il~_k;ff:~~~U{[("fJ'i.fi-ftM;fJ.tU s~lt.~iI(2005 fF)

4. ~~

*~fi;Ej,jijitlllJl(8~3Oppm)ZJiI1Jlt;ff:~~ fj. $oWJ.f<Mf~NP1t~~j(jis:l;lz;Ej,j! , is'GfitB DZ~~'W~~Zm~~~~~ffi~ ~S~zm~o~~~~mN~~~ft~~s ~, ~~mlfll7J<~~~~jiji~ .MZ~?~.flS~'H~e~$~~~m OJ~ 90%:ti::b'm~lmmmG.QIGffi'~~~. MflIIt!~~ 0

5fg Pj, -lHllE1it*j:f(1-3mS/cm)i~H'fjilj.J3tM ~~~.'~~~$~~.~'H.~S ~ a ~!'j~$:JJ<' ~~~~W~~ tBDZ~~m~a~~W~~o

34 ;~)$NH 2004.1 2

.:fJ3tlt

(1)~~B&' fflI~*' $H' Itftfl' 'gm ~_sllr",~~z~~J' ~-tliJi;!;l~:fi!t?'5 ~fM:IX~~' m 791-797]{' 1998 ~,_o

(2) Mif . 51** ' 'f-I-*lIIm~1ii.~~~~ ~'"t J ,2000 ¥~-f¥1Im:~"5~~ t&:mBLiJ.lI:tE·

(3)1*1&Ii' ~~. ~{! , r ~.~. t~1!iH'FJt~~H J'2003 _{f.ilJ!:~L:fi.~ lff~1 \1iI ~~ • 2003_{f , a;:ft • ::r:UiUt3ft ~.~Mll~vti°

(4)ftEE' ~B!Xt::. ~-ii:I!i' r sg~.a~ ~.& Scrubber o$.mt.~ J ' 2004 _{f~ ~lfti!U.fi~3tll ' m 72-88 J{ , 2004_{f ,t1~t ' ::r:M~*M~'+iUl4I9~ a

(5) 1\lt{1II:n • r m;-a-mm~z~::I:~ J ' $~*~1t::r:~m±ftt3t ' 2003_{f 0

(6) Rolf, S . .' Compilation ofHemy' s Law Constants for Inorganic and Organic Species of Potential Importance in Environmental Chemistry Version 3 J , Max-Planck Institute of Chemistry, pp.B & ppAS, 1999 0

(7) I!JJH~m,' ~tpJJ"U?'5~~~~$ ~J'2002~~~tRfffj'~~ , 2002 ~ 11 ~ , WTmlffd-:f) 0

(8) fl!5k~ , ~1'iJf ' 'llfMH.Jlbjl~.~3&~. .~~~J'I~fi~~~~fl~S9W'~ 192-211]{ , 2004 ~ •

(9) Ef!~:fi!tfi~~rJ-$JlA~~II~f;t' r ~M ~ifitlfiffi J ' 2001 !¢ 6 ~~Mi 0

11=~flftlJ! {'F1lf : Ji§:*~

~~:~~t:pW*~~~ •• /~~~*~ ::r:¥~~.~W~~ll±ft

~ : RU. L10 .BffiB~~i'Rif&_IfilW