Aim: all elements (mirror, L3(L5), L4(L6), fobj) are axially and laterally identical in the two arms

depth of field (20x/0.5) 4m M2 CL0.8m M1 <0.7mrad

1.Geometrical layout
Sample arm L6 L5

fobj
Reference arm

fobj

f100
L4

f100

f150
L3

f150

fobj

fobj

f100

f100

f150

f150

Method: (1)Pinhole check lateral and tilt

Tilt, back reflections Hide into the entrance beam Lateral shift check spot postion Same as without the lens

Pinhole

Screen

(2) single pixel on CCD, Wavefront sensor check axial position; (3)repeat several rounds

2. Interference to parallel mirrors

Sample arm L6 L5 Pinhole

fobj Reference arm

fobj

f100 L4

f100

f150 L3

f150

fobj

fobj

f100

f100

f150

f150

CCD

Tilting mirror in sample arm to make them parallel (collimated laser , LD or SLED) observe on CCD

3. Interference to refine positon of L3(L5) [a traditional OCT]

Sample arm L5

f150
Reference arm L3 f150 M0 M1

f150

f150

CCD

Collimated laser(LD or SLED observe on CCD)

fringes Axially displace L5 Laterally displace L5 White light(or converged SLED beam), observe on CCD

4. Interference to refine positon of L4(L6)

Sample arm L6 L5

f150
Reference arm L4 L3 f150 M0

f150

f150 CCD

Laterally displace L6 Collimated laser(LD or SLED fringes) observe on CCD

Axially displace L6

5. Interference to refine positon of afocal L3+L4(L5+L6)

Sample arm L6 L5

fobj Reference arm

fobj

f100 L4

f100

f150 L3

f150

fobj

fobj

f100

f100

f150

f150 CCD

Depth 50um, onion By axial displace afocal (L5+L6) By axial displace objectives White light(or converged SLED beam), observe on CCD

Notice: The flatness of mirrors used during alignment shall be highly precise(/10 in diameter 20mm); For thin silicon wafer in reference arm, it shall not be used During alignment. Thicker silicon wafer is prefered, and slow glue (such as Silicon glue is prefered) Thickness of corresponding lenses and objectives shall be measured and decreased as little as possible. Dispersion of each lens can be compensated only for Coherence length. it will also cause uncompensable magnification distortion(i.e contrast dropped) Distilled water is a much better immersion media (changed each day). GEL is hard to have good image( Inhomogeneity and bulbles)