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VENDOR: TSMC
FEATURE SIZE: 0.25 microns
INTRODUCTION: This report contains the lot average results obtained by MOSIS
from measurements of MOSIS test structures on each wafer of
this fabrication lot. SPICE parameters obtained from similar
measurements on a selected wafer are also attached.
COMMENTS: TSMC 0251P5M
TRANSISTOR PARAMETERS
W/L
MINIMUM
Vth
0.36/0.24
SHORT
Idss
Vth
Vpt
20.0/0.24
WIDE
Ids0
20.0/0.24
LARGE
Vth
Vjbkd
Ijlk
Gamma
50/50
K' (Uo*Cox/2)
Low-field Mobility
-0.47 volts
576
0.51
7.6
-263
uA/um
-0.51 volts
-7.2 volts
6.0
-2.9
pA/um
0.43
6.1
<50.0
0.44
-0.56
-7.0
<50.0
0.59
volts
volts
pA
V^0.5
123.3
399.92
-24.8 uA/V^2
80.44 cm^2/V*s
COMMENTS: Poly bias varies with design technology. To account for mask and
etch bias use the appropriate value for the parameters XL and XW
in your SPICE model card.
Design Technology
XL
XW
----------------------- -----SCN5M_DEEP (lambda=0.12)
0.03
-0.04
thick oxide, NMOS
0.02
-0.04
thick oxide, PMOS
-0.03
-0.04
TSMC25
0.03
0.00
thick oxide, NMOS
0.03
0.00
thick oxide, PMOS
0.03
0.00
SCN5M_SUBM (lambda=0.15)
-0.03
0.00
thick oxide, NMOS
0.02
0.00
thick oxide, PMOS
-0.03
0.00
FOX TRANSISTORS
Vth
GATE
Poly
PROCESS PARAMETERS
N+ACTV P+ACTV POLY N+BLK PLY+BLK MTL1 MTL2 UNITS
Sheet Resistance
4.4
3.5 4.0
58.2 176.7 0.07 0.07 ohms/sq
Contact Resistance
5.8
5.1 5.0
2.95 ohms
Gate Oxide Thickness 56
angstrom
PROCESS PARAMETERS
Sheet Resistance
Contact Resistance
MTL3
0.07
5.55
MTL4
0.07
7.87
MTL5
0.03
9.92
N_WELL
1091
UNITS
ohms/sq
ohms
255
401
CIRCUIT PARAMETERS
Inverters
Vinv
Vinv
Vol (100 uA)
Voh (100 uA)
Vinv
Gain
Ring Oscillator Freq.
D1024_THK (31-stg,3.3V)
DIV1024 (31-stg,2.5V)
Ring Oscillator Power
D1024_THK (31-stg,3.3V)
DIV1024 (31-stg,2.5V)
COMMENTS: DEEP_SUBMICRON
347
UNITS
K
1.0
1.5
2.0
2.0
2.0
2.0
1.02
1.10
0.20
2.08
1.16
-18.10
volts
volts
volts
volts
volts
235.13 MHz
258.49 MHz
0.12 uW/MHz/gate
0.06 uW/MHz/gate
2012
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
27
2.3549E17
5.929784E-3
1E-7
0
0.4798196
-1.12881E-9
1.635085E5
-4.375283E-8
4.018353E-4
0.5
0
-4E-8
-0.0974614
2.4E-4
4.875988E-3
1.8525545
-0.050769
5.163298E-10
4.4
-1.5
0.022
-5.6E-11
1
0
0
2
5.73E-10
0.99
0.99
0.99
-0.01
9.917607E-3
LEVEL
TOX
VTH0
K3
NLX
DVT2W
DVT2
UB
A0
B1
A2
PRWB
LINT
DWG
NFACTOR
CDSCD
ETAB
PDIBLC1
DROUT
PVAG
MOBMOD
KT1
UA1
AT
WW
LL
LWN
XPART
CGBO
MJ
MJSW
MJSWG
PRDSW
LKETA
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
49
5.6E-9
0.381362
1E-3
2.478383E-7
0
-0.5
2.351349E-18
1.8686781
4.903443E-7
0.378476
-0.2
0
-2.586891E-8
1.8219843
0
3.92741E-4
0.9990679
0.8924914
0.0099982
1
-0.11
4.31E-9
3.3E4
0
0
1
0.5
1E-12
0.458011
0.3424721
0.3424721
-10
-7.394384E-3
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
27
4.1589E17
7.343447E-3
1E-6
0
0.6881792
1.569579E-9
2E5
1.569804E-6
0
0.1639469
0
-4E-8
-0.1326985
2.4E-4
0.3344081
1.097713
LEVEL
TOX
VTH0
K3
NLX
DVT2W
DVT2
UB
A0
B1
A2
PRWB
LINT
DWG
NFACTOR
CDSCD
ETAB
PDIBLC1
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
49
5.6E-9
-0.5674034
0
1E-9
0
-0.1155068
1E-21
0.8547304
5E-6
0.3605999
-0.3373371
3.205759E-8
-5.418362E-8
1.1503468
0
-0.0985916
3.842508E-4
+PDIBLC2
+PSCBE1
+DELTA
+PRT
+KT1L
+UB1
+WL
+WWN
+LLN
+LWL
+CGDO
+CJ
+CJSW
+CJSWG
+CF
+PK2
*
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
6.021018E-3
2.587374E10
0.01
0
0
-7.61E-18
0
1
1
0
6.61E-10
1.894379E-3
3.452765E-10
2.5E-10
0
3.556973E-3
PDIBLCB
PSCBE2
RSH
UTE
KT2
UC1
WLN
WWL
LW
CAPMOD
CGSO
PB
PBSW
PBSWG
PVTH0
WKETA
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
-9.645765E-4
6.600691E-9
3.5
-1.5
0.022
-5.6E-11
1
0
0
2
6.61E-10
0.99
0.5892224
0.5892224
5.755321E-3
0.0261299
DROUT
PVAG
MOBMOD
KT1
UA1
AT
WW
LL
LWN
XPART
CGBO
MJ
MJSW
MJSWG
PRDSW
LKETA
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
=
9.964722E-4
0.0149447
1
-0.11
4.31E-9
3.3E4
0
0
1
0.5
1E-12
0.4688436
0.2674658
0.2674658
-0.1748529
-9.970751E-3